• Title/Summary/Keyword: Clearance flow

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Non-contact Transportation of Flat Panel Substrate by Combined Ultrasonic Acoustic Viscous and Aerostatic Forces

  • Isobe, Hiromi;Fushimi, Masaaki;Ootsuka, Masami;Kyusojin, Akira
    • International Journal of Precision Engineering and Manufacturing
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    • v.8 no.2
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    • pp.44-48
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    • 2007
  • In recent years, the size of plane substrates and semiconductor wafers has increased. As conventional contact transportation systems composed of, for example, carrier rollers, belt conveyers, and robot hands carry these longer and wider substrates, the increased weight results in increased potential for fracture. A noncontact transportation system is required to solve this problem. We propose a new noncontact transportation system combining acoustic viscous and aerostatic forces to provide damage-free transport. In this system, substrates are supported by aerostatic force and transported by acoustic viscous streaming induced by traveling wave deformation of a disk-type stator. A ring-type piezoelectric transducer bonded on the stator excites vibration. A stator with a high Q piezoelectric transducer can generate traveling vibrations with amplitude of $3.2{\mu}m$. Prior to constructing a carrying road for substrates, we clarified the basic properties of this technique and stator vibration characteristics experimentally. We constructed the experimental equipment using a rotational disk with a 95-mm diameter. Electric power was 70 W at an input voltage of 200 Vpp. A rotational torque of $8.5\times10^{-5}Nm$ was obtained when clearance between the stator and disk was $120{\mu}m$. Finally, we constructed a noncontact transport apparatus for polycrystalline silicon wafers $(150(W)\times150(L)\times0.3(t))$, producing a carrying speed of 59.2 mm/s at a clearance of 0.3 mm between the stator and wafer. The carrying force when four stators acted on the wafer was $2\times10^{-3}N$. Thus, the new noncontact transportation system was demonstrated to be effective.

EFFECT OF MISALIGNMENT ON THE STATIC CHARACTERISTICS OF 3-LOBE proceeding BEARING

  • Strzelecki, S.;Radulski, W.
    • Proceedings of the Korean Society of Tribologists and Lubrication Engineers Conference
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    • 2002.10b
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    • pp.95-96
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    • 2002
  • The operation of proceeding bearing in the conditions of misaligned axis of proceeding and bush leads to the load concentration on the bearing edges causing further mixed lubrication conditions, unstable operation and intensive wear of mating parts. For the design process of proceeding bearing the knowledge of static characteristics determined from the oil film pressure and temperature distribution is very important. For the 3-lobe proceeding bearing, the pressure, temperature and viscosity fields, load capacity, minimum oil film thickness, power loss, oil flow and maximum oil film temperature have been determined by iterative solution of the Reynolds', energy and viscosity equations. The paper introduces the results of theoretical investigations of static characteristics of 3-lobe proceeding bearing operating at misaligned axis of proceeding and bush. An effect of misalignment ratio, length to diameter ratio of the proceeding bearing, the lobe clearance ratio on the static characteristics was investigated. Laminar, adiabatic model of oil film for the solution of Reynolds, energy and viscosity equations was applied.

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Analysis of Radial Air-shear Force on Magnetic Disks for Reducing the Spin-off of Lubricants

  • Kurita, M.;Shimizu, H.;Mizumoto, M.;Ootani, Y.
    • Proceedings of the Korean Society of Tribologists and Lubrication Engineers Conference
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    • 2002.10b
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    • pp.281-282
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    • 2002
  • To reduce the spin-off of lubricants on a magnetic disk, which is caused by the radial component of shear force between the disk and air, we analyzed the air-velocity distribution and the air-shear force by three-dimensional large-eddy simulation (LES). This sensitivity analysis, on five design parameters, showed that disk/arm clearance and arm thickness have a greater effect on the mean radial air-shear force than the other parameters. The force on a disk optimized according to the optimum parameters is 12% less than the force on a conventional disk.

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Some Relations Between the Geometric Parameters and Internal Flow Field Characteristics in Multiblade Fan/Scroll System (다익 홴/스크롤 시스템의 형상변수와 내부 유동장 특성과의 관계)

  • Maeng, Joo-Sung;Yoo, Dal-Hyun;Lee, Kwang-Ho;Park, ln-Gyu
    • Transactions of the Korean Society of Mechanical Engineers B
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    • v.24 no.9
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    • pp.1139-1147
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    • 2000
  • This paper describes that the size of inactive zone can be directly applied to design multiblade fan/scroll system. From the experimental studies using a five hole pitot tube and smoke test, it is found that the size of inactive zone has linear relations with the mean velocity of impeller inlet and cut-off angle gives a great influences to the fan efficiency. For the practical design, a function related with geometric parameters(i.e. inner radius, cord length, cut-off clearance and cut-off angle) of fan/scroll system is suggested. By using these formulas, the size and distribution of inactive zone can be predicted without the measurements through the full domain, it can be possible to use them to know the efficiency improvement for new model designed.

Effect of Yohimbine on the Renal Action of Clonidine in Dog (Clonidine의 개 신장작용에 대한 Yohimbine의 영향)

  • Ko, Suk-Tai;Choe, In
    • Biomolecules & Therapeutics
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    • v.1 no.2
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    • pp.151-159
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    • 1993
  • Effect of yohimbine, a specific antagonist for presynaptic adrenoceptor, on the renal action of clonidine, a specific presynaptic adrenoceptor agonist, was investigated in dog. Clonidine, when given intravenously, produced diuretic action accompanied with augmentation of osmolar and free water clearance (Cosm and 4C_{H_2O}$), and elicited the increase of amounts of sodium and potassium excreted in urine ($E_{Na}\; and\; E_k$). These actions of clonidine were inhibited by yohimbine either injected intravenously or infused into a renal artery. Clonidine, when infused into a renal artery, produced antidiuretic action accompanied with decreased of glomerular filtration rate (GFR) and renal plasma flow (RPF), and exhibited the reduced amounts of sodium and potassium in urine. These actions of clonidine injected into a renal artery were blocked by yohimbine administered either into vein or into a renal artery. Above results suggest that yohimbine block the renal action of clonidine only in central system, do not in kidney.

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Analysis of Impulse Turbine for Wave Energy Conversion Using CFD Method (수치해석을 이용한 파력발전용 임펄스 터어빈의 성능해석)

  • Hyun, Beom-Soo;Moon, Jae-Seung
    • Proceedings of the Korea Committee for Ocean Resources and Engineering Conference
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    • 2003.10a
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    • pp.81-86
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    • 2003
  • This paper deals with the performance analysis and design of impulse turbine for OWC type wave energy plant. Numerical analysis was performed using a commercially-available software FLUENT. This parametric study includes the variation of several important parameters such as the number and shape of blades, hub ratio and tip clearance. Since parametric study at various flow coefficients requires considerable amount of computing tim, two-dimensional analysis was employed to find out optimum principal particulars in rather simple manner. Full three-dimensional calculation was also performed for several test cases to confirm the validity of two-dimensional approach. Up to the present stage, tentative result is well demonstrating the usefulness of 2-D analysis.

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The Behavior of Fresh Concrete to Pass between Bars (굳지 않은 콘크리트의 간극통과거동)

  • 오상균
    • Proceedings of the Korean Institute of Building Construction Conference
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    • 2002.05a
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    • pp.97-102
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    • 2002
  • The ability to pass between bars is one of the most important performance of self-compacting concrete or high-flowability concrete since it determines the final filling capacity which influences the strength and durability of hardened concrete in structure. Therefore it has been evaluated by many researchers using different kinds of testing apparatuses. The assessments of passing ability, however, differ largely according to the style, the dimension and the criteria in apparatuses, and the value obtained from one apparatus cannot be converted those of the others. There needs a rheological approach to the better understanding of the passing behavior of fresh concrete between reinforcing bars, where the flow velocity of concrete becomes slow and the blockade sometimes occurs due to the interference between aggregates and reinforcing bars. Experimental works were conducted to clarity the effects of the clearance between reinforcing bars, the volume of aggregate and the rheological properties of matrix on the behavior from the rheological point view and showed the rational mix proportioning of concrete.

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Stability analysis of pump using finite element method (유한요소법에 의한 펌프축계의 안정성해석)

  • 양보석
    • Journal of Advanced Marine Engineering and Technology
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    • v.10 no.4
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    • pp.31-40
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    • 1986
  • With the tendency toward high speed and high pressure in centrifugal pumps, the problem of sub-synchronous vibration has arisen, caused by the hydraulic forces of the working fluid, such as wearring, balance piston, impeller, etc.. These forces can drastically alter the rotor critical speeds and stability characteristics, and can be acted significant destabilizing forces. For preventing such self-excited vibration, the desing of the rotor system needs, which would secure the stability of the machine. In this paper, a procedure is presented for dynamic modeling of rotor-bearing-seal-impeller systems which consist of rigid disks, distributed parameter finite rotor elements and discrete bearings, seals and impellers. A finite element model including the effects of rotatory inertia and gyroscopic moments is developed using the consistent matrix approach. The technique of dynamic matrix reduction is applied to the shaft matrices to reduce them to a set of matrices of dynamic of significantly fewer degrees of freedom. The representation of bearing, seal and impeller elements is in term of linearized stiffness and damping matrices by reasonably small perturbations from equilibrium. The stability behavior of a typical double suction centrifugal pump is presented. Results show the influence of clearance and flow conditions on running speeds and stability characteristics.

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Effects of Gap between Tube and Support Plate on the Steam Generator Tube Wear (증기발생기 세관과 지지대 간극이 세관 마모에 미치는 영향)

  • Park, Chi-Yong;Lee, Yong-Son;Boo, Myung-Hwan;Kim, Tae-Ryong;Kim, Tae-Soon
    • Proceedings of the KSME Conference
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    • 2004.11a
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    • pp.302-307
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    • 2004
  • The major flow-induced vibration mechanisms such as fluid-elastic and turbulence excitation can cause the various types of wear of the steam generator tubes in unclear power plant. It is generally accepted that the tube wear due to vibration is affected by the presence of gap clearance between tube and support plate. Connors showed that the tube wear depth could be estimated by using the relationship between wear volume and sliding distance for contact time. Au-Yang predicted the wear depth by using the nonlinear characteristics of normal work rate to contact time. In this study the effect of gap size on the steam generator tubes wear is analyzed by deriving the wear depth versus normal work rate relationship from these previous results.

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Investigation of the Downwash Induced by Rotary Wings in Ground Effect

  • Tanabe, Yasutada;Saito, Shigeru;Ooyama, Naoko;Hiraoka, Katsumi
    • International Journal of Aeronautical and Space Sciences
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    • v.10 no.1
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    • pp.20-29
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    • 2009
  • There are concerns about the influence of the gust wind caused by helicopters affecting the moving vehicles while hovering over the road during rescue activities. For the understanding of such complicated flow. numerical simulation of a rotor hovering above the ground has been carried out, changing the rotor/ground clearances. The rotor thrust is kept constant. and the rotor control is determined by trim adjustments incorporated into the CFD algorithm. Collective pitch angle and the required power decreases with the rotor/ground clearance which agrees with experience. Changes of the flowfield near the rotor with regard to the rotor height are investigated based on the calculated results.