• Journal of the Korean institute of surface engineering
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• v.34 no.5
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• pp.403-408
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• 2001

In this work, the cyclic perfluorinated ether (c-C$_4$F$_{8}$O) with very high destructive removal efficiency (DRE) than other alternative gases, such as $C_3$F$_{8}$, c-C$_4$F$_{8}$ and NF$_3$ was used as an alternative process chemical. The plasma cleaning of silicon nitride using gas mixtures of c-C$_4$F$_{8}$O/O$_2$ and c-C$_4$F$_{8}$O/O$_2$+ $N_2$ was investigated in order to evaluate the effects of adding $N_2$ to c-C$_4$F$_{8}$O/O$_2$ on the global warming effects. Under optimum condition, the emitted net perfluorocompounds (PFCs) during cleaning of silicon nitride were quantified and then the effects of additive $N_2$ by obtaining the destructive removal efficiency (DRE) and the million metric tons of carbon equivalent (MMT-CE) were calculated. DRE and MMTCE were obtained by evaluating the volumetric emission using. Fourier transform-infrared spectroscopy (FT-IR). During the cleaning using c-C$_4$F$_{8}$O/O$_2$+$N_2$, DRE values as high as (equation omitted) 98% were obtained and MMTCE values were reduced by as high as 70% compared to the case of $C_2$F$_{6}$O$_2$. Recombination characteristics were indirectly investigated by combining the measurements of species in the chamber using optical emission spectroscopy (OES), before and after the cleaning, in order to understand any correlation between plasma and emission characteristics as well as cleaning rate of silicon nitride.silicon nitride.

• Clean Technology
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• v.9 no.1
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• pp.9-21
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• 2003

CFC-113 and 1,1,1-TCE which are ozone destruction substances are not used any more in the advanced countries because of Montreal protocol. MC and TCE are now used restrictively at small part of industrial fields in most of countries since they are known to be hazardous or carcinogenic materials. Thus, it is indispensible that the alternative cleaning agents which are environmental-friendly and safe, and show good cleaning ability should be developed or utilized for replacement of the halogenated cleaning agents. Aqueous cleaning agents are evaluated to be promising alternative ones among various alternatives in environmental and economical view point. This study has been carried out as a part of development program of aqueous cleaning agent. First of all, several types of surfactants which are the most important component in aqueous cleaning agents were chosen, and the physical properties, foaming ability, cleaning ability and oil-water separation efficiency of their aqueous solutions were measured and compared for selection of proper type of surfactant in aqueous cleaning agents.

• Clean Technology
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• v.18 no.4
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• pp.419-425
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• 2012

This work explored the characteristics and the photocatalytic activities of S element-doped $TiO_2$ (S-$TiO_2$) and N element-doped $TiO_2$ (N-$TiO_2$) for the decomposition of gas-phase isopropyl alcohol (IPA) at sub-ppm concentrations, using a plug-flow reactor irradiated by 8-W daylight lamp or visible light-emitting-diodes (LEDs). In addition, the generation yield of acetone during photocatalytic processes for IPA at sub-ppm levels was examined. The surface characteristics of prepared S- and N-$TiO_2$ photocatalysts were analyzed to indicate that they could be effectively activated by visible-light irradiation. Regarding both types of photocatalysts, the cleaning efficiency of IPA increased as the air flow rate (AFR) was decreased. The average cleaning efficiency determined via the S-$TiO_2$ system for the AFR of 2.0 L $min^{-1}$ was 39%, whereas it was close to 100% for the AFR of 0.1 L $min^{-1}$. Regarding the N-$TiO_2$ system, the average cleaning efficiency for the AFR of 2.0 L $min^{-1}$ was above 90%, whereas it was still close to 100% for the AFR of 0.1 L $min^{-1}$. In contrast to the cleaning efficiencies of IPA, both types of photocatalysts revealed a decreasing trend in the generation yields of acetone with decreasing the AFR. Consequently, the N-$TiO_2$ system was preferred for cleaning of sub-ppm IPA to S-$TiO_2$ system and should be operated under low AFR conditions to minimize the acetone generation. In addition, 8-W daylight lamp exhibited higher cleaning efficiency of IPA than for visible LEDs.

• Clean Technology
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• v.18 no.3
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• pp.287-294
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• 2012

In this study, performances of two cleaning methods were analyzed and a cleaning system was designed to develop a cleaning process of electronic components to remanufacture old laser copy machine. First, plasma cleaning as a dry cleaning method was executed to test cleaning ability. In cleaning of printed circuit board (PCB) by plasma, some damages were found near the metal parts, and considering the productivity, this method was not adequate for the cleaning of electronic components. With 4 different cleaning agents, ultrasonic cleaning tests were executed to select an optimal cleaning agent, aqueous agents showed superior cleaning performance compared to semi-aqueous and non-aqueous agents. Cleaning with aqueous cleaning agent A and 28 kHz ultrasonic frequency can be completed in 30 sec to 1 min. Finally, an ultrasonic cleaning system was constructed based on the pre-test results. Optimal cleaning conditions of 40 kHz and $50^{\circ}C$ were found in the field test. The productivity and economic efficiency in remanufacturing of laser copy machine are expected to increase by adapting developed ultrasonic cleaning system.

• Journal of Environmental Health Sciences
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• v.32 no.5 s.92
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• pp.478-484
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• 2006

There was no significant difference in the CADR (Clean Air Delivery Rate) between physical aerosols, NaCl and smoke, and biological aerosols, airborne MS2 virus and P. fluorescens, which implicate that the hybrid-type of air purifier, applying the unipolar ion emission and the radiant catalytic ionization, imposed identical reduction effect on both physical aerosol and bioaerosol. Ventilation decreases the efficiency of air cleaning by unipolar ionization because high ventilation diminishes the particle concentration reduction effect. The particle removal efficiency decreases with increase in the chamber volume because of the augmented ion diffusion and higher ion wall loss rate. Particle size affects the efficiency of air ionization. The efficiency is high for particles with very small diameter because reduction of charge increases with particle size. If there is no increasing supply of ions, the efficiency of air cleaning by unipolar ionization increases with respect to initial concentration of particles because of the large space charge effect at high particle concentration and amplified electric field.

• Journal of the Korea Society of Computer and Information
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• v.13 no.3
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• pp.85-90
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• 2008

In this paper, we propose a new robot cleaning algorithm, which we call SetClean. The new algorithm cleans from the most less complex area. Sometimes, when the cleaning completion time can be longer or can not be estimated, cleaning larger area first is better than optimizing the whole time for cleaning. To do this, SetClean algorithm divides the whole area into cleanable sub-areas using Set Cover algorithm and cleans the area in the order of high efficiency that maximize the cleanable area per unit time. SetClean algorithm decides the navigation flow by considering not only the size of the area but also the distance from the current robot location to the area to be cleaned and the delay time caused by the number of turns within the area. The experimental results show the mechanism and performance of the SetClean algorithm.

• Journal of the Korean Home Economics Association
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• v.20 no.4
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• pp.113-124
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• 1982

We have investited on the efficiency of the electric vacuum cleaners for household use. On this experiment, we have used the Expired Gas Analyer IHO6(SAN-EI, K.K) to get energy expenditure of house cleaning. The testing items are, (1) The difference of energy expenditure of cleaning for the each types of the test floors: Which are P-tile, Tatami, and 4 kinds of carpets. (2) The energy expenditure of cleaning for the room with a given quantity of furnitures: The volumes of furnitures are 0, 3, 10, 20% of the room with 2 kinds of chair. The results of the experiments are as follows. 1. The energy expenditure of cleaning for the types of test floors: Setting the energy expenditure on the basis of P-tile, Tatami needs 20~24% energy expenditure than P-tile, and carpet needs 60~64% energy expenditure than P-tile. 2. Cleaning time: The more the room has many furnitures, the more it takes longer. The types of vacuum cleaners, the Shoulder-type cleaner needs 1.19 times of the Upright-type, and the Cylender-type needs 1.08 times of the Upright-type. 3. The energy expenditure of cleaning for a given quantity of furnitures: The more the rooms has many furnitures, the more the energy expenditure increase. A 10% (20%) increases in the volume of the furniture causes a 100% (200%) increases in the energy expenditure of vacuum cleaners.

• Journal of the Semiconductor & Display Technology
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• v.22 no.2
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• pp.17-23
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• 2023

In semiconductor manufacturing processes, a cleaning process is important that can remove sub-micron particles. Conventional wet cleaning methods using chemical have limits in removing nano-particles. Thus, physical forces of a mechanical vibration up to 1 MHz frequency, was tried to aid in detaching them from the substrates. In this article, we developed a 1 MHz quartz megasonic for a bare wafer cleaning using finite element analysis. At first, a 1 MHz megasonic prototype was manufactured. Using the results, a main product which can improve a particle removal performance, was analyzed and designed. The maximum impedance frequency was 992 kHz, which agreed well with the experimental value of 986 kHz (0.6% error). Acoustic pressure distributions were measured, and the result showed that maximum / average was 400.0~432.4%, and standard deviation / average was 46.4~47.3%. Finally, submicron particles were deposited and cleaned for the assessment of the system performance. As a result, the particle removal efficiency (PRE) was proved to be 92% with 11 W power. Reflecting these results, the developed product might be used in the semiconductor cleaning process.

• Journal of Marine Life Science
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• v.9 no.1
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• pp.1-8
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• 2024

Over the past decade, there has been global expansion in the advancement of underwater cleaning technology for ship hulls. This methodology ensures both diver safety and operational efficiency. However, recent attention has been drawn to the harmful effects of ship hull-cleaning wastewater on marine animals. It is anticipated that this wastewater may have various impacts on a wide range of organisms, potentially leading to populationand ecosystem-relevant alterations. This concern is especially significant when the wastewater affects functionally important species, such as aquaculture animals and habitat-forming species living in coastal regions, where underwater cleaning platforms are commonly established. Despite this, information on the ecotoxicological effects of this wastewater remains limited. In this mini review, we discuss the adverse effects of wastewater from in-water cleaning processes, as well as the current challenges and limitations in regulating and mitigating its potential toxicity. Overall, recent findings underscore the detrimental effects posed by sublethal levels of wastewater to the health status of aquatic animals under both acute and chronic exposure.

• Clean Technology
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• v.12 no.4
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• pp.250-258
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• 2006

CFC compounds such as CFC-113 and 1,1,1-TCE, etc. have been used in various industries due to their excellent chemical stability, thermodynamic characteristics, non-inflammability and anti-corrosiveness. However, in oder to protect the earth environment, "the Montreal Protocol on substances that deplete the ozone layer" was adopted in 1989 for prevention of production and utilization of these CFC compounds and alternative cleaning agent have been required in the industry. The objective of this study is to develop non-aqueous cleaning agents that do not require major change of cleaning system, have excellent cleaning efficiency, are favorable to the environment, are harmless to the human body, and are not generated corrosive materials. In this work, non-aqueous cleaning agents have been formulated with glycol ether series and paraffinic hydrocarbon series with siloxane, and their physical properties and cleaning efficiencies were analyzed and compared with those of regulated materials. As a result of physical properties measurement of the formulated cleaning agents, it is expected that they may have good penetration ability into contaminated materials due to their properties with low density and low surface tension. Measurement of flash point and vapor pressure of the cleaning agents will be helpful for evaluation of their safety and working environment. The experimental results of cleaning flux, solder and grease by the formulated cleaning agents show that their cleaning abilities of soils were good and that there were no residues on the substance after cleaning. Therefore, alternative cleaning agents which have equivalent cleaning ability to regulating materials, good penetration ability and low hazard to human body, have been developed in this work.