• Title/Summary/Keyword: Clean tube system

Search Result 23, Processing Time 0.031 seconds

Wafer Position Sensing and Control in the Clean Tube System (클린 튜브 시스템에서 웨이퍼의 위치 인식 및 정지 제어)

  • Kim, Yu-Jin;Shin, Dong-Hun
    • Journal of Institute of Control, Robotics and Systems
    • /
    • v.12 no.11
    • /
    • pp.1095-1101
    • /
    • 2006
  • The clean tube system was developed as a means of transferring air-floated wafers inside a closed tube filled with super clean air. This paper presents a wafer position sensing method in the clean tube system, where the photo proximity sensors are used. The first presented method uses the two positions sensed lately in order to compute the wafer center position. The next method uses the latest sensed position and the next latest position compensated with the information of the wafer velocity. The third method uses the kalman filter, which enable us to use all the previous sensing information. The simulation results are compared to show results of the presented method. In addition, the paper presents a control method to stop the wafer at the center of the unit in the clean tube system. The experimental clean tube system worked successfully with the applying the both presented methods of sensing and control.

Floated Wafer Motion Modeling of Clean Tube system

  • Shin, Dong-Hun;Yun, Chung-Yong;Jeong, Kyoo-Sik;Choi, Chul-Hwan
    • 제어로봇시스템학회:학술대회논문집
    • /
    • 2004.08a
    • /
    • pp.1264-1268
    • /
    • 2004
  • This paper presents a wafer motion modeling of the transfer unit and the control unit in the clean tube system, which was developed as a means for transferring the air-floated wafers inside the closed tube filled with the super clean airs. The motion in the transfer unit is modeled as a mass-spring-damper system where the recovering force by air jets issued from the perforated plate is modeled as a linear spring. The motion in the control unit is also modeled as another mass-spring-damper system, but in two dimensional systems. Experiments with a clean tube system built for 12-inch wafers show the validity of the presented force and motion models.

  • PDF

Wafer Motion Control of Clean Tube System (클린튜브 시스템의 웨이퍼 운동 제어)

  • 신동헌;최철환;정규식
    • Korean Journal of Air-Conditioning and Refrigeration Engineering
    • /
    • v.16 no.5
    • /
    • pp.475-481
    • /
    • 2004
  • This paper presents a force model of the clean tube system, which was developed as a means of transferring air-floated wafers inside a closed tube filled with super clean air. The recovering force from the holes for floating wafers is modeled as a linear spring and thus the wafers motion is modeled as a mass-spring-damper system. The propelling forces are modeled as linear along with the wafer location. The paper also proposes a control method to emit and stop a wafer at the center of a control unit. It reveals the minimum value of the propelling force to leave from the control unit. In order to stop the wafer, it utilizes the exact time when the wafer arrives at the position to activate the propelling force. Experiments with the clean tube system built for the 12 inch wafer shows the validity of the proposed model and the algorithm.

Wafer Motion Control of a Clean Tube System (클린튜브 시스템의 웨이퍼 정지 제어)

  • 신동헌;최철환
    • Proceedings of the Korean Society of Precision Engineering Conference
    • /
    • 2003.06a
    • /
    • pp.459-462
    • /
    • 2003
  • This paper presents a force model of the clean tube system, which was developed as a means for transferring the air-floated wafers inside the closed tube filled with the super clean air. The recovering force from the holes for floating wafers is modeled as a linear spring and thus the wafer motion is modeled as a mass-spring-damper system. The propelling forces are modeled as linear along with the wafer location. The paper also proposes the control method to emit and stop a wafer at the center of a control unit. It shows the minimum value of the propelling force to leave from the control unit. In order to stop the wafer, it utilizes the exact time when a wafer arrives at the position to activate the propelling force. Experiments with the clean tube system built for 12 inch wafer shows the validity of the proposed model and the algorithm.

  • PDF

Wafer Motion Modeling of Transfer Unit in Clean Tube System (클린 튜브 시스템 이송 유닛의 웨이퍼 운동 역학 모델링)

  • 신동헌;정규식;윤정용
    • Journal of the Korean Society for Precision Engineering
    • /
    • v.21 no.3
    • /
    • pp.66-73
    • /
    • 2004
  • This paper presents wafer motion modeling of transfer unit in clean tube system, which was developed as a means for transferring the air-floated wafers inside the closed tube filled with the super clean airs. When the wafer is transferred in x direction with an initial velocity the motion along x direction can be modeled as a simple decaying motion due to viscous friction of the fluid. But, the motion in y direction is modeled as a mass-spring-damper system where the recovering force by air jets issued from the perforated is modeled as a linear spring. Experiments with a clean tube system built fur 12 wafer show the validity of the presented force and motion models.

Effect of Ash Content on Unburned Carbon and NOx Emission in a Drop Tube Furnace (DTF 를 이용한 석탄 회분 함량에 따른 미연분 및 NOx 배출 특성 연구)

  • Kim, Sang-In;Lee, Byoung-Hwa;An, Ke-Ju;Kim, Man-Cheol;Kim, Seung-Mo;Jeon, Chung-Hwan
    • Transactions of the Korean Society of Mechanical Engineers B
    • /
    • v.38 no.12
    • /
    • pp.963-969
    • /
    • 2014
  • Four coal sources that had different ash contents were evaluated in a drop tube furnace (DTF). Combustion experiments were conducted by using several sources with different particle sizes and excess air ratios under air-staging conditions to determine the optimized combustion conditions of high-ash coal, with an emphasis on the combustion efficiency and NOx emissions. The results show that the higher ash content results in a large amount of carbon remaining unburned, and that this effect is dominant when the largest particle size is used. Furthermore, the ash content of coal does affect the Char-NOx concentration, which decreases with the particle size. The results of this study suggest that an air-staged system can be useful to reduce the NOx emissions of high-ash coal and that control of the air stoichiometric ratio of the primary combustion zone (SR1) is effective for reducing NOx emissions, especially by considering unburned carbon contents.

Pyrolysis Characteristics of Oil Shale (Oil shale의 열분해 특성 연구)

  • Roh, Seon Ah;Yun, Jin Han;Keel, Sang In;Lee, Jung Kyu;Kim, Han Seok
    • Clean Technology
    • /
    • v.24 no.4
    • /
    • pp.365-370
    • /
    • 2018
  • Oil shale is the sedimentary rock containing kerogen, which is one of the abundant unconventional fuel. In the pyrolysis process, oil, gas and coke are produced from the decomposition of oil shale. In this study, TGA and the continuous pyrolysis of oil shale have been investigated for the clean conversion of oil shale. Effects of reaction temperature and residence time on the pyrolysis conversion and oil production rate have been determined. Conversion of oil shale increases with increasing the reaction temperature and residence time. Optimum conditions for oil production were reaction temperature of $450{\sim}500^{\circ}C$ at the residence time of 30 min.

Experimental Study of Transition to Secondary Acoustic Instability at Downward-Propagating Premixed Flame in a Tube (튜브 내 하향 전파하는 예혼합 화염의 이차 열음향 불안정성 천이에 관한 실험적 연구)

  • Park, Juwon;Kim, Daehae;Park, Dae Geun;Yoon, Sung Hwan
    • Journal of the Korean Society of Marine Environment & Safety
    • /
    • v.26 no.7
    • /
    • pp.915-921
    • /
    • 2020
  • Thermoacoustic instability caused by air conditioning in a combustion chamber has emerged as a problem that must be solved to establish a stable combustion system. Thermoacoustic instability is largely divided into primary and secondary acoustic instability. In this study, an experimental study of the effects of heat losses was conducted to investigate the mechanism of secondary acoustic instability. To generate the secondary acoustic instability, a quarter-wavelength resonator with one open end and one closed end was used, and the inside of the resonator was filled with premixed gases. Subsequently, secondary acoustic instability with downward-propagating flames could be realized via thermal expansion on the burnt side. To control heat losses qualitatively, an additional co-axial tube was installed in the resonator with air or nitrogen supply. Therefore, additional diffusion flames can be formed at the top of the resonator depending on the injection of the oxidizer into the co-axial tube when rich premixed flames are used. Consequently, secondary acoustic instability could not be achieved by increasing heat losses to the ambient when the additional diffusion flame was not formed, and the opposite result was obtained with the additional diffusion flame.

Comparison of Particle Loading Characteristics onto Ceramic Candle Filters in Filtration System at Different Gas Inflow Pattern (가스 유입 방식에 따른 집진장치 내에서의 세라믹 캔들 필터로의 입자 부하 특성 비교)

  • Park, Seok-Joo;Lim, Jeong-Hwan;Lim, Kyeong-Soo
    • Korean Chemical Engineering Research
    • /
    • v.46 no.5
    • /
    • pp.983-987
    • /
    • 2008
  • Computational simulation has been performed to design optimally the filtration system for IGCC pilot plant. It was analyzed how the different inflow pattern influences the flow field and the particle behavior in a filter vessel. The particle loading onto the filter surface lowers significantly and decreases dramatically with particle size when the dusty gas flows into the filter vessel with a shroud tube through a tangential inlet setup tangentially on the vessel outer wall. However, the particle loading is considerably high when the dusty gas enters the filter vessel through a normal inlet setup vertically on the vessel top wall, and the decrease of the particle loading with particle size is not steeper compared with the tangential inflow pattern.