• 설비공학논문집
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• 제5권1호
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• pp.55-64
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• 1993

A numerical investigation has been carried out for the two-dimensional flow and pressure characteristics in a clean room equipped with two kinds of filters and four access panels. The distributed pressure resistance concept was applied to describe the momentum loss in filters and access panels. As a result, the velocity profile in the clean room became rather smooth by the presence of access panels. Furthermore, the average pressure drop of each access panel reached the same value so that the ratio of the flow rate should be the same at any zone. The closing of an access panel with maintaining the other access panels being opened had influenced on the velocity distribution in lower two thirds of left half space of the clean room.

• 한국건축시공학회지
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• 제3권2호
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• pp.103-110
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• 2003

In the early 1990's the clean room system was a new trend of the operating room. This is the concept using in seminconductor plants. That is what the space around the operating table so clean as it remove contaminations with circulation of interior air. These articles describe the standard of interior construction and drawing details.

• 제어로봇시스템학회논문지
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• 제17권6호
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• pp.566-572
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• 2011

In recent semiconductor and FPD (Flat Panel Display) manufacturing processes, high clean-class delivery operation is required more and more for short working time and better product quality. Traditionally SLIM (Single-sided Linear Induction Motor) is widely used in the liner drive applications because of its simplicity in the rail structure. A magnetically levitated (Maglev) unmanned vehicle with SLIM traction, which is powered by a CPS (Contactless Power Supply) can be a high precision delivery solution for this industry. In this paper unmanned FPD-carrying vehicle, which can levitate without contacting the rail structure, is suggested for high clean-class FPD delivery applications. It can be more acceptable for the complex facilities composed with many processes which require longer rails, because of simple rail structure. The test setup consists of a test vehicle and a rounded rail, in which the vehicle can load and unload products at arbitrary position commanded through wireless communications of host computer. The experimental results show that the suggested vehicle and rail have reasonable traction servo and robust electromagnetic suspensions without any contact. The resolution of point servo errors in the SLIM traction system is accomplished under 1mm. The maximum gap error is ${\pm}0.25mm$ with nominal air gap length of 4.0mm in the electromagnetic suspensions. This type of automated delivery vehicle is expected to have significant role in the clean delivery like FPD glass delivery.

• 한국소음진동공학회논문집
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• 제12권1호
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• pp.65-72
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• 2002

Generally, there are laser operating equipments( aligner, stepper) and electronic microscope( SEM, TEM) as a high precision manufacturing and inspection equipment in semiconductor production companies, precision examination and measuring laboratories. Mostly, these equipments are characterized by projection and target part. The relative displacements between projection and target part are dominant roles in vibrational problem in these precision equipments. These relative displacements are determined by the position of incoming vibration and the difference of vibration response in projection and target part. In this study, the allowable vibrational limits are suggested and the vibrational reduction plans are proposed by measurement and analysis of vibration phenomenon in the Clean Room in PDP(plasma display panel) production building. The vibration performance is evaluated by comparison relative displacements between projection and target part before/after the vibration isolation plan.

• 대한전기학회논문지:전기물성ㆍ응용부문C
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• 제49권11호
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• pp.635-639
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• 2000

In this paper, a new idea about ultra-clean aligning and mounting method of FED spacers was introduced. The glass-to -glass electrostatic bonding process was employed in order to bond the micro-structures of spacers to black matrix area formed on an FED anode substrate. It is possible to get adhesive-free bonding interface and well-aligned spacer array on an FED anode substrate with a ${\pm}5{\mu}m$ accuracy. Finally, I inch-sized FED panel was demonstrated to make sure of its applicability to FED panel fabrication.

• 동굴
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• 제89호
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• pp.27-33
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• 2008

Solar energy is most green and clean, unlimited and sustainable energy source on the earth. It is almost 97% of imported consumer energy in Korea. Because of resource poor nation, it is necessary to do their best to make alternative energy to allot their deficiency of the matter in hand of energy resources of petroleum. In a point of view of this problems, the natural solar energy should be improved by any methods as much, possible as we need. Photovoltaic generation with solar tracking system for obtaining optimal power is one of most benefit equipment to improve power of solar-cell panel producing clean electric power efficiently. Solar tracker is a device for orienting a solar photovoltaic panel toward the sun perpendicularly to sunlight, especially in widely separated place. For this reason, we are very interested in developing the equipment system of tracker, specially in solar cell applications, obtaining a high degree of accuracy to ensure that the optimal sunlight could be directed precisely against to the powered device. As a result, it was obtained of 12.46 volts at 90$^\circ$toward solar panel and 9.44 volts at 45$^\circ$, furthermore, improved efficiency more than 30% of average output voltage between tracker system (12.41V) and fixed system (8.55V), respectively. It is also very useful for optimum power system of widely separated cave.

• 한국재료학회지
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• 제18권5호
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• pp.247-252
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• 2008

A laser glass cutting system using a femto-second laser was evaluated for Flat Panel Display (FPD) glass. A theoretical analysis of the ablation threshold and depth is described using an explicit analytic form. Experiments for clean and deep grooves were performed using a 3W femto-second laser, and the relationships between the input energy and the scribing depth as well as the threshold energy are presented. Mechanical breaking after the scribing process was carried out and the results are compared with a theoretical method. It was found that a two-sided LCD panel glass can be cut clearly using the laser cutting method. The methodology was found to be very effective as a mass-production cutting system.

• 청정기술
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• 제16권2호
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• pp.103-116
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• 2010

평면 판넬 디스플레이(FPD)산업 중 액정표시장치(LCD) panel 시장은 계속 성장하고 있으며, 대형화와 생산은 해마다 증가하고 생산기술은 향상되고 있다. FPD의 제조공정은 고도의 청정성이 요구되는 공정으로 제조공정 중 세정공정이 30~40%를 차지할 정도로 기술적 생산성 측면에서 매우 중요하다. 그 중 액정주입 후 잔류하는 액정은 미세갭에 잔류하여 제거하기 매우 어렵다. 본 연구에서는 대체세정제의 원료로 많이 이용되고 있는 glycol ether계 용제, glycol dimethyl ether계 용제, 그리고 비이온계면활성제를 사용하여 우수한 세정력, 린스력, 침투력을 갖고 배선에 영향을 주는 이온함량을 최소화한 수계세정제를 개발하여 액정주입 후에 사용되는 panel의 액정 세척에 적용해 보았다. 이에 따라 배합성분들의 혼합비에 따른 세정제의 물성, 세정 효율 및 헹굼성을 측정하여 보았다. 실험 결과에 따르면, 배합세정제는 기존의 세정제보다 높은 습윤지수와 높은 운점을 보였다. 그리고 세정제의 주용제의 구조변화와 오염물로서 액정의 종류에 따라 세정효율이 영향을 미치고 있음이 확인되었다. 또한 최적의 배합세정제는 기존의 세정제에 비하여 동등이상의 세정력을 보여주었고 헹굼성능도 훨씬 우수하였다.

• 반도체디스플레이기술학회지
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• 제8권4호
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• pp.71-76
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• 2009

The clean non-contact type conveyor system for vertical transfer of large size FPD(Flat Panel Display) glasses has been installed at FPD production line just since a few years ago. The most important part of the conveyor is the 3 axis permanent magnet rollers faced orthogonally in pairs. However, the systematic design method about it has not been proposed yet. In this paper, we studied a design analysis for determining geometrical parameters of the magnetic roller by using a commercial FEM tool of the 3D Maxwell. Through a series of simulation, we obtained the relationship of several geometrical parameters affecting the torque of the conveyor.

• 대한설비공학회:학술대회논문집
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• 대한설비공학회 2009년도 하계학술발표대회 논문집
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• pp.1507-1512
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• 2009

Flow field in a roller conveyor system, induced from the movement of a cassette in which glasses for flat panel display are loaded, is numerically studied in this paper. Contamination on the glass surface by dust particles produced from mechanical friction between roller and cassette is predicted from the analysis results of flow fields. Results show that a large swirl flow is formed under the moving cassette with constant speed. This swirl flow is confined only under the cassette because two main streams from the backward and the fan filter unit on the top ceiling are sufficiently strong. Therefore, it can be said that possibility of the contamination by the particles originated from the friction is relatively low. It is also revealed that flow direction between glass plates is changed according to the speed of the cassette movement due to the shear force of glass plates.