• Title/Summary/Keyword: Chemical flow control

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A Direct Injection-mixing Total-flow-control Boom Sprayer System (주입식 총유량 자동제어방식 분관 방제기의 개발)

  • 구영모
    • Journal of Biosystems Engineering
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    • v.21 no.2
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    • pp.155-166
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    • 1996
  • A direct injection sprayer was designed using the concepts of injection mixing and total flow control, flowrate-based system compensating for the variation of forwarding speed. A metered rate, proportionally to the actual diluent flow rate, of a tracer chemical was injected directly into the diluent stream. The injection of chemical may improve the precision and safety of chemical application process. The control system was evaluated for the variables of the control interval, tolerances and sensitivities of flow regulation valve and injection pump. Performance of the system was assessed as that the response time of flow rate, response time of injection rate, absolute steady state error, and the coefficient of variance(C.V.) of concentration were 8.5 and -0.53 seconds, 0.067 lpm(0.8%) and 3.15%, respectively, at optimal parameters of control interval of 1.0 sec, fast sensitivity of flow regulation valve, medium sensitivity of injection pump and medium tolerance of flow rate. Performance of the system can be improved by increasing the sensitivity of flow regulating valve and employing a high resolution velocimeter, such as Doppler radar.

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Development of automatic flow control system based on LabView (LabView를 이용한 자동유량제어 시스템의 개발)

  • Kang, Tae-Won;Kim, Du-Seob;Ann, Sung-Gyu
    • Journal of Engineering Education Research
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    • v.19 no.2
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    • pp.3-7
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    • 2016
  • A flow control system was designed and fabricated to control the flow rate of liquid through the pipe. This control system was composed of hardwares and software, hardwares as controller, gate valve, orifice meter and data aquisition board and software as National instruments Labview program. Control of flow rate was executed by adjusting the pneumatic valve located at the center of pipe line based on the control signal generated by LabView PID control algorithm, which converts analog signal measured by pressure difference of orifice to digital signal to adjust pneumatic valve. For the controller setup Ziegler-Nichols tuning technique was applied and control performances were investigated for not only the disturbance but also the set point changes. Developed system showed good control performances in flow control enough to use as teaching tool of feedback control theory and practice in university, and also as industrial application.

Development of automatic flow control system for the practice of Ziegler-Nichols and Cohen-Coon control theory (Ziegler-Nichols와 Cohen-Coon 제어 이론의 실습을 위한 자동 유량제어 시스템의 구축)

  • Kang, Tae-Won;Lee, Ho-Gyun
    • Journal of Engineering Education Research
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    • v.20 no.4
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    • pp.61-66
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    • 2017
  • Automatic flow control system composed by hardware and software was designed and fabricated to be used as teaching tool of feedback control theory in university experimental class. This system includes hardwares like data acquisition board, flow measuring device, transmitters, and the pneumatic valve, and software like LabView program for the monitoring and control of flow rates. The system was designed as the student can see the control effect of not only set point but also disturbance changes. Also the LabView program was composed for the calculation of controller parameters of both Ziegler-Nichols and Cohen-Coon tuning. The students can apply both tuning constants and compare the control performances. This system will provide the easy way for the students to understand the function and specification of control hardwares, and to raise the programing ability of control software.

Control of Slurry Flow Rate in Copper CMP (구리 CMP시 슬러리 Flow Rate의 조절)

  • Kim, Tae-Gun;Kim, Nam-Hoon;Kim, Sang-Yong;Seo, Yong-Jin;Chang, Eui-Goo
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2004.04b
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    • pp.34-37
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    • 2004
  • Recently advancing mobile communication tools and I.T industry, semiconductor device is requested more integrated, faster operation time and more scaled-down. Because of these reasons semiconductor device is requested multilayer interconnection. For the multilayer interconnection chemical mechanical polishing (CMP) becomes one of the most useful process in semiconductor manufacturing process. In this experiment, we focus on understand the characterize and improve the CMP technology by control of slurry flow rate. Consequently, we obtain that optimal flow rate of slurry is 170ml/min, since optimal conditions are less chemical flow and performance high with good selectivity to Ta. If we apply this results to copper CMP process. it is thought that we will be able to obtain better yield.

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Rheological perspectives of industrial coating process

  • Kim, Sun-Hyung;Kim, Jae-Hong;Ahn, Kyung-Hyun;Lee, Seung-Jong
    • Korea-Australia Rheology Journal
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    • v.21 no.2
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    • pp.83-89
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    • 2009
  • Coating process plays an important role in information technology such as display, battery, chip manufacturing and so on. However, due to complexity of coating material and fast deformation of the coating flow, the process is hard to control and it is difficult to maintain the desired quality of the products. Moreover, it is hard to measure the coating process because of severe processing conditions such as high drying temperature, high deformation coating flow, and sensitivity to the processing variables etc. In this article, the coating process is to be re-illuminated from the rheological perspectives. The practical approach to analyze and quantify the coating process is discussed with respect to coating materials, coating flow and drying process. The ideas on the rheology control of coating materials, pressure and wet thickness control in patch coating process, and stress measurement during drying process will be discussed.

Control of Hot Spots in Plug Flow Reactors Using Constant-temperature Coolant (등온 냉각액을 활용한 plug flow reactor 내의 과열점 제어를 위한 제어모델 개발)

  • Rhyu, Jinwook;Kim, Yeonsoo;Lee, Jong Min
    • Korean Chemical Engineering Research
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    • v.59 no.1
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    • pp.77-84
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    • 2021
  • To control hot spot in a plug flow reactor (PFR) is important for the yield and purity of products and safety. In this paper, coolant temperature is set as a state variable, and radial distributions of heat and mass are considered to model the PFR more realistic than without considering radial distributions. The model consists of three state variables, reactant concentration, reactant temperature, and the coolant temperature. The flow rate of the isothermal coolant is a manipulated variable. This paper shows that the controller considering the radial distributions of heat and mass is more effective than the controller without them. Assuming that u3,0 is 0.7, the suggested control equation was robust when St is bigger than 1.3, and Ac/A is smaller than 2.0. Under this condition, the hot spot temperature changed within the relative error of one percent when the temperature of input altered within the range of five percent.

Development of the Chemical Flow Control System for Spinner Equipment in Semiconductor Manufacturing Process (반도체 제조공정의 스피너 장비를 위한 약액 흐름제어 시스템 개발)

  • Park, Hyoung-Keun
    • Journal of the Korea Academia-Industrial cooperation Society
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    • v.12 no.4
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    • pp.1812-1816
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    • 2011
  • This research developed chemical flow control system(CFCS) essential for spinner equipment in nano semiconductor manufacturing process under the 100nm to prevent complex process defect due to missing spread after chemical injection. The devices developed in this research, which can be swiftly replaced in case abnormal state element changes or wafer manufacturing defect occurs, are anticipated to improve module yield as well as real-time monitoring on the state element. In addition, as a result of mounting H/W and S/W system to control detailed operation sequence in production line and executing performance check and verification, we can be exactly detected in five abnomal process type.

Conformation of single polymer molecule in a slot coating flow

  • Lee, Jeong-Yong;Ryu, Bo-Kyung;Lee, Joo-Sung;Jung, Hyun-Wook;Hyun, Jae-Chun
    • Korea-Australia Rheology Journal
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    • v.20 no.2
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    • pp.89-94
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    • 2008
  • To satisfy good mechanical and optical properties of polymer-coated film products, it will be indispensable to elucidate the molecular orientation of polymer chains within coating liquids in coating flows. Using hybridized numerical method between computational fluid dynamics (CFD) and Brownian dynamics (BD) simulations can provide the useful information for the better quality control of coated films. Flexible polymer chains, e.g., ${\lambda}$-DNA molecules here, change their conformation according to the flow strength and the flow type. The molecular conformation within the coated film on the web or substrate is quite different, because the polymer chains experience the complicated flow strength and flow types in flow field. Especially in the slot coating flow, these chains are more extended by the extension-like flow field generated in the free surface curvature just beyond the downstream die region. Also, the polymer chain extension beneath the free surface can be affected by the die geometry, e.g., the coating gap, changing flow field.

COMPUTER AIDED SCHECULING MODEL OF MATERIALS HANDSLING IN CHEMICAL ANALYSIS FLOOR

  • Fujino, Yoshikazu;Motomatu, Hiroyoshi;Kurono, Shigeru
    • 제어로봇시스템학회:학술대회논문집
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    • 1995.10a
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    • pp.31-34
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    • 1995
  • The automated chemical analysis shop floor are developed for the environmental pollution problems in our chemical analysis center. This shop floor have the several equipments include weight, pour, dry, heater, boiler, mixture, spectroscopy etc. And the material handling components are made up by the stored stack, conveyore, turntables, robot etc. Computer simulation has been an important tool for these complete design problem. We have designed the arangement of chemical equipments and material flow systems by using the simulator "AutoModII". "AutoMoII" is one of the advanced simulator, CAD-like drawing tools with a powerful, engineering oriented language to model control logic and material flow. The result is the modeling of the chemical analysis system in accurate, three dimensional detail. We could designed the set able layout and scheduling system by using the AutoMoII simulator. AutoMoII simulator.

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Property Control in a Continuous MMA Polymerization Reactor using EKF based Nonlinear Model Predictive Controller

  • Ahn, Sung-Mo;Park, Myung-June;Rhee, Hyun-Ku
    • 제어로봇시스템학회:학술대회논문집
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    • 1998.10a
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    • pp.468-473
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    • 1998
  • A mathematical model was developed for a continuous re-actor in which free radical polymerization of methyl methacrylate (MMA) occurred. Elementary reactions considered in this study were initiation, propagation, termination, and chain transfers to monomer and solvent. The reactor model took into account the density change of the reactor contents and the gel effect. A control system was designed for a continuous reactor using extended Kalman filter (EKF) based non-linear model predictive controller (NLMPC) to control the conversion and the weight average molecular weight of the polymer product. Control input variables were the jacket inlet temperature and the feed flow rate. For the purpose of validation of the control strategy, on-line digital control experiments were conducted with densitometer and viscometer for the measurement of the polymer properties. Despite the com-plex and nonlinear features of the polymerization reaction system, the EKF based NLMPC performed quite satisfactorily for the property control of the continuous polymerization reactor.

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