• Journal of Biosystems Engineering
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• 제21권2호
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• pp.155-166
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• 1996

A direct injection sprayer was designed using the concepts of injection mixing and total flow control, flowrate-based system compensating for the variation of forwarding speed. A metered rate, proportionally to the actual diluent flow rate, of a tracer chemical was injected directly into the diluent stream. The injection of chemical may improve the precision and safety of chemical application process. The control system was evaluated for the variables of the control interval, tolerances and sensitivities of flow regulation valve and injection pump. Performance of the system was assessed as that the response time of flow rate, response time of injection rate, absolute steady state error, and the coefficient of variance(C.V.) of concentration were 8.5 and -0.53 seconds, 0.067 lpm(0.8%) and 3.15%, respectively, at optimal parameters of control interval of 1.0 sec, fast sensitivity of flow regulation valve, medium sensitivity of injection pump and medium tolerance of flow rate. Performance of the system can be improved by increasing the sensitivity of flow regulating valve and employing a high resolution velocimeter, such as Doppler radar.

• 공학교육연구
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• 제19권2호
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• pp.3-7
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• 2016

A flow control system was designed and fabricated to control the flow rate of liquid through the pipe. This control system was composed of hardwares and software, hardwares as controller, gate valve, orifice meter and data aquisition board and software as National instruments Labview program. Control of flow rate was executed by adjusting the pneumatic valve located at the center of pipe line based on the control signal generated by LabView PID control algorithm, which converts analog signal measured by pressure difference of orifice to digital signal to adjust pneumatic valve. For the controller setup Ziegler-Nichols tuning technique was applied and control performances were investigated for not only the disturbance but also the set point changes. Developed system showed good control performances in flow control enough to use as teaching tool of feedback control theory and practice in university, and also as industrial application.

• 공학교육연구
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• 제20권4호
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• pp.61-66
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• 2017

Automatic flow control system composed by hardware and software was designed and fabricated to be used as teaching tool of feedback control theory in university experimental class. This system includes hardwares like data acquisition board, flow measuring device, transmitters, and the pneumatic valve, and software like LabView program for the monitoring and control of flow rates. The system was designed as the student can see the control effect of not only set point but also disturbance changes. Also the LabView program was composed for the calculation of controller parameters of both Ziegler-Nichols and Cohen-Coon tuning. The students can apply both tuning constants and compare the control performances. This system will provide the easy way for the students to understand the function and specification of control hardwares, and to raise the programing ability of control software.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2004년도 춘계학술대회 논문집 반도체 재료 센서 박막재료 전자세라믹스
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• pp.34-37
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• 2004

Recently advancing mobile communication tools and I.T industry, semiconductor device is requested more integrated, faster operation time and more scaled-down. Because of these reasons semiconductor device is requested multilayer interconnection. For the multilayer interconnection chemical mechanical polishing (CMP) becomes one of the most useful process in semiconductor manufacturing process. In this experiment, we focus on understand the characterize and improve the CMP technology by control of slurry flow rate. Consequently, we obtain that optimal flow rate of slurry is 170ml/min, since optimal conditions are less chemical flow and performance high with good selectivity to Ta. If we apply this results to copper CMP process. it is thought that we will be able to obtain better yield.

• Korea-Australia Rheology Journal
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• 제21권2호
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• pp.83-89
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• 2009

Coating process plays an important role in information technology such as display, battery, chip manufacturing and so on. However, due to complexity of coating material and fast deformation of the coating flow, the process is hard to control and it is difficult to maintain the desired quality of the products. Moreover, it is hard to measure the coating process because of severe processing conditions such as high drying temperature, high deformation coating flow, and sensitivity to the processing variables etc. In this article, the coating process is to be re-illuminated from the rheological perspectives. The practical approach to analyze and quantify the coating process is discussed with respect to coating materials, coating flow and drying process. The ideas on the rheology control of coating materials, pressure and wet thickness control in patch coating process, and stress measurement during drying process will be discussed.

• Korean Chemical Engineering Research
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• 제59권1호
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• pp.77-84
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• 2021

Plug flow reactor (PFR) 내의 과열점(hot spot) 온도를 조절하는 것은 생성물의 수득률 및 순도, 안전성 측면에서 중요하다. 본 연구에서는 더 현실에 가깝게 모델링 하기 위하여 PFR 내부의 냉각액 온도를 상태변수로 설정하고 방사 방향의 열 및 물질전달을 고려하였다. 모델은 반응물의 농도 및 온도와 냉각액의 온도 총 3개의 상태변수로 이루어져 있으며, 등온 냉각액의 유량을 조작변수로 가진다. 본 연구에서는 방사 방향의 열 및 물질전달을 고려한 제어식이 그렇지 않은 제어식보다 과열점의 온도를 set point 부근으로 더 효과적으로 유지한다는 것을 보였다. 본 연구에서 제안한 제어식은 냉각액의 온도가 반응물 온도의 약 0.7배 부근일 때 St가 1.3 이상이고 Ac/A가 2.0 이하인 조건에서 강건성을 유지하였다. 이 조건에서 반응기로 유입되는 반응물의 온도가 5% 범위에서 바뀔 때 본 연구에서 제안된 제안식을 이용하면 과열점의 온도를 set point의 1% 이내로 유지할 수 있다.

• 한국산학기술학회논문지
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• 제12권4호
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• pp.1812-1816
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• 2011

본 연구에서는 약액 주입 후 미 도포로 인한 복합적인 공정불량을 예방하기 위하여 100nm 이하의 나노 반도체 제조공정에서 필수적인 스피너(spinner) 장비를 위한 약액 흐름제어 시스템을 개발하였다. 본 연구개발을 통하여 실시간으로 상태요소들을 감시할 뿐만 아니라 상태요소의 비정상적 변화나 웨이퍼 가공불량이 발생할 경우 해당 유니트를 정지시킴과 동시에 원격지에 있는 엔지니어에게 경보를 전송함으로써 즉각적인 대처가 가능하여 모듈의 수율을 향상시킬 수 있을 것으로 기대된다. 또한 세부 동작 시퀀스를 제어하기 위한 H/W와 S/W 시스템을 생산라인에 실장하고 성능점검 및 인증을 수행한 결과 5가지의 유형별 비정상적 프로세스를 정확히 검출하였다.

• Korea-Australia Rheology Journal
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• 제20권2호
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• pp.89-94
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• 2008

To satisfy good mechanical and optical properties of polymer-coated film products, it will be indispensable to elucidate the molecular orientation of polymer chains within coating liquids in coating flows. Using hybridized numerical method between computational fluid dynamics (CFD) and Brownian dynamics (BD) simulations can provide the useful information for the better quality control of coated films. Flexible polymer chains, e.g., ${\lambda}$-DNA molecules here, change their conformation according to the flow strength and the flow type. The molecular conformation within the coated film on the web or substrate is quite different, because the polymer chains experience the complicated flow strength and flow types in flow field. Especially in the slot coating flow, these chains are more extended by the extension-like flow field generated in the free surface curvature just beyond the downstream die region. Also, the polymer chain extension beneath the free surface can be affected by the die geometry, e.g., the coating gap, changing flow field.

• 제어로봇시스템학회:학술대회논문집
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• 제어로봇시스템학회 1995년도 Proceedings of the Korea Automation Control Conference, 10th (KACC); Seoul, Korea; 23-25 Oct. 1995
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• pp.31-34
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• 1995

The automated chemical analysis shop floor are developed for the environmental pollution problems in our chemical analysis center. This shop floor have the several equipments include weight, pour, dry, heater, boiler, mixture, spectroscopy etc. And the material handling components are made up by the stored stack, conveyore, turntables, robot etc. Computer simulation has been an important tool for these complete design problem. We have designed the arangement of chemical equipments and material flow systems by using the simulator "AutoModII". "AutoMoII" is one of the advanced simulator, CAD-like drawing tools with a powerful, engineering oriented language to model control logic and material flow. The result is the modeling of the chemical analysis system in accurate, three dimensional detail. We could designed the set able layout and scheduling system by using the AutoMoII simulator. AutoMoII simulator.

• 제어로봇시스템학회:학술대회논문집
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• 제어로봇시스템학회 1998년도 제13차 학술회의논문집
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• pp.468-473
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• 1998

A mathematical model was developed for a continuous re-actor in which free radical polymerization of methyl methacrylate (MMA) occurred. Elementary reactions considered in this study were initiation, propagation, termination, and chain transfers to monomer and solvent. The reactor model took into account the density change of the reactor contents and the gel effect. A control system was designed for a continuous reactor using extended Kalman filter (EKF) based non-linear model predictive controller (NLMPC) to control the conversion and the weight average molecular weight of the polymer product. Control input variables were the jacket inlet temperature and the feed flow rate. For the purpose of validation of the control strategy, on-line digital control experiments were conducted with densitometer and viscometer for the measurement of the polymer properties. Despite the com-plex and nonlinear features of the polymerization reaction system, the EKF based NLMPC performed quite satisfactorily for the property control of the continuous polymerization reactor.