• 한국진공학회지
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• 제5권2호
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• pp.169-174
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• 1996

The applications of the high density plasma sources to the etching in semiconductor fabrication process are actively studied because of the more strict requirement from the dry etching process due to shrinking down of the critical dimension. But in the oxide etching with the high density plasma sources, abundant fluorine atoms released from the flurocarbon feed gas make it difficult to get the highly selective $SiO_2/Si$ etching. In this study, to improve the $SiO_2/Si$ etch selectivity through the control of the radical loss channels, we propose the wall heating , one of methods of controlling loss mechanisms. With appearance mass spectroscopy(AMS) and actinometric optical emission spectroscopy(OES), the increase of both radicals impinging on the substrate and existing in bulk plasma, and the decrease of the fluorine atom with wall temperature are observed. As a result, a 40% improvement of the selectivity was achieved for the carbon rich feed gas.

• 한국표면공학회지
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• 제43권6호
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• pp.309-314
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• 2010

The numerical study for the effect of various factors that affect the temperature distribution of the process glass installed above the large rectangular heater plate was carried out. For the calculation, heat flux, distance between heat source and process glass plate, effect of vacuum condition and convection in a chamber were considered as important factors. The results showed that the temperature gradient on the glass was increased at the natural convection because of the buoyancy force increases due to the heated air. Also, the more heat flux and distance between the heater plate and glass increases, the more increasing the temperature gradient was. In the case of isothermal heating wall, the temperature variation was smaller than the uniform heat flux condition.

• 한국정보디스플레이학회:학술대회논문집
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• 한국정보디스플레이학회 2002년도 International Meeting on Information Display
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• pp.689-691
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• 2002

Well-aligned multi-wall carbon nanotubes (MWCNTs) have been grown on both Coming glass and silicon substrates at about 400 $^{\circ}C$ by a modified plasma - enhanced chemical vapor deposition system. We have investigated laser irradiation effect on carbon nanotube surface by using an ultra - violet laser. The laser operated to modify structural defect of was carbon nanotube and to ablate possible contamination of carbon nanotube surface. The morphology and surface transformation of MWCNTs as analyzed by a SEM. In addition, the field emission measurement was also carried out in a vacuum chamber with a $10^{-7}$ Torr base pressure by applying bias voltages up to 1000V.

• 한국추진공학회지
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• 제6권4호
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• pp.25-35
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• 2002

본 연구에서는 액체로켓의 엔진조건에 부합하는 재생냉각 시스템을 설계하는 방법을 다루었다. 정상상태에서 로켓 추력실에서의 열전달 과정은 연소가스로부터 벽면으로 대류와 복사가 이루어지고, 다시 연소실 벽을 통해 전도된 후 마지막으로 냉각제로 대류열전달 된다. criterial method와 integral method를 이용하여 열전달량을 구하고, 이를 이용하여 냉각채널을 설계하였으며, 러시아 냉각 시스템 설계 코드의 결과와 비교하였다. 복잡한 설계과정을 정형화된 logic을 구현하여 냉각 시스템 설계를 용이하게 하였으며, 설계변수를 변화시켜 얻어진 계산결과를 통하여 각 인자의 영향을 정성적으로 살펴보았다.

• 한국의학물리학회:학술대회논문집
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• 한국의학물리학회 2004년도 제29회 추계학술대회 발표논문집
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• pp.36-38
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• 2004

The detector size effect due to the spatial response of defectors is one critical source of inaccuracy in clinical dosimetry and has been a subject of numerous studies. Conventionally, the detector response kernel contains all of the influence that the detector size has on the measured beam profile. Various analytic models for this kernel have been proposed and studied in theoretical and experimental works. Here, we use a method to determine detector response kernel simply by using Monte Carlo simulation and convolution theory. Based on this numerical method and DOSIMETER, an EGS4 Monte Carlo code, the detector response for a Farmer type ion chamber embedded in water phantom is obtained. There exists characteristic difference in the simulated chamber readings between one with carbon graphite wall and the other with Acrylic wail. Using the obtained response and the convolution theory, we are planning to derive the detector response kernel numerically and remove detector size effect from measurements for 6MV, 10${\times}$l0cm2 and 0.5${\times}$10 cm2 photon beam.

• 한국유체기계학회 논문집
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• 제13권4호
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• pp.37-43
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• 2010

The purpose of this study is not only to investigate the effects of air layer in the turbine chamber on the performance and internal flow of the cross-flow turbine, but also to suggest a newly developed air supply method. Field test is performed in order to measure the output power of the turbine by a new air supply method. CFD analysis on the performance and internal flow of the turbine is conducted by an unsteady state calculation using a two-phase flow model in order to embody the air layer effect on the turbine performance effectively. The result shows that air layer effect on the performance of the turbine is considerable. The air layer located in the turbine runner passage plays the role of preventing a shock loss at the runner axis and suppressing a recirculation flow in the runner. The location of air suction hole on the chamber wall is very important factor for the performance improvement. Moreover, the ratio between air from suction pipe and water from turbine inlet is also significant factor of the turbine performance.

• 한국산학기술학회논문지
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• 제18권1호
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• pp.345-350
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• 2017

디젤 엔진의 연비와 배기를 개선하고자 하는 노력으로 다운사이징이 강화되고 있다. 이에 따라 엔진의 사이즈는 작아지고, 엔진 연소실 내 온도와 압력은 상승하는 추세이다. 따라서 높은 온도와 압력 조건에서 연료 분무의 발달과정과 연소과정 연구가 매우 중요하다. 본 연구에서는 디젤 엔진 연소실의 고온 고압 환경을 벤치에서 모사해줄 수 있는 정적 연소실을 개발하였다. 정적 연소실은 예혼합기를 연소시켜 순간적으로 온도와 압력을 급격하게 상승시킨 다음, 주변으로의 열전달에 의해 온도와 압력이 감소할 때 시험 목표조건인 온도와 압력 조건에 다다르면, 연료 분사기에 신호를 인가하여 연료분무를 개시하며 쿼츠 창을 통하여 연료 분무를 가시화 한다. 이 때, 정적 연소실 내에 연료 분무가 이루어지는 영역의 온도를 정확히 측정하여 정확한 시험 조건을 형성해야 한다. 본 연구에서는 고속으로 온도를 측정할 수 있는 열전대를 직접 개발 및 제작하여 연소실 내 시공간적 온도분포를 측정하였다. 측정 결과, 전체 체적 온도보다 연료 분무가 개시되는 중심 공간의 온도가 더 높게 나타났으며, 이는 연소실 벽면으로의 열전달 때문임을 확인하였다. 또한 횡방향으로의 온도 편차는 약 10%이내 수준이었으나, 종방향으로 온도편차가 최대 15%수준으로 나타났고 이는 부력으로 인한 고온의 연소가스의 상승효과 때문으로 판단되었다.

• KSBB Journal
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• 제11권1호
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• pp.52-57
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• 1996

평활근 세포에 대한 shear stress의 영향을 알아보기 위해 슬라이드 글라스위에 배양된 牛 대통맥의 평활근 세포를 120시간 동안 0~26 dyn/$cm^2$의 각기 다른 일정한 shear stress의 유체에 노출하였다. 실험 장치를 순환하는 배지의 lactate dehydrogen­a ase의 농도측정 결과, 본 연구에서 적용된 shear stress 범위에서는 유체의 흐름으로 인하여 세포가 슬라이드 글라스 표면으로부터 이탈되는 현상은 없었다. 표면 $cm^2$ 당 존재하는 세포의 수를 측정한 결과, 평활근 세포는 정체배양시 가장 빨리 성장하였다. 표변에서의 shear stress가 증가할수록 i영활근 세포의 성장은 늦었으며, shear stress가 17 dyn/$cm^2$ 이상에서는 세포의 성장이 관찰되지 않았다.

• 한국자동차공학회논문집
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• 제15권2호
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• pp.1-7
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• 2007

The effect of injector geometries including the injection angle and number of nozzle holes on homogeneous charge compression ignition (HCCI) engine combustion has been investigated in an automotive-size single-cylinder diesel engine. The HCCI engine has advantages of simultaneous reduction of PM and NOx emissions by achieving the spatially homogenous distribution of diesel fuel and air mixture, which results in no fuel-rich zones and low combustion temperature. To make homogeneous mixture in a direct-injection diesel engine, the fuel is injected at early timing. The early injection guarantees long ignition delay period resulting in long mixing period to form a homogeneous mixture. The wall-impingement of the diesel spray is a serious problem in this type of application. The impingement occurs due to the low in-cylinder density and temperature as the spray penetrates too deep into the combustion chamber. A hole-type injector (5 holes) with smaller angle ($100^{\circ}$) than the conventional one ($150^{\circ}$) was applied to resolve this problem. The multi-hole injector (14 holes) was also tested to maximize the atomization of diesel fuel. The macroscopic spray structure was visualized in a spray chamber, and the spray penetration was analyzed. Moreover, the effect of injector geometries on the power output and exhaust gases was tested in a single-cylinder diesel engine. Results showed that the small injection angle minimizes the wall-impingement of diesel fuel that results in high power output and low PM emission. The multi-hole injector could not decrease the spray penetration at low in-cylinder pressure and temperature, but still showed the advantages in atomization and premixing.

• 태양에너지
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• 제9권3호
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• pp.64-72
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• 1989

In this study, the computer simulation for the heat transfer in pulse combustion water heater is performed. The attention is focused to the effects of the installation of corebuster in the flue tube on heat transfer. The energy equations are established for both wall and gas side in the combustion chamber, flue way, exhaust chamber and muffler, and the numerical calculation is executed. Zone method takes longer computer calculation time compared with semi-zone method. Semi-zone method is chosen for numerical calculation. As a result of this study, it is found that the installation of the core buster in flue tube increases total heat transfer. It is also found that the total heat transfer is increased with the increasing of the ratio of the cross section area of corebuster to that of the flue tube. However, the heat transfer effect is negligible for the area ratio above 0.5.