• Transactions on Electrical and Electronic Materials
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• 제4권3호
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• pp.34-37
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• 2003

[ $HfO_2$ ] and $HfO_xN_y$ films were deposited by plasma-enhanced chemical vapor deposition using $Hf[OC(CH_3)_3]_4$ as the precursor in the absence of $O_2$. The crystallization temperature of the $HfO_xN_y$ films is higher than that of the $HfO_2$ film. Nitrogen incorporation in $HfO_xN_y$ was confirmed by auger electron spectroscopy analysis. After post deposition annealing (PDA) at 800$\Box$, the EOT increased from 1.34 to 1.6 nm in the $HfO_2$ thin films, whereas the increase of EOT was suppressed to less than 0.02 nm in the $HfO_xN_y$. The leakage current density decreased from 0.18 to 0.012 $A/cm^2$ with increasing PDA temperature in the $HfO_2$ films. But the leakage current density of $HfO_xN_y$ does not vary with increasing PDA temperature because an amorphous $HfO_xN_y$ films suppresses the diffusion of oxygen through the gate dielectric.

• 한국재료학회지
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• 제20권9호
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• pp.451-456
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• 2010

A promising candidate material for a $H_2$ permeable membrane is SiC due to its many unique properties. A hydrogen-selective SiC membrane was successfully fabricated on the outer surface of an intermediate multilayer $\gamma-Al_2O_3$ with a graded structure. The $\gamma-Al_2O_3$ multilayer was formed on top of a macroporous $\alpha-Al_2O_3$ support by consecutively dipping into a set of successive solutions containing boehmite sols of different particle sizes and then calcining. The boehmite sols were prepared from an aluminum isopropoxide precursor and heated to $80^{\circ}C$ with high speed stirring for 24 hrs to hydrolyze the precursor. Then the solutions were refluxed at $92^{\circ}C$ for 20 hrs to form a boehmite precipitate. The particle size of the boehmite sols was controlled according to various experimental parameters, such as acid types and acid concentrations. The topmost SiC layer was formed on top of the intermediate $\gamma-Al_2O_3$ by pyrolysis of a SiC precursor, polycarbosilane, in an Ar atmosphere. The resulting amorphous SiC-on-$Al_2O_3$ composite membrane pyrolyzed at $900^{\circ}C$ possessed a high $H_2$ permeability of $3.61\times10^{-7}$ $mol{\cdot}m^{-2}{\cdot}s^{-1}{\cdot}Pa^{-1}$ and the $H_2/CO_2$ selectivity was much higher than the theoretical value of 4.69 in all permeation temperature ranges. Gas permeabilities through a SiC membrane are affected by Knudsen diffusion and a surface diffusion mechanism, which are based on the molecular weight of gas species and movement of adsorbed gas molecules on the surface of the pores.

• 대한용접접합학회:학술대회논문집
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• 대한용접접합학회 2002년도 Proceedings of the International Welding/Joining Conference-Korea
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• pp.726-731
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• 2002

Reaction synthesis is a process to form ceramics, intermetallics and their composites from elemental powder mixture. Application of this process to a surface modification techniques has a possibilities to enable the process at a lower temperature or for a shorter time, although synthesized materials are likely to include voids and unreacted elements. This paper intend to examine the effect of Si addition to the mixture of Al and Ni on the densification of synthesized Ni-Al intermetallic compounds and to evaluate the surface properties of obtained coatings. By the Si addition, exothermic reaction temperature to form Ni-Al intermetallic was lowered to be below the melting point of Al. Si soluted $Al_3$Ni$_2$, $Al_3$Ni and $Al_{6}$Ni$_3$Si were mainly formed in the coating layer when powder mixture was heated to 973K for 300s. Besides, densification was enhanced by increasing hot press pressure, Si additions and heating rate. When the composition of eutectic Al-Si reaches 78%, void ratio of sintered compact reduced to 0.4%. It is caused by higher flowability of Al-Si liquid phase generated and its infiltration into the void. Since the hardness of NiAl(Si) compound (about 600HV) formed in the coating layer is higher than that of Ni-Al compound (about 400HV), coating layer with high density and superior wear property is obtained by hot press using reaction synthesis from Al-Ni-Si powder mixture.

• 한국세라믹학회지
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• 제54권4호
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• pp.278-284
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• 2017

In this work, Ta-substituted $Li_7La_3Zr_{2-x}O_{12}$ (LLZTO) powder and pellets with garnet cubic structure were fabricated and characterized by modified and optimized sol-gel synthesis. Ta-substituted LLZO powder with the smallest grain size and pure cubic structure with little pyrochlore phase was obtained by synthesis method in which Li and La sources in propanol solvent were mixed together with Zr and Ta sources in 2-methoxy ethanol. The LLZTO pellets made with the prepared powder showed cubic garnet structure for all conditions when the amount of Li addition was varied from 6.2 to 7.4 mol. All the X-ray peaks of the pyrochlore phase disappeared when the Li addition was increased above 7.0 mol. When the final sintering temperature was varied, the LLZTO pellet had a pyrochlore-mixed cubic phase above $1000^{\circ}C$. However, the surface morphology became much denser when the final sintering temperature was increased. The sol-gel-driven LLZTO pellet with a sintering temperature of $1100^{\circ}C$ showed a lithium ionic conductivity of 0.21 mS/cm when Au was adopted as electrode material for the blocking capacitor. The results of this study suggest that modified sol-gel synthesis is the optimum method to obtain cubic phase of LLZTO powder for highly dense and conductive solid electrolyte ceramics.

• 한국세라믹학회지
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• 제55권2호
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• pp.153-159
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• 2018

Porous ceramic plates were prepared from Onggi clay and bamboo charcoal powder at 1100 and $1200^{\circ}C$ and their porous properties and water absorption, and the cooling effect of porous plates, were investigated to produce eco-friendly porous ceramics for a self-cooling system that relies on the evaporation of absorbed water. Porous properties were dependent on the particle size of charcoal powder pore forming additive and the firing temperature; properties were also found to be dependent on the total pore volume, average pore size and porosity, which had values of $0.103-0.243cm^3/g$, 0.81 - 2.56 mm and 20.9 - 38.2%, respectively, at $1100^{\circ}C$ and $0.04-0.18cm^3/g$, 0.33 - 2.03 mm and 10.8 - 30.9%, respectively, at $1200^{\circ}C$. Cooling temperature difference of flowing air parallel to surface of porous ceramic plates fired with two kinds of charcoal powder at $1100^{\circ}C$ was $3.5-3.6^{\circ}C$ at $26^{\circ}C$ and 60% of relative humidity in a closed box. Cooling temperature difference was dependent on the number of porous plates and the distance between porous plates. A simple and eco-friendly cooling system using porous ceramic plates fired from Onggi clay and charcoal powder was proposed.

• The Korean Journal of Ceramics
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• 제2권1호
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• pp.19-24
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• 1996

The phase distribution and interface chemistry by the solid-state reaction between SiC and nickel were studied at temperatures between $550 \;and\; 1250^{\circ}C$ for 0.5-100 h. The reaction with the formation of silicides and carbon was first observed above $650^{\circ}C$. At $750^{\circ}C$, as the reaction proceeded, the initially, formed $Ni_3Si_2$ layer was converted to $Ni_2$Si. The thin nickel film reacted completely with SiC after annealing at $950^{\circ}C$ for 2 h. The thermodynamically stable $Ni_2$Si is the only obsrved silicide in the reaction zone up to $1050^{\circ}C$. The formation of $Ni_2$Si layers with carbon precipitates alternated periodically with the carbon free layers. At temperatures between $950^{\circ}C$ and $1050^{\circ}C$, the typical layer sequences in the reaction zone is determined by quantitative microanalysis to be $SiC/Ni_2$$Si+C/Ni_2$$Si/Ni_2$$Si+C/…Ni_2$Si/Ni(Si)/Ni. The mechanism of the periodic band structure formation with the carbon precipitation behaviour was discussed in terms of reaction kinetics and thermodynamic considerations. The reaction kinetics is proposed to estimate the effective reaction constant from the parabolic growth of the reaction zone.

• Transactions on Electrical and Electronic Materials
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• 제4권2호
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• pp.20-23
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• 2003

Piezoelectric powder with the composition of PbTiO$_3$-PbZrO$_3$-Pb(Mn$\_$1/3/Nb$\_$2/3/)O$_3$ and small particle size of 0.3 $\mu\textrm{m}$ was investigated for low-temperature firing of PZT thick films. PbTiO$_3$-PbZrO$_3$-Pb(Mn$\_$1/3/Nb$\_$2/3)O$_3$ ceramics showed dense microstructure and superior piezoelectric properties, electromechanical coupling factor (k$\_$p/) of 0.501 and piezoelectric constant (d$\_$33/) of 224. The PZT paste was made of the powder and organic vehicles, and screen-printed on Pt(450nm)/YSZ(110nm)/SiO$_2$(300nm)/Si substrates and fired at 800∼900$^{\circ}C$. Any interface reaction between the PZT thick film and the bottom electrode was not observed in the PZT thick films. The PZT thick film fired at 800$^{\circ}C$ showed moderate electrical properties, the remanent polarization(p$\_$r/) of 16.0 ${\mu}$C/$\textrm{cm}^2$, the coercive field(E$\_$c/) of 36.7 ㎸/cm, and dielectric constant ($\varepsilon$$\_$r/) of 531. Low-temperature sinterable piezoelectric composition and high activity of fine particles reduced the sintering temperature of the thick film. This PZT thick film could be utilized for piezoelectric microactuators or microsensors that require Si micromachining technology.

• The Korean Journal of Ceramics
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• 제6권1호
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• pp.64-67
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• 2000

Reactively sputtered $Pb(Zr,Ti)O_3$(PZT) films on $IrO_2$and Ir were evaluated with particular consideration on interface properties. The $IrO_2$and Ir were previously annealed at $650^{\circ}C$ in $O_2$or $N_2$atmosphere, respectively. There was no appreciable roughening in the interface of the $PZT/IrO_2$respective to that of the PZT/Ir; the rms roughness of $IrO_2$and Ir was about 3nm and 10nm, respectively. The ferroelectric properties of the $PZT/IrO_2$were found to be better than that of the PZT/Ir; however, the leakage current of the $PZT/IrO_2$was slightly larger than that of the PZT/Ir. The $PZT/IrO_2$thin films did not exhibit any fatigue up to $10^{11}$ cycles; the $P^*\;_r-P^r$ value decreased only from 16.6 to 14$\mu$C/$\textrm{cm}^2$ until $10^{12}$ polarization reversals. On the other hand, although thin $IrO_2$layer was formed between PZT and Ir, the PZT/Ir thin films began to undergo fatigue after $10^9$ polarization reversals.

• 마이크로전자및패키징학회지
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• 제11권1호
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• pp.87-96
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• 2004

폴리머/세라믹 복합체는 유기기판용 내장형 커패시터의 가장 유망한 재료다. 폴리머/세라믹 복합체의 유효유전상수를 예측하는 것은 복합재료의 설계에 있어 매우 중요하다. 본 논문에서는 크기가 다른 5가지 $BaTiO_3$ 분말을 이용하여 분말함량에 따른 에폭시/$BaTiO_3$ 복합 내장형 커패시터 필름의 유전상수를 측정하였다. 그 측정 결과를 여러 가지 이론식들에 최소 자승법을 이용해 fitting하여 폴리머/세라믹 복합체의 유효유전상수를 예측하는데 가장 유용한 식을 찾고 BaTiO$_3$ 분말의 유전상수를 추정하고자 하였다. Lichtenecker식과 Jayasundere-Smith식이 에폭시/$BaTiO_3$ 복합 내장형 커패시터 필름의 유전상수 예측에 유용한 것으로 나타났다. 피팅을 통해 계산된 $BaTiO_3$ 분말의 유전상수는 분말의 크기에 따라 100 에서 600 사이였는데 이는 다결정 세라믹 $BaTiO_3$의 유전상수보다 작은 값이다.

• The Journal of Advanced Prosthodontics
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• 제9권1호
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• pp.67-73
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• 2017

PURPOSE. The aims of the study were to evaluate the fracture load of zirconia core material after dipping in coloring liquid at different time intervals and to compare the color of dipped blocks with that of prefabricated shaded blocks. MATERIALS AND METHODS. 3-unit bridge frameworks were designed digitally. Sixty frameworks were fabricated using uncolored zirconia blocks by CAD/CAM and divided into 4 groups randomly (n = 15). Group 2 (G2) was subjected to coloring liquids for 2 minutes, Group 4 (G4) for 4 minutes, and Group 6 (G6) for 6 minutes. CFS group was not subjected to any coloring procedure. After coloring, color differences between the test groups and a prefabricated shaded zirconia group (CPZ, n = 15) were evaluated by using a spectrophotometer. Fracture test was conducted immediately after shade evaluation with a Testometric test device at a cross-head speed of 1 mm/sec. Statistical analysis for evaluating color and fracture load was performed by using one way ANOVA followed by Tukey HSD test ($P{\leq}.05$). Weibull analysis was conducted for distribution of fracture load. RESULTS. There was no difference in terms of fracture load and color between CFS (1176.681 N) and G2 (985.638 N) group and between CPZ (81.340) and G2 (81.140) group, respectively. Fracture load values of G4 (779.340 N) and G6 (935.491 N) groups were statistically significantly lower than that of CFS group ($P{\leq}.005$). The color values of G4 (79.340) and G6 (79.673) groups were statistically different than that of CPZ group ($P{\leq}.005$). CONCLUSION. Prolonged immersion of zirconia in coloring liquid not only negatively affected the fracture load of the zirconia being tested in the current study but also deteriorated the desired shade of the restoration.