• 대한전기학회:학술대회논문집
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• 대한전기학회 2007년도 제38회 하계학술대회
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• pp.1542-1543
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• 2007

This paper presents the effect of driving waveform for piezoelectric bend mode inkjet printhead with optimized mechanical design. Experimental and theoretical studies on the applied driving waveform versus jetting characteristics were performed. The inkjet head has been designed to maximize the droplet velocity, minimize voltage response of the actuator and optimize the firing frequency to eject ink droplet. The head design was carried out by using mechanical simulation. The printhead has been fabricated with Si(100) and SOI wafers by MEMS process and silicon direct bonding method. To investigate how performance of the piezoelectric ceramic actuator influences on droplet diameter and droplet velocity, the method of stroboscopy was used. Using the water based ink of viscosity of 11.8 cps and surface tension of 0.025N/m, it is possible to eject stable droplets through 64 nozzles average velocity of 4.05 m/s with standard deviation of 0.06 m/s and average diameter of $29.2\;{\mu}m$ with standard variation of $0.5\;{\mu}m$.

• 한국세라믹학회지
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• 제56권6호
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• pp.549-557
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• 2019

More than two decades of world-wide research efforts have resulted in several classes of potentially important materials. Among them are incipient piezoelectrics, which are especially useful for actuator applications. However, relatively large electric fields are required for activating the large incipient electromechanical strains. So far, many attempts have been made to reduce the required electric field by intentionally inhomogenizing the electric field distribution in the microstructure through core-shell and composite approaches. Here, we show that electric field concentration can be realized simply by adjusting electrode patterns. We have investigated the effect of electrode patterning on the incipient electromechanical strain properties of an exemplarily chosen lead-free relaxor system, revealing that electrode patterning does have a significant role on the strain properties of the given lead-free relaxor system. We believe that this approach would make a new strategy for ones to consider bringing the functional properties of electroceramics beyond their conventional limit.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2005년도 하계학술대회 논문집 Vol.6
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• pp.62-63
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• 2005

Recently, a tiny piezoelectric linear motor using a vibration made of the transducer has been invented. The motor consists of a shaft, mobile element, and piezoelectric transducer using a piezoelectric radial mode bimorph disk. The fringe of the bimorph disk is fixed firmly which means this area has no degree of freedom. Therefore, the radial mode of the tranducer transfers to the flexurd mode. The mobile elements move along the shaft by the impact force generated by the flexurd mode of the piezoelectric transducer. The piezoelectric ceramic disks have thickness of 0.1 mm and diameter of 3.5 mm. The elastic disk is introduced between two disks of the ceramic, which has thickness of 0.1 mm and diameter of 3.8 mm. The fringe of the elastic disk is fixed by a brass cylinder which height is 1.2 mm. The Pyrex shaft is used which has diameter of 1 mm and height of 10 mm. The motors are operated at their resonant frequencies. The dynamic properties of the motor have been intensively measured and analyzed according to the applied voltage wave forms at the resonant frequencies. As the sawtooth and rectangular voltage waves are applied, the velocity, the thrust force, and the velocity dependence of the mobile position are measured. The dynamic characteristics are also analyzed within a period of each wave using laser vibrometer. The velocity of the mobile is moderately constant along the shaft. The better dynamic characteristics are obtained in the case of applying the rectangular wave.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2009년도 추계학술대회 논문집
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• pp.109-109
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• 2009

This paper represented driving characteristic of a thin-type ultrasonic motor by fabricating and utilizing two kinds of drivers which could generate sinusoidal wave, square wave, respectively. A thin brass plate was used as a cross shaped vibrator and sixteen ceramic plates were attached on upper and bottom side of the brass plate. From the thin stator, elliptical displacements of the four contact tips were obtained. Speed, torque, and current were measured by applying sinusoidal waves through driving equipment such as function generator, power amplifier: to measure characteristic of the motor. As a result, the speed and the torque changed linearly at either driving frequency of 88.6 ~ 87.6[kHz] or voltage of 24~36[V]. Two-drivers which generate sinusoidal waves and square waves were designed respectively, and then were compared through some experiments in order to be put to practical use. In conclusion, the drivers had similar characteristic of speed-torque at similar frequency and voltage. It was able to control the motor linearly by using the driver generating square wave among two-drivers. Besides, it also was possible to make the drivers smaller.

• 한국산학기술학회논문지
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• 제11권4호
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• pp.1229-1232
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• 2010

본 논문은 고효율 강압형 적층 압전변압기를 개발하기 위하여 저온소결 세라믹스 개발 및 적층 변압기를 제작하였다. 그리고 회로 요소로써 사용하는 PT는 인버터 설계의 일반적인 접근법을 보여주기 위한 것이다. 또한 압전기 영향의 기술(記述)은 다수의 연구에서 복잡한 방정식과 공식도 쉽게 찾을 수 있다. 특히 압전기 세라믹 EMT가 변화하지 않으며 PT기초 전기소자의 여러 가지 예는 더욱 효과적인 적층변압기의 적용이 가능할 것으로 판단된다.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2010년도 하계학술대회 논문집
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• pp.204-204
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• 2010

A development of device with reduced size and improved sensitivity is highly impotant Pb(Zr,Ti)$O_3$ thin films are widely used both to make actuator and sensor due to their high sensitivity and low cost. In this study, the feasibility of a piezoelectric presssure sensors based on hybrid low-temperaute co-fired ceramic (LTCC) technology were presented. The LTCC diaphragms with thickness of $400\;{\mu}m$ were fabricated by laminating 4 green tapes which consist of alumina and glass particle in an organic binder. PZT thin films were successfully prepared on between top and bottom Au electrode with LTCC substrates using RF magnetron sputtering. In addition, The frequency response characteristics of the sensor under varing pressure has been analysed. by Network Analyser (HP-8722D). A frequency shift range has been obseved from 1.7GHz to 1.8GHz with a good linearity for applied pressure from 0 psi up to 25 psi.

• Smart Structures and Systems
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• 제13권4호
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• pp.547-565
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• 2014

This paper investigates the design of a perfect point load actuator based on flat triangular piezoelectric patches. Applying a difference of electric potential between the electrodes of a triangular patch leads to point loads at the tips and distributed moments along the edges of the electrodes. The previously derived analytical expressions of these forces show that they depend on two factors: the width over height (b/l) ratio of the triangle, and the ratio of the in-plane piezoelectric properties ($e_{31}/e_{32}$) of the active layer of the piezoelectric patch. In this paper, it is shown that by a proper choice of b/l and of the piezoelectric properties, the moments can be cancelled, so that if one side of the triangle is clamped, a perfect point load actuation can be achieved. This requires $e_{31}/e_{32}$ to be negative, which imposes the use of interdigitated electrodes instead of continuous ones. The design of two transducers with interdigitated electrodes for perfect point load actuation on a clamped plate is verified with finite element calculations. The first design is based on a full piezoelectric ceramic patch and shows superior actuation performance than the second design based on a piezocomposite patch with a volume fraction of fibres of 86%. The results show that both designs lead to perfect point load actuation while the use of an isotropic PZT patch with continuous electrodes gives significantly different results.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2003년도 하계학술대회 논문집 Vol.4 No.1
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• pp.160-163
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• 2003

This paper describes on anodic bonding characteristics of MLCA(Multi Layer Ceramic Actuator) to Si-wafer using evaporated Pyrex #7740 glass thin-films for MEMS applications. Pyrex #7740 glass thin-films with same properties were deposited on MLCA under optimum RF magneto conditions(Ar 100 %, input power $1\;/cm^2$). After annealing in $450^{\circ}C$ for 1 hr, the anodic bonding of MLCA to Si-wafer was successfully performed at 600 V, $400^{\circ}C$ in - 760 mmHg. Then, the MLCA/Si bonded interface and fabricated Si diaphragm deflection characteristics were analyzed through the actuation test. It is possible to control with accurate deflection of Si diaphragm according to its geometries and its maximum non-linearity is 0.05-008 %FS. Moreover, any damages or separation of MICA/Si bonded interfaces do not occur during actuation test. Therefore, it is expected that anodic bonding technology of MICA/Si wafers could be usefully applied for the fabrication process of high-performance piezoelectric MEMS devices.

• 소음진동
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• 제10권6호
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• pp.1048-1058
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• 2000

본 논문에서는 압전 세라믹 재료를 작동기 및 감지기로 이용한 사각 경계면이 고정된 얇은 사각평판의 능동 진동제어 방법을 제시한다. 실험 데이터에 기초한 다중 입출력계의 주파수영역 모델링방법을 이용하여 분포된 센서 및 구동기 특성이 포함된 구조물의 동적 특성이 규명된다. 제어기 구조로는 혼합형을 채택하고 되먹임 제어기는 LQG 제어기법에 의해 설계된다. 앞먹임 제어기는 다중 filtered-$x$ 최소자승오차법에 의해 적응되도록 한다. 진동제어에 대한 시뮬레이션 및 실험결과는 제안된 제어기법이 지속적 외란 및 과도적 외란에 효율적으로 적용될 수 있음을 보인다.

• Transactions on Electrical and Electronic Materials
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• 제11권2호
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• pp.65-68
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• 2010

The operation principle of a traveling wave rotary type ultrasonic motor can be successfully applied to the fluidic transfer mechanism of the micro-pump. This paper proposes an innovative valveless micro-pump type that uses an extensional vibration mode of a traveling wave as a volume transportation means. The proposed pump consists of coaxial cylindrical shells that join the piezoelectric ceramic ring and metal body, respectively. In order to confirm the actuation mechanism of the proposed pump model, a numerical simulation analysis was implemented. In accordance with the variations in the exciting wave mode and pump body dimension, we analyzed the vibration displacement characteristics of the proposed model, determined the optimal design condition, fabricated the prototype pump from the analysis results and evaluated its performance. The maximum flow rate was approximately $595\;{\mu}L/min$ and the highest back pressure was 0.88 kPa at an input voltage of $130\;V_{rms}$. We confirmed that the peristaltic motion of the piezoelectric actuator was effectively applied to the fluid transfer mechanism of the valveless type micro pump throughout this research.