• Title/Summary/Keyword: CdTe 박막

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$CdCl_2$ 활성화 공정과 후면 산화막 제거 공정을 거친 CdTe 박막의 표면 물성 변화 연구

  • Cheon, Seung-Ju;Lee, Seung-Hun;Jeong, Yeong-Hun;Bae, Jong-Seong;Kim, Ji-Hyeon;Kim, Dong-Hwan
    • Proceedings of the Materials Research Society of Korea Conference
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    • 2012.05a
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    • pp.98.1-98.1
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    • 2012
  • CdS/CdTe 박막 태양전지의 경우 높은 광흡수 계수를 가지고 있는 CdTe 다결정 박막을 흡수층으로이용 한다. CdTe 다결정 박막의 경우 CdS/CdTe 계면과 박막 내부에 많은 결함들이 존재 하며, CdTe 박막 내부에 존재하는 캐리어의 수를 증가 시키기 위하여 $CdCl_2$ 활성화 공정을 거치게 된다. 이때 박막의 물성 변화를 분석 하기 위하여, X-Ray Diffractometer (XRD), X-ray Photoelectron Spectroscopy (XPS)를 이용하여 박막 표면 분석을 진행 하였다. 이를 통해 박막 표면에서 산소가 Cd와 Te과 결합하면서 산화막이 생성되는 것을 확인하였다. 박막 표면에 생성된 산화막은 후면 금속 전극 형성을 위해, 용액 공정을 통하여 제거 되는데, 이때 CdTe 박막 표면에서 Cd이 용액에 의해 제거 되는 것을 확인 하였다.

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Improvement of HgCdTe Qualities grown by MOVPE using MBE grown CdTe/Si as Substrate (MBE법으로 성장된 CdTe(211)/Si 기판을 이용한 MOVPE HgCdTe 박막의 특성 향상)

  • Kim, Jin-Sang;Suh, Sang-Hee;Sivananthan, S.
    • Journal of Sensor Science and Technology
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    • v.12 no.6
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    • pp.282-288
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    • 2003
  • We report the growth of HgCdTe by metal organic vapor phase epitaxy (MOVPE), using (211)B CdTe/Si substrates grown by molecular beam epitaxy (MBE). The surface morphology of these films is very smooth with hillock free. The etch pit densities (EPD) and full widths at half maximum (FWHM) of x-ray rocking curves exhibited that the crystalline quality of HgCdTe epilayer on MBE grown CdTe/Si was improved compare to HgCdTe on GaAs substrate. The Hall parameters of undoped HgCdTe layers on CdTe/Si showed n-type behavior with carrier concentration of $8{\times}10^{14}/cm^3$ at 77K. But HgCdTe on GaAs showed p-type conductivity due to in corporation of p-type impurities during GaAs substrate preparation. It is thought that these results are applicable for large area HgCdTe forcal plane arrays of $1024{\times}1024$ format and beyound.

Characteristics of MOVPE Grown HgCdTe on GaAs and CdZnTe Substrates (GaAs 및 CdZnTe기판위에 MOVPE 법으로 성장된 HgCdTe 박막의 특성)

  • 김진상;서상희
    • Korean Journal of Crystallography
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    • v.12 no.3
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    • pp.171-176
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    • 2001
  • HgCdTe films were grown on the (100). (111), (211) CdZnTe, and (100) GaAs substrates by metal organic chemical vapor epitaxy. We have investigated the surface morphology, electrical properties, crystalline qualities, and composition of HgCdTe with substrates orientation. Three dimensional facet growth was occurred on (111) CdZnTe substrate. The crystalline quality of HgCdTe on (100) CdZnTe was superior to that of HgCdTe on (100) GaAs. FWHM values of double crystal x-ray diffraction of HgCdTe on (100) CdZnTe and (100) GaAs were 55 and 125arcsec, respectively. HgCdTe on GaAs substrate showed n-type conductivity with high mobility, however, HgCdTe on CdZnTe showed p-type conductivity with carrier concentration of higher than 10/sup 16/㎤.

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A study on the capacitance-voltage characteristics of the CdZnS/CdTe heterojunction (CdZnS/CdTe 이종접합의 커패시턴스-전압 특성에 관한 연구)

  • Lee, Jae-Hyeong
    • Journal of the Korea Institute of Information and Communication Engineering
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    • v.15 no.6
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    • pp.1349-1354
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    • 2011
  • In this work, we fabricated the CdZnS/CdTe heterojunction and investigated the C-V characteristics to determine the depletion width and the charge density distribution. A parallel experiment on CdS/CdTe heterojunction was also carried out for comparison. The depletion region width, for CdZnS/CdTe heterojunction, was nearly constant, regardless of bias voltage. However, the depletion region was wider than that of CdS/CdTe heterojunction due to high resistivity of CdZnS film. The interface charge density of CdZnS/CdTe heterojunction was increased linearly with the bias voltage and showed lower values than those for CdS/CdTe junction. The open circuit voltage of CdZnS/CdTe heterojunction solar cells increased with zinc mole ratio due to reducing of the electron affinity difference between CdZnS and CdTe films. However, the increase of series resistance due to the high resistivity of Cd1-xZnxS films results in reducing conversion efficiency.

MOCVD of CdTe thin films on Si substrates (MOCVD 법에 의한 CdTe/Si 박막성장)

  • Kim, Kwang-Chon;Kwon, Sung-Do;Choi, Ji-Hwan;Kim, Hyun-Jae;Kim, Jin-Sang
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2009.06a
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    • pp.451-451
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    • 2009
  • CdTe는 에너지밴드갭이 1.45eV인 직접천이헝 II-VI 화합물 반도체로서 높은 광홉수율과 가시광 영역의 에너지밴드캡으로 태양전지, x-선 검출기 등에 널리 사용되고 있다. 본 연구에서는 Metal Organic Chemical Vapor Deposition (MOCVD)으로 Si 기판위에 CdTe 에피 박막을 성장 하고자 하였다. Cd, Te의 금속유기 화합물로는 Dimethylcadmium(DmCd)과 Diisopropyltellurium(DIPTe)을 사용하였다. 기판으로는 Si 을 사용하였으며 박막성장 온도를 $360^{\circ}C\;{\sim}\;500^{\circ}C$로 제어하여 에피박막이 형성되는 조건을 얻고자 하였다. $360^{\circ}C$, $450^{\circ}C$에서 성장된 CdTe박막은 다양한 방향이 존재하는 다결정 구조 였으며 $500^{\circ}C$의 경우 단결정 에피 박막 성장이 이루어졌음을 확인하였다. 본 연구를 통한 CdTe 에피박막은 기존의 열증착 등으로 제조되는 다결정 CdTe 박막과 비교하여 높은 에너지변환 효율을 얻을 것으로 기대된다.

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The Analysis of CdS and CdTe Thin Film at the Processes of Manufacturing CdTe Solar Cells (CdTe 태양전지 제조 공정에 따라 변화하는 CdS와 CdTe 박막의 물성 변화 분석)

  • Chun, Seungju;Jung, Younghun;Choi, Suyoung;Tark, Sung Ju;Kim, Jihyun;Kim, Donghwan
    • 한국신재생에너지학회:학술대회논문집
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    • 2011.05a
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    • pp.106.2-106.2
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    • 2011
  • 다층 박막 구조로 이루어진 CdS/CdTe 태양전지의 경우, 각각의 박막이 다양한 제조 공정을 거치면서 물성특성의 변화를 겪게 된다. 각각의 박막이 고온의 열처리 공정과, $CdCl_2$ 용액 처리 및 후면 산화막 제거 공정 등을 거치게 되면서 겪게 되는 물성 변화 분석을 살펴보고자 한다. 각각의 박막 제조 방식은 일반적으로 사용되는 방식으로, CdS의 경우는 용액성장법(Chemical Bath Deposition, CBD), CdTe의 경우는 근접승화법(Closed Space Sublimaition, CSS)을 사용했으며, X-Ray Diffractometer (XRD), Raman spectroscopy, Field Emission Scanning Electron Microscope (FE-SEM), Energy Dispersive Spectroscopy (EDS), X-ray Photoelectron Spectroscopy (XPS) 등을 이용하여 분석하였다. 각각의 셀 제조 공정을 거치면서 CdS, CdTe 박막들은 결정, 광 특성, 성분 변화를 보였다.

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The properties and effects of the electrodeposited CdTe compound film on the porous silicon (다공질규소에 전착된 CdTe 화합물 박막의 특성과 효과)

  • 김영유;이춘우;류지욱;홍사용;박대규;육근철
    • Journal of the Korean Crystal Growth and Crystal Technology
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    • v.9 no.1
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    • pp.89-93
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    • 1999
  • The properties and effects of the electrodeposited CdTe compound film on the porous silicon. To find ways to achieve good mechanical contact on the nanostructure porous silicon layer while keeping the interface transparent, we tried to electrodeposit a CdTe compound film on the porous silicon surface. The CdTe compound film was fabricated with -2.3V vs. Ag/AgCl potential difference in the electrolyte solution containing 1M of $CdSO_4$and 1 mM of $TeO_4$. X-ray diffraction results confirmed the existence of CdTe compound film on the porous silicon surface. Auger depth profile showed that Cd and Te were uniformly distributed up to a 80 nm distance from the surface. The photoluminescence of the sample with a CdTe compound film was weaker in intensity than that without the film and the maximum wavelength was shifted to the higher energy. These results indicate that the contacting CdTe compound film was infiltrated to the nanostructure of porous silicon.

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A Study on the Photo-Conductive Characteristics of (p)ZnTe/(n)Si Solar Cell and (n)CdS-(p)ZnTe/(n)Si Poly-Junction Thin Film ((p)ZnTe/(n)Si 태양전지와 (n)CdS-(p)ZnTe/(n)Si 복접합 박막의 광도전 특성에 관한 연구)

  • Jhoun, Choon-Saing;Kim, Wan-Tae;Huh, Chang-Su
    • Solar Energy
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    • v.11 no.3
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    • pp.74-83
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    • 1991
  • In this study, the (p)ZnTe/(n)Si solar cell and (n)CdS-(p)ZnTe/(n)Si poly-junction thin film are fabricated by vaccum deposition method at the substrate temperature of $200{\pm}1^{\circ}C$ and then their electrical properties are investigated and compared each other. The test results from the (p)ZnTe/(n)Si solar cell the (n)CdS-(p)ZnTe/(n)Si poly-junction thin fiim under the irradiation of solar energy $100[mW/cm^2]$ are as follows; Short circuit current$[mA/cm^2]$ (p)ZnTe/(n)Si:28 (n)CdS-(p)ZnTe/(n)Si:6.5 Open circuit voltage[mV] (p)ZnTe/(n)Si:450 (n)CdS-(p)ZnTe/(n)Si:250 Fill factor (p)ZnTe/(n)Si:0.65 (n)CdS-(p)ZnTe/(n)Si:0.27 Efficiency[%] (p)ZnTe/(n)Si:8.19 (n)CdS-(p)ZnTe/(n)Si:2.3 The thin film characteristics can be improved by annealing. But the (p)ZnTe/(n)Si solar cell are deteriorated at temperatures above $470^{\circ}C$ for annealing time longer than 15[min] and the (n)CdS-(p)ZnTe/(n)Si thin film are deteriorated at temperature about $580^{\circ}C$ for longer than 15[min]. It is found that the sheet resistance decreases with the increase of annealing temperature.

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Hot-wall epitaxial growth and characteristic of CdTe films (Hot-wall epitaxy법에 의한 CdTe 박막의 성장과 특성)

  • 박효열;조재혁;진광수;황영훈
    • Journal of the Korean Crystal Growth and Crystal Technology
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    • v.14 no.4
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    • pp.140-144
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    • 2004
  • CdTe thin films were grown on GaAs (100) substrates by hot wall epitaxy method. From the XRD measurements, it was found that CdTe/GaAs (100) film was grown as a single crystals with the different from growth plane of (III), and growth rate of CdTe thin films was found to be 30 $\AA/sec$ by SEM. To acquire a high quality CdTe thin film, the optimum temperature for the source and substrate are found to be $500^{\circ}C$ and $320^{\circ}C$, respectively, which was checked by PL.

Effects of rapid thermal annealing on Physical properties of polycrystalline CdTe thin films (급속열처리가 다결정 CdTe 박막의 물성에 미치는 효과에 관한 연구)

  • 조영아;이용혁;윤종구;오경희;염근영;신성호;박광자
    • Journal of the Korean Vacuum Society
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    • v.5 no.4
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    • pp.348-353
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    • 1996
  • Rapid thermal annealing (RTA) was applied to polycrystalline CdTe thin films evaporated on CdS/ITO/glass substrate and the effect of the annealing temperatures and the atmosphere on physical properties of polycrystalline CdTe thin films and CdTe/CdS solar cell characteristics were studied. Results obtained by EDX showed that the bulk composition of CdTe remained stoichiometric after annealing at $550^{\circ}C$ in the air but the surface composition became Cd-rich. Cross-sectional TEM and micro EDX showed that columnar grains and micro-twins remained even after RTA, however, and the sulfur content in the annealed CdTe (added by sulfur diffusion from CdS during the annealing) was much smaller than that by furnace annealing. Among the investigated RTA temperatures and gas environments, the cell made with CdTe annealed at $550^{\circ}C$ in air showed the best solar energy conversion efficiency.

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