• Journal of the Korean Electrochemical Society
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• v.10 no.2
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• pp.88-93
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• 2007

Nano-sized Sn particles were coated with Ni-P layer using an electroless deposition method and their anodic performance was tested for lithium secondary batteries. Uniform coating layers were obtained, of which the thickness was controlled by varying the $Ni^{2+}$ concentration in the plating bath. It was found that the Ni-P layer plays two important roles in improving the anodic performance of Sn powder electrode. First, it prevents the inter-particle aggregation between Sn particles during the charge/discharge process. Second, it provides an electrical conduction pathway to the Sn particles, which allows an electrode fabrication without an addition of conductive carbon. A pseudo-optimized sample showed a good cyclability and high capacity ($>400mAh\;g^{-1}$) even without conductive carbon loading.

• Proceedings of the KIEE Conference
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• 1997.11a
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• pp.273-275
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• 1997

We fabricated the conventional silicon tips coated with a diamond-like carbon (DLC) film. The DLC films are prepared by the filtered cathodic vacuum arc (FCVA) technique. With increasing nitrogen content in DLC film, the work function($\phi$) and the turn-on voltage decrease and the emission current increases. This phenomenon is due to the fact that the Fermi-level moves to the conduction band by increasing nitrogen doping concentration. We have tested on the stability of the DLC film coated silicon tip during 2 hours at 500V.

• Journal of Korean Vacuum Science & Technology
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• v.3 no.1
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• pp.54-58
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• 1999

We deposited diamond-like carbon (DLC) films using ion beam sputtering of a graphite target on flat substrates for use as a thin film field emitter. An n-type silicon wafer, titanium-coated silicon, and indium tin oxide (ITO) coated glass were used as a substrate. All films exhibited a sudden increase in the emission after a breakdown occurred at high voltage. The morphology of the films after the breakdown depended on the substrate. On ITO and Ti substrates, the DLC film peeled off upon breakdown, but on the Si substrate the surface melting due to breakdown resulted in the formation of various structures such as a sharp point, mound, and crater. By scanning the deformed surface with a tip anode, we found that the emission was concentrated at the deformed sites, indicating that the field enhancement due to the morphology change was responsible for the increased emission.

• Applied Chemistry for Engineering
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• v.20 no.6
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• pp.663-669
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• 2009

The honeycomb adsorbent was prepared for adsorbing and seadsorbent was prepared by using zeolite sheet, which contained zeolite as component. The steady-state adsorption properties and surface morphologies were analyzed and breakthrough characteristics were ananlyzed by providing 16% carbon dioxide mixed gas. By thermal regeneration, carbon dioxide concentration properties were analyzed, and the adsorptive separation process was compared between thermal swing adsorption and pressure swing adsorption after adsorbent temperature change during heating. The breakthrough results of the honeycomb showed possibility parating carbon dioxide from combustion exhaust gas, which had deep impact on climate change, and the characteristics of the adsorbent were studied. Na-X zeolite was coated on a honeycomb prepared with ceramic sheet or active carbon sheet so that the two honycomb can be used at high temperature. Third honeycomb of rotary adsorptive concentration process.

• Proceedings of the Korean Vacuum Society Conference
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• 2012.02a
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• pp.183-183
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• 2012

In the era of 45 nm or beyond technology, conventional etch mask using photoresist showed its limitation of etch mask pattern collapse as well as pattern erosion, thus hard mask in etching became necessary for precise control of etch pattern geometry. Currently available hard mask materials are amorphous carbon and polymetric materials spin-on containing carbon or silicon. Amorphous carbon layer (ACL) deposited by PECVD for etch hard mask has appeared in manufacturing, but spin-on carbon (SOC) was also suggested to alleviate concerns of particle, throughput, and cost of ownership (COO) [1]. SOC provides some benefits of reduced process steps, but it also faced with wiggling on a sidewall profile. Diamond like carbon (DLC) was also evaluated for substituting ACL, but etching selectivity of ACL was better than DLC although DLC has superior optical property [2]. Developing a novel material for pattern hard mask is very important in material research, but it is also worthwhile eliminating a potential issue to continuously develop currently existing technology. In this paper, we investigated in-situ dry-cleaning (ISD) monitoring of ACL coated process chamber. End time detection of chamber cleaning not only provides a confidence that the process chamber is being cleaned, but also contributes to minimize wait time waste (WOW). Employing Challenger 300ST, a 300mm ACL PECVD manufactured by TES, a series of experimental chamber cleaning runs was performed after several deposition processes in the deposited film thickness of $2000{\AA}$ and $5000{\AA}$. Ar Actinometry and principle component analysis (PCA) were applied to derive integrated and intuitive trace signal, and the result showed that previously operated cleaning run time can be reduced by more than 20% by employing real-time monitoring in ISD process.

• Journal of the Korean Society for Aeronautical & Space Sciences
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• v.48 no.12
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• pp.961-968
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• 2020

In this study, the effective thermal conductivity and elastic modulus of heat-resistant coating materials are analyzed by using micromechanical computational models. Three-dimensional computational models for HfC-coated carbon/carbon composites were created with Simpleware, and finite element analysis was performed. The porosity and thickness changes in the coating layer were taken into account to identify the tendency of effective material properties. In addition, the coupon specimen was produced to compare the thermal conductivity measured by experiments with the one obtained by finite element analysis according to temperature changes, and the analysis results were close to the measured values. This confirms that micromechanical computational analysis is appropriate in the calculation of effective material properties of coating composites.

• Journal of Surface Science and Engineering
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• v.56 no.1
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• pp.62-68
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• 2023

Silicon (Si) is considered as a promising substitute for the conventional graphite due to its high theoretical specific capacity (3579 mAh/g, Li₁₅Si₄) and proper working voltage (~0.3V vs Li⁺/Li). However, the large volume change of Si during (de)lithiation brings about severe degradation of battery performances, rendering it difficult to be applied in the practical battery directly. As a one feasible candidate of industrial Si anode, silicon monoxide (SiO_x) demonstrates great electrochemical stability with its specialized strategy, downsized Si nanocrystallites surrounded by Li⁺ inactive buffer phase (Li₂O and Li₄SiO₄). Nevertheless, SiO_x inherently has the initial irreversible capacity and poor electrical conductivity. To overcome those issues, conformal carbon coating has been performed on SiO_x utilizing ethylbenzene as the carbon precursor of chemical vapor deposition (CVD). Through various characterizations, it is confirmed that the carbon is homogeneously coated on the surface of SiO_x. Accordingly, the carbon-coated SiOx from CVD using ethylbenzene demonstrates 73% of the first cycle efficiency and great cycle life (88.1% capacity retention at 50th cycle). This work provides a promising synthetic route of the uniform and scalable carbon coating on Si anode for high-energy density.

• Journal of Powder Materials
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• v.30 no.5
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• pp.387-393
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• 2023

Transition metal chalcogenides are promising cathode materials for next-generation battery systems, particularly sodium-ion batteries. Ni₃Co₆S₈-pitch-derived carbon composite microspheres with a yolk-shell structure (Ni₃Co₆S₈@C-YS) were synthesized through a three-step process: spray pyrolysis, pitch coating, and post-heat treatment process. Ni₃Co₆S₈@C-YS exhibited an impressive reversible capacity of 525.2 mA h g^-1 at a current density of 0.5 A g^-1 over 50 cycles when employed as an anode material for sodium-ion batteries. However, Ni₃Co₆S₈ yolk shell nanopowder (Ni₃Co₆S₈-YS) without pitch-derived carbon demonstrated a continuous decrease in capacity during charging and discharging. The superior sodium-ion storage properties of Ni₃Co₆S₈@C-YS were attributed to the pitch-derived carbon, which effectively adjusted the size and distribution of nanocrystals. The carbon-coated yolk-shell microspheres proposed here hold potential for various metal chalcogenide compounds and can be applied to various fields, including the energy storage field.

• Journal of Ceramic Processing Research
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• v.21 no.2
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• pp.170-191
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• 2020

As interest in environmental pollution has increased, research in the field of filtration has been concentrated. While various types of filters have been developed, research on nanomaterial filtration has been limited. Since then, the development of new materials such as carbon nanotubes (CNTs) has accelerated the study of new filters. Especially, CNTs have been among the most attractive materials ever synthesized for the development of nano-technologies. However, there are fundamental technical problems to be solved the development of new CNT composites. One of these problems is the development of a CNTs filter with excellent adsorption behavior and a filter that is capable of filtering a specific substance. In addition, it is necessary to develop a technology to increase the uniform distribution of CNTs, and to reduce the high processing cost of CNT composite production. In general, the chemical pathways for the production of CNTs include hydrocarbon gases, such as methane (CH4) and acetylene (C2H2), through metal nanoparticle catalysts. However, nano-metal particles have a strong coagulation phenomenon at high temperature by catalytic chemical vapor deposition (CCVD) method. In this review, attempts were made by applying three different reaction techniques to form CNTs on biomorphic carbon materials (BCM) coated with catalyst materials to control the shape and size of CNTs. Hierarchical carbon substrates with pore size of 100 ~ 300 ㎛ were developed using carbonization reaction. Linde type A (LTA) zeolite, silicalite-1, and mesoporous SiO2 template crystals were simultaneously synthesized and coated on the BCM by an in-situ hydrothermal process to synthesize high-yield CNTs composites.

• 정보저장시스템학회:학술대회논문집
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• 2005.10a
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• pp.113-118
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• 2005

Small form factor optical disks for near-field optics using solid immersion lens were developed. Disk durability properties in terms of head-disk interface (HDI) properties were investigated by drag test, diamond like carbon film and lubricant film were coated on the small form factor disk to enhance HDI. Disks with glass substrates and lubricant films after heat treatment showed more durable characteristics. Coverlayers made of UV resin were uniformly coated by spin coating In which the ski-jump could not be formed by adopting outer ring technique.