• 제목/요약/키워드: Carbide Morphology

검색결과 89건 처리시간 0.023초

고온 열처리 공정이 탄화규소 쇼트키 다이오드 특성에 미치는 영향 (Effect of High Temperature Annealing on the Characteristics of SiC Schottky Diodes)

  • 정희종;방욱;강인호;김상철;한현숙;김형우;김남균;이용재
    • 한국전기전자재료학회논문지
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    • 제19권9호
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    • pp.818-824
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    • 2006
  • The effects of high-temperature process required to fabricate the SiC devices on the surface morphology and the electrical characteristics were investigated for 4H-SiC Schottky diodes. The 4H-SiC diodes without a graphite cap layer as a protection layer showed catastrophic increase in an excess current at a forward bias and a leakage current at a reverse bias after high-temperature annealing process. Moreover it seemed to deviate from the conventional Schottky characteristics and to operate as an ohmic contact at the low bias regime. However, the 4H-SiC diodes with the graphite cap still exhibited their good electrical characteristics in spite of a slight increase in the leakage current. Therefore, we found that the graphite cap layer serves well as the protection layer of silicon carbide surface during high-temperature annealing. Based on a closer analysis on electric characteristics, a conductive surface transfiguration layer was suspected to form on the surface of diodes without the graphite cap layer during high-temperature annealing. After removing the surface transfiguration layer using ICP-RIE, Schottky diode without the graphite cap layer and having poor electrical characteristics showed a dramatic improvement in its characteristics including the ideality factor[${\eta}$] of 1.23, the schottky barrier height[${\Phi}$] of 1.39 eV, and the leakage current of $7.75\{times}10^{-8}\;A/cm^{2}$ at the reverse bias of -10 V.

나노 실리카와 카본블랙이용 탄화열 반응으로 나노 SiC 합성 및 특성 (Synthesis of SiC Nanoparticles by a Sol-Gel Process)

  • 정광진;배동식
    • 한국재료학회지
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    • 제23권4호
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    • pp.246-249
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    • 2013
  • Nano-sized ${\beta}$-SiC nanoparticles were synthesized combined with a sol-gel process and a carbothermal process. TEOS and carbon black were used as starting materials for the silicon source and carbon source, respectively. $SiO_2$ nanoparticles were synthesized using a sol-gel technique (Stober process) combined with hydrolysis and condensation. The size of the particles could be controlled by manipulating the relative rates of the hydrolysis and condensation reactions of tetraethyl orthosilicate (TEOS) within the micro-emulsion. The average particle size and morphology of synthesized silicon dioxide was about 100nm and spherical, respectively. The average particles size and morphology of the used carbon black powders was about 20nm and spherical, respectively. The molar ratio of silicon dioxide and carbon black was fixed to 1:3 in the preparation of each combination. $SiO_2$ and carbon black powders were mixed in ethanol and ball-milled for 12 h. After mixing, the slurries were dried at $80^{\circ}C$ in an oven. The dried powder mixtures were placed in alumina crucibles and synthesized in a tube furnace at $1400{\sim}1500^{\circ}C$ for 4 h with a heating rate of $10^{\circ}C$/min under flowing Ar gas (160 cc/min) and furnace cooling down to room temperature. SiC nanoparticles were characterized by XRD, TEM, and SAED. The XRD results showed that high purity beta silicon carbide with excellent crystallinity was synthesized. TEM revealed that the powders are spherical shape nanoparticles with diameters ranging from 15 to 30 nm with a narrow distribution.

TAS (Total Analysis System)를 이용한 SB-TRIP강에서의 2-D & 3-D 미세구조 분석 연구 (2-D & 3-D Observations on the microstructures of Super Bainitie TRIP Steels using Total Analysis System)

  • 설재복;임영록;박찬경
    • 한국소성가공학회:학술대회논문집
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    • 한국소성가공학회 2009년도 추계학술대회 논문집
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    • pp.209-212
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    • 2009
  • It has been widely reported that carbide-free bainitic steels or super-bainite WP (SB-TRIP) steels for the automotive industry are a new family of steels offering a unique combination of high strength and ductility. Hence, it is important to exactly evaluate the volume fraction of RA and to identify the 3-D morphology of constituent phases, because it plays a crucial role in mechanical properties. Recently, as electron back-scattered diffraction (EBSD) equipped with focused ion beam (FIB) has been developed, 3-D EBSD technique for materials science are used to these steels. Moreover, newly developed atom probe tomography (APT) technique can provide the exact distribution and chemical concentration of alloying elements in a sub-nm scale. The APT analysis results indicate exactly the distribution and composition of alloying elements in the austenite and bainite phases of SB-TRIP steels with the atomic-scale resolution. And thus, no partitioning of aluminum and manganese atoms was showed between the austenite containing $7.73{\pm}0.39$ at% C and the bainitic ferrite associated with $0.22{\pm}0.06$ at% C in the SB-TRIP steel.

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고온 수증기 환경에서 Ni기 초합금의 산화특성 (Oxidation Behaviors of Nickel-Base Superalloys in High Temperature Steam Environments)

  • 김동훈;구자현;김대종;유영성;장창희
    • 한국압력기기공학회 논문집
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    • 제7권2호
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    • pp.26-33
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    • 2011
  • To evaluate steam oxidation behaviours of Alloy 617 and Haynes 230, oxidation test were performed at $900^{\circ}C$ in steam and $steam+20\;vol.-%\;H_2$ environments. Oxidation rate in steam condition was similar to that in air for Alloy 617, while it was slightly lower for Haynes 230. When hydrogen was added to steam, oxidation rate was enhanced. Isolated $MnTiO_3$ particle were formed on $Cr_2O_3$ oxide layer and sub layer $Cr_2O_3$ were formed in steam and $steam+20\;vol.-%\;H_2$ for Alloy 617. On the other hands, $MnCr_2O_3$ layer were formed on top of $Cr_2O_3$ oxide layer for Haynes 230. The extensive sub layer $Cr_2O_3$ formation was resulted from the oxygen inward diffusion in such environments. When hydrogen was added, the oxide morphology was changed from polygonal to platelet because of the accelerated diffusion of cations under the oxide layer. In addition, decarburized zone was extended as hydrogen participated into the reactions causing carbide dissolution.

TAS(Total Analysis System)을 이용한 SB-TRIP강에서의 2-D & 3-D 미세구조 분석 연구 (2-D & 3-D Observations on the Microstructure of Super Bainite TRIP Steels using Total Analysis System)

  • 설재복;이봉호;박찬경
    • 소성∙가공
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    • 제19권1호
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    • pp.44-49
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    • 2010
  • It has been widely reported that carbide-free bainitic steels or super-bainite TRIP (SB-TRIP) steels for the automotive industry are a new family of steels offering a unique combination of high strength and ductility. Hence, it is important to exactly evaluate the volume fraction of RA and to identify the 3-D morphology of constituent phases, because it plays a crucial role in mechanical properties. Recently, as electron back-scattered diffraction (EBSD) equipped with focused ion beam (FIB) has been developed, 3-D EBSD technique for materials science are used to these steels. Moreover, newly developed atom probe tomography (APT) technique can provide the exact distribution and chemical concentration of alloying elements in a sub-nm scale. The APT analysis results indicate exactly the distribution and composition of alloying elements in the austenite and bainite phases of SB-TRIP steels with the atomic-scale resolution. And thus, no partitioning of aluminum and manganese atoms was showed between the austenite containing $7.73{\pm}0.39$ at% C and the bainitic ferrite associated with $0.22{\pm}0.06$ at% C in SB-TRIP steel.

전기선폭발법에 의해 카본 코팅된 Cu 나노분말의 제조 및 특성 연구 (Fabrication and Characterization of Carbon-Coated Cu Nanopowders by Pulsed Wire Evaporation Method)

  • 이희민;박중학;홍성모;엄영랑;이창규
    • 한국분말재료학회지
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    • 제16권4호
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    • pp.243-248
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    • 2009
  • Carbon-coated Cu nanopowders with core/shell structure have been successfully fabricated by pulsed wire evaporation (PWE) method, in which a mixed gas of Ar/$CH_4$ (10 vol.%) was used as an ambient gas. The characterization of the samples was carried out using x-ray diffraction (XRD), scanning electron microscope (SEM), and high resolution transmission electron microscope (HRTEM). It was found that the nanoparticles show a spherical morphology with the size ranging of 10-40 nm and are covered with graphite layers of 2-4 nm. When oxygen-passivated Cu nanopowders were annealed under flowing argon gas (600 and 800$^{\circ}C$), the crystallinity of $Cu_2O$ phase and the particle size gradually increased. On the other hand, carbon-coated Cu nanopowders remained similar to as-prepared case with no additional oxide or carbide phases even after the annealing, indicating that the metal nanoparticles are well protected by the carbon-coating layers.

페라이트계 스테인레스 주강의 고온강도에 관한 연구 (A Study on the High Temperature Strength of Ferritic Stainless Cast Steels)

  • 안수정;강미리;서도수;김용현;이광학;김흥식
    • 한국주조공학회지
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    • 제18권6호
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    • pp.563-569
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    • 1998
  • A Study on microstructure and elevated temperature strength of 18Cr-2Mo ferritic stainless steel castings strengthened by alloying small amounts of titanium and carbon, has been conducted. The morphology of titanium carbides showed spherical in shape and their distribution depended on the amount of alloying elements. Maximum density ($7{\times}10^5/cm^2$) of titanium carbides has been formed in the alloy containing 2.0 wt.% titanium and 0.5 wt.% carbon as alloying elements and the size of carbide particles is in the range of 0.5 to $3.0\;{\mu}m$. High temperature tensile and fatigue strength of this alloy were the highest among the alloys tested in this research. The fracture mode of the alloys containing alloying elements less that 2.0 wt.% titanium and 0.5 wt.% carbon showed intercrystalline fracture at room temperature, while the alloys containing higher amounts of alloying elements showed transcrystalline fracture. All of the alloys showed creep or ductile rupture mode at elevated temperature.

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입방형 탄화규소 박막의 적층 성장 (Single Source Chemical Vapor Deposition of Epitaxial Cubic SiC Films on Si)

  • 이경원;유규상;구수진;김창균;고원용;조용국;김윤수
    • 한국진공학회지
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    • 제5권2호
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    • pp.133-138
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    • 1996
  • 단일 선구물질인 1, 3 -디실라부탄을 사용하여 고진공 하의 온도 영역 900-$1000^{\circ}C$에서 탄화규소 환충층이 형성된 Si(001) 기질 위에 입방형 탄화규소 박막을 적층 성장시켰다. 얻어진 탄화규소 박막의 화학량론적 비, 양질의 결정성 및 표면형태의 특성을 반사 고에너지 전자 회절, Xtjs 광전자 분광법, X선 회절, Xtjs 극접도, 주사 전자 현미경 및 투과 전자 현미경으로 확인하였다. 이들 결과로부터 단일 선구물질인 1, 3-디실라부탄이 입방구조를 가지는 탄화규소 박막의 적층 성장에 적절한 물질임을 밝혔다.

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화학증착 탄화규소 휘스커에 의한 다공성 코디어라이트의 기공구조 개질 및 특성평가 (Pore Structure Modification and Characterization of Porous Cordierite with Chemical Vapor Infiltration (CVI) SiC Whisker)

  • 김익환;김준규;이환섭;최두진
    • 한국세라믹학회지
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    • 제45권2호
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    • pp.132-137
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    • 2008
  • The main purpose of this study is enhancing the filtering efficiency, performance and durability of filter by growing SiC whiskers on cordierite honeycomb substrate. The experiment was performed by Chemical Vapor Infiltration (CVI) in order to control pore morphology of substrate. Increasing the mechanical strength of porous substrate is one of important issues. The formation of "networking structure" in the pore of porous substrate increased mechanical strength. The high pressure gas injection to the specimen showed that a little of whiskers were separated from substrate but additional film coating enhanced the stability of whisker at high pressure gas injection. Particle trap test was performed. More nano-particle was trapped by whisker growth at the pore of substrate. Therefore it is expected that the porous cordierite which deposited the SiC whisker will be the promising material for the application as filter trapping the nano-particles.

RF plasma-enhancd CVD 법에 의해 증착된 a-$Si_xC_{1x}:H$ 의 표면분석 (Surface analysis of a-$Si_xC_{1x}:H$ deposited by RF plasma-enhanced CVD)

  • Kim, Yong-Tak;Yang, Woo-Seok;Lee, Hyun;Byungyou Hong;Yoon, Dae-Ho
    • 한국결정성장학회:학술대회논문집
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    • 한국결정성장학회 1999년도 PROCEEDINGS OF 99 INTERNATIONAL CONFERENCE OF THE KACG AND 6TH KOREA·JAPAN EMG SYMPOSIUM (ELECTRONIC MATERIALS GROWTH SYMPOSIUM), HANYANG UNIVERSITY, SEOUL, 06월 09일 JUNE 1999
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    • pp.285-303
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    • 1999
  • Thin films of hydrogenated amorphous silicon carbide compounds (a-SixC1x:H) of different compositions were deposited on Si substrate by RF plasma-enhanced chemical vapor deposition (PECVD). Experiments were carried out using silane(SiH4) and methane(CH4) as the gas precursors at 1 Torr and at low substrate temperature (25$0^{\circ}C$). The gas flow rate was changed with every other parameters (pressure, temperature, RF power) fixed. The substrate was Si(100) wafer and all of the films obtained were amorphous. The bonding structure of a-SixC1x:H films deposited was investigated by X-ray photoelectron spectroscopy (XPS) for the film compositions. In addition, the surface morphology of films was investigated by atomic force microscopy (AFM).

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