• 센서학회지
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• 제14권1호
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• pp.28-32
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• 2005

In this paper, a CMOS integrated detection circuit for capacitive type fingerprint sensor signal processing is described. We designed a detection circuit of charge-sharing sensing scheme. The proposed detection circuit increases the voltage difference between a ridge and valley. The test chip is composed of $160{\times}192$ array sensing cells (12 by $12.7{\;}mm^{2}$). The chip was fabricated on a 0.35 m standard CMOS process. Measured difference voltage between a ridge and valley was 0.95 V.

• 전기학회논문지
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• 제57권10호
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• pp.1861-1868
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• 2008

In this paper, Passive Telemerty RF Sensor System using Unscented Kalman Filter algorithm(UKF) is proposed. General Passive Telemerty RF Sensor System means that it should be "wireless", "implantable" and "batterless". Conventional Passive Telemerty RF Sensor System adopts Integrated Circuit type, but there are defects like complexity of structure and limit of large power consumption in some cases. In order to overcome these kinds of faults, Passive Telemetry RF Sensor System based on inductive coupling principle is proposed in this paper. Because passive components R, L, C have stray parameters in the range of high frequency such as about 200[KHz] used in this paper, Passive Telemetry RF Sensor System considering stray parameters has to be derived for accurate model identification. Proposed Passive Telemetry RF Sensor System is simple because it consists of R, L and C and measures the change of environment like pressure and humidity in the type of capacitive value. This system adopted UKF algorithm for estimation of this capacitive parameter included in nonlinear system like Passive Telemetry RF Sensor System. For the purpose of obtaining learning data pairs for UKF Algorithm, Phase Difference Detector and Amplitude Detector are proposed respectively which make it possible to get amplitude and phase between input and output voltage. Finally, it is verified that capacitive parameter of proposed Passive Telemetry RF Sensor System using UKF algorithm can be estimated in noisy environment efficiently.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2011년도 춘계학술대회 논문집
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• pp.1103-1104
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• 2011

• 대한기계학회:학술대회논문집
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• 대한기계학회 2007년도 춘계학술대회A
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• pp.1450-1454
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• 2007

A Contact-type Linear Encoder-like Capacitive Displacement Sensor (CLECDiS) has been developed to measure displacements at high accuracy within a long measurement range. In this paper, we have worked on improving the performance and reliability of the sensor. The performance increase can be done by introducing the smaller electrode patterns of $4{\mu}m$ width. In order to improve the reliability of the sensor we have changed the electrode layers from chrome-gold to chrome-gold-chrome and re-design its supporting structure. The newly-designed sensor is fabricated and tested to show that its sensitivity is $35pF/{\mu}m$, which implies that its resolution may be 0.36nm if SNR (Signal-to-Noise-Ratio) is 80.1dB. It is about ten times of that $(3.14pF/{\mu}m)$ of its previous version with 10${\mu}m$ electrodes. The total measurement range remains the same as the previous one; 15mm. The calibration experiments show its improved performance and reliability.

• 한국정밀공학회지
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• 제12권3호
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• pp.23-31
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• 1995

The sending characteristics of the non-contact type displacement transducers can affect the performances of the magnetic bearing systems when they support the rotating shaft. The probe type displacement sensor detects not only the displacement of the rotor at the sensing position but also the surface irregularitis of the rotor such as surface roughnessand roundness errors. If there exist such measuring errors, the magnetic bearing can not apply proper force against the rotor displacements for the detected signal is the input to the magnetic bearing controllers. The cylindrical shape capacitive transducer can detect the rotor displacement by the integral sum of the charges which are formed between the sensor plates and rotor so that it can reduce the detecting errors induced by the surface irregularities of the rotor. By theore- tical analysis, we compared the sensing characteristics of the cylindrical shape capacitive transducers for the rotors that have some sinusoidal irregularities with that of the ideal probe type displacement transducers.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2004년도 하계학술대회 논문집 C
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• pp.1829-1831
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• 2004

This paper described the capacitive sensor for the diagnosis of deterioration of electrical insulating oils applying guard-ring type the 3-terminal electrodes. To measure stable capacitance of the sensor and to determine the design factors of the sensor, we utilized computational analysis, FEM software. This capacitive sensor discern the extent of deterioration measuring relative permittivity of electrical insulating oils. The result of measuring numerous sample, mineral oils, as serviced year, we confirmed an increase in relative permittivity of oils. Moreover, we confirmed the superior characteristics of the sensor as a species, aged pattern of oils and operating temperature.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2004년도 추계학술대회 논문집 전기설비전문위원
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• pp.89-92
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• 2004

This paper described the capacitive sensor for the diagnosis of deterioration of electrical insulating oils applying guard-ring type the 3-terminal electrodes. To measure stable capacitance of the sensor and to determine the design factors of the sensor, we utilized computational analysis, FEM software. This capacitive sensor discern the extent of deterioration measuring relative permittivity of electrical insulating oils. The result of measuring numerous sample, mineral oils, as serviced year, we confirmed an increase in relative permittivity of oils. Moreover, we confirmed the superior characteristics of the sensor as a species, aged pattern of oils and operating temperature.

• 전자공학회논문지A
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• 제30A권7호
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• pp.82-88
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• 1993

This paper describes fabrication of relative type capacitive pressure sensor to be in great demand for many fields. The fabricated sensor consists of two parts` a sensing diaphragm and a pyrox glass cover. The sensor size is 4.5${\times}3.4mm$^{2})$ and 400$\mu$m thick. To improve the nonlinearity, this sensor is designed a rectangular silicon diaphragm with a center boss structure, and in order to improve the temperature characteristics of the sensor in a packaging process, the sensing element is mounted on the pyrex glass support. Some suggestions toward the design and fabrication of improved sensors have been presented. The zero pressure capacitance, Co of sensor is 26.57pF, and the change of capacitance, ${\Delta}$C is 1.55pF from 0Kgf/Cm$^{2}$ to 1Kgf/Cm$^{2}$ at room temperature. The nonlinearity of the sensor output with center boss diaphragm is 1.29%F.S., and thermal zero shift and thermal sensitivity shift is less than 1.43%F.S./$^{\circ}C$and 0.14% F.S./$^{\circ}C$, respectively.

• 전기학회논문지P
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• 제58권4호
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• pp.476-482
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• 2009

This paper describes the development of capacitive sensor for the diagnosis of liquid dielectrics, which is widely used as the electrical insulating oil of transformer, circuit breaker, cable and etc. To survey the dielectric properties of the virgin and aged electrical insulating oils, we utilized the highly precise measuring system, using the principle of cross capacitance. The measured properties were used to determine the design factors of the sensor. Then the factors were optimized with the help of computational analysis. To evaluate diagnosis by the sensor, we performed accelerated thermal aging test about electrical insulating oils. The condition of aged specimens were investigated by measurements of relative permittivity i.e. capacitance change by capacitive sensor. And to evaluate the hysteresis characteristics with the change of temperature, we constructed a testing system, which was composed with vacuum drying oven, oil chamber and measuring instruments, such as LCR meter, MUX and so forth. Through the results of this investigation, we confirmed the superior characteristics of the newly developed sensor.

• 한국소음진동공학회논문집
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• 제23권12호
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• pp.1082-1089
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• 2013

3-Axis sensor measurement system is needed for measuring ride quality of elevator. But because 3-Axis piezoelectric accelerometer is expensive. We developed 3-Axis sensor system which is suitable for measuring ride quality of elevator using cheap MEMS sensor. There are two types of MEMS sensor that are piezoresistive and capacitive type. The excellence of piezoresistive type in characteristic of frequency response and noise is confirmed compare to capacitive type as a result of this paper's experiment and reference. 3-Axis system using MEMS sensor needs MEMS's proper frequency response characteristic. Additionally noise characteristic of sensor and circuit, stiffness of assembly are needed for deciding frequency range and accuracy of amplitude.