• Proceedings of the Korean Society of Precision Engineering Conference
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• 2004.10a
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• pp.1109-1112
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• 2004

This paper presents a high sensitive force sensing module to measure machining forces for a tip-based nanopatterning instrument. The force sensing module utilizing a leaf spring mechanism and a capacitive displacement sensor has been designed to provide a measuring range from 80$\mu$N to 8N. This force sensing module is mounted on a PZT driven in-feed motion stage with 1 nm resolution. The sample can be moved by a X-Y scanning motion stage with 5 nm resolution. In the patterning experiments, the machining forces were controlled and monitored by the force sensing module. Then, the patterned sample was measured by AFM. Experimental results demonstrated that the developed force sensing module can be used as an effective sensing device in the nanopatterning operation.

• Journal of the Korean Society for Precision Engineering
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• v.34 no.1
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• pp.53-58
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• 2017

A fine stage is developed for the 3-DOF error compensation of a linear axis in order to improve the positioning accuracy. This stage is designed as a planar parallel mechanism, and the joints are based on a flexure hinge to achieve ultra-precise positioning. Also, the effect of Abbe's offsets between the measuring and driving coordinate systems is minimized to ensure an exact error compensation. The mode shapes of the designed stage are analyzed to verify the desired 3-DOF motions, and the workspace and displacement of a piezoelectric actuator (PZT) for compensation are analyzed using forward and inverse kinematics. The 3-DOF error of a linear axis is measured and compensated by using the developed fine stage. A marked improvement is observed compared to the results obtained without error compensation. The peak-to-valley (PV) values of the positional and rotational errors are reduced by 92.6% and 91.3%, respectively.

• Journal of the Institute of Electronics Engineers of Korea SD
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• v.49 no.2
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• pp.1-8
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• 2012

This paper presents the accelerometer which is a key component of TPMS(Tire Pressure Monitoring System). Generally a piezoresistive accelerometer has characteristics of lower cost, better linearity and better immunity about the environmnet noise than a capacitive one. Three types of piezoresistive accelerometers are degined and simulated using ANSYS program. The best one is a piezoresistive sensor which is supported by four beams located at the center of the edge of the mass after comparing the characteristics of resonant frequency of the three types. Considering the sensor size and a simulated maximum stress and maximum displacement, the length of beams is set as $200{\mu}m$. The size of a piezoresistive accelerometer is $3.0mm{\times}3.0mm{\times}0.4mm$. The sensor output is characterized by measuring the output characteristic depending on angle. As a result the offset voltage of the accelerometer is 43.2 mV and its sensitivity is $42.5{\mu}V/V/g$. The temperature bias drift is measured. The shock durability of the sensor is 1500g and the measuring range is 0 ~ 60 g.

• Journal of Multimedia Information System
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• v.7 no.2
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• pp.189-196
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• 2020

We have developed a device for recording biological data by inserting three electrodes and a needle with an angular velocity sensor into the moth for the purpose of measuring the electromyogram of the flapping and the corresponding lift force. With this measurement, it is possible to evaluate the moth-physiological function of moths, and the amount of pesticides that insects are exposed to (currently LD50-based standards), especially the amount of chronic low-concentration exposure, can be reduced the dose. We measured and recorded 2-channel electromyography (EMG) and angular velocity corresponding to pitch angle (pitch-like angle) associated with wing flapping for 100 sweet potato hawkmoths (50 females and 50 males) with the animals suspended and constrained in air. Overall, the angular velocity and amplitude of EMG signals demonstrated high correlation, with a correlation coefficient of R = 0.792. In contrast, the results of analysis performed on the peak-to-peak (PP) EMG intervals, which correspond to the RR intervals of ECG signals, indicated a correlation between ΔF fluctuation and angular velocity of R = 0.379. Thus, the accuracy of the regression curve was relatively poor. Using a DC amplification circuit without capacitive coupling as the EMG amplification circuit, we confirmed that the baseline changes at the gear change point of wing flapping. The following formula gives the lift provided by the wing: angular velocity × thoracic weight - air resistance - (eddy resistance due to turbulence). In future studies, we plan to attach a micro radio transmitter to the moths to gather data on potential energy, kinetic energy, and displacement during free flight for analysis. Such physiological functional evaluations of moths may alleviate damage to insect health due to repeated exposure to multiple agrochemicals and may lead to significant changes in the toxicity standards, which are currently based on LD50 values.