• 제어로봇시스템학회논문지
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• 제13권7호
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• pp.616-623
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• 2007

A dual micro gas sensor array was fabricated using nano sized $SnO_2$ thin films which had good sensitivities to CO and combustible gases, or $H_2S$ gas for air quality sensors in automobile. The already existed air quality sensor detects oxidizing gases and reducing gases, the air quality sensor(AQS), located near the fresh air inlet detected the harmful gases, the fresh air inlet door/ventilation flap was closed to reduce the amount of pollution entering the vehicle cabin through HVAC(heating, ventilating, and air conditioning) system. In this study, to make $SnO_2$ thin film AQS sensor, thin tin metal layer between 1000 and $2000{\AA}$ thick was oxidized between 600 and $800^{\circ}C$ by thermal oxidation. The gas sensing layers such as $SnO_2$, $SnO_2$(pt) and $SnO_2$(+CuO) were patterned by metal shadow mask for simple fabrication process on the silicon substrate. The micro gas sensors with $SnO_2$(+Pt) and $SnO_2$(CuO) showed good selectivity to CO gas among reducing gases and good sensitivity to $H_2S$ that is main component of bad odor, separately.

• 센서학회지
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• 제30권1호
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• pp.36-41
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• 2021

The motivation of this paper is to easily analyze the properties of nondispersive infrared gas sensor that has more than two different optical path length and to suggest the criterion and definition of infrared light absorbance in order to minimize the measurement errors. With the output voltage ratios and the normalized derivatives of infrared ray (IR) absorbance, when the normalized derivatives of IR absorbance decreases from 0.28 to 0.10, the lower and higher limits of errors were decreased from -5.62% and 2.39% to -4.27% and 2.78%. When the normalized derivatives of IR absorbance were 0.10, the output voltage could be partitioned into two regions with one exponential equation and the temperature compensation error was less than 5%.