• 대한기계학회논문집B
• /
• 제35권11호
• /
• pp.1147-1156
• /
• 2011

CLECDiS 는 면적변화형 정전용량 센서의 단점을 극복하고 나노미터 수준의 분해능으로 밀리미터 이상의 큰 변위를 측정하도록 개발된 접촉식 변위센서이다. 그러나 접촉구동 특성으로 인하여 표면평탄도와 마찰에 의해 작은 접촉상태의 변화에도 출력 신호는 크게 왜곡될 수 있어 실제 이를 활용하기 위해서는 전극간 접촉상태를 안정적으로 유지하는 것이 중요하다. 이에 본 연구에서는 전극간 접촉상태의 변화에 따른 신호의 왜곡 특성을 실제 출력 신호와 비교하여 분석하고, 접촉면 내 압력 분포와 센서의 운동 오차 측정을 통해 접촉상태의 변화를 파악하였다. 이를 통하여 센서의 운동 오차와 마찰력의 영향을 최소화하기 위한 접촉 유지 기구를 설계하고 제작하였으며 이를 이용한 구동실험을 통해 보다 안정적인 센서 출력 신호를 획득하였다.

• 센서학회지
• /
• 제21권6호
• /
• pp.440-445
• /
• 2012

Contact-type Linear Encoder-like Capacitive Displacement Sensor (CLECDiS) is a novel displacement sensor which has wide measurable range with high resolution. The sensor, however, is very sensitive to relative rotational alignment between stator and mover of the sensor as well as its displacement. In addition to, there can be some disturbances in the relative rotational alignment, so some noises occur in the sensor's output signal by the disturbances. This negative effect of the high sensitivity may become larger as increasing sensitivity. Therefore, this negative effect of the high sensitivity has to be compensated and reduced to achieve nanometer resolution of the sensor. In this study, a new type capacitive linear encoder with a mechanical guide is presented to reduce the relative rotational alignment problem. The presented method is not only to reduce the alignment problem, but also to assemble the sensor to the stage conveniently. The method is based on a new type CLECDiS that has mechanical guide autonomously. In the presented sensor, when the device is fabricated by micro-machining, the guide-rail is also fabricated on the surface of the sensor. By the direct fabrication of the guide-rail with high precision micro-machining, errors of the guide-rail can be reduced significantly. In addition, a manual yaw alignment is not required to obtain large magnitude of the output signal after the assembly of the sensor and the stage. The sensor movement is going to follow the guide-rail automatically. The prototype sensor was fabricated using the presented method, and we verify the feasibility experimentally.

• 대한기계학회:학술대회논문집
• /
• 대한기계학회 2007년도 춘계학술대회A
• /
• pp.1450-1454
• /
• 2007

A Contact-type Linear Encoder-like Capacitive Displacement Sensor (CLECDiS) has been developed to measure displacements at high accuracy within a long measurement range. In this paper, we have worked on improving the performance and reliability of the sensor. The performance increase can be done by introducing the smaller electrode patterns of $4{\mu}m$ width. In order to improve the reliability of the sensor we have changed the electrode layers from chrome-gold to chrome-gold-chrome and re-design its supporting structure. The newly-designed sensor is fabricated and tested to show that its sensitivity is $35pF/{\mu}m$, which implies that its resolution may be 0.36nm if SNR (Signal-to-Noise-Ratio) is 80.1dB. It is about ten times of that $(3.14pF/{\mu}m)$ of its previous version with 10${\mu}m$ electrodes. The total measurement range remains the same as the previous one; 15mm. The calibration experiments show its improved performance and reliability.