• Electrical & Electronic Materials
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• v.8 no.6
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• pp.774-779
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• 1995

Process optimization experiments based on the Taguchi method were performed in order to set up the optimal process conditions for the contact oxide etching process module which was built in order to be attached to the cluster system of multi-processing purpose. In order to compare with Taguchi method, the contact oxide etching process carried out with different process parameters(CHF$_{3}$/CF$_{4}$ gas flow rate, chamber pressure, RF power and magnetic field intensity). Optimal etching characteristics were evaluated in terms of etch rate, selectivity, uniformity and etched profile. In this paper, as a final analysis of experimental results the optimal etching characteristics were obtained at the process conditions of CHF3/CF4 gas flow rate = 72/8 sccm, chamber pressure = 50 mTorr, RF power = 500 watts, and magnetic field intensity = 90 gauss.

• Nuclear Engineering and Technology
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• v.45 no.3
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• pp.335-346
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• 2013

The Critical Heat Flux (CHF) of water with dispersed alumina nanoparticles was measured for the geometry and flow conditions relevant to the In-Vessel Retention (IVR) situation which can occur during core melting sequences in certain advanced Light Water Reactors (LWRs). CHF measurements were conducted in a flow boiling loop featuring a test section designed to be thermal-hydraulically similar to the vessel/insulation gap in the Westinghouse AP1000 plant. The effects of orientation angle, pressure, mass flux, fluid type, boiling time, surface material, and surface state were investigated. Results for water-based nanofluids with alumina nanoparticles (0.001% by volume) on stainless steel surface indicate an average 70% CHF enhancement with a range of 17% to 108% depending on the specific flow conditions expected for IVR. Experiments also indicate that only about thirty minutes of boiling time (which drives nanoparticle deposition) are needed to obtain substantial CHF enhancement with nanofluids.

• Design & Manufacturing
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• v.13 no.1
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• pp.42-47
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• 2019

Nucleate boiling heat transfer is one of the most important phenomenon in the various industries. Especially, critical heat flux (CHF) refers to the upper limit of the pool boiling heat transfer region. Therefore, many researchers have found that CHF can be significantly increased by adding very small amounts of nanoparticles. In this study, the CHF and heat transfer coefficient were tested under the pool boiling state using copper and multi wall carbon nanotube nanoparticles. The results showed that two different types of nanoparticles deposited on the surface of two specimens made of the same material increased the heat flux in the nanoparticles with high conductivity, and there was no difference in the critical heat flux when the same material nanoparticles were deposited on the two different specimen surfaces.

• Proceedings of the Korean Nuclear Society Conference
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• 1998.10a
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• pp.126-126
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• 1998

• Proceedings of the Korean Nuclear Society Conference
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• 1999.05a
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• pp.156-156
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• 1999

• Journal of Energy Engineering
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• v.25 no.1
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• pp.153-162
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• 2016

Experimental investigation was carried out on the CHF(Critical Heat Flux) under downward flow condition in narrow rectangular channels simulating subchannel of plate-type-fuel for JRTR(Jordan Research and Training Reactor). The experiments covers the license requirement of the research reactor. Two test sections used in this study simulate full scale subchannels for fission moly uranium target and plate-type-fuel, respectively. From the experimental results, the parameters affecting on the CHF are investigated. By using experimental data, the existing CHF prediction models were evaluated. Finally, the applicability of correlations were analysed to predict CHF in the narrow rectangular channel under the downward flow condition.

• Korean Journal of Clinical Laboratory Science
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• v.37 no.2
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• pp.88-95
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• 2005

Even though the echocardiograph has been recognized as the method of choice among various diagnostic tools to detect congestive heart failure (CHF), there were some limitations in relation to the consumption of time, labor and process. We analyzed results of N-terminal probrain-type natriuretic peptide (NT-proBNP) and various parameters of the echocardiographic findings to clarify the diagnostic usefulness of NT-proBNP in detecting patients with CHF. We analyzed the sera from total of 242 cases from in-patients and out-patients, which were requested from the cardiovascular section of department of Internal Medicine at Chungnam National University Hospital from March 2003 to May 2004. The procedures were performed in order as shown below; sampling, NT-proBNP analysis, data acquisition and data analysis. All data including personal information and echocardiographic findings ware acquired by medical record review. When classifying the study population into six groups according to the degree of left ventricular ejection fraction (LVEF), the serum level of NT-proBNP was higher in the group with 51-60% of LVEF (P=0.023). There were low correlation between the serum level of NT-proBNP and various parameters of the echocardiographic findings with LVESD (r=0.1513), LVEDD (r=0.0831), LVEF (r=0.2035), IVST (r=0.03) and LVPWT (r=0.0728), respectively. When comparing NT-proBNP with atrial and/or ventricular enlargement, the patient group with both left atrial and left ventricular enlargement (p=0.186) or only left atrial (p=0.105) or only left ventricular enlargement (p=0.256) showed higher level of NT-proBNP without statistical significance than patient group with no enlargement. Searching the optimal cutoff of the serum level of NT-proBNP, the sensitivity (98.9%) and the specificity (100%) was highest at the cutoff of 300 pg/mL than any other cutoffs. These findings suggested that the analysis of NT-proBNP in serum might detect the patients with CHF earlier than with the echocardiograph, especially in patients with asymptomatic or mild symptomatic CHF. In conclusion, NT-proBNP test was proved to be clinically useful to diagnose CHF patients.

• Clean Technology
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• v.7 no.3
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• pp.203-214
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• 2001

A silicon oxide cleaning characteristic and its mechanism were studied in RF plasma cleaning system with various gases such as $CHF_3$, $CF_4$, Argon, oxygen and mixing gas. The experimental parameters - working pressure (100 mTorr), RF power (300 W, 500 W), electrode distance (5cm, 8cm, 11.5cm), cleaning time (90, 180 seconds), gas flow (50 sccm) were fixed to compare cleaning efficiency by gas types. The results were as follows. First, the argon plasma is retaining only physical sputtering effect and etch rate was low. Second, the oxygen plasma showed good cleaning efficiency in electrode distace of 5cm, 300W, 180secs, but surface roughness increased. Third, $CF_4$ Plasma could get the best cleaning efficiency. Fourth, $CHF_3$ plasma could know that addition gas that can lower the CFx/F ratio need. We could not get good cleaning efficiency in case of added argon to $CHF_3$. But, we could get good cleaning efficiency in case added oxygen.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.40 no.10
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• pp.653-658
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• 2016

A study on the measurement of critical heat flux using the transient inverse heat conduction method in spray cooling was performed. The inverse heat conduction method estimates the surface heat flux or temperature using a measured interior temperature history. The effects of the measuring time interval and location of temperature measurement on the measurement of critical heat flux were primarily investigated. The following results were obtained. The estimated critical heat flux decreased as the time interval of temperature measurement increased. Meanwhile, the effect of measurement location on critical heat flux was not significant. It was also found, from the experimental results, that the critical superheat increased as the measurement location of thermocouple neared the heat transfer surface.

• Korean Journal of Air-Conditioning and Refrigeration Engineering
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• v.28 no.3
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• pp.95-102
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• 2016

A boiling heat transfer is used in various industry such as power generation systems, heat exchangers, air-conditioning and refrigerations. In the boiling heat transfer system, the critical heat flux (CHF) is the important factor, and it indicated safety of the system. It has kept up studies on the CHF enhancement. Recently, it is reported the CHF enhancement, when working fluid used the nanofluid with high thermal properties. But it could be occurred nanoflouling phenomenon from nanoparticle deposition, when nanofluid applied the heat transfer system. And, it is reported that the safety and thermal efficiency of heat transfer system could decrease. Therefore, it is compared and analyzed to the CHF and the boiling heat transfer coefficient on effect of artificial nanofouling (coating) in oxidized multi-wall carbon nanotube nanofluids. As the result, the CHF of oxidized multi-wall carbon nanofluids and the CHF of artificial nanofouling in the nanofluids increased to maximum 99.2%, 120.88%, respectively. A boiling heat transfer coefficient in nanofluid increased to maximum 24.29% higher than purewater, but artificial nanofouling decreased to maximum -7.96%.