• 한국정밀공학회지
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• 제33권6호
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• pp.459-467
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• 2016

Using a line scan camera and a Galvano mirror, we constructed a high-speed line-scanning microscope that can generate 2D images ($8000{\times}8000pixels$) without any moving parts. The line scanner consists of a Galvano mirror and a cylindrical lens, which creates a line focus that sweeps over the sample. The measured resolutions in the x (perpendicular to line focus) and y (parallel to line focus) directions are both $2{\mu}m$, with a 2X scan lens and a 3X relay lens. This optical system is useful for measuring defects, such as spalling, chipping, delamination, etc., on the surface of carbon fiber reinforced plastic (CFRP) holes after machining in conjunction with adjustments in the angle of LED lighting. Defects on the inner wall of holes are measured by line confocal laser scanning. This confocal method will be useful for analyzing defects after CFRP machining and for fast 3D image reconstruction.