• Proceedings of the Korean Society of Propulsion Engineers Conference
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• 2007.11a
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• pp.285-288
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• 2007

Numerical study of the influence of the boundary layer of micro-supersonic jet impinging on a flat plate with a hole was performed, to investigate the role of gas jet to eject melted materials from the cut zone in the laser machining. The detailed shock structures and the information of the mass flow rate through the hole were compared to the results of the previous study, in which the effects of boundary layer inside nozzle was not accounted. It was found that the boundary layer inside the micro- nozzle introduced stronger Mach disc over the machining zone, and thus that the mass flow rate through the hole decreased.

• Korean Journal of Air-Conditioning and Refrigeration Engineering
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• v.15 no.4
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• pp.318-328
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• 2003

Numerical simulation using computational fluid dynamics (CFD) is performed to calculate the velocities and temperature profiles of air in adjacent to a worker within the individual local air conditioning system. The calculation domain is the space of ㄴ between walls and a worker in the climate room. The fresh air is supplied from the three different inlets located on the right, left and center wall in the climate room. In this study, the calculated data of velocities and temperature profiles of air in the nearest the skin of a worker are used to calculate the PMV (Predicted Mean Vote) for evaluation of thermal comfort of a worker in the local air conditioning system. Because the data of veto-cities temperature profiles of air in adjacent to a worker and the PMV of a worker are the design parameters of the local air conditioning system. The results of calculation show that the fresh air velocity and injection position are closely related to the PMV value. In individual air condition system of ㄴ, the appropriate PMV are obtained when the fresh air velocity and position are 1.0 m/s, throat of a worker and are 1.5 m/s, head of a worker, respectively. The method of numerical calculation is effective to obtain the optimum velocity and position of the fresh air for optimum the PMV and energy saving in individual local air conditioning system.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.26 no.7
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• pp.976-982
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• 2002

In this study, smoke movement in tunnel fire with natural ventilation shaft has been investigated with various size of fire source. Gasoline pool fire with different size of diameter - 73mm, 100mm, 125mm and 154mm - was used to describe fire source. Experimental data is obtained with 1/20 model tunnel test and its results are compared with numerical results. The computation were carried out using FDS 1.0 which is a field model of fire-driven now. Temperature profiles between measured and predicted data are compared along ceiling and near the ventilation shaft. Both results are in good agreement with each other. In order to evaluating a safe egress time in tunnel fire, horizontal smoke front velocity was measured in model tunnel fire tests and those are compared with numerical results. According to the presence or absence of natural ventilation shaft, ventilation effect are estimated quantitatively. Finally, this paper shows that computational fluid dynamics(CFD) is applicable to predict fire-induced flow in tunnel.

• Proceedings of the Korean Institute of Surface Engineering Conference
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• 2017.05a
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• pp.71-71
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• 2017

플라즈마를 이용하는 건식 식각 또는 박막 증착 장비(PECVD)의 경우 웨이퍼에 rf bias를 인가하여 이온의 에너지와 입사각을 조절한다. 종래에는 웨이퍼의 가장 자리 3 mm영역을 공정 대상에서 제외하는 exclusion area로 지정하였으나 점차 공정 기술의 발달로 2 mm 이내로 감소하고 있다. 따라서 웨이퍼의 가장 자리에서 발생하는 전기장의 방향 및 크기 변화를 조절할 수 있는 기술의 개발이 필요하게 되었으며 그중 핵심적인 부품이 Si 또는 SiC로 제작되는 edge ring이다. Focus ring이라고도 불리는 이 부품은 웨이퍼 상에서 반경 방향으로 흐르는 가스의 유속이 가장 자리에 근접하면 빨라지는 현상과 이에 의해 식각/증착 화학 반응 속도가 증가하는 문제를 완화하기 위한 것과 적절한 전기 전도도를 부여함으로써 가장 자리의 전기장 분포를 최적화 할 수 있는 새로운 설계 변수로 활용할 수 있다. 스퍼터링의 경우에도 웨이퍼 중앙과 주변 부는 마그네트론 음극의 회전 링과의 입체각이 차이가 나므로 가장 자리의 경우 트렌치나 홀의 내측이 외측에 비해서 증착막의 두께가 얇아지는 문제가 있으며 건식 식각의 경우 홀의 형상이 수직에서 벗어나는 경향이 발생할 수 있다. 또한 사용 시간에 비례해서 edge ring의 형상이 변화하는데 상대적으로 고가품이어서 교체 주기를 설정하는 보다 합리적 기준이 필요하다. 본 연구에서는 전산 유체 역학 모델을 사용하는 ESI사의 CFD-ACE+를 활용하여 edge ring의 형상과 재질이 갖는 영향을 전산 모사하기 위한 기초 작업을 그림 1과 같이 진행하였다. 2D-CCP model에 Ar 가스를 가정하고 비유 전율 10내외 전도도 $0.1/Ohm{\cdot}m$정도의 재질에 대한 용량성 결합 플라즈마에 대해서 계산을 하고 이 때 기판에 인가되는 고주파 전력에 의한 이온의 입사 에너지 분포 및 각도 분포를 Monte Carlo 방법으로 처리하여 계산하였다.

• Proceedings of the Korean Vacuum Society Conference
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• 2011.02a
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• pp.291-291
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• 2011

플라즈마에 노출된 재료 표면의 온도 증가는 다음과 같은 요인에 의해서 결정된다. 이온의 충돌에 의한 역학적 에너지, 이온의 중성화, 라디칼의 안정화에 의한 에너지 방출(잠열, latent heat), 플라즈마에서 방출된 빛의 흡수. 이중 식각을 위한 기판 바이어스에 의해서 주로 결정되는 이온 충돌 에너지와 잠열의 방출이 300 mm wafer용 유도 결합 플라즈마 식각 장치에서 소스 전력과 바이어스 전력에 따라서 어떻게 변화하는지 전산 유체 역학 모사 프로그램인 CFD-ACE를 이용하여 상용 식각 장비인 AMAT사의 DPS II를 대상으로 온도 분포의 변화를 계산하였다. 실험 결과와 비교를 위하여 다섯 곳에(상, 하, 좌, 우, 중심) 열전대를 부착한 온도 측정 웨이퍼를 기판의 위치에 설치하고 여러 가지 실험 조건에 대해서 온도의 변화를 측정하였다. Ar 10 mTorr에서 2열 병렬 안테나의 전력을 300 W에서 시간에 따른 온도의 변화를 측정하였다. 이때 wafer의 평균 온도는 $28.9^{\circ}C$에서 $150^{\circ}C$까지 12분 내에 상승하였으며 최고 온도에 도달한 다음에는 거의 일정하게 유지 되었다. Si의 식각에서 온도의 영향을 가장 크게 받는 반응은 F 라디칼에 의한 Si의 직접 식각이며 Arrhenius 식의 형태로 표현하면 0.116*exp (-1250/T)의 형태로 된다. 문헌에 보고된 계수를 이용해서 $29^{\circ}C$의 식각 속도와 플라즈마에 의한 가열 최고 온도인 $150^{\circ}C$ 때의 값을 비교해보면 3.3배의 차이가 난다. 따라서 4%내의 식각 균일도를 목표로 하는 폴리 실리콘 게이트 식각 장비의 설계에서는 플라즈마에 의한 가열 불균일을 상쇄 할 수 있는 히터와 냉각 구조의 최적 설계가 필요하다.

• Journal of the Korean Society for Aeronautical & Space Sciences
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• v.40 no.9
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• pp.781-788
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• 2012

Flow in the oxidizer manifold of a liquid rocket combustor has been analysed using an open source CFD toolbox, OpenFOAM. The applicability of OpenFOAM to the problems with complex geometries involving porous media zones for simulating the pressure drop induced by the injectors has been evaluated by performing turbulent, incompressible steady-state flow analysis. The usefulness and applicable area of the OpenFOAM as a design evaluation and analysis tool will be confirmed and enlarged by further evaluation with various computational cases representing major physical phenomena in rocket combustion devices.

• Journal of the Society of Naval Architects of Korea
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• v.41 no.4
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• pp.1-8
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• 2004

As a computer has been continuously progressed to reduce R&D time and cost, the study of the flow physics has been significantly relied on the numerical method. Recently, Large Eddy Simulation(LES) has been widely used in CFD community to accurately capture the turbulent flows. The LES code requires high accuracy in time, as well as in space. Also, it should have strong robustness to ensure the convergence in various complicated flows. The objective of the present work is to develop a base code for LES simulation, having 2$^{nd}$ order accuracy in time and 4$^{th}$ order accuracy in space. To achieve the present objective, the four-step fractional step method was enhanced by adopting compact Pade'scheme. The standard Smagorinsky model was implemented for the first stage of the present code development. The flows over a cylinder and an airfoil were successfully simulated. and an airfoil were successfully simulated.

• Journal of computational fluids engineering
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• v.14 no.4
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• pp.23-30
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• 2009

The existing code which solves two-dimensional RANS(Reynolds Averaged Navier-Stokes) equations and 2-equation turbulence model equations was modified to enable numerical simulation of various supersonic flows. For this, various boundary conditions have been implemented to the code. Bleed boundary condition was incorporated into the code for calculating wall mean flow quantities. Furthermore, boundary conditions for the turbulence quantities along rough surfaces as well as porous walls were applied to the code. The code was verified and validated by comparing the computational results against the experimental data for the supersonic flows over bleed region on a flat plate. Furthermore, numerical simulations for supersonic shock boundary layer interaction with a bleed region were performed and their results were compared with the existing computational results.

• Journal of the Korean Society of Propulsion Engineers
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• v.13 no.6
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• pp.48-55
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• 2009

The purpose of using Gas Generator Oxidizer On/Off Valve(GOV) is to control opening and closing of oxidizer mass flow. This paper describes analytical results of flow and structural properties for four different GOV models, using commercial software such as Fluent(Ver. 6.3.26) and NASTRAN(2005 r.2), PATRAN(2005 r.2). Analytical results show that GOVs could generate 2.3~3.8 kg/s of oxidizer mass flow rate and come up with 1.09~1.42 of safety factor.

• Journal of Aerospace System Engineering
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• v.12 no.2
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• pp.15-22
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• 2018

A compressible multiphase flow was investigated using a DIM consisting of seven equations, including the fifth-order MLP and a modified HLLC Riemann solver to achieve a precise interface structure of liquid and gas. The numerical methods were verified by comparing the flow structures of the high-pressure water and low-pressure air in the shock tube. A 2D air-helium shock-bubble interaction at the incident shock wave condition (Mach number 1.22) was numerically solved and verified using the experimental results.