• Title/Summary/Keyword: C-V characteristic

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Fabriaction of bump bounded piezoresistive silicon accelerometer (범프 본딩된 압저항 실리콘 가속도센서의 제조)

  • 심준환;이상호;이종현
    • Journal of the Korean Institute of Telematics and Electronics D
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    • v.34D no.7
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    • pp.30-36
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    • 1997
  • Bump bonded piezoesistive silicon accelerometer was fabricated by the porous silicon micromachining and th eprocess technique of integrated circuit. The output voltage of the accelerometer fabricated on (111)-oreiented Si substrates with n/n$^{+}$n triple layers showed good linear characteristic of less than 1%. The measured sensitivity and the resonant frequency was about 743 .mu.V/g and 2.04 kHz, respectively. And the transverse sensitivity of 5.2% was measured from the accelerometer. Also, to investigate an influence on the output characteristics of the sensor due to bump bonding, the values of the piezoresistors were measured through thermal-cycling test in the temperature variation form -50 to 120.deg. C. Then, there was 0.014% resistance changes about 3.61 k.ohm., so sthe output charcteristics of the sensor was less affected by bump bonding.g.

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Improvement of Device Characteristic on Solution-Processed InGaZnO Thin-Film-Transistor (TFTs) using Microwave Irradiation

  • Moon, Sung-Wan;Cho, Won-Ju
    • JSTS:Journal of Semiconductor Technology and Science
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    • v.15 no.2
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    • pp.249-254
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    • 2015
  • Solution-derived amorphous indium-gallium-zinc oxide (a-IGZO) thin-film-transistor (TFTs) were developed using a microwave irradiation treatment at low process temperature below $300^{\circ}C$. Compared to conventional furnace-annealing, the a-IGZO TFTs annealed by microwave irradiation exhibited better electrical characteristics in terms of field effect mobility, SS, and on/off current ratio, although the annealing temperature of microwave irradiation is much lower than that of furnace annealing. The microwave irradiated TFTs showed a smaller $V_{th}$ shift under the positive gate bias stress (PGBS) and negative gate bias stress (NGBS) tests owing to a lower ratio of oxygen vacancies, surface absorbed oxygen molecules, and reduced interface trapping in a-IGZO. Therefore, microwave irradiation is very promising to low-temperature process.

multi-stack gate dielectric 구조를 통한 LTPS TFT 특성

  • Baek, Gyeong-Hyeon;Jeong, Seong-Uk;Jang, Gyeong-Su;Park, Hyeong-Sik;Lee, Won-Baek;Yu, Gyeong-Yeol;Lee, Jun-Sin
    • Proceedings of the Korean Vacuum Society Conference
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    • 2010.08a
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    • pp.200-200
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    • 2010
  • 이 논문에서는 field-effect mobility를 향상시키기 위해 triple-layer (SiNx/SiO2/SiOxNy stack 구조)를 gate dielectric material 로 LTPS TFTs에 적용하였다. 이는 플라즈마 처리 기법과 적층구조의 효과적인 in-situ 공정을 이용하여 interface trap과 mobile charge를 낮추어 높은 이동도의 결과를 생각하고 실험하였다. 실험은 SiO2 gatedielectric과 triple-gate dielectric의 C-V curve를 1 MHz의 주파수에서 측정하였다. 또한 Transfer characteristics를 single SiO2 gatedielectric과 triple-gate dielectric of SiNx/SiO2/SiOxNy를 STA 장비를 이용해 측정하였다. 위의 측정을 통해 threshold voltage, mobility, subtheshold swing, driving current, ON/OFF current ratio를 비교 분석하였다.

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The Pharmacognostical Studies of Angelica Plants in Korea (II) A Classification Method of the Roots of some Anegelica Genus Plants by Thin Layer Chromatography (한국산 anglica 속식물의 생약학적연구 (II) 수종 Angelica 속식물근의 Thin Layer Chromatography를 이용한 감별법에 대하여)

  • 정보섭;지형준
    • YAKHAK HOEJI
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    • v.11 no.3_4
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    • pp.33-35
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    • 1967
  • The internal structures of "Chunho", "Kangwhal" and "Dangui" and their original plants had been compared with each other in the prior report. Coumarin derivatives, khellactone from the roots of Angelica purpuraefolia $C_{HUNG}$ and decursin and decursinol from A. gigas $N_{AKAI}$ were also isolated. In this report, we made a simple and convenient identification method for the powdered drugs of several Angelica genus by using a thin layer chromatogrophic technique. The ehter extract of the powdered drugs were applied to a silica gel plate, and was developed with n-hexane and ethyl acetate (1:1) mixture. The characteristic U.V. absorption patterns of each drug were shown.

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Space Charge Effects at Doped Ⅲ-Ⅴ Compound Semiconductor Interfaces (Doping된 Ⅲ-Ⅴ族 化合物 半導體 界面에서 空間電荷效果)

  • Chun, Jang-Ho
    • Journal of the Korean Institute of Telematics and Electronics
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    • v.27 no.2
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    • pp.93-97
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    • 1990
  • Interfacil charge approximations and structures at doped semiconductor interfaces were proposed. Rectifying phenomena at the III-V compound semiconductor (p-GaP, p-InP, n-GaAs)/$CsNO_3$ aqueous electrolyte interfaces were qualitatively analyzed in terms of their cyclic current-voltage characteristics. The current-voltage characteristic curves, the ion adsorption and potential barrier processes at the semiconductor interfaces were verified using continuous cyclic voltammetric methods. The pn or np junction structures and the related rectifying types at the doped semi-condudtor-electrolyte inferfaces are determined by the space charges.

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A Study on the Electrical Conduction of Plasma-Co-Polymerized Organic Thin Film (플라즈마 공중합 유기 박막의 전기 전도에 관한 연구)

  • 육재호;박재윤;이덕출;박상현
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 1988.10a
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    • pp.108-111
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    • 1988
  • In this study, the electrical conduction properties of plasma-polymerized (MMA+Styrene) thin film have been investigated. The measurements of transient conduction currents were carried out in the temperature of 50 to 150$^{\circ}C$ at electric field of 10$^4$to 10$\^$6/V/cm. The electric field-current density characteristic curves were divided into three regions-ohmic region, child region, sudden-increasing region. It is shown that the conduction mechanism of this thin film is in good agreement with SCLC(space charge limited current) model by applying the high field conduction theories.

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Simulation of Fault-Arc using EMTP (EMTP를 이용한 아크 사고의 모의)

  • Byun, S.H.;Choi, H.S.;Chae, J.B.;Kim, C.H.;Han, K.N.;Kim, I.D.;Kim, Y.H.
    • Proceedings of the KIEE Conference
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    • 1996.07b
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    • pp.850-852
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    • 1996
  • High impedance fault (HIF) is defined as fault that general overcurrent relay can't detect or interrupt, Especially when HIF occur under 15 kV, energized high voltage conductor results in fire hazard, equipment damage or personal threat. Because most HIF occur arc, HIF detection using arc is to increase. Numerical arc model can be applied in an electromagnetic transients program (EMTP) to reproduce the dynamic and random characteristic of arcs for any insulator arrangement, current and system voltage. It allows the representation of any network configuration to be investigated, so the digital simulation of arc faults through air can be substitute for demanding power arc test.

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Development of a Contact Type Temperature Sensor Using Single Crystal Silicon Thermopile (단결정 실리콘 써모파일을 이용한 접촉형 온도센서 개발)

  • Lee, Young-Tae;Lee, You-Na;Lee, Wang-Hoon
    • Journal of Sensor Science and Technology
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    • v.22 no.5
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    • pp.369-373
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    • 2013
  • In this paper, we developed contact type temperature sensor with single crystal silicon strip thermopile. This sensor consists of 15 p-type single crystal silicon strips, 17 n-types and contact electrodes on silicon dioxide silicon membrane. The result of electromotive force measuring showed very good characteristic as $15.18mV/^{\circ}C$ when temperature difference between the two ends of the thermopile occurs by applying thermal contact on the thermopile which was fabricated with silicon strip of $200{\mu}m$ length, $20{\mu}m$ width, $1{\mu}m$ thickness.

Thickness dependence of the piezoelectric characteristic for PZT films using by rf magnetron sputtering (RF 마그네트론 스퍼터링으로 증착한 두께에 따른 PZT 박막의 강유전 특성에 관한 연구)

  • Lee, Tae-Yong;Park, Young;Song, Joon-Tae
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2003.11a
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    • pp.313-316
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    • 2003
  • The lead zirconate titanate, $Pb(Zr_{0:52}Ti_{0:48})O_3$, films of $0.5\;{\mu}m,\;1\;{\mu}m$ and $2\;{\mu}m$ thickness were fabricated on $Pt/Ti/SiO_2/Si$ substrate by the rf magnetron sputtering method. The PZT films were annealed using by a rapid thermal annealing (RTA) method. The thickness dependence of the film structure, dielectric properties, Polarization-electric field hysteresis loops and capacitance-voltage characteristics were investigated over the thickness range of $0.5\;{\mu}m,\;1\;{\mu}m$ and $2\;{\mu}m$. According to the XRD patterns of the films, (110) peak intensity increases with film thickness increased. The increase of PZT films thickness leads to the decrease of the remanent polarization and the dielectric constant.

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Analysis of Ginsenosides by Thermospray LC/MS (열분무 LC/MS에 의한 인삼사포닌의 분석)

  • Park, Man-Ki;Park, Jeong-Hill;Hwang, Gwi-Seo;Lee, Mi-Young;Park, In-Jeong
    • Journal of Ginseng Research
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    • v.19 no.2
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    • pp.134-137
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    • 1995
  • Ginseng saponins were analyzed by thermospray (TSP) LCMS method using ODS column and with acetonitrile/ammonium acetate solution. Optimal condition for TSP Lchfs was found as follows: capillary temperature: 33$0^{\circ}C$ repelled voltage: 200 V, and concentration of ammonium acetate: 0. 05 M. Panaxadiol and panaxatriol type saponins showed characteristic fragment ions. The calibration curve of ginseng saponin showed good linearity with a correlation coefficient of 0.99. Detection limits using selected ion monitoring (SIM) technique were improved by 10~200 times compared to conventional HPLCnnr detection method.

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