• 제목/요약/키워드: C-축배 향

검색결과 3건 처리시간 0.017초

FIS에 의한 Co-Cr-Ta 기록층의 제작 (Preparation of Co-Cr-Ta recording layers by FTS)

  • 공석현;손인환;박창옥;김재환;김경환
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 1999년도 춘계학술대회 논문집
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    • pp.578-581
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    • 1999
  • The Co-Cr-Ta films are one of the most suitable candidates for perpendicular magnetic recording media. The facing targets sputtering(FTS) system has a advantage of preparing films over a wide range of working gas pressure on plasma-free substrates. In this study, we investigated the effect underlayers on the growths layers of Co-Cr-Ta recording layers. The Co-Cr-Ta/Ti(CoCr) double layers were deposited with sputter gas pressure$(P_N, 0.3-1mTorr)$ by using FTS apparatus at temperature of$40^{\circ}C~-300^{\circ}C$, respectively. Crystallographic and magnetic characteristics were evaluated by x-ray diffractometry(XRD) and vibrating sample magnetometer(VSM), respectively.

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대향타겟스퍼터링에 의한 Co-Cr 박막의 제작 (Preparation of Co-Cr Thin Films by Facing Targets Sputtering)

  • 김경환;금민종;공석현;손인환;최성민
    • 한국전기전자재료학회논문지
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    • 제11권5호
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    • pp.418-422
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    • 1998
  • The Co-Cr films are one of the most suitable candidates for perpendicular magnetic recording media. The facing targets sputtering(FTS) system has a advantage of preparing films over a wide range of working gas pressure on plasma-free substrate. In this study, we investigated the possibility of employing FTS system for depositing Co-Cr films. The Co-Cr thin films were deposited with various sputter gas pressure($P_Ar$, 0.1~10mTorr) by using FTS apparatus at temperature of $40^{\circ}C and 220^{\circ}C$, respectively. Crystallographic and magnetic characteristics were evaluated by x-ray diffractometry (XRD) and vibrating sample magnetometer(VSM), respectively. Under argon gas pressure at 0.1mTorr, films with morphologically dense microstructure, good c-axis orientation and higher coercivity were obtained. It has been confirmed that the FTS system is very useful for preparing Co-Cr thin film recording media.

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$YBa_2CU_3O_{7-\delta}$ coated Conductor 완충층으로의 응용을 위한 $SrTiO_3 $ 박막의 성장 조건 (Growth Conditions of $SrTiO_3 $ Film on Textured Metal Substrate for $YBa_2CU_3O_{7-\delta}$ Coated Conductor)

  • 정준기;고락길;송규정;박찬;김철진
    • 한국결정학회지
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    • 제14권2호
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    • pp.51-55
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    • 2003
  • YBa₂CU₃O/sub 7-8/(YBCO) coated conductor의 완충층 구조를 개선하기 위하여 2축배향된 Ni-3 wt%W 합금 기판위에 단일 완충층으로 SrTiO₃(STO) 박막을 증착하였다. YBCO와 STO 박막은 펄스레이저 증착법으로 성장시켰다. STO 박막의 표면은 증착온도에 따라 다른 미세조직을 보여 주었고, XRD 분석에서는 STO와 YBCO 박막이 금속기판의 배향성을 가지면서 성장되었음을 알 수 있었다. 액체질소 온도에서 1.2 MA/㎠의 임계전류밀도와 86 K의 임계온도를 가지는 짧은 길이의 coated conductor를 STO 단일완충층을 이용하여 제조하였다.