• 제목/요약/키워드: C/C-SiC-Cu

검색결과 540건 처리시간 0.027초

Copper Interconnection and Flip Chip Packaging Laboratory Activity for Microelectronics Manufacturing Engineers

  • Moon, Dae-Ho;Ha, Tae-Min;Kim, Boom-Soo;Han, Seung-Soo;Hong, Sang-Jeen
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2012년도 제42회 동계 정기 학술대회 초록집
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    • pp.431-432
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    • 2012
  • In the era of 20 nm scaled semiconductor volume manufacturing, Microelectronics Manufacturing Engineering Education is presented in this paper. The purpose of microelectronic engineering education is to educate engineers to work in the semiconductor industry; it is therefore should be considered even before than technology development. Three Microelectronics Manufacturing Engineering related courses are introduced, and how undergraduate students acquired hands-on experience on Microelectronics fabrication and manufacturing. Conventionally employed wire bonding was recognized as not only an additional parasitic source in high-frequency mobile applications due to the increased inductance caused from the wiring loop, but also a huddle for minimizing IC packaging footprint. To alleviate the concerns, chip bumping technologies such as flip chip bumping and pillar bumping have been suggested as promising chip assembly methods to provide high-density interconnects and lower signal propagation delay [1,2]. Aluminum as metal interconnecting material over the decades in integrated circuits (ICs) manufacturing has been rapidly replaced with copper in majority IC products. A single copper metal layer with various test patterns of lines and vias and $400{\mu}m$ by $400{\mu}m$ interconnected pads are formed. Mask M1 allows metal interconnection patterns on 4" wafers with AZ1512 positive tone photoresist, and Cu/TiN/Ti layers are wet etched in two steps. We employed WPR, a thick patternable negative photoresist, manufactured by JSR Corp., which is specifically developed as dielectric material for multi- chip packaging (MCP) and package-on-package (PoP). Spin-coating at 1,000 rpm, i-line UV exposure, and 1 hour curing at $110^{\circ}C$ allows about $25{\mu}m$ thick passivation layer before performing wafer level soldering. Conventional Si3N4 passivation between Cu and WPR layer using plasma CVD can be an optional. To practice the board level flip chip assembly, individual students draw their own fan-outs of 40 rectangle pads using Eagle CAD, a free PCB artwork EDA. Individuals then transfer the test circuitry on a blank CCFL board followed by Cu etching and solder mask processes. Negative dry film resist (DFR), Accimage$^{(R)}$, manufactured by Kolon Industries, Inc., was used for solder resist for ball grid array (BGA). We demonstrated how Microelectronics Manufacturing Engineering education has been performed by presenting brief intermediate by-product from undergraduate and graduate students. Microelectronics Manufacturing Engineering, once again, is to educating engineers to actively work in the area of semiconductor manufacturing. Through one semester senior level hands-on laboratory course, participating students will have clearer understanding on microelectronics manufacturing and realized the importance of manufacturing yield in practice.

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PMF 모델을 이용한 대기 중 PM-10 오염원의 확인 (Source Identification of Ambient PM-10 Using the PMF Model)

  • 황인조;김동술
    • 한국대기환경학회지
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    • 제19권6호
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    • pp.701-717
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    • 2003
  • The objective of this study was to extensively estimate the air quality trends of the study area by surveying con-centration trends in months or seasons, after analyzing the mass concentration of PM-10 samples and the inorganic lements, ion, and total carbon in PM-10. Also, the study introduced to apply the PMF (Positive Matrix Factoriza-tion) model that is useful when absence of the source profile. Thus the model was thought to be suitable in Korea that often has few information about pollution sources. After obtaining results from the PMF modeling, the existing sources at the study area were qualitatively identified The PM-10 particles collected on quartz fiber filters by a PM-10 high-vol air sampler for 3 years (Mar. 1999∼Dec.2001) in Kyung Hee University. The 25 chemical species (Al, Mn, Ti, V, Cr, Fe, Ni, Cu, Zn, As, Se, Cd, Ba, Ce, Pb, Si, N $a^{#}$, N $H_4$$^{+}$, $K^{+}$, $Mg^{2+}$, $Ca^{2+}$, C $l^{[-10]}$ , N $O_3$$^{[-10]}$ , S $O_4$$^{2-}$, TC) were analyzed by ICP-AES, IC, and EA after executing proper pre - treatments of each sample filter. The PMF model was intensively applied to estimate the quantitative contribution of air pollution sources based on the chemical information (128 samples and 25 chemical species). Through a case study of the PMF modeling for the PM-10 aerosols. the total of 11 factors were determined. The multiple linear regression analysis between the observed PM-10 mass concentration and the estimated G matrix had been performed following the FPEAK test. Finally the regression analysis provided source profiles (scaled F matrix). So, 11 sources were qualitatively identified, such as secondary aerosol related source, soil related source, waste incineration source, field burning source, fossil fuel combustion source, industry related source, motor vehicle source, oil/coal combustion source, non-ferrous metal source, and aged sea- salt source, respectively.ively.y.

추출조건(抽出條件)이 홍삼(紅蔘)엑기스의 무기성분(無機成分) 조성(組成)에 미치는 영향 (Effect of Extracting Conditions on the Mineral Content of Korean Red Ginseng Extract)

  • 성현순;조시형;박명한;양차범
    • 한국식품영양과학회지
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    • 제14권4호
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    • pp.387-390
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    • 1985
  • 홍미삼엑기스를 제조할 때 추출용매와 그 농도 및 추출온도와 추출시간 등의 추출조건이 홍삼엑기스의 조회분 함량과 무기성분의 조성에 미치는 영향을 조사한 결과 무기성분의 용출량과 이행율은 추출용매에탄올의 농도가 증가 될수록 낮아 졌으며 특히 70% 이상 농도에서 현저하였다. 물 추출구(區)의 경우 용출량은 K의 1.55%로 가장 높았고 Cu가 11ppm으로 가장 낮았으며 원료함량대비로는 Ca의 91.41% 용출이행으로 가장 높았고 Mg이 30.14%로 가장 낮았다. 추출온도 상승에 따라서는 큰 차이가 없었으나 소량씩 증가되는 경향이었고 초기용출이행이 커 $1{\sim}3$회 추출에 80%이상이 용출되었다. 조회분의 경우도 같은 경향이었고 몰 추출구(區)의 경우 3회 추출에 92.38%이상의 용출되어 70% 에탄올추출구(區)에 비하여 훨씬 높았다.

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은 도핑 효과를 이용한 그래핀 투명 전도성 필름의 전기적 특성 향상

  • 정상희;이수일;김유석;송우석;김성환;차명준;박상은;민경임;박종윤
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2012년도 제42회 동계 정기 학술대회 초록집
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    • pp.566-566
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    • 2012
  • 그래핀(Graphene)은 모든 탄소 동소체의 기본구성 요소로 2 차원 결정구조를 가지며, 양자홀 효과(quantum Hall effect), 뛰어난 열 전도도, 고 탄성, 광학적 투과성 등과 같은 탁월한 물리적 성질을 보이는 물질이다. 이러한 그래핀의 우수한 특성은 전계 효과 트랜지스터(field effect transistor), 화학/바이오 센서, 투명 전극(transparent electrode) 등의 다양한 전자소자를 개발하는 응용 가능하다. 그 중, 그래핀 투명전극의 제조는 가장 응용가능성이 높은 분야이다. 현재 투명전극 물질로는 인듐-주석 산화물(indium tin oxide; ITO)가 널리 이용되고 있으나, 인듐의 고갈로 인한 공급부족 문제 및 고 생산비용, 휘어지지 않는 취성 등의 단점을 지니고 있다. 따라서, 우수한 광학적 투과성과 전기전도성을 지닌 그래핀이 ITO의 대체 물질로서 각광받고 있다.[1-5] 본 연구에서는 그래핀의 투명전도필름의 응용을 위해 면저항을 낮추기 위한 방법으로 화학적 도핑(doping)을 이용하였다. 그래핀은 구리(copper; Cu) 호일을 촉매로 사용하여 열 화학증착법(Thermal Chemical Vapor Deposition)을 이용하여 합성하였다. 합성된 그래핀은 PMMA(Poly(methyl methacrylate)) 전사법을 이용하여 산화실리콘(SiO2) 기판에 전사 후, 염화은(AgCl)과 클로로벤젠(C6H5Cl)으로 만든 콜로이드(colloid) 용액에 디핑(dipping)하여 그래핀에 은 입자를 도핑 하였다. 그 결과, 은 입자 도핑 농도에 따라 면저항이 감소하는 양상을 보였다. 제작된 그래핀 투명전도성 필름의 투과도는 자외선-가시광선-근적외선 분광법(UV-Vis-NIR spectroscopy)를 이용하여 측정하였고, 라만 분광법(Raman spectroscopy)을 통해 그래핀 필름의 질적 우수성과 성장 균일도를 조사하였다.

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Fe계 연자성 합금 분말의 고온 압연시 자성특성에 미치는 압연인자들의 영향 (Effect of rolling parameters on soft-magnetic properties during hot rolling of Fe-based soft magnetic alloy powders)

  • 김휘준;이주호;이성호;박은수;허무영;배정찬
    • 한국소성가공학회:학술대회논문집
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    • 한국소성가공학회 2009년도 춘계학술대회 논문집
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    • pp.266-269
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    • 2009
  • Iron-based soft magnetic materials are widely used as cores, such as transformer transformers, motors, and generators. Reducing losses generated from soft magnetic materials of these applications results in improving energy conversion efficiency. Recently, the new P/M soft magnetic material realized an energy loss of 68 W/kg with a drive magnetic flux of 1 T, at a frequency of 1 kHz, rivaling general-purpose electromagnetic steel sheet in the low frequency range of 200 Hz to 1 kHz. In this research, the effect of rolling parameters on soft magnetic properties of Fe-based powder cores was investigated. The Fe-based soft magnetic plates were produced by the hot powder rolling process after both pure Fe and Fe-4%Si powders were canned, evacuated, and sealed in Cu can. The soft magnetic properties such as energy loss and coercive power were measured by B-H curve analyzer. The soft magnetic properties of rolled sheets were measured under conditions of a magnetic flux density of 1 T at a frequency of 200 kHz. It was found that rolling reduction ratio is the most effective parameter on reducing both energy loss and coercivity because of increasing aspect ratio with reduction ratio. By increasing aspect ratio from 1 to 9 through hot rolling of pure Fe powder, a significant loss reduction of one-third that of SPS sample was achieved.

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Elemental characteristics of sialoliths extracted from a patient with recurrent sialolithiasis

  • Buyanbileg Sodnom-Ish;Mi Young Eo;Kezia Rachellea Mustakim;Yun Ju Cho;Soung Min Kim
    • Journal of the Korean Association of Oral and Maxillofacial Surgeons
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    • 제50권2호
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    • pp.94-102
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    • 2024
  • The exact mechanism of sialolith formation has yet to be determined. Recurrence of sialolithiasis is rare, affecting only 1%-10% of patients. The current study presents a case of recurrent stones that occurred twice on the right submandibular gland 6 months postoperative and 7 months after reoperation in a 48-year-old female patient. The stones were analyzed using histology, scanning electron microscopy, energy dispersive spectroscopy, and transmission electron microscopy (TEM). The first stone showed a three-layered structure with a poorly mineralized peripheral multilayered zone, highly mineralized middle layer, and the central nidus. The stones were composed of Ca, C, O, Cu, F, N, P, Si, Zn, and Zr. In TEM, compact bi-layered bacterial cell membrane was found on the peripheral layer and the central nidus of the stone as well as exosomes in the central nidus. The results demonstrated the essential components of sialolith formation, including bacteria, inflammatory exosomes, and exfoliated salivary epithelial cells that cooperatively underwent the pathogenetic progresses of central nidus formation, induction of compact zone calcification of the middle layer, and repeated subsequent deposition in the peripheral multilayer zone. The rapid recurrence could have resulted from residual pieces of a sialolith acting as the nidus of bacterial infection.

고고자료(考古資料)의 자연과학(自然科學) 응용(應用)(II) - 익산(益山) 미륵사지(彌勒寺址) 납유리(琉璃)의 제조(製造) 및 유통(流通) - (Application of Science for Interpreting Archaeological Materials(II) - Production and Flow of Lead Glass from Mireuksa Temple -)

  • 강형태;김성배;허우영;김규호
    • 헤리티지:역사와 과학
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    • 제36권
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    • pp.241-266
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    • 2003
  • Glass pieces excavated from Mireuksa Temple dated $7^{th}$ century A.D. were characterized by chemical composition, specific gravity and melting point. Lead isotope ratios of lead glasses were also compared with those of lead ore to attribute which lead ore was delivered for making lead glass. It was known that some lead glasses found in Japan were similar with those of Mireuksa Temple as comparing the data of chemical composition and lead isotope ratios. Characteristics of lead glass from Mireuksa Temple Thirty five glass pieces of Mireuksa Temple were analyzed for five oxides and found that all was lead glass system(PbO-$SiO_2$) with the range of 70~79% for PbO and 20~28% for $SiO_2$. The concentrations of oxides such as $Al_2O_3$, $Fe_2O_3$ and CuO were below 0.4%, 0.3% and 0.9%, respectively. Principal component analysis(PCA) as a statistical method was carried out to classify glasses with the similarities of chemical concentrations. The result of PCA has shown that three groups of glasses were created according to the excavation positions and two major oxides(PbO and $SiO_2$) greatly contributed to the dispersion of glasses on principal component 1(PC1) axis and trace element oxides($Al_2O_3$ and $Fe_2O_3$) for PC2 axis. Most of lead glasses were greenish by the efficacy of iron and copper oxides and some showed yellowish-green. The gravity of lead glasses was about 4.4~5.4 and estimated melting point was near $670^{\circ}C$. Lead isotope ratios of glasses were analyzed and found quite close to a lead ore from the Bupyeong mine in Gyeonggi-do. Comparison with lead glasses found in Japan Lead glasses of Mireuksa Temple were compared with those of Japan on the basis of chemical and physical data. Chemical compositions of Japanese lead glasses dated $7^{th}{\sim}8^{th}$ century A.D. were nearly similar with those of Mireuksa Temple but lead isotope ratios of those were separated into two groups. Three distribution maps of lead ores of Korea, Japan and China with lead isotope ratios were applied for lead glasses found in Japan. The result have shown that the locations of lead glasses from Fukuoka Prefecture coincided with the region of northen part of Korea and similar with those of Mireuksa Temple and lead glasses from Nara Prefecture dated $8^{th}$ century A.D. were located in the region of Japanese lead ore. This research has demonstrated that lead glasses of Mireuksa Temple conveyed to Miyajidake site, Fukuoka Prefecture around $7^{th}$ century A.D. and glass melting pots and glass beads excavated from Nara Prefecture confirmed the first use of Japanese lead ore for production of lead glasses from the end of $7^{th}$ century A.D.

질소-산소 주개 거대고리 화합물-금속착물의 수용액에서의 안정도상수 (Stability Constants of Nitrogen-Oxygen Donor Macrocyclic Ligand-Metal Ion Complexes in Aqueous Solutions)

  • 김정;윤창주;박휴범;김시중
    • 대한화학회지
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    • 제35권2호
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    • pp.119-127
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    • 1991
  • 고리를 구성하는 원자의 수가 15개에서 18개인 디아자 크라운계의 고대고리 화합물인 1,12-diaza-3, 4 : 9, 10-dibenzo-5, 8-dioxacyclopentadecane(NtnOenH$_4$), 1,13-diaza-3,4 : 10,11-dibenzo-hydroxy-5,9-dioxacyclohexadecane(NtnOtnH$_4$), 1,13-diaza-3,4 : 10,11-dibenzo-15-hydroxy-5,9-dioxacyclohexadecane(Ntn(OH)OtnH$_4$), 1,15-diaza-3,4 : 12,13-dibenzo-5,8,11-trioxacycloheptadecane (NenOdienH$_4$) and 1,15-diaza-3,4 : 12,13-dibenzo-5,8,11-trioxacyclooctadecane(NtnOdienH$_4$)의 양성자화와 금속이온과의 착물 형성을 전위차적정법과 핵자기 공명법으로 연구하였다. 양성자화상수는 크라운 에테르의 염기도를 예측하는데 상용하였다. 본 연구에서 사용한 거대고리 화합물의 염기도 순서는 NenOdienH$_4$ < Ntn(OH)OtnH$_4$ < NtnOenH$_4$ < NtnOtnH$_4$ < NtnOdienH$_4$였다. 염기도의 이와 같은 변화를 거대고리에 대한 치환기와 양성자화가 일어날 때의 고리의 비틀림 정도로 설명하였다. 금속이온과의 착물 형성에 대한 안전도상수는 전이금속이온에 대해서는 Co(II) < Ni(II) < Cu(II) < Zn(II)순이었으며, 중금속이온에 대해서는 Cd(II) < pb(II) < Hg(II)의 순이었다. 금속 착물 형성에 대한 이와 같은 안정도상수의 변화에는 Co(II), Ni(II) 및 Cu(II) 착물의 경우 리간드 고리의 크기가 영향을 미치고 있었으며, Zn(II), Cd(II), pb(II) 및 Hg(II) 착물의 경우에는 리간드의 염기도가 주로 영향을 미치고 있었다. 후전이금속 착물에 대한 $^1$H와 $^{13}$C 핵자기공명 분광법에서는 고리의 질소원자가 산소원자보다 금속이온에 더 큰 친화력을 가짐을 알 수 있었고, 금속이온과 착물을 형성할 때에 고리의 평면성이 상실되고 있음도 밝혀졌다.

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휴대용X선형광분석기를 이용한 통도사 영산전 벽화 안료의 과학적 성분분석 (A Scientific Analysis of Ancient Pigments on Wall Paintings at Yeongsanjeon in Tongdo Temple Using a Field-XRF)

  • 한민수;이한형;김재환
    • 헤리티지:역사와 과학
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    • 제44권3호
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    • pp.132-149
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    • 2011
  • 고대에는 단청이나 고분벽화, 사찰벽화, 불화 등 문화재에 다양한 색상을 구현하고자 무기안료 또는 유기안료를 많이 사용하였다. 이 연구는 통도사 영산전내 벽체에 그려진 사찰벽화의 안료를 휴대용X선형광분석기로 정성분석하여 사용안료의 종류를 밝히고자 하였다. 성분분석 결과와 기존 고대 벽화 안료의 분석 결과들을 종합해 볼 때, 영산전 벽화에 사용된 적색은 주사와 석간주로 추정되며, 백색은 연백이 사용되었고, 일부 호분이나 백악, 백토 등의 사용 가능성도 있다. 녹색은 2가지가 사용되었는데 주로 바탕칠에 사용된 밝은 녹색은 녹토이고, 광배부분 등의 진한녹색은 석록이나 동록, 녹염동광으로 판단된다. 황색과 흑색은 각각 황토와 먹이 사용된 것으로 보이며, 육색과 분홍 등 원색이 아닌 안료들은 적색에 백색안료를 혼합하거나, 진적색에 황색안료를 혼합하는 것과 같이 2가지 이상의 안료를 적절하게 섞어서 사용하였을 것으로 추정된다. 결론적으로 성분분석으로만 판단하였을 때 통도사 영산전에 사용된 안료는 모두 고대에 주로 이용되었던 무기 안료임을 알 수 있었다. 다만, 문화재임으로 안료의 일부를 채취하여 결정구조분석 등의 방법으로 광물을 동정한 것이 아니므로 특정 원료 광물을 명확하게 판단하기는 어려웠다.

덕평지역의 탄질 변성니질암에 관한 환경적 독성원소의 지구화학적 기원, 거동 및 부화 (Geochemical Origin, Behavior and Enrichment of Environmental Toxic Elements in Coaly Metapelite from the Deokpyeong Area, Korea)

  • 이현구;이찬희
    • 자원환경지질
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    • 제30권6호
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    • pp.553-566
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    • 1997
  • Origin, behavior and enrichment of environmental toxic elements from the Deokpyeong area were investigated on the basis of major, trace and rare earth element geochemistry. Coaly metapelites of the Deokpyeong area are subdivided into grey phyllite, dark grey phyllite, coaly slate and black slate, which are interbedded along the Ogcheon Supergroup. The coaly slate had been mined for coal, but mining is closed. The coaly and black slates are lower contents of $SiO_2$ and $Al_2O_3$, and higher contents of LOI, CaO, $Na_2O$ and BaO as compared with the phyllitic rocks. Rare earth elements are highly enriched in the coaly and black slate. Average compositions (ppm) of minor and/or environmental toxic elements in the coaly and black slate are revealed as As=127, Ba=30,163, Cd=18, Cr=740, Cu=84, Mo=378, Pb=43, Sb=12, Se=44, U=144, V=8,147 and Zn=292, which are extremely high concentrations than those in the NASC compositions. Major elements (average enrichment index; 5.34) in the coaly metapelites are mostly depleted, excepting $P_2O_5$ and BaO, normalized by NASC. Rare earth elements (average enrichment index; 1.48) are enriched in the coaly slate. On the basis of NASC, minor and/or environmental toxic elements in the coaly metapelites were strongly enriched of all the elements with the exception of Co, Cs, Ni and Sr. Average enrichment index of trace elements in coaly metapelite is 31.51 (coaly slate; 51.94 and black slate; 15.46). Especially, enrichment index of potentially toxic elements (As, Ba, Cr, Cu, Mo, Ni, Sb, Se, U, V and Zn) of the rock is 46.10 (grey phyllite; 7.15, dark grey phyllite; 4.77, coaly slate; 88.96 and black slate; 22.11). These coal formations were deposited in basin of boundary between terrestrial and marine environments deduced to carbon, sulfur (C/S=2.2 to 275.7), trace and rare earth elements characteristics. Irregular behavior and dispersion between major, minor and rare earth elements of those metapelites indicates a variable source materials, incomplete mixing of differential source and/or reequilibrium of diagenesis and metamorphism.

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