• Title/Summary/Keyword: C/C-SiC-Cu

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Copper Interconnection and Flip Chip Packaging Laboratory Activity for Microelectronics Manufacturing Engineers

  • Moon, Dae-Ho;Ha, Tae-Min;Kim, Boom-Soo;Han, Seung-Soo;Hong, Sang-Jeen
    • Proceedings of the Korean Vacuum Society Conference
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    • 2012.02a
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    • pp.431-432
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    • 2012
  • In the era of 20 nm scaled semiconductor volume manufacturing, Microelectronics Manufacturing Engineering Education is presented in this paper. The purpose of microelectronic engineering education is to educate engineers to work in the semiconductor industry; it is therefore should be considered even before than technology development. Three Microelectronics Manufacturing Engineering related courses are introduced, and how undergraduate students acquired hands-on experience on Microelectronics fabrication and manufacturing. Conventionally employed wire bonding was recognized as not only an additional parasitic source in high-frequency mobile applications due to the increased inductance caused from the wiring loop, but also a huddle for minimizing IC packaging footprint. To alleviate the concerns, chip bumping technologies such as flip chip bumping and pillar bumping have been suggested as promising chip assembly methods to provide high-density interconnects and lower signal propagation delay [1,2]. Aluminum as metal interconnecting material over the decades in integrated circuits (ICs) manufacturing has been rapidly replaced with copper in majority IC products. A single copper metal layer with various test patterns of lines and vias and $400{\mu}m$ by $400{\mu}m$ interconnected pads are formed. Mask M1 allows metal interconnection patterns on 4" wafers with AZ1512 positive tone photoresist, and Cu/TiN/Ti layers are wet etched in two steps. We employed WPR, a thick patternable negative photoresist, manufactured by JSR Corp., which is specifically developed as dielectric material for multi- chip packaging (MCP) and package-on-package (PoP). Spin-coating at 1,000 rpm, i-line UV exposure, and 1 hour curing at $110^{\circ}C$ allows about $25{\mu}m$ thick passivation layer before performing wafer level soldering. Conventional Si3N4 passivation between Cu and WPR layer using plasma CVD can be an optional. To practice the board level flip chip assembly, individual students draw their own fan-outs of 40 rectangle pads using Eagle CAD, a free PCB artwork EDA. Individuals then transfer the test circuitry on a blank CCFL board followed by Cu etching and solder mask processes. Negative dry film resist (DFR), Accimage$^{(R)}$, manufactured by Kolon Industries, Inc., was used for solder resist for ball grid array (BGA). We demonstrated how Microelectronics Manufacturing Engineering education has been performed by presenting brief intermediate by-product from undergraduate and graduate students. Microelectronics Manufacturing Engineering, once again, is to educating engineers to actively work in the area of semiconductor manufacturing. Through one semester senior level hands-on laboratory course, participating students will have clearer understanding on microelectronics manufacturing and realized the importance of manufacturing yield in practice.

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Source Identification of Ambient PM-10 Using the PMF Model (PMF 모델을 이용한 대기 중 PM-10 오염원의 확인)

  • 황인조;김동술
    • Journal of Korean Society for Atmospheric Environment
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    • v.19 no.6
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    • pp.701-717
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    • 2003
  • The objective of this study was to extensively estimate the air quality trends of the study area by surveying con-centration trends in months or seasons, after analyzing the mass concentration of PM-10 samples and the inorganic lements, ion, and total carbon in PM-10. Also, the study introduced to apply the PMF (Positive Matrix Factoriza-tion) model that is useful when absence of the source profile. Thus the model was thought to be suitable in Korea that often has few information about pollution sources. After obtaining results from the PMF modeling, the existing sources at the study area were qualitatively identified The PM-10 particles collected on quartz fiber filters by a PM-10 high-vol air sampler for 3 years (Mar. 1999∼Dec.2001) in Kyung Hee University. The 25 chemical species (Al, Mn, Ti, V, Cr, Fe, Ni, Cu, Zn, As, Se, Cd, Ba, Ce, Pb, Si, N $a^{#}$, N $H_4$$^{+}$, $K^{+}$, $Mg^{2+}$, $Ca^{2+}$, C $l^{[-10]}$ , N $O_3$$^{[-10]}$ , S $O_4$$^{2-}$, TC) were analyzed by ICP-AES, IC, and EA after executing proper pre - treatments of each sample filter. The PMF model was intensively applied to estimate the quantitative contribution of air pollution sources based on the chemical information (128 samples and 25 chemical species). Through a case study of the PMF modeling for the PM-10 aerosols. the total of 11 factors were determined. The multiple linear regression analysis between the observed PM-10 mass concentration and the estimated G matrix had been performed following the FPEAK test. Finally the regression analysis provided source profiles (scaled F matrix). So, 11 sources were qualitatively identified, such as secondary aerosol related source, soil related source, waste incineration source, field burning source, fossil fuel combustion source, industry related source, motor vehicle source, oil/coal combustion source, non-ferrous metal source, and aged sea- salt source, respectively.ively.y.

Effect of Extracting Conditions on the Mineral Content of Korean Red Ginseng Extract (추출조건(抽出條件)이 홍삼(紅蔘)엑기스의 무기성분(無機成分) 조성(組成)에 미치는 영향)

  • Sung, Hyun-Soon;Cho, Si-Houng;Park, Myung-Han;Yang, Cha-Bum
    • Journal of the Korean Society of Food Science and Nutrition
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    • v.14 no.4
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    • pp.387-390
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    • 1985
  • The effect of extracting conditions on the content of inorganic compounds of red ginseng extract was studied with respect to the change in ethanolic concentration ranges of $0{\sim}90%$ and temperature of $70{\sim}100^{\circ}C$ during $1{\sim}5$ times of extraction. Each extraction time was taken 8 hours at given temperature. Little effect of temperature on inorganic compounds was observed, while higher ethanol concentrations, particularly higher than 70%, were resulted a significant decreased in their contents. The yield of inorganic compounds in water was shown 80% over after 3rd extraction, while content of crude ash was observed similar tendency and their contents were significant increased in water than in 70% ethanolic concentration. In the process of extraction with water, 1.55% of the potassium content was the highest value, and the smallest was 11ppm of the copper. But in the extraction ratio to raw mateirls, the highest ratio was 91.4% of the calcium, and smallest was 30.4.% of the magnesium.

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은 도핑 효과를 이용한 그래핀 투명 전도성 필름의 전기적 특성 향상

  • Jeong, Sang-Hui;Lee, Su-Il;Kim, Yu-Seok;Song, U-Seok;Kim, Seong-Hwan;Cha, Myeong-Jun;Park, Sang-Eun;Min, Gyeong-Im;Park, Jong-Yun
    • Proceedings of the Korean Vacuum Society Conference
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    • 2012.02a
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    • pp.566-566
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    • 2012
  • 그래핀(Graphene)은 모든 탄소 동소체의 기본구성 요소로 2 차원 결정구조를 가지며, 양자홀 효과(quantum Hall effect), 뛰어난 열 전도도, 고 탄성, 광학적 투과성 등과 같은 탁월한 물리적 성질을 보이는 물질이다. 이러한 그래핀의 우수한 특성은 전계 효과 트랜지스터(field effect transistor), 화학/바이오 센서, 투명 전극(transparent electrode) 등의 다양한 전자소자를 개발하는 응용 가능하다. 그 중, 그래핀 투명전극의 제조는 가장 응용가능성이 높은 분야이다. 현재 투명전극 물질로는 인듐-주석 산화물(indium tin oxide; ITO)가 널리 이용되고 있으나, 인듐의 고갈로 인한 공급부족 문제 및 고 생산비용, 휘어지지 않는 취성 등의 단점을 지니고 있다. 따라서, 우수한 광학적 투과성과 전기전도성을 지닌 그래핀이 ITO의 대체 물질로서 각광받고 있다.[1-5] 본 연구에서는 그래핀의 투명전도필름의 응용을 위해 면저항을 낮추기 위한 방법으로 화학적 도핑(doping)을 이용하였다. 그래핀은 구리(copper; Cu) 호일을 촉매로 사용하여 열 화학증착법(Thermal Chemical Vapor Deposition)을 이용하여 합성하였다. 합성된 그래핀은 PMMA(Poly(methyl methacrylate)) 전사법을 이용하여 산화실리콘(SiO2) 기판에 전사 후, 염화은(AgCl)과 클로로벤젠(C6H5Cl)으로 만든 콜로이드(colloid) 용액에 디핑(dipping)하여 그래핀에 은 입자를 도핑 하였다. 그 결과, 은 입자 도핑 농도에 따라 면저항이 감소하는 양상을 보였다. 제작된 그래핀 투명전도성 필름의 투과도는 자외선-가시광선-근적외선 분광법(UV-Vis-NIR spectroscopy)를 이용하여 측정하였고, 라만 분광법(Raman spectroscopy)을 통해 그래핀 필름의 질적 우수성과 성장 균일도를 조사하였다.

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Effect of rolling parameters on soft-magnetic properties during hot rolling of Fe-based soft magnetic alloy powders (Fe계 연자성 합금 분말의 고온 압연시 자성특성에 미치는 압연인자들의 영향)

  • Kim, H.J.;H.Lee, J.;Lee, S.H.;Park, E.S.;Huh, M.Y.;Bae, J.C.
    • Proceedings of the Korean Society for Technology of Plasticity Conference
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    • 2009.05a
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    • pp.266-269
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    • 2009
  • Iron-based soft magnetic materials are widely used as cores, such as transformer transformers, motors, and generators. Reducing losses generated from soft magnetic materials of these applications results in improving energy conversion efficiency. Recently, the new P/M soft magnetic material realized an energy loss of 68 W/kg with a drive magnetic flux of 1 T, at a frequency of 1 kHz, rivaling general-purpose electromagnetic steel sheet in the low frequency range of 200 Hz to 1 kHz. In this research, the effect of rolling parameters on soft magnetic properties of Fe-based powder cores was investigated. The Fe-based soft magnetic plates were produced by the hot powder rolling process after both pure Fe and Fe-4%Si powders were canned, evacuated, and sealed in Cu can. The soft magnetic properties such as energy loss and coercive power were measured by B-H curve analyzer. The soft magnetic properties of rolled sheets were measured under conditions of a magnetic flux density of 1 T at a frequency of 200 kHz. It was found that rolling reduction ratio is the most effective parameter on reducing both energy loss and coercivity because of increasing aspect ratio with reduction ratio. By increasing aspect ratio from 1 to 9 through hot rolling of pure Fe powder, a significant loss reduction of one-third that of SPS sample was achieved.

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Elemental characteristics of sialoliths extracted from a patient with recurrent sialolithiasis

  • Buyanbileg Sodnom-Ish;Mi Young Eo;Kezia Rachellea Mustakim;Yun Ju Cho;Soung Min Kim
    • Journal of the Korean Association of Oral and Maxillofacial Surgeons
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    • v.50 no.2
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    • pp.94-102
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    • 2024
  • The exact mechanism of sialolith formation has yet to be determined. Recurrence of sialolithiasis is rare, affecting only 1%-10% of patients. The current study presents a case of recurrent stones that occurred twice on the right submandibular gland 6 months postoperative and 7 months after reoperation in a 48-year-old female patient. The stones were analyzed using histology, scanning electron microscopy, energy dispersive spectroscopy, and transmission electron microscopy (TEM). The first stone showed a three-layered structure with a poorly mineralized peripheral multilayered zone, highly mineralized middle layer, and the central nidus. The stones were composed of Ca, C, O, Cu, F, N, P, Si, Zn, and Zr. In TEM, compact bi-layered bacterial cell membrane was found on the peripheral layer and the central nidus of the stone as well as exosomes in the central nidus. The results demonstrated the essential components of sialolith formation, including bacteria, inflammatory exosomes, and exfoliated salivary epithelial cells that cooperatively underwent the pathogenetic progresses of central nidus formation, induction of compact zone calcification of the middle layer, and repeated subsequent deposition in the peripheral multilayer zone. The rapid recurrence could have resulted from residual pieces of a sialolith acting as the nidus of bacterial infection.

Application of Science for Interpreting Archaeological Materials(II) - Production and Flow of Lead Glass from Mireuksa Temple - (고고자료(考古資料)의 자연과학(自然科學) 응용(應用)(II) - 익산(益山) 미륵사지(彌勒寺址) 납유리(琉璃)의 제조(製造) 및 유통(流通) -)

  • Kang, Hyung-Tae;Kim, Seong-Bae;Huh, Woo-Young;Kim, Gyu-Ho
    • Korean Journal of Heritage: History & Science
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    • v.36
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    • pp.241-266
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    • 2003
  • Glass pieces excavated from Mireuksa Temple dated $7^{th}$ century A.D. were characterized by chemical composition, specific gravity and melting point. Lead isotope ratios of lead glasses were also compared with those of lead ore to attribute which lead ore was delivered for making lead glass. It was known that some lead glasses found in Japan were similar with those of Mireuksa Temple as comparing the data of chemical composition and lead isotope ratios. Characteristics of lead glass from Mireuksa Temple Thirty five glass pieces of Mireuksa Temple were analyzed for five oxides and found that all was lead glass system(PbO-$SiO_2$) with the range of 70~79% for PbO and 20~28% for $SiO_2$. The concentrations of oxides such as $Al_2O_3$, $Fe_2O_3$ and CuO were below 0.4%, 0.3% and 0.9%, respectively. Principal component analysis(PCA) as a statistical method was carried out to classify glasses with the similarities of chemical concentrations. The result of PCA has shown that three groups of glasses were created according to the excavation positions and two major oxides(PbO and $SiO_2$) greatly contributed to the dispersion of glasses on principal component 1(PC1) axis and trace element oxides($Al_2O_3$ and $Fe_2O_3$) for PC2 axis. Most of lead glasses were greenish by the efficacy of iron and copper oxides and some showed yellowish-green. The gravity of lead glasses was about 4.4~5.4 and estimated melting point was near $670^{\circ}C$. Lead isotope ratios of glasses were analyzed and found quite close to a lead ore from the Bupyeong mine in Gyeonggi-do. Comparison with lead glasses found in Japan Lead glasses of Mireuksa Temple were compared with those of Japan on the basis of chemical and physical data. Chemical compositions of Japanese lead glasses dated $7^{th}{\sim}8^{th}$ century A.D. were nearly similar with those of Mireuksa Temple but lead isotope ratios of those were separated into two groups. Three distribution maps of lead ores of Korea, Japan and China with lead isotope ratios were applied for lead glasses found in Japan. The result have shown that the locations of lead glasses from Fukuoka Prefecture coincided with the region of northen part of Korea and similar with those of Mireuksa Temple and lead glasses from Nara Prefecture dated $8^{th}$ century A.D. were located in the region of Japanese lead ore. This research has demonstrated that lead glasses of Mireuksa Temple conveyed to Miyajidake site, Fukuoka Prefecture around $7^{th}$ century A.D. and glass melting pots and glass beads excavated from Nara Prefecture confirmed the first use of Japanese lead ore for production of lead glasses from the end of $7^{th}$ century A.D.

Stability Constants of Nitrogen-Oxygen Donor Macrocyclic Ligand-Metal Ion Complexes in Aqueous Solutions (질소-산소 주개 거대고리 화합물-금속착물의 수용액에서의 안정도상수)

  • Jeong Kim;Chang-Ju Yoon;Hyu-Bum Park;Si-Joong Kim
    • Journal of the Korean Chemical Society
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    • v.35 no.2
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    • pp.119-127
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    • 1991
  • The protonation and the metal ion complexation of 15 to 18 membered diaza crown ether such as 1,12-diaza-3, 4 : 9, 10-dibenzo-5, 8-dioxacyclopentadecane(NtnOenH$_4$), 1,13-diaza-3,4 : 10,11-dibenzo-hydroxy-5,9-dioxacyclohexadecane(NtnOtnH$_4$), 1,13-diaza-3,4 : 10,11-dibenzo-15-hydroxy-5,9-dioxacyclohexadecane(Ntn(OH)OtnH$_4$), 1,15-diaza-3,4 : 12,13-dibenzo-5,8,11-trioxacycloheptadecane (NenOdienH$_4$) and 1,15-diaza-3,4 : 12,13-dibenzo-5,8,11-trioxacyclooctadecane(NtnOdienH$_4$) were studlied by potentiometry and NMR spectroscopy. The protonation constants were used to predict basicity of crown ethers. The sequence of the basicity was NenOdienH$_4$ < Ntn(OH)OtnH$_4$ < NtnOenH$_4$ < NtnOtnH$_4$ < NtnOdienH$_4$. Changes on the basicity were explained in terms of the effects of substituents and the degree of twistness of the macrocyclic ring. The sequence of the complex stabilities were Co(II) < Ni(II) < Cu(II) < Zn(II) for the transition metal complexes and Cd(II) < pb(II) < Hg(II) for the post-transition metal complexes. These changes on the stabilities were dependent on the basicity of the ligand and cavity size of the ring. For the heavy post-transiton metal complexes and Zn(Ⅱ) complex, the former factor was predominent and for the other transition metal complexes, the latter was affected on the stabilities. $^1$H and $^{13}$C-NMR studies for heavy post-transition metal complexes indicated that the nitrogen atom has greater affinity on metal ions than oxygen atom and the planarity of the rings was losed by the complexation with metal ions.

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A Scientific Analysis of Ancient Pigments on Wall Paintings at Yeongsanjeon in Tongdo Temple Using a Field-XRF (휴대용X선형광분석기를 이용한 통도사 영산전 벽화 안료의 과학적 성분분석)

  • Han, Min Su;Lee, Han Hyoung;Kim, Jae Hwan
    • Korean Journal of Heritage: History & Science
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    • v.44 no.3
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    • pp.132-149
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    • 2011
  • In ancient period, a variety of inorganic or organic pigments had been used as colorants in various kinds of religious and secular paintings such as tomb paintings and wall and scroll paintings in buddhist temples, and danchung(cosmic patterns) for the surface of wooden buildings. This study discusses the results obtained from an analysis of the pigments on the wall paintings of Yeongsanjeon(Hall of Vulture Peak) in Tongdo temple by a qualitative analysis using a field-XRF. The results can be briefly summarized as follows. Firstly, assuming from the major components examined from F-XRF analysis, raw materials of pigment of each color are: red to be Cinnabar(HgS) or Hematite($Fe_2O_3$); white to be White Lead[$2PbCO_3{\cdot}Pb(OH)_2$] in most cases and Calcite($CaCO_3$) or Chalk($CaCO_3$), Kaolin($Al2O_3{\cdot}SiO_2{\cdot}4H_2O$) in some cases; yellow to be Yellow Ocher[$FeO(OH){\cdot}nH_2O$]; black to be carbon(C); green on the painted surface to be Celadonite[$K(Mg,Fe^{2+})(Fe^{3+},Al)(Si_4O_{10})(OH)_2$] in most cases; dark green on the halo of figures to be Malachite[$CuCO_3{\cdot}Cu(OH)_2$], Copper Green[$2CuO{\cdot}CO_2{\cdot}H_2O$] or Atacamite[$Cu_2Cl(OH)_3$]. Secondly, incarnadine and pink were made by mixing with more than two pigments such as red and white for making various tone of colors. The qualitative analysis of pigments on the wall paintings of Yeongsanjeon, in conclusion, displays that the all pigments for ancient periods are inorganis pigments. However, it has the limitation to identify a definite kinds of mineral for each pigment because it was not possible to collect samples from cultural heritage for conducting a crystalline analysis of XRD.

Geochemical Origin, Behavior and Enrichment of Environmental Toxic Elements in Coaly Metapelite from the Deokpyeong Area, Korea (덕평지역의 탄질 변성니질암에 관한 환경적 독성원소의 지구화학적 기원, 거동 및 부화)

  • Lee, Hyun Koo;Lee, Chan Hee
    • Economic and Environmental Geology
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    • v.30 no.6
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    • pp.553-566
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    • 1997
  • Origin, behavior and enrichment of environmental toxic elements from the Deokpyeong area were investigated on the basis of major, trace and rare earth element geochemistry. Coaly metapelites of the Deokpyeong area are subdivided into grey phyllite, dark grey phyllite, coaly slate and black slate, which are interbedded along the Ogcheon Supergroup. The coaly slate had been mined for coal, but mining is closed. The coaly and black slates are lower contents of $SiO_2$ and $Al_2O_3$, and higher contents of LOI, CaO, $Na_2O$ and BaO as compared with the phyllitic rocks. Rare earth elements are highly enriched in the coaly and black slate. Average compositions (ppm) of minor and/or environmental toxic elements in the coaly and black slate are revealed as As=127, Ba=30,163, Cd=18, Cr=740, Cu=84, Mo=378, Pb=43, Sb=12, Se=44, U=144, V=8,147 and Zn=292, which are extremely high concentrations than those in the NASC compositions. Major elements (average enrichment index; 5.34) in the coaly metapelites are mostly depleted, excepting $P_2O_5$ and BaO, normalized by NASC. Rare earth elements (average enrichment index; 1.48) are enriched in the coaly slate. On the basis of NASC, minor and/or environmental toxic elements in the coaly metapelites were strongly enriched of all the elements with the exception of Co, Cs, Ni and Sr. Average enrichment index of trace elements in coaly metapelite is 31.51 (coaly slate; 51.94 and black slate; 15.46). Especially, enrichment index of potentially toxic elements (As, Ba, Cr, Cu, Mo, Ni, Sb, Se, U, V and Zn) of the rock is 46.10 (grey phyllite; 7.15, dark grey phyllite; 4.77, coaly slate; 88.96 and black slate; 22.11). These coal formations were deposited in basin of boundary between terrestrial and marine environments deduced to carbon, sulfur (C/S=2.2 to 275.7), trace and rare earth elements characteristics. Irregular behavior and dispersion between major, minor and rare earth elements of those metapelites indicates a variable source materials, incomplete mixing of differential source and/or reequilibrium of diagenesis and metamorphism.

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