• Proceedings of the KIEE Conference
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• 2006.10b
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• pp.159-162
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• 2006

In this paper energy distribution function in $SiH_4$ has been analysed over the E/N range 0.5${\sim}$300Td and Pressure value 0.5, 1.0, 2.5 Torr by a two-term approximation Boltzmann equation method and by a Monte Carlo simulation. The motion has been calculated to give swarm parameters for the electron drift velocity, diffusion coefficient, electron ionization, mean energy and the electron energy distribution function. The electron energy distribution function has been analysed in $SiH_4$ at E/N=30, 50Td for a case of the equilibrium region in the mean electron energy and respective set of electron collision cross sections. The results show that the deduced electron drift velocities, the electron ionization or attachment coefficients, longitudinal and transverse diffusion coefficients and mean energy agree reasonably well with theoretical for a rang of E/N values.

• Journal of computational fluids engineering
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• v.4 no.3
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• pp.63-70
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• 1999

A Direct simulation Monte-Carlo (DSMC) code is developed, which employs the Monte-Carlo statistical sampling technique to investigate hypersonic rarefied gas flows accompanying chemical reactions. The DSMC method is a numerical simulation technique for analyzing the Boltzmann equation by modeling a real gas flow using a representative set of molecules. Due to the limitations in computational requirements. the present method is applied to a flow around a simple two-dimensional object in exit velocity of 7.6 km/sec at an altitude of 90 km. For the calculation of chemical reactions an air model with five species (O₂, N₂, O, N, NO) and 19 chemical reactions is employed. The simulated result showed various rarefaction effects in the hypersonic flow with chemical reactions.

• Proceedings of the KSME Conference
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• 2004.11a
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• pp.1528-1533
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• 2004

A numerical investigation is made of transient evolutionary prcocess of electroosmotic flow in a two-dimensional microchannel connected to a reservoir. The channel height is very small so that two electric double layers forming on the charged surfaces are overlapped. Transient transports of ions in the electrolyte solution are computed by integrating the Nernst-Planck equation together with the Poisson equation for electric potential. The numerical results illustrate that there are two distinct transient phases. The physical mechanisms and relevant time scales for the transient evolution are described.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 1997.04a
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• pp.154-159
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• 1997

This paper describes the electron transport characteristic in SiH$_4$ gas calculated for range of E/N values from 0.5~300(Td) by the Monte Calro simulation and Boltzmann equation method using a set of electron collision cross sections determined by the authors and the values of electron swarm parameters are obtained for TOF method. The results gained that the value of an electron swarm parameter such as the electron drift velocity, the electron ionization coefficients longitudinal and transverse diffusion coefficients, characteristics energy agree with thee experimental and theoretical for a range of E/N. The electron energy distributions function were analysed in monosilane at EN : 30, 50(Td) for a case of equilibrium region in the mean electron energy. The validity of the results obtained has been confirmed by a TOF method.

• Proceedings of the KIEE Conference
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• 2000.07e
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• pp.17-21
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• 2000

A Study on the electron energy distribution function in $SF_6+Ar$ mixtures gas used by MCS-BE algorithm, the electron swam parameters in the 0.5% and 0.2% $SF_6+Ar$ mixtures are measured by time of flight method over the E/N(Td) range from 30 to 300(Td). A two-term approximation of the Boltzmann equation analysis and Monte Carlo simulation have been also used to study electron transport coefficients. The electron energy distribution function has been analysed in $SF_6$ gas and $SF_6+Ar$ mixtures at E/N : 200(Td) for a case of the equilibrium region in the mean electron energy. The measured results and the calculated results have been compared each other.

• Korean Journal of Air-Conditioning and Refrigeration Engineering
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• v.6 no.4
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• pp.417-426
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• 1994

Filter media performance was evaluated using monodisperse NaCl particles with Differential Mobility Analyzer and Ultrafine Condensation Particle Counter. Low or medium performance filters show that the most penetrating particles size(MPPS) is around $0.3{\mu}m$ in diameter and is shifted to smaller sizes as the filter face velocity increases. However, HEPA and ULPA filters show MPPS is around $0.15{\mu}m$ in diameter and is also shifted to $0.1{\mu}m$ in diameter as the face velocity increases. In case of electret filter, the MPPS is found around $0.04{\mu}m$ region for Boltzmann charge equilibrium particles. There is a tendency of strong collection efficiency decrease for large particles as the face velocity increases on the contrary to the other filters. One of the medium performance filter efficiency was compared with filtration theory and the good agreetment was found in the experimental range.

• Proceedings of the KIEE Conference
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• 2001.07e
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• pp.76-79
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• 2001

Energy distribution function in $SiH_4$ has been analysed over the E/N range $0.5{\sim}300Td$ and Pressure value 0.5, 1.0, 2.5 Torr by a two-term approximation Boltzmann equation method and by a Monte Carlo simulation. The motion has been calculated to give swarm parameters for the electron drift velocity, diffusion coefficient, electron ionization, mean energy and the electron energy distribution function. The electron energy distribution function has been analysed in $SiH_4$ at E/N=30, 50Td for a case of the equilibrium region in the mean electron energy and respective set of electron collision cross sections.

• Proceedings of the Korean Society Of Semiconductor Equipment Technology
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• 2006.05a
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• pp.255-258
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• 2006

In this paper, the new method which is monitoring quantity of particles using by ion-counter has been developed. ISPM system is composed by Gerdien type ion-counter (house-made), DC power supply and electrometer. Ion-counter applied positive voltage could detect only positive charged particles. Therefore charged particles to Boltzmann equilibrium distribution or to some identified charge distribution can be detected by ion-counter. Ion-counter could install on the exhaust line of process equipment since pressure loss is structurally low. ISPM system has been certified by comparison with the result of SMPS (Scanning Mobility Particle Sizer) system. The relation coefficiency is above 0.98 about $20{\sim}300nm$ particles with identified charge distribution under $0.1{\sim}10.0$ Torr.

• Proceedings of the KSME Conference
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• 2004.04a
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• pp.1376-1381
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• 2004

Understanding the thermal conductivity and heat transfer processes in superlattice structures is critical for the development of thermoelectric materials and optoelectronic devices based on quantum structures. $Chen^{(1)}$ developed ballistic diffusive equation(BDE) for alternatives of the Boltzmann equation that can be applied to the complex geometrical situation. In this study, a simulation code based on BDE is developed and applied to the 1-dimensional transient heat conduction across a thin film and transient 2-dimensional heat conduction across the film with heater. The obtained results are compared to the results of the $Chen^{(1)}$ and Yang and $Chen^{(1)}$. Finally, steady 2-dimensional heat conduction in the quantum dot superlattice are solved to obtain the equivalent thermal conductivity of the lattice and also compared with the experimental data from $Borca-Tasciuc^{(2)}$.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.26 no.8
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• pp.1102-1114
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• 2002

An electret filter is composed of permanently charged electret fibers and is widely used in applications requiring high collection efficiency and low-pressure drop. In this work, the collection efficiency of the filter media used in manufacturing cabin air filters was investigated by using poly-disperse particles when submicron particles were loaded. Long-term experiments were conducted by applying two different charging states, which were spray electrification and charge equilibrium by bipolar ionization. In order to investigate the effect of particle loading in filter media, NaCl particles were generated from 0.1% and 1% solutions by an atomizer. Liquid DOS particles were used to evaluate the effect of liquid particles on the collection efficiency of an electret filter. The results show significant effect of charge amount and size distribution of loading particles on the collection performance of a filter media in submicron region. Smaller particles loaded in electret fibers cause a more rapid degradation in collection efficiency and have lower minimum efficiency with time. The pressure drop of a filter media do rarely increase when the collection efficiency decreases to the minimum value. For the larger particles charged by spray electrification, which have charge amounts more than that of Boltzmann equilibrium charge distribution, the pressure drop of a filter media slowly increases in comparison with that of equilibrium charged particles. For DOS particles it is shown that the charging level of an electret filter severely decreases and the collection efficiency is below 10% in some particle size range.