Characteristics of Ferroelectric SrBi2Ta2O9 Thin Films deposited by Plasma-Enhanced Atomic Layer Deposition (플라즈마 원자층증착법에 의해 제조된 강유전체 SrBi2Ta2O9박막의 특성)
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- Proceedings of the Materials Research Society of Korea Conference
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- 2003.03a
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- pp.35-35
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- 2003