• Proceedings of the Korean Society of Precision Engineering Conference
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• 2007.06a
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• pp.653-654
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• 2007

• Proceedings of the Korean Society for Technology of Plasticity Conference
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• 2009.05a
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• pp.213-214
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• 2009

Recently the use of ferritic stainless steels for automotive exhaust system has been increased dramatically. A detailed knowledge of material behavior of ferritic stainless steel is important for successful manufacturing of exhaust systems. To achieve this goal, numerical study of square cup deep drawing for ferritic stainless steel sheet, type 409L was conducted with Yld2000-24. Uniaxial tensile test and hydraulic bulge test were performed to characterize plastic material behavior. Finite element simulation of square cup deep drawing was performed successfully.

• Proceedings of the Korean Society for Technology of Plasticity Conference
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• 1997.03a
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• pp.175-178
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• 1997

A modified Mukerjee's model considering the microstructural evolution was developed to study the superplastic bulge forming process of Ti-6Al-4V alloy. Through the microstructual observation after deformation, it was found that the grain growth rate of uniaxially tested specimens was different from that of biaxially deformed specimens. From this result, bulge forming experiments with and without back pressure were performed to examine the grain growth behavior and to compare the results of biaxial test with those of triaxial test. Good agreement between the prediction by a modified Mukerjee's model and the experimental measurements was obtained for bulge profile and thickness distribution.

• Proceedings of the KSME Conference
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• 2007.05a
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• pp.1807-1812
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• 2007

A bulge testing system was developed to measure mechanical properties of thin film materials. A bulge pressure test system for pressurizing the bulge window of the film and a micro out-of-plane ESPI(Electronic Speckle Pattern Interferometric) system for measuring deflection of the film were included in the testing system developed. For the out-of-plane ESPI system, whole field speckle fringe pattern, corresponding to the out-of-plane deflection of the bulged film, was 3-dimensionally visualized using 4-bucket phase shifting algorithm and least square phase unwrapping algorithm. The bulge pressure for loading and unloading was controlled at a constant rate. From the pressure-deflection curve measured by this testing system, ain-plane stress-strain curve could be determined. In this study, elastic modulus of an electrolytic copper film 18 ${\mu}m$ was determined. The modulus was calculated from determining the plain-strain biaxial elastic modulus at the respective unloading slopes of the stress-strain curve and for the Poisson's ratio of 0.34.

• Proceedings of the Korean Society for Technology of Plasticity Conference
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• 2004.10a
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• pp.180-183
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• 2004

Superplastic formability depends on flow parameters such as temperature, strain rate, strain and stress, microstructures. Usually, superplastic properties of materials are characterized with using a uni-axial tension testing. However, superplastic sheet is formed under mutiaxial loading condition in most forming practices. In the present study, superplastic characteristics of A15083 alloys were determined with using both a uni-axial and biaxial bulging tests. Specially, cone-type die was used to achieve constant strain rate under constant pressure condition. Even though constant strain rate under a certain pressure was achieved only approximately, a cone-type bulging test was found to be quite beneficial to get a multiaxial formability of superplastic materials.

• Proceedings of the Korean Society for Technology of Plasticity Conference
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• 2008.10a
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• pp.452-455
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• 2008

In the present study, blow forming characteristics of commercially roiled AZ31 alloy sheets were investigated. Two different kinds of AZ31 sheets were originally fabricated by using direct casting and strip casting methods respectively. Both sheets have similar grain sizes of about $7{\mu}m$ with a relatively equiaxed structure after rolling. A series of tensile tests were carried out to get flow behavior in terms of temperature and strain rate. Also, grain size effect was investigated by annealing as-received sheet at elevated temperatures. Elongation increased with temperature increment as well expected. However, the differences in tensile test condition did not give much difference in elongation even at the temperature range where a large elongation would be expected with such as fine grain of $7{\mu}m$. Blow forming experiments showed that forming condition did not result in higher difference in dome height. However, the interesting feature from this study was that formability of this AZ31 alloy got different with stress condition. Firstly, biaxial stress condition might result in lower temperature and strain rate dependencies compared to uniaxial tension results for both DC and SC sheets. Secondly, DC showed slower grain growth in uniaxial tension than in biaxial stress state while SC has much higher grain growth rage in uniaxial tension than in bulging.

• Proceedings of the Korean Vacuum Society Conference
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• 2000.02a
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• pp.128-128
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• 2000

박막의 탄성 특성을 평가하는 방법으로 nano-indentation, Brillouin light scattering measurement, ultrasonic surface wave measurement, bulge test, vibration membrane method 등 여러 가지가 제시되어 왔다. 이러한 방법들은 필름의 두께가 일정 두께 이상이 되어야 정확한 측정이 가능한 방법으로 매우 얇은 박막에서도 탄성특성을 평가할 수 있는 freehang, bridge 방법이 제시되었으며, 이 방법은 간단한 식각 공정을 통해 매우 얇은 박막에도 적용시킬 수 있다는 장점을 가지고 있다. 본 연구에서는 아주 얇은 박막에서도 탄성특성을 평가할 수 있는 freehang 방법을 이용하여 순수한 Diamond-like carbon (DLC) 필름과 Sidl 첨가된 DLC 필름의 탄성 특성을 평가하고자 한다. 실험에서 사용한 필름은 rf-PACVD 장비를 이용하여 증착하였다. 이때 전극과 플라즈마 사이의 바이어스 음전압은 -400 Vb로 합성압력은 10mTorr로 고정하였다. 사용한 반응 가스는 벤젠(C6H6), 그리고 벤젠과 희석된 실렌(SiH4 : H2 = 10 : 90)이며, 희석된 실렌의 첨가량을 조절하여 필름 내에 일정량의 Si을 함유시켰다. 각각의 조건에서 증착시간을 조절하여 필름의 두께를 변화시켰으며, KOH(5.6mol) 용액을 이용하여 습식 식각을 함으로써 freehang을 제작하였다. 이때 식각액에 의한 DLC 필름의 손상은 관찰되지 않았다. 필름의 잔류 응력을 측정하기 위해 200$\pm$10 혹은 100$\pm$5$\mu\textrm{m}$ 두께의 얇은 (100) Si wafer를 5$\times$50 mm2의 strip 형태로 절단하여 사용하였다. 필름의 압축 잔류 응력에 의해 발생한 필름/기판 복합체의 곡률은 laser 반사법과 $\alpha$-step profiler를 이용하여 측정하였으며, 이 결과를 Brenner 등에 유도된 식을 이용하여 잔류 응력을 계산하였다. 또한 제작된 frddhang은 광학 현미경과 전자주사현미경에 의해 관찰되었다. 이렇게 제작된 freehang을 이용하여 필름이 기판에 부착되기 위해 필요한 변형률을 측정하고, 독립적으로 측정된 필름의 잔류 응력을 박막의 응력-변형률 관계식에 적용하여 biaxial elastic modulus, E/(1-v)를 구할 수 있었다. 측정 결과 필름의 잔류 응력과 biaxial elastic modulus는 필름의 두께가 감소함에 따라 감소하는 경향을 나타냈으며, 같은 두께의 필름인 경우, 식각 깊이에 따른 biaxial elastic modulus 의 변화를 통해 최적의 식각 깊이를 알 수 있었다.

• Proceedings of the Korean Society for Technology of Plasticity Conference
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• 1999.03b
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• pp.163-170
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• 1999

Although the bulge forming technique is currently employed in commercial superplastic forming processes, the uniaxial tensile test is still the most commonly used method for the evaluation of the superplasticity of materials due to its simplicity in testing. However, the results obtained from the uniaxial tensile test can not be applied in analyzing the characteristics of the real parts formed in multi-axial stress state. In this paper, using the tensile test specimen obtained from the square cup manufactured by superplastic forming, tensile strength and elongation have been investigated according to the strain and cavity volume fraction. From the result of experiment, tensile strength and elongation are decreased according to the strain and cavity in Al-6%Cu-0.4%Zr alloy. On condition of uniaxial stress, cavity volume fraction is increased on linear according to the increasement of thickness strain. However, on condition of biaxial stress there are critical point( E t=1.5-1.6) that the slope, the ratio of cavity volume fraction and strain, have been changed. Therefore, cavity volume fraction is different with respect to stress condition, although the same strain.

• Proceedings of the Korean Vacuum Society Conference
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• 1999.07a
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• pp.136-136
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• 1999

박막의 탄성특성을 평가하는 방법으로 nano-indentation, Brillouin light scattering measurement, ultrasonic surface wave measurement, bulge test, vibration membrane method 등 여러 가지가 제시되어 왔다. 최근에는 탄성특성을 평가할 수 있는 간단한 방법으로 기판 식각 기법을 이용한 freehang, bridge 방법이 제시되었다. 이중에서 bridge 방법은 간단한 식각 기법을 이용하여 얇은 박막에서도 탄성 특성을 평가할 수 있는 방법으로 제시되었다. 그러나 식각 과정에서 발생하는 patch 부분의 under-cut으로 인해 정확한 bridge의 길이를 측정할 수 없게 되어 오차가 발생하고 있다. 본 연구에서는 bridge 방법에서 발생하는 오차를 줄이기 위한 방법으로, patch 부분에 etch-stop을 제작해 줌으로서 식각 과정에서 발생하는 under-cut을 효과적으로 제거시켰다. Etch-stop은 2장의 mask를 align key를 이용하여 제작하였다. 먼저 산화막이 형성되어 있는 Si 기판위에 mask 1을 이용하여 patch 부분을 lithography 작업하고, 습식 식각 공정을 한 뒤 DLC 필름을 증착시킨다. 다음으로 mask 2를 이용하여 bridge pattern을 제작하고, DLC 필름을 증착시킨 후 lift-off 기술과 산화막 등방식각 공정을 통해 bridge를 제작하였다. 이렇게 제작된 bridge를 통해 필름이 기판에 부착되기 위해 필요한 변형률을 측정하고, 독립적으로 측정된 필름의 잔류응력과 함께 박막의 응력-변형률 관계식에 적용시켜 biaxial elastic modulus, E/(1-v)를 구할 수 있었다. Sidl 첨가된 DLC 필름은 rf-PACVD 장비를 이용하여 증착하였다. 이때 전극과 플라즈마 사이의 바이어스 음전압은 -400V로 합성압력은 10mTorr로 고정하였다. 사용한 반응가스는 벤젠(C6H6)과 희석된 실렌(SiH4:2H=10:90)이며, 희석된 실렌의 첨가량을 조절하여 필름 내에 함유된 Si의 양을 조절하였다. 각각의 조건에서 증착시간을 조절하여 필름의 두께를 조절하였다. 필름의 잔류응력은 압축잔류 응력에 의해 발생한 필름/기판 복합체의 곡률을 laser 반사법을 이용하여 측정하고, 이 결과를 Brenner 등에 의해 유도된 식을 대입하여 계산하였다.