• 한국진공학회:학술대회논문집
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• 한국진공학회 2016년도 제50회 동계 정기학술대회 초록집
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• pp.170.2-170.2
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• 2016

DLC(Diamond like Carbon)는 Diamond와 유사한 물리화학적 특성을 보유한 막으로 고경도 및 우수한 내마모성, 화학적 안정성의 특성을 가지고 있다. DLC는 크게 카본의 막 형성 공정에서 카본 소스에 따라 수소가 포함된 DLC와 무수소DLC로 구분된다. Tetrahedral amorphous carbon (ta-C) 박막은 DLC 박막 중에서 가장 다이아몬드와 유사한 특성을 가지는 박막으로, a:C-H에 비해 높은 열적안정성, 경도(50~60 GPa) 및 내마모 특성이 우수하여, 현재 다양한 응용분야에 적용하고 있다. 본 연구에서는 무수소 DLC 형성을 위해 자장필터가 장착된 Filtered Vacuum Arc Source(FVAS)를 자체적으로 개발하여 연구를 진행하였다. FVAS 장비는 카본 이온 발생부와 Plasma Duct 부위, 전자석부위 구성되어 있으며, 본 연구에서는 Plasma Duct 부위의 Bias 제어를 통해 음극에서 기판으로 이동하는 카본이온의 에너지와 flux 변화를 통한 박막 증착 거동 및 물성 연구를 진행하였다. Plasma Duct Bias 변화는 각 0, 5, 10, 15, 20 V 조건으로 진행하였으며, 물성 평가는 경도(Hardness), 마찰계수, 응력(Stress), 전기전도 특성에 대한 분석을 진행하였다. 박막의 증착 거동에서는 Plasma Duct bias 변화에 따라10 V에서 가장 높은 증착 거동을 가지다 감소하는 경향을 확인 하였으며, 박막의 물성 특성 평가 시에도 이와 유사하게 특성의 차이를 관찰하였다. 이는 음극부위에서 형성된 카본이온이 기판에 도달 시에 Plasma Duct Bias 변화에 따라 이온의 Flux 및 에너지 변화로 인해 박막의 밀도 및 ta-C 막의 물성 변화로 예상되며, 이를 분석하기 위해 라만분석 및 기판 도달 에너지 분석을 진행하였다

• 한국자기학회지
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• 제15권6호
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• pp.332-335
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• 2005

자속계의 경우 입력전압을 적분하여야 되기 때문에 연산증폭기의 입력 바이어스 전류가 있으면 적분기의 출력이 드리프트하게 된다. 본 연구에서는 이 드리프트를 자동으로 측정하고 보상하기 위하여 전압변동이 없는 디지털 sample and hold증폭기를 자속계에 도입하여 제작하였다. 개발한 자속계의 경우 적분기의 시간상수 $RC=10^{-3}$ s에서 드리프트가 $5{\times}10^{-8}\;Wb/s$ 이하였다.

• 한국산업융합학회 논문집
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• 제22권1호
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• pp.29-37
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• 2019

A new permanent magnet biased hybrid maglev actuator is developed. Compared to the classical hybrid maglev actuators, the new maglev has unique flux paths such that bias fluxes are separated with control flux paths. The control flux paths have minimum reluctances only developed by air gaps, so the currents to produce control fluxes can be minimized. The consumed power to operate this maglev system can also be minimized. The gravity load can be compensated with the static magnetic forces developed by the permanent magnet bias fluxes while external disturbances are controlled with the bidirectional AC magnetic forces developed by control fluxes by currents. 1-D circuit model is developed for this model such that the flux densities and magnetic forces are extensively analyzed. 3-D finite element model is also developed to analyze the performances of the maglev actuator.

• 한국표면공학회:학술대회논문집
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• 한국표면공학회 2009년도 춘계학술대회 논문집
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• pp.177-181
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• 2009

Compositional gradient CrNx coatings were fabricated using arc ion plating in Ar/$N_2$ gaseous mixture by gradually increasing $N_2$ flux rate from 0 to 120 SCCM. The effect of negative substrate bias on the film microstructure and mechanical properties were systematically investigated with XRD, GDOES, and SEM. The results show that substrate bias has an important influence on film growth and microstructure of gradient CrNx coatings. The coatings mainly crystallized in the mixture of hexagonal $Cr_{2}N$ and fcc CrN phases. By increasing substrate bias, film microstructure evolved from an apparent columnar structure to an equiaxed one. With increasing substrate bias, deposition rate first increased, and then decreased. The maximum of deposition rate was 15 nm/min obtained at a bias of -50V.

• 한국분말야금학회:학술대회논문집
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• 한국분말야금학회 2006년도 Extended Abstracts of 2006 POWDER METALLURGY World Congress Part 1
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• pp.451-452
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• 2006

The influence of Hi-flux powders characteristics on the performance of magnetic powder cores was studied. It was found that different cooling rate and nozzle configuration could change the shape and microstructure of powders. Smooth surface and spherical shape of powders were beneficial to improve DC bias performance and reduce core losses of magnetic powder core.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2013년도 제44회 동계 정기학술대회 초록집
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• pp.376-377
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• 2013

반도체산업이 발전함에 따라 패턴이 점점 더 복잡해 지고 있다. 이에 따라 웨이퍼 위에 올려지는 layer도 개수도 많아지고 점점 더 두꺼워진다. 예전에는 수백 nm였지만 최근에는 um단위까지 두꺼워지고 있다. 하지만 mask 역할을 하는 ACL과 substrate (SiO2)의 selectivity는 일정하기 때문에 mask 역할을 하는ACL layer 역시 두꺼워지는 것이 불가피하다. 이로인해 예전에는 없었던 문제들이 발생하기 시작한다. Mask 역할을 하는 ACL layer가 얇고 패턴 크기가 클 때에는 아무런 문제도 없었지만 ACL layer도 두꺼워 지고 패턴 크기도 수십 nm로 작아졌기 때문에 ACL 역시 식각 공정을 할 때 어려움이 생기기 시작한다. 이를 해결하기 위한 하나의 방법으로 자화된 ICP 챔버 substrate에 Dual bias frequency 인가하여 식각해 보고 이와같이 하였을 때 식각특성을 분석해 보았다. 자화된 ICP 챔버에서 substrate에 dual bias frequency를 인가함으로써 ion energy와 ion flux에 변화가 생기게 되고 이로 인해 다른 식각 특성이 나타나게 되었다. Dual bias frequency의 비율을 변화시켜 보고 변화에 따른 식각 특성을 분석해 보았다. 이와 같은 과정을 통하여 높은 주파수와 낮은 주파수의 각각의 변화에 따른 식각특성의 변화에 대한 이해를 할 수 있었다.

• Progress in Superconductivity
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• 제7권1호
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• pp.36-40
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• 2005

The problem of fluctuation-induced digital errors in a rapid single flux quantum (RSFQ) circuit has been a very important issue. In this work, we calculated the bit error rate of an RSFQ switch used in superconductive arithmetic logic unit (ALU). RSFQ switch should have a very low error rate in the optimal bias. Theoretical estimates of the RSFQ error rate are on the order of $10^{-50}$ per bit operation. In this experiment, we prepared two identical circuits placed in parallel. Each circuit was composed of 10 Josephson transmission lines (JTLs) connected in series with an RSFQ switch placed in the middle of the 10 JTLs. We used a splitter to feed the same input signal to both circuits. The outputs of the two circuits were compared with an RSFQ exclusive OR (XOR) to measure the bit error rate of the RSFQ switch. By using a computerized bit-error-rate test setup, we measured the bit error rate of $2.18{\times}10^{-12}$ when the bias to the RSFQ switch was 0.398 mA that was quite off from the optimum bias of 0.6 mA.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2011년도 제41회 하계 정기 학술대회 초록집
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• pp.236-236
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• 2011

Silicon oxynitride (SiON) was deposited for gas barrier film on polyethylene terephthalate (PET) using octamethylycyclodisiloxane (Si4O4C8H24, OMCTS) precursor by plasma enhanced chemical vapor deposition (PECVD) at low temperature. The ion flux and substrate temperature were measured by oscilloscope and thermometer. The chemical bonding structure and barrier property of films were characterized by Fourier transform infrared (FT-IR) spectroscopy and the water vapor transmission rate (WVTR), respectively. The deposition rate of films increases with RF bias and nitrogen dilution due to increase of dissociated precursor and nitrogen ion incident to the substrate. In addition, we confirmed that the increase of nitrogen dilution and RF bias reduced WVTR of films. Because, on the basis of FT-IR analysis, the increase of the nitrogen gas flow rate and RF bias caused the increase of the C=N stretching vibration resulting in the decrease of macro and nano defects.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2001년도 춘계학술대회논문집B
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• pp.164-169
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• 2001

The active magnetic bearing has many advantages - an active positioning, no contact and lubrication free motion - and is widely used in high precision motion stages. But, the conventional magnetic bearings composed of electromagnets only are power consuming due to their bias current and have the excessive heat generation, which can make the repeatability of the positioning system worse. To overcome this drawback, we developed a novel permanent magnet (PM) biased linear magnetic bearing for a high precision magnetically levitated stage. The permanent magnets provide a bias flux and generate a bias force, and the electromagnet increases or reduces a flux of the permanent magnets and gives a levitation force. This paper presents a theoretical magnetic circuit analysis, FEM analysis and experimental data from the 1-DOF tests, and compares the theoretical power consumption of the electromagnetic bearings and the PM biased linear magnetic bearings. The PM biased linear magnetic bearing presented in this paper gives better load capacity but lower power consumption than a conventional electromagnetic bearing and will be adopted in our 6-DOF high precision linear positioning maglev stage.

• Nuclear Engineering and Technology
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• 제55권7호
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• pp.2474-2482
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• 2023

The development of fast reactors with complex designs and operation status requires more accurate and effective simulation. The Monte-Carlo method can generate multi-group cross-sections in arbitrary geometry without approximation on resonances treatment and leads to good results in combination with diffusion codes. However, in previous studies, the coupling of Monte-Carlo generated multi-group cross-sections (MC-MGXS) and transport solvers has shown relatively large biases in fast reactor problems. In this paper, the main contribution to the biases is proved to be the neglect of the angle-dependence of the total cross-sections. The flux-moment homogenization technique (MHT) is proposed to take into account this dependence. In this method, the angular dependence is attributed to the transfer cross-sections, keeping an independent form for the total sections. For the MET-1000 benchmark, the multi-group transport simulation results with MC-MGXS generated with MHT are improved by 700 pcm and an additional 120 pcm with higher order scattering. The factors that cause the residual bias are discussed. The core power distribution bias is also significantly reduced when MHT is used. It proves that the MCMGXS with MHT can be applicable with transport solvers in fast reactor analysis.