• Transactions of the Korean Society of Mechanical Engineers
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• v.16 no.2
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• pp.267-280
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• 1992

This paper describes a numerical analysis of the light scattering patterns of roughness profiles. This analysis was based upon the light scattering theory developed by Beckmann. In the analysis, the roughness profile was regarded as a profile whose irregularities depend on the production process and the shape of cutting tool. Generally, waviness of an actual surface seriously distorts the scattered pattern of roughness profile. In order to avoid the effects of waviness of actual surfaces, several theoretically calculated scattering patterns, instead of actual scattering patterns, were used to analyze the scattering patterns of typical engineering roughness profiles. The characteristics of the light scattering patterns for five model surfaces were studied.

• Transactions of the Korean Society of Mechanical Engineers
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• v.12 no.6
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• pp.1303-1311
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• 1988

Described is method for development of an optical roughness measurement sensor for in-subequality assurance in the precision grinding. Main approach is made based upon the Brckmann's light scattering theory, in which general solutions of the optical scattering behaviour are given under many simplifying assumptions on the model of the surfaces illuminated. For the ground surface, the assumptions are verified through computer simulation and experimental work in order to examine the validity of Beckmann's theory on predicting the optical responses according to the roughness variation. As a result, an optical monitoring strategy is derived which can evaluate the roughness value of the ground surface by statistically detecting the pattern of intensity distribution of the scattered light. Finally, the strategy is proven by comparing with the results using the stylus method.