• 제목/요약/키워드: Beam Equivalent Pressure(BET)

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Influence of MBE Growth Temperature on the Sulfur Compositional Variation Of ZnSSe Epitaxial Layers on GaAs Substrates

  • Kim, Dong-Lyeul;Bae, In-Ho;Son, Jeong-Sik;Kim, In-Su;Lee, Jae-Young m;Akira Yoshida
    • Transactions on Electrical and Electronic Materials
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    • 제1권3호
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    • pp.18-22
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    • 2000
  • In this work, we reported the sulfur compositional variation of ZnS$\_$x/Se$\_$1-x/ epitaxial layers with growth temperature and BEP ration of ZnX/Se/)P$\_$ZnS//P$\_$Se/) grown on GaAs substrates by molecular beam epitaxy. The sulfur composition of ZnSSe epitaxial layers was varied sensitively on the growth temperature and show different linear relationship with growth temperature and BEP ration of ZnS/Se(P$\_$ZnS//P$\_$Se/), which revealed -0.107 %$\^{C}$ at (P$\_$ZnS//P$\_$Se/)=0.30 and -0.052 %$\^{C}$ at (P$\_$ZnS//P$\_$Se/)=0.158 rspectively. A reference data for the accurate control of the sulfur composition and the growth of high quality ZnSSe/GaAs epitaxial layers was provided.

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