• 제목/요약/키워드: Backside area

검색결과 33건 처리시간 0.174초

Optimization of Backside Etching with High Uniformity for Large Area Transmission-Type Modulator

  • Lee, Soo-Kyung;Na, Byung-Hoon;Ju, Gun-Wu;Choi, Hee-Ju;Lee, Yong-Tak
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2012년도 제43회 하계 정기 학술대회 초록집
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    • pp.319-320
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    • 2012
  • Large aperture optical modulator called optical shutter is a key component to realize time-of-flight (TOF) based three dimensional (3D) imaging systems [1-2]. The transmission type electro-absorption modulator (EAM) is a prime candidate for 3D imaging systems due to its advantages such as small size, high modulation performance [3], and ease of forming two dimensional (2D) array over large area [4]. In order to use the EAM for 3D imaging systems, it is crucial to remove GaAs substrate over large area so as to obtain high uniformity modulation performance at 850 nm. In this study, we propose and experimentally demonstrate techniques for backside etching of GaAs substrate over a large area having high uniformity. Various methods such as lapping and polishing, dry etching for anisotropic etching, and wet etching ([20%] C6H8O7 : H2O2 = 5:1) for high selectivity backside etching [5] are employed. A high transmittance of 80% over the large aperture area ($5{\times}5mm^2$) can be obtained with good uniformity through optimized backside etching method. These results reveal that the proposed methods for backside etching can etch the substrate over a large area with high uniformity, and the EAM fabricated by using backside etching method is an excellent candidate as optical shutter for 3D imaging systems.

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도시내 가로변 빌딩이 도로 이면지역의 소음에 미치는 영향 (Influence of roadside buildings on the noise in the backside blocks in city area)

  • 김용성;한찬훈
    • 한국음향학회지
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    • 제38권3호
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    • pp.352-362
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    • 2019
  • 가로변 이면지역에 위치한 노후된 공동주택은 주도로의 교통소음의 피해를 받는다. 이면지역의 소음은 가로면 건물의 높이와 주도로와의 이격거리, 그리고 도로변 건물간의 이격거리 및 도로변 건물간의 높이차이에 의하여 영향을 받는다. 본 연구는 한 도시 내의 15개의 블록을 선정하여 가로변 건물배치형태를 1)블록에 단일건물이 배치된형태, 2)블록에 다수의 건물이 하나의 축으로 연속하여 배치된 형태로 분류하였으며, 가로변과 이면지역에서 도로교통소음을 동시에 측정하여 가로변의 건물 배치형식에 따른 이면지역소음의 상관성을 분석하였다. 분석결과, 이면지역으로 전달된 도로교통소음은 가로변에 배치된 건물의 높이, 건물과 건물간의 이격된 거리, 인접한 건물의 높이차에 영향을 받으며 건물의 너비에 의한 소음도의 감소는 나타나지 않았다. 가로변에 위치한 건물의 높이가 4 m(단층)인 경우 이면지역의 소음도는 12 dB(A)감소하였으며 높이가 4 m 증가할 때마다 2 dB(A)씩 감소하는 것으로 나타났다. 또한 인접한 두 건물의 높이차가 4 m 증가할 때마다 이면지역의 소음도는 1 dB(A)씩 증가하였으며, 인접한 두 건물의 이격된 거리가 0.5 m 증가할 때마다 이면지역의 소음도는 1 dB(A)씩 증가하는 것으로 나타났다.

덕수궁 선원전(璿源殿)영역의 조경 복원정비 계획 (A Landscape Restoration and Maintenance Plan in the Seonwonjeon of the Deoksugung Palace)

  • 소현수;김미정
    • 한국전통조경학회지
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    • 제39권3호
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    • pp.22-32
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    • 2021
  • 대한제국 시기 경운궁에 부속된 왕실의 제례공간이었으나 현재 비어있는 덕수궁 선원전영역의 복원 사업으로서 조경 복원정비 계획을 수립하였으며, 원형 고증과 유사 사례 고찰을 통해서 다음과 같은 연구 결과를 도출하였다. 첫째, 선원전영역에 있었던 전각 배후림의 원지형이 전각의 지반보다 3.0~5.0m 높아서 녹지 경계부에 화계를 설치하여 경관적으로 처리하였다. 둘째, 배후림은 제례에 사용하는 과실을 얻기 위한 유실수원과 제례공간을 상징하는 소나무림으로 구성되었다. 셋째, 궁궐 방문자의 편의를 제공하기 위하여 성역(聖域)의 분위기를 방해하지 않도록 부지 양쪽 끝에 휴게공간을 배치하고, 배후림 내에 산책로를 도입하였으며, 최소한의 조경시설로서 기능적으로 요구되는 안내판, 휴게의자, 수목보호대, 경사로, 보행등·경관조명등을 도입하였다. 넷째, 문헌, 고회화, 사진 등 사료(史料) 고찰과 현장 조사로 궁궐과 제례공간의 기존 식재 정보를 추출하고, 이를 바탕으로 선원전영역 조경공간을 구성하는 전각 마당, 관람로와 휴게공간, 화계, 소나무림, 유실수원의 배식계획을 수립하였다.

Fabrication of Large Area Transmission Electro-Absorption Modulator with High Uniformity Backside Etching

  • Lee, Soo Kyung;Na, Byung Hoon;Choi, Hee Ju;Ju, Gun Wu;Jeon, Jin Myeong;Cho, Yong Chul;Park, Yong Hwa;Park, Chang Young;Lee, Yong Tak
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2013년도 제45회 하계 정기학술대회 초록집
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    • pp.220-220
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    • 2013
  • Surface-normal transmission electro-absorption modulator (EAM) are attractive for high-definition (HD) three-dimensional (3D) imaging application due to its features such as small system volume and simple epitaxial structure [1,2]. However, EAM in order to be used for HD 3D imaging system requires uniform modulation performance over large area. To achieve highly uniform modulation performance of EAM at the operating wavelength of 850 nm, it is extremely important to remove the GaAs substrate over large area since GaAs material has high absorption coefficient below 870 nm which corresponds to band-edge energy of GaAs (1.424 eV). In this study, we propose and experimentally demonstrate a transmission EAM in which highly selective backside etching methods which include lapping, dry etching and wet etching is carried out to remove the GaAs substrate for achieving highly uniform modulation performance. First, lapping process on GaAs substrate was carried out for different lapping speeds (5 rpm, 7 rpm, 10 rpm) and the thickness was measured over different areas of surface. For a lapping speed of 5 rpm, a highly uniform surface over a large area ($2{\times}1\;mm^2$) was obtained. Second, optimization of inductive coupled plasma-reactive ion etching (ICP-RIE) was carried out to achieve anisotropy and high etch rate. The dry etching carried out using a gas mixture of SiCl4 and Ar, each having a flow rate of 10 sccm and 40 sccm, respectively with an RF power of 50 W, ICP power of 400 W and chamber pressure of 2 mTorr was the optimum etching condition. Last, the rest of GaAs substrate was successfully removed by highly selective backside wet etching with pH adjusted solution of citric acid and hydrogen peroxide. Citric acid/hydrogen peroxide etching solution having a volume ratio of 5:1 was the best etching condition which provides not only high selectivity of 235:1 between GaAs and AlAs but also good etching profile [3]. The fabricated transmission EAM array have an amplitude modulation of more than 50% at the bias voltage of -9 V and maintains high uniformity of >90% over large area ($2{\times}1\;mm^2$). These results show that the fabricated transmission EAM with substrate removed is an excellent candidate to be used as an optical shutter for HD 3D imaging application.

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View Factor를 고려한 마이크로그리드 적용용 고효율 P-Type Si 양면형 태양광 모듈의 출력량 예측 (Power Prediction of P-Type Si Bifacial PV Module Using View Factor for the Application to Microgrid Network)

  • 최진호;김광순;차혜림;김규광;방병관;박소영;안형근
    • 한국전기전자재료학회논문지
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    • 제31권3호
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    • pp.182-187
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    • 2018
  • In this study, 20.8% of a p-type Si bifacial solar cell was used to develop a photovoltaic (PV) module to obtain the maximum power under a limited installation area. The transparent back sheet material was replaced during fabrication with a white one, which is opaque in commercial products. This is very beneficial for the generation of more electricity, owing to the additional power generation via absorption of light from the rear side. A new model is suggested herein to predict the power of the bifacial PV module by considering the backside reflections from the roof and/or environment. This model considers not only the frontside reflection, but also the nonuniformity of the backside light sources. Theoretical predictions were compared to experimental data to prove the validity of this model, the error range for which ranged from 0.32% to 8.49%. Especially, under $700W/m^2$, the error rate was as low as 2.25%. This work could provide theoretical and experimental bases for application to a distributed and microgrid network.

합판(合板)의 내화처리(耐火處理)에 관(關)한 연구(硏究) - III. 제1인산(第一燐酸)암모늄처리합판(處理合板)의 내화도(耐火度) (Studies on Plywood Treated Fire-Retardant - III. The Fire-Retardant Degree of Monoammonium Phosphate Treated Plywood)

  • 김종만
    • Journal of the Korean Wood Science and Technology
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    • 제14권4호
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    • pp.21-28
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    • 1986
  • Plywood used for construction as a decorative inner material is inflammable and can fire accident, causing destruction of human life and property. In this study, 3.5mm Kapur plywoods were soaked in the 23% monoammonium phosphate solutions by cold soaking method 3, 6, 9hrs and hot-cold bath method for 3/3hrs, and redrying was carried out by press-drying at the platen temperature of 110, 130, 160, 180$^{\circ}C$, and then fire test was carried out to investigate burning point, flame exhausted length, frame spread length, back side carbonized area and weight loss. The results are as follows; 1. In cold soaking method for 3, 6, 9hrs. retentions of monoammonium phosphate were 0.377, 0.448, 0.498kg/(30cm)$^3$ respectively, and in hot-cold bath method for 3/3hrs, the retention was 1.331kg(30cm)$^3$ that exceeded the minimum retention 1.124kg/(30cm)$^3$. 2. Correlation coefficients among the variable were shown in table 2. From the table, it could be recognized that there were close negative correlations between the treatment and burning point, flame spread length, back side carbonized area, flame exhausted time and weight loss, and there was negative correlation between treating time and back side carbonized area, but there was positive correlation between platen temperature and burning point. 3. From table 3, it can be observed that there were highly significant differences for burning point, flame spread length, flame exhausted time, back side carhonized area, weight loss between treatments. And in 2-way interactions, there were also highly significant for burning point, flame spread length, flame exhausted time, weight loss between time x treatment. 4. It was observed that burning point, flame exhausted time, flame spread length, back side carbonized area, and weight loss in fire-retardant treated plywood were the best effects in fire-retardant treated plywood, water treated plywood and nontreated plywood. In conclusion, I can estimate that absorbed chemical contents by hot-cold bath method for 3/3hrs, have a lot of effects on fire-retardant factors such as burning point, flame spread length, flame exhausted time, backside carbonized area and weight loss, but platen temperatures have a little effects on the fire factors.

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대기오염의 장거리 이동 사례연구 : 황사, TSP, Sulphate의 발원지 추적 (On Long Range Transport of Air Pollutants - Sources and Observations of Yellow Sand, TSP and Sulphate in Korea)

  • 정용승;김태군
    • 한국대기환경학회지
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    • 제7권3호
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    • pp.197-202
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    • 1991
  • It is observed that the outbreak of dust storms (yellow sand) from Northern China and Mongolia occurs a few times in April 1988 and 1990. It is found that a dust storm initiated with strong gusty winds after the passage of a cold front, particularly after defrost of the ground surface of a source region in the early spring. According to meteorological chart, satellite images and trajectory analyses, dust clouds invaded Korea in April 1988 and 1990 were landing in the sink area after 2 $\sim$ 4 days travelling for 2,000 $\sim$ 3,000 km from a source region. It was also observed that in the west coast total suspended particulated (TSP) were 100 $\sim$ 200 $\mug m^{-3}$ and sulphates $(SO_4=)$ were 3 $\sim$ 10 $\mug m^{-3}$. These values clearly exceed the concentrations of a background level measured in the Arctic and Atlantic Ocean. Trajectory analyses and meteorological analyses suggest that the high values occurred with prevailing westerly flows coming from anthropogenic sources in China. High concentrations of air pollutants occurred in the backside of an anticyclone and in the area "col".col".uot;.

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서원의 외부공간 특성 -상주지방의 사례연구- (External Space Characteristics of the Seowon -A case Study of Sangju Area-)

  • 박영달;신영철
    • 한국조경학회지
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    • 제27권3호
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    • pp.18-31
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    • 1999
  • The research deals with external space Seowon(lecture hall) dedicated to education and memorial rises in Sangju area of Choson Dynasty. Characteristics of Seowon as follow; 1. Seowon of Sangju area were built from the middle of 17C to the beginning of 18C. Ideological background of building functioning were grafted into the belief in the three God governing Childbirth, the theory of feng-shui(wind-and water-magic) which is in close connection with the principles of yin and yang, and confucianism and the philosophy of lao-tze and chung-tze. The formation of space were horizontally arrangement and vertical arrangement as the first-learning and then-ancestor shrine of Youngnam provinces. 2. Background and factors of site selection were applied geographical feature, tried to connect owner home town. 3. The shape of path of flow were simple of vertical and curved composition, were continued, were stabilized through composition of human scale's space by reasonable internal. A case of Sangju area, D/H ratio of the front area of buildings and courts was as follows. D/H=1>Hyangkyo> houses on the river>temples>lecture halls. D/H ratio ot the backside areas is as follows. D/H=1>Hyangkyo>houses on the river>lecture halls. 4. Inner garden were planted deciduous than evergreen trees with Lagerstroemia indica. Enclosed dominant trees were planted by Pinus densiflora, Querces seuata.construct GEM strain, and examined for the expression and functional stability in microcosms.

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도로연변 환경시설에 의한 교통소음 저감방안에 관한 연구 (A study on Traffic Noise control by the Environmental facilities around Roadway)

  • 설증민;정용
    • 환경위생공학
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    • 제3권2호
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    • pp.43-60
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    • 1988
  • This study was carried out to determine traffic noise level and analyze noise reduction effects of various sound protection facilities in the area of Seoul, Inch'on, Songchoo and Seoul- Busan Expressway from March to Octover, 1987. The results were as follows; 1. As compared with the environmental standards and the traffic noise level in heavy noise areas, traffic noise levels observed were shown in higher than environmental standards. The noise levels in Seoul were determined at 12.8-18.2 dB(A) in daytime and 19.0-26.9 dB (A) in nighttime. And incase of inch'on, it were 6.7-9.6 dB(A) in daytime, 7.9-18.9 dB(A) in nighttime, respectively. 2. The environmental noise level observed in the backside of protection facilities, such as apartment, soundproof barrier and houses, which were constructed in paralled to the road was lower about 3-5 dB(A) than perpendicular to theroad. Noise recuction effect of upper stairs in apartment was higher than lower stairs. 3. The predicted noise level obtained from the equation $({\triangle}L\;=\; -10\;log\;(^{I'1}/Ii)\;was\;\pm\;1dB$ (A) and the correlation coefficient (r) was 0.923. 4. The noise reduction effect in backside of apartment was measured at on sites and predicted by total noise loss equation. The predicted noise level was 60.9 dB(A) and the measured level was 60.6 dB(A), respectively. 5. The narrow width landscape less than 10m width was almost no effect for the protection of traffic noise. According to the synthesis of the above results, the noise level of the road was exceeding mostly the environmental standard in the heavy traffic areas. The counterplan should be set as well. The insulation of noise protection facilities were effective by the location with near distance from the road edge. The reduction effect of double window in apartment was represented so much. The prediction model could be applied to estimate the noise levels in the roadside as well as the effectiveness for the noise protection facilities.

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스트레스 감도 향상을 위한 턴 온 직후의 조름 효과를 이용한 얇은 질화막 폴리실리콘 전계 효과 트랜지스터 압력센서 (A Polysilicon Field Effect Transistor Pressure Sensor of Thin Nitride Membrane Choking Effect of Right After Turn-on for Stress Sensitivity Improvement)

  • 정한영;이정훈
    • 센서학회지
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    • 제23권2호
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    • pp.114-121
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    • 2014
  • We report a polysilicon active area membrane field effect transistor (PSAFET) pressure sensor for low stress deflection of membrane. The PSAFET was produced in conventional FET semiconductor fabrication and backside wet etching. The PSAFET located at the front side measured pressure change using 300 nm thin-nitride membrane when a membrane was slightly strained by the small deflection of membrane shape from backside with any physical force. The PSAFET showed high sensitivity around threshold voltage, because threshold voltage variation was composed of fractional function form in sensitivity equation of current variation. When gate voltage was biased close to threshold voltage, a fractional function form had infinite value at $V_{tn}$, which increased the current variation of sensitivity. Threshold voltage effect was dominant right after the PSAFET was turned on. Narrow transistor channel established by small current flow was choked because electron could barely cross drain-source electrodes. When gate voltage was far from threshold voltage, threshold voltage effect converged to zero in fractional form of threshold voltage variations and drain current change was mostly determined by mobility changes. As the PSAFET fabrication was compatible with a polysilicon FET in CMOS fabrication, it could be adapted in low pressure sensor and bio molecular sensor.