• Title/Summary/Keyword: Backside area

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Optimization of Backside Etching with High Uniformity for Large Area Transmission-Type Modulator

  • Lee, Soo-Kyung;Na, Byung-Hoon;Ju, Gun-Wu;Choi, Hee-Ju;Lee, Yong-Tak
    • Proceedings of the Korean Vacuum Society Conference
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    • 2012.08a
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    • pp.319-320
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    • 2012
  • Large aperture optical modulator called optical shutter is a key component to realize time-of-flight (TOF) based three dimensional (3D) imaging systems [1-2]. The transmission type electro-absorption modulator (EAM) is a prime candidate for 3D imaging systems due to its advantages such as small size, high modulation performance [3], and ease of forming two dimensional (2D) array over large area [4]. In order to use the EAM for 3D imaging systems, it is crucial to remove GaAs substrate over large area so as to obtain high uniformity modulation performance at 850 nm. In this study, we propose and experimentally demonstrate techniques for backside etching of GaAs substrate over a large area having high uniformity. Various methods such as lapping and polishing, dry etching for anisotropic etching, and wet etching ([20%] C6H8O7 : H2O2 = 5:1) for high selectivity backside etching [5] are employed. A high transmittance of 80% over the large aperture area ($5{\times}5mm^2$) can be obtained with good uniformity through optimized backside etching method. These results reveal that the proposed methods for backside etching can etch the substrate over a large area with high uniformity, and the EAM fabricated by using backside etching method is an excellent candidate as optical shutter for 3D imaging systems.

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Influence of roadside buildings on the noise in the backside blocks in city area (도시내 가로변 빌딩이 도로 이면지역의 소음에 미치는 영향)

  • Kim, Yong-Seong;Haan, Chan-Hoon
    • The Journal of the Acoustical Society of Korea
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    • v.38 no.3
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    • pp.352-362
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    • 2019
  • The old residences and shops in the backside blocks are affected by the traffic noises from the main road. The noise of the backside roads is affected by the following factors such as the height of the roadside buildings, the distance between the road and the backside streets, distance among adjacent roadside buildings, and the difference of the adjacent building heights. The both noise levels on the road and the backside street were measured simultaneously in 15 urban blocks of a city which can be categorized into two types of roadside building plans ; 1) one single building along the street, 2) buildings arranged on one axis beside the road. As the results, there is no significant noise reduction due to the width of the buildings in general. However, in the cases of buildings arranged on one axis beside the road, it was found that the average noise reduction was 12 dB(A) on the basis of the building height of 4 m. Also, it was analysed that for each 4 m increase in the building height, noise reduction occurred by 2 dB(A) beyond building height of 4 m. In general, it was proved that the noise of the back streets is mainly affected by the lowest height of the roadside buildings. It was found that noise is increased by 1 dB(A) for each 4 m increase of the height difference between adjacent buildings. Also, It was revealed that for each 0.5 m increase in the distance between roadside building, noise reduction decreased by 1 dB(A).

A Landscape Restoration and Maintenance Plan in the Seonwonjeon of the Deoksugung Palace (덕수궁 선원전(璿源殿)영역의 조경 복원정비 계획)

  • So, Hyun-Su;Kim, Mi-Jeong
    • Journal of the Korean Institute of Traditional Landscape Architecture
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    • v.39 no.3
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    • pp.22-32
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    • 2021
  • The Seonwonjeon(璿源殿) in the Deoksugung Palace was initially the ritual space for the royal family affiliated with the Gyeongungung Palace during the Korean Empire. It is currently, however, empty, as a landscape restoration and maintenance plan is established as a part of the restoration project for the Seonwonjeon area. The following results were obtained through the historical investigation of the original form and examination of similar cases. First, the original topography of the backside grove, which had been in the Seonwonjeon area, is 3.0-5.0m higher than the base of the building, and a terraced flower bed(花階) was installed on the border of the green to set off the difference in a scenic way. Second, the backside grove was composed with fruit trees to bear fruits used in rites and pine trees which symbolize the ritual space. Third, resting places were established at both ends of the site for the convenience of visitors without interrupting the atmosphere of the sacred ground. A trail was also created inside the backside grove along with minimum landscape elements, including functionally required items, such as the signboard, bench, tree guard, ramp, street lights, and landscaping lights. Fourth, the information on original planting in the palace and ritual space was extracted through historical materials, such as literatures, antique paintings, and photographs along with site surveys. Based on the information acquired, a planting plan was established for the courtyard, pedestrian road, resting places, terraced flower bed, pine grove, and fruit tree garden, which constitute the landscaping space of the Seonwonjeon area.

Fabrication of Large Area Transmission Electro-Absorption Modulator with High Uniformity Backside Etching

  • Lee, Soo Kyung;Na, Byung Hoon;Choi, Hee Ju;Ju, Gun Wu;Jeon, Jin Myeong;Cho, Yong Chul;Park, Yong Hwa;Park, Chang Young;Lee, Yong Tak
    • Proceedings of the Korean Vacuum Society Conference
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    • 2013.08a
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    • pp.220-220
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    • 2013
  • Surface-normal transmission electro-absorption modulator (EAM) are attractive for high-definition (HD) three-dimensional (3D) imaging application due to its features such as small system volume and simple epitaxial structure [1,2]. However, EAM in order to be used for HD 3D imaging system requires uniform modulation performance over large area. To achieve highly uniform modulation performance of EAM at the operating wavelength of 850 nm, it is extremely important to remove the GaAs substrate over large area since GaAs material has high absorption coefficient below 870 nm which corresponds to band-edge energy of GaAs (1.424 eV). In this study, we propose and experimentally demonstrate a transmission EAM in which highly selective backside etching methods which include lapping, dry etching and wet etching is carried out to remove the GaAs substrate for achieving highly uniform modulation performance. First, lapping process on GaAs substrate was carried out for different lapping speeds (5 rpm, 7 rpm, 10 rpm) and the thickness was measured over different areas of surface. For a lapping speed of 5 rpm, a highly uniform surface over a large area ($2{\times}1\;mm^2$) was obtained. Second, optimization of inductive coupled plasma-reactive ion etching (ICP-RIE) was carried out to achieve anisotropy and high etch rate. The dry etching carried out using a gas mixture of SiCl4 and Ar, each having a flow rate of 10 sccm and 40 sccm, respectively with an RF power of 50 W, ICP power of 400 W and chamber pressure of 2 mTorr was the optimum etching condition. Last, the rest of GaAs substrate was successfully removed by highly selective backside wet etching with pH adjusted solution of citric acid and hydrogen peroxide. Citric acid/hydrogen peroxide etching solution having a volume ratio of 5:1 was the best etching condition which provides not only high selectivity of 235:1 between GaAs and AlAs but also good etching profile [3]. The fabricated transmission EAM array have an amplitude modulation of more than 50% at the bias voltage of -9 V and maintains high uniformity of >90% over large area ($2{\times}1\;mm^2$). These results show that the fabricated transmission EAM with substrate removed is an excellent candidate to be used as an optical shutter for HD 3D imaging application.

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Power Prediction of P-Type Si Bifacial PV Module Using View Factor for the Application to Microgrid Network (View Factor를 고려한 마이크로그리드 적용용 고효율 P-Type Si 양면형 태양광 모듈의 출력량 예측)

  • Choi, Jin Ho;Kim, David Kwangsoon;Cha, Hae Lim;Kim, Gyu Gwang;Bhang, Byeong Gwan;Park, So Young;Ahn, Hyung Keun
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.31 no.3
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    • pp.182-187
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    • 2018
  • In this study, 20.8% of a p-type Si bifacial solar cell was used to develop a photovoltaic (PV) module to obtain the maximum power under a limited installation area. The transparent back sheet material was replaced during fabrication with a white one, which is opaque in commercial products. This is very beneficial for the generation of more electricity, owing to the additional power generation via absorption of light from the rear side. A new model is suggested herein to predict the power of the bifacial PV module by considering the backside reflections from the roof and/or environment. This model considers not only the frontside reflection, but also the nonuniformity of the backside light sources. Theoretical predictions were compared to experimental data to prove the validity of this model, the error range for which ranged from 0.32% to 8.49%. Especially, under $700W/m^2$, the error rate was as low as 2.25%. This work could provide theoretical and experimental bases for application to a distributed and microgrid network.

Studies on Plywood Treated Fire-Retardant - III. The Fire-Retardant Degree of Monoammonium Phosphate Treated Plywood (합판(合板)의 내화처리(耐火處理)에 관(關)한 연구(硏究) - III. 제1인산(第一燐酸)암모늄처리합판(處理合板)의 내화도(耐火度))

  • Kim, Jong-Man
    • Journal of the Korean Wood Science and Technology
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    • v.14 no.4
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    • pp.21-28
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    • 1986
  • Plywood used for construction as a decorative inner material is inflammable and can fire accident, causing destruction of human life and property. In this study, 3.5mm Kapur plywoods were soaked in the 23% monoammonium phosphate solutions by cold soaking method 3, 6, 9hrs and hot-cold bath method for 3/3hrs, and redrying was carried out by press-drying at the platen temperature of 110, 130, 160, 180$^{\circ}C$, and then fire test was carried out to investigate burning point, flame exhausted length, frame spread length, back side carbonized area and weight loss. The results are as follows; 1. In cold soaking method for 3, 6, 9hrs. retentions of monoammonium phosphate were 0.377, 0.448, 0.498kg/(30cm)$^3$ respectively, and in hot-cold bath method for 3/3hrs, the retention was 1.331kg(30cm)$^3$ that exceeded the minimum retention 1.124kg/(30cm)$^3$. 2. Correlation coefficients among the variable were shown in table 2. From the table, it could be recognized that there were close negative correlations between the treatment and burning point, flame spread length, back side carbonized area, flame exhausted time and weight loss, and there was negative correlation between treating time and back side carbonized area, but there was positive correlation between platen temperature and burning point. 3. From table 3, it can be observed that there were highly significant differences for burning point, flame spread length, flame exhausted time, back side carhonized area, weight loss between treatments. And in 2-way interactions, there were also highly significant for burning point, flame spread length, flame exhausted time, weight loss between time x treatment. 4. It was observed that burning point, flame exhausted time, flame spread length, back side carbonized area, and weight loss in fire-retardant treated plywood were the best effects in fire-retardant treated plywood, water treated plywood and nontreated plywood. In conclusion, I can estimate that absorbed chemical contents by hot-cold bath method for 3/3hrs, have a lot of effects on fire-retardant factors such as burning point, flame spread length, flame exhausted time, backside carbonized area and weight loss, but platen temperatures have a little effects on the fire factors.

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On Long Range Transport of Air Pollutants - Sources and Observations of Yellow Sand, TSP and Sulphate in Korea (대기오염의 장거리 이동 사례연구 : 황사, TSP, Sulphate의 발원지 추적)

  • 정용승;김태군
    • Journal of Korean Society for Atmospheric Environment
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    • v.7 no.3
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    • pp.197-202
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    • 1991
  • It is observed that the outbreak of dust storms (yellow sand) from Northern China and Mongolia occurs a few times in April 1988 and 1990. It is found that a dust storm initiated with strong gusty winds after the passage of a cold front, particularly after defrost of the ground surface of a source region in the early spring. According to meteorological chart, satellite images and trajectory analyses, dust clouds invaded Korea in April 1988 and 1990 were landing in the sink area after 2 $\sim$ 4 days travelling for 2,000 $\sim$ 3,000 km from a source region. It was also observed that in the west coast total suspended particulated (TSP) were 100 $\sim$ 200 $\mug m^{-3}$ and sulphates $(SO_4=)$ were 3 $\sim$ 10 $\mug m^{-3}$. These values clearly exceed the concentrations of a background level measured in the Arctic and Atlantic Ocean. Trajectory analyses and meteorological analyses suggest that the high values occurred with prevailing westerly flows coming from anthropogenic sources in China. High concentrations of air pollutants occurred in the backside of an anticyclone and in the area "col".col".uot;.

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External Space Characteristics of the Seowon -A case Study of Sangju Area- (서원의 외부공간 특성 -상주지방의 사례연구-)

  • 박영달;신영철
    • Journal of the Korean Institute of Landscape Architecture
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    • v.27 no.3
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    • pp.18-31
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    • 1999
  • The research deals with external space Seowon(lecture hall) dedicated to education and memorial rises in Sangju area of Choson Dynasty. Characteristics of Seowon as follow; 1. Seowon of Sangju area were built from the middle of 17C to the beginning of 18C. Ideological background of building functioning were grafted into the belief in the three God governing Childbirth, the theory of feng-shui(wind-and water-magic) which is in close connection with the principles of yin and yang, and confucianism and the philosophy of lao-tze and chung-tze. The formation of space were horizontally arrangement and vertical arrangement as the first-learning and then-ancestor shrine of Youngnam provinces. 2. Background and factors of site selection were applied geographical feature, tried to connect owner home town. 3. The shape of path of flow were simple of vertical and curved composition, were continued, were stabilized through composition of human scale's space by reasonable internal. A case of Sangju area, D/H ratio of the front area of buildings and courts was as follows. D/H=1>Hyangkyo> houses on the river>temples>lecture halls. D/H ratio ot the backside areas is as follows. D/H=1>Hyangkyo>houses on the river>lecture halls. 4. Inner garden were planted deciduous than evergreen trees with Lagerstroemia indica. Enclosed dominant trees were planted by Pinus densiflora, Querces seuata.construct GEM strain, and examined for the expression and functional stability in microcosms.

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A study on Traffic Noise control by the Environmental facilities around Roadway (도로연변 환경시설에 의한 교통소음 저감방안에 관한 연구)

  • Sul Jeung Min;Chung Yong
    • Journal of environmental and Sanitary engineering
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    • v.3 no.2 s.5
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    • pp.43-60
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    • 1988
  • This study was carried out to determine traffic noise level and analyze noise reduction effects of various sound protection facilities in the area of Seoul, Inch'on, Songchoo and Seoul- Busan Expressway from March to Octover, 1987. The results were as follows; 1. As compared with the environmental standards and the traffic noise level in heavy noise areas, traffic noise levels observed were shown in higher than environmental standards. The noise levels in Seoul were determined at 12.8-18.2 dB(A) in daytime and 19.0-26.9 dB (A) in nighttime. And incase of inch'on, it were 6.7-9.6 dB(A) in daytime, 7.9-18.9 dB(A) in nighttime, respectively. 2. The environmental noise level observed in the backside of protection facilities, such as apartment, soundproof barrier and houses, which were constructed in paralled to the road was lower about 3-5 dB(A) than perpendicular to theroad. Noise recuction effect of upper stairs in apartment was higher than lower stairs. 3. The predicted noise level obtained from the equation $({\triangle}L\;=\; -10\;log\;(^{I'1}/Ii)\;was\;\pm\;1dB$ (A) and the correlation coefficient (r) was 0.923. 4. The noise reduction effect in backside of apartment was measured at on sites and predicted by total noise loss equation. The predicted noise level was 60.9 dB(A) and the measured level was 60.6 dB(A), respectively. 5. The narrow width landscape less than 10m width was almost no effect for the protection of traffic noise. According to the synthesis of the above results, the noise level of the road was exceeding mostly the environmental standard in the heavy traffic areas. The counterplan should be set as well. The insulation of noise protection facilities were effective by the location with near distance from the road edge. The reduction effect of double window in apartment was represented so much. The prediction model could be applied to estimate the noise levels in the roadside as well as the effectiveness for the noise protection facilities.

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A Polysilicon Field Effect Transistor Pressure Sensor of Thin Nitride Membrane Choking Effect of Right After Turn-on for Stress Sensitivity Improvement (스트레스 감도 향상을 위한 턴 온 직후의 조름 효과를 이용한 얇은 질화막 폴리실리콘 전계 효과 트랜지스터 압력센서)

  • Jung, Hanyung;Lee, Junghoon
    • Journal of Sensor Science and Technology
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    • v.23 no.2
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    • pp.114-121
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    • 2014
  • We report a polysilicon active area membrane field effect transistor (PSAFET) pressure sensor for low stress deflection of membrane. The PSAFET was produced in conventional FET semiconductor fabrication and backside wet etching. The PSAFET located at the front side measured pressure change using 300 nm thin-nitride membrane when a membrane was slightly strained by the small deflection of membrane shape from backside with any physical force. The PSAFET showed high sensitivity around threshold voltage, because threshold voltage variation was composed of fractional function form in sensitivity equation of current variation. When gate voltage was biased close to threshold voltage, a fractional function form had infinite value at $V_{tn}$, which increased the current variation of sensitivity. Threshold voltage effect was dominant right after the PSAFET was turned on. Narrow transistor channel established by small current flow was choked because electron could barely cross drain-source electrodes. When gate voltage was far from threshold voltage, threshold voltage effect converged to zero in fractional form of threshold voltage variations and drain current change was mostly determined by mobility changes. As the PSAFET fabrication was compatible with a polysilicon FET in CMOS fabrication, it could be adapted in low pressure sensor and bio molecular sensor.