• 제목/요약/키워드: Backplate

검색결과 16건 처리시간 0.024초

기판접합기술을 이용한 두꺼운 백플레이트와 수직음향구멍을 갖는 정전용량형 마이크로폰의 설계와 제작 (Design and fabrication of condenser microphone with rigid backplate and vertical acoustic holes using DRIE and wafer bonding technology)

  • 권휴상;이광철
    • 센서학회지
    • /
    • 제16권1호
    • /
    • pp.62-67
    • /
    • 2007
  • This paper presents a novel MEMS condenser microphone with rigid backplate to enhance acoustic characteristics. The MEMS condenser microphone consists of membrane and backplate chips which are bonded together by gold-tin (Au/Sn) eutectic solder bonding. The membrane chip has 2.5 mm${\times}$2.5 mm, $0.5{\mu}m$ thick low stress silicon nitride membrane, 2 mm${\times}$2 mm Au/Ni/Cr membrane electrode, and $3{\mu}m$ thick Au/Sn layer. The backplate chip has 2 mm${\times}$2 mm, $150{\mu}m$ thick single crystal silicon rigid backplate, 1.8 mm${\times}$1.8 mm backplate electrode, and air gap, which is fabricated by bulk micromachining and silicon deep reactive ion etching. Slots and $50-60{\mu}m$ radius circular acoustic holes to reduce air damping are also formed in the backplate chip. The fabricated microphone sensitivity is $39.8{\mu}V/Pa$ (-88 dB re. 1 V/Pa) at 1 kHz and 28 V polarization voltage. The microphone shows flat frequency response within 1 dB between 20 Hz and 5 kHz.

기판접합기술을 이용한 MEMS 컨덴서 마이크로폰의 설계와 제작 (Design and Fabrication of MEMS Condenser Microphone Using Wafer Bonding Technology)

  • 권휴상;이광철
    • 한국소음진동공학회논문집
    • /
    • 제16권12호
    • /
    • pp.1272-1278
    • /
    • 2006
  • This paper presents a novel MEMS condenser microphone with rigid backplate to enhance acoustic characteristics. The MEMS condenser microphone consists of membrane and backplate chips which are bonded together by gold-tin(Au/Sn) eutectic solder bonding. The membrane chip has $2.5mm{\times}2.5mm$, 0.5${\mu}m$ thick low stress silicon nitride membrane, $2mm{\times}2mm$ Au/Ni/Cr membrane electrode, and 3${\mu}m$ thick Au/Sn layer. The backplate chip has $2mm{\times}2mm$, 150${\mu}m$ thick single crystal silicon rigid backplate, $1.8mm{\times}1.8mm$ backplate electrode, and air gap, which is fabricated by bulk micromachining and silicon deep reactive ion etching. Slots and $50{\sim}60{\mu}m$ radius circular acoustic holes to reduce air damping are also formed in the backplate chip. The fabricated microphone sensitivity is 39.8 ${\mu}V/Pa$(-88 dB re. 1 V/Pa) at 1 kHz and 28 V polarization voltage. The microphone shows flat frequency response within 1 dB between 20 Hz and 5 kHz.

Development of a Spherically Focused Capacitive-film Air-coupled Ultrasonic Transducer

  • Song, Jun-Ho;Chimenti Dale E.
    • 비파괴검사학회지
    • /
    • 제25권6호
    • /
    • pp.446-450
    • /
    • 2005
  • We have built a spherically focused, not using acoustic mirrors, capacitive micromachined air-coupled ultrasonic transducer. A flexible backplate of a copper/polyimide backplate is used, permitting it to conform to a spherically shaped substrate. The backplate is patterned with $40-{\mu}m$ depressions having $80-{\mu}m$ center-to-center spacing. A $6-{\mu}m$ thick aluminized Mylar film completing the transducer is deformed to allow it to conform to the spherical backplate. The device's frequency spectrum is centered at 805kHz with -6dB points at 440 and 1210kHz.

Backplate의 유무에 따른 맞대기 용접 시험편의 피로강도 평가 (Fatigue Assessment of Butt Welded Specimen According to the Existence of the Backplate)

  • 한주호;김성민;이우일;강성원;김명현
    • Journal of Welding and Joining
    • /
    • 제27권1호
    • /
    • pp.90-94
    • /
    • 2009
  • In this study, a series of fatigue test was performed to evaluate the fatigue strength of butt welded specimens. Effective notch stress through finite element analysis was conducted to analyze the fatigue results. As a results, no significant decrease in fatigue strength was observed when backplates were present. The S-N curve that based on effective notch stress appeared a similar fatigue lift to FAT 225 curve without reference to existence of backplates.

고해상도 광학영상장비 반사경 구조해석 (Mirror Structure Analysis of High Resolution Optical Imaging Payload)

  • 권우근;김광로;이영신
    • 대한기계학회:학술대회논문집
    • /
    • 대한기계학회 2003년도 춘계학술대회
    • /
    • pp.462-467
    • /
    • 2003
  • For the Space-borne optical imaging payload system design, light weighting and moderate stiffness of mirror and/or mirror fixation device is very important aspects. The front surface of mirror is regulated by optical performance requirement, but the shape of backplate of mirror is to be optimised while satisfing the required stiffness and weight. According to the results, the best shape of backplate cell is triangular. And also related geometric dimensions and the optimised mounting point of MFD(Mirror Fixation Device) is presented. Finally, natural frequencies and shpaes of mirror structure are analysed.

  • PDF

한국전통가구의 금속 손잡이 영문표기 연구 - 한국 및 서구를 중심으로 - (A Study on Terminology of Metal Handles in Traditional Korean Furniture - Focusing on Korean and Western Furniture -)

  • 문선옥
    • 한국가구학회지
    • /
    • 제23권4호
    • /
    • pp.449-459
    • /
    • 2012
  • The article aims to making a comparison between traditional Korean and Western furniture metal handles to give the detail information of the handle terms by analyzing the related literature including internet and interviews. In terms of that, the Korean and Western metal handles are compared in the types, components, materials, methods, and terms affecting the development made by the craftsmen before the Industrial Revolution about the mid or late 18th century. As a result, first, ring and drop pull handles were mostly and wooden knobs were a little used to open the furniture doors and drawers. The Korean drop pulls, Deulswae, came out after the ring pulls, Gori, while the Western drops called loop or bail handles as well, came out before the ring pulls. Second, the components were composed by ring, Gori, loop or bail, Deulswae, Post, Baemok, washer, Baemokbatchim, and backplate, Deulswaebatchim. Most of the Western handles were fastened by the bolt and nut, while the post of two strips, Baemok, fastened the Korean metal handles. Third, the metal handles were created of brass and iron mostly, gilded gold and silver. Forth, the method were largely used by casting, engraving, forging, plating, and hammering in the Korean handles, and by casting, molding, engraving, and stamped in the Western handles. Finally, the terms such as "knobs, pulls, drops, ring and drop pulls, loop or bail handles, posts, washers, backplate, casting, molding, engraving, forging, plating, and stamped" were clarified by the two comparison in Korean and English.

  • PDF

고속용 브레이크에서 디스크 패드의 열응력 특성에 관한 연구 (Thermal Stress Characteristics of a Disk Pad in High-Speed Brakes)

  • 김청균;조승현
    • Tribology and Lubricants
    • /
    • 제14권4호
    • /
    • pp.29-36
    • /
    • 1998
  • The thermal characteristics of a disk such as temperature distribution, thermal behaviors and thermal stress during a braking operation has been analyzed for a high-speed brake using the finite element method. The maximum stress for a pad loaded against a disk was occurred at the trailing and leading edges of the disk pad at the underlayer-backplate interface. The FEM results indicate that the thermal characteristics of the spot type pad shows good performance compared with those of the flat type pad. Thus, the spot type pad in brake system may be recommended for the high-speed train system.

운전 익단간극을 고려한 마이크로터빈 코어용 원심압축기의 성능특성 연구 (Performance Test of Centrifugal Compressor for Microturbine with Running Tip Clearance)

  • 강정식;임병준;차봉준;양수석
    • 한국유체기계학회 논문집
    • /
    • 제8권1호
    • /
    • pp.7-15
    • /
    • 2005
  • Tip clearance of centrifugal compressor affects the performance. Larger tip clearance results in lower efficiency. What really affects the performance is the running tip clearance, not the cold tip clearance. When the compressor is operating, blade strain and the pressure difference between impeller backplate and hub affects the running tip clearance. This paper describes measured running tip clearance and its effects on the performance of centrifugal compressor. Cold tip clearance before operation was 0.4 mm and running tip clearance varied from 0.86 mm to 0.25 mm with impeller exit pressure. As the pressure at impeller exit increases, the running tip clearance tends to decreases. The target running tip clearance for Compressor at $100\%$ speed was 0.3 mm, and it turned out to be exactly 0.30 mm from experiment.

고속 전철에서 디스크 패드의 열응력 특성에 관한 연구 (Thermal Stress Characteristics of a Disk Pad in High-Speed Trains)

  • 김청균;조승현
    • 한국윤활학회:학술대회논문집
    • /
    • 한국윤활학회 1997년도 제26회 추계학술대회
    • /
    • pp.245-255
    • /
    • 1997
  • The thermal characteristics of a disk such as temperature distribution, thermal behaviours and thermal stress during a braking operation has been analyzed for a high-speed train using the finite element method. The maximum stress for a pad loaded against a disk was occurred at the trailing and leading edges of the disk pad at the underlayer-backplate interface. The FEM results indictate that the thermal characterisics of the spot type pad shows good performance compared with those of the flat type pad. Thus, the spot type pad in brake system may be recommended for the high-speed train system.

  • PDF

운전 익단간극을 고려한 마이크로터빈 코어용 원심압축기의 성능특성 연구 (Performance Test of Centrifugal Compressor for Microturbine with Running Tip Clearance)

  • 강정식;임병준;차봉준;양수석
    • 유체기계공업학회:학술대회논문집
    • /
    • 유체기계공업학회 2004년도 유체기계 연구개발 발표회 논문집
    • /
    • pp.411-418
    • /
    • 2004
  • Tip clearance of centrifugal compressor affects the performance. Larger tip clearance results in lower efficiency. What really affects the performance is the running tip clearance, not the cold tip clearance. When the compressor is operating, blade strain and the pressure difference between impeller backplate and hub affects the running tip clearance. This paper describes measured running tip clearance and its effects on the performance of centrifugal compressor. Cold tip clearance before operation was 0.4 mm and running tip clearance varied from 0.86 mm to 0.25 mm with impeller exit pressure. As the pressure at impeller exit increases, the routing tip clearance tends to decreases. The target running tip clearance for compressor at $100\%$ speed was 0.3 mm and it turned out to be exactly 0.30 mm from experiment.

  • PDF