• 제목/요약/키워드: BaTiO3

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새로운 적층방법으로 제조된 고품위 비정질/다결정 $BaTiO_3$ 적층박막의 특성과 교류 구동형 박막 전기 발광소자에의 응용 (Characteristics of Amorphous/Polycrystalline $BaTiO_3$ Double Layer Thin Films with High Performance Prepared New Stacking Method and its Application to AC TFEL Device)

  • 송만호;이윤희;한택상;오명환;윤기현
    • 한국세라믹학회지
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    • 제32권7호
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    • pp.761-768
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    • 1995
  • Double layered BaTiO3 thin films with high dielectric constant as well as good insulating property were prepared for the application to low voltage driving thin film electroluminescent (TFEL) device. BaTiO3 thin films were formed by rf-magnetron sputtering technique. Amorphous and polycrystalline BaTiO3 thin films were deposited at the substrate temperatures of room temperature and 55$0^{\circ}C$, respectively. Two kinds of films prepared under these conditions showed high resistivity and high dielectric constant. The figure of merit (=$\varepsilon$r$\times$Eb.d) of polycrystalline BaTiO3 thin film was very high (8.43$\mu$C/$\textrm{cm}^2$). The polycrystalline BaTiO3 showed a substantial amount of leakage current (I), under the high electric field above 0.5 MV/cm. The double layered BaTiO3 thin film, i.e., amorphous BaTiO3 layer coated polycrystalline BaTiO3 thin film, was prepared by the new stacking method and showed very good dielectric and insulating properties. It showed a high dielectric constant fo 95 and leakage current density of 25 nA/$\textrm{cm}^2$ (0.3MV/cm) with the figure of merit of 20$\mu$C/$\textrm{cm}^2$. The leakage current density in the double layered BaTiO3 was much smaller than that in polycrystalline BaTiO3 under the high electric field. The saturated brightness of the devices using double layered BaTiO3 was about 220cd/$m^2$. Threshold voltage of TFEL devices fabricated on double layered BaTiO3 decreased by 50V compared to the EL devices fabricated on amorphous BaTiO3.

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초소형 캐패시터용 $BaTiO_3$분말합성 및 소결특성에 관한 연구 (Study on the Powder Synthesis of $BaTiO_3$ and its Dielectric Properties)

  • 문흥수;박병규;이태근;김철긴;이석근
    • 한국결정학회지
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    • 제10권1호
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    • pp.56-65
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    • 1999
  • 수열법을 이용하여 미세한 BaTiO3 분말을 합성하였다. Ti원으로 두 종류의 TiO2 gel을 사용하였으며 그 크기와 모양을 BaTiO3 합성에 주는 영향을 고찰하였다. 구형의 단분산 TiO2 gel을 사용하여 Ba(NO3)2 수용액에서 수열 합성한 BaTiO3 분말은 입자크기도 균일하였으며 응집이 일어나지 않아않았다. 비교적 낮은 pH에서 구형 TiO2 gel을 사용하여 합성한 BaTiO3 분말은 구형을 그대로 유지하였지만 높은 pH에서 합성한 BaTiO3 분말은 그 구형이 분해되었다. KOH양이 많아지고, 합성시간이 길어짐에 따라 합성된 BaTiO3 분말의 크기는 커졌으며 그 c/a 값도 증가하였다.

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$BaB_2B_4$ 첨가에 따른 반도성 $BaTiO_3$ 세라믹스의 소결 및 전기적 특성 (Sintering and Electrical Characteristics of Semiconducting $BaTiO_3$ Ceramics with Addition of $BaB_2O_4$)

  • 허영우;이준형;김정주;김남경;조상희
    • 한국세라믹학회지
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    • 제33권9호
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    • pp.1038-1044
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    • 1996
  • The variations of sintering and electrical characteristics of semiconducting BaTiO3 ceramics with sintering agents added were investigated comparing the case of BaB2O4 addition to BN and TiO2 addition. When BaB2O4 added in BaTiO3 ceramics the densitifcation of specimen could be acheived more easily and recvealed the better PTCR characteristics than BN and TiO2 addition. As increase of addition of BaB2O4 in BaTiO3 spec imens the slope of resistivity jump also increased but the temperature of maximum resistivity decreased, It was supposed that addition of BaB2O4 led to increase of Ns (acceptor state density) value at grain boundaries.

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적층 세라믹콘덴서 제조공정에서 $BaTiO_3$의 분산이 테이프캐스팅 성형체의 물성에 미치는 영향 (Effect of $BaTiO_3$ Dispersion on the Properties of Cast Tapes in Processing of Multilayer Ceramic Capacitor(MLCC))

  • 김봉호;김병관;김명호;백운규
    • 한국세라믹학회지
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    • 제33권2호
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    • pp.214-222
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    • 1996
  • The effect of physicochemical properties of organic solvent and dispersant among organic solvent dispersant binder and plasticizer which are used as processing additives in MLCC fabrication process on the dispersion of BaTiO3 was studied. The steric and electrostatic stabilization mechanisms in dispersion of BaTiO3 in organic media were evaluated respectively. The sttability of BaTiO3 achieved bysteric stabilization was dependent on the fraction of surface coverage of dispersant adsorption on BaTiO3. The electrostatic repulsive forces of BaTiO3 particles dispersed in orgainc media was found to be appreciabley great and dependent mainly on the kinds of organic solvent used. The mechanism affecting the stability of BaTiO3 was studied by the method of rheologi-cal behaviors of BaTiO3 suspension.

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$({Zn}_{1/3}{Nb}_{2/3}){O}_{2}$의 첨가가 세라믹스의 상변화 및 유전특성에 미치는 영향 (Effect of $({Zn}_{1/3}{Nb}_{2/3}){O}_{2}$ Addition on the phase changes and dielectric properties of ${BaTiO}_{3}-{3TiO}_{2}$ceramics)

  • 김상근;박찬식;변재동;김경용
    • 대한전기학회논문지
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    • 제44권8호
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    • pp.1068-1074
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    • 1995
  • Effect of (Zn$_{1}$3/Nb$_{2}$3/) $O_{2}$ addition on the phase changes and microwave dielectric properties of BaTi $O_{3}$-3Ti $O_{2}$ ceramics were investigated. Addition of (Zn$_{1}$3/Nb$_{2}$3/) $O_{2}$ to BaTi $O_{3}$-3Ti $O_{2}$ resulted in the formation of Ba $Ti_{4}$$O_{9}$, $Ba_{2}$ $Ti_{9}$ $O_{20}$, Ba(Zn$_{1}$3/Nb$_{2}$3/) $O_{3}$, and Ti $O_{2}$ phases. Ba $Ti_{4}$$O_{9}$ phase was gradually transformed to $Ba_{2}$ $Ti_{9}$ $O_{20}$. This was identified by XRD and microstructure. As the Ba $Ti_{4}$$O_{9}$ phase transformed to $Ba_{2}$ $Ti_{9}$ $O_{20}$ phase, the dielectric constant increased to 37.5. Q*f$_{o}$ value was 40000 at x=0.04, and the temperature coefficient of resonant frequency was +10ppm/.deg. C.C.. C.C.

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임베디드 커패시터용 세라믹(BaTiO3)-고분자(에폭시) 필름의 세라믹 분말 형상 및 함량에 따른 전기적 특성 (Effect of Ceramic Powder Content and Shape on the Electrical Properties of Ceramic(BaTiO3)-polymer(Epoxy) Composite for Embedded Capacitors)

  • 한정우;윤중락;제해준;이동호;이경민
    • 한국전기전자재료학회논문지
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    • 제22권6호
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    • pp.495-500
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    • 2009
  • The ceramic($BaTiO_3$)-polymer(epoxy) composites have been widely investigated as dielectric materials for embedded capacitors in printed circuit boards (PCBs). The dielectric properties of $BaTiO_3$/epoxy composites prepared using the agglomerated $BaTiO_3$ particles were investigated in the present study. The dielectric constants of the composites prepared using the agglomerated $BaTiO_3$ particles were about 2 times higher than those of the composites with the dispersed $BaTiO_3$ particles. The insulation resistance of the composites prepared using the agglomerated $BaTiO_3$ particles were lower than those of the composites with dispersed $BaTiO_3$ particles. As a result, there is tradeoff between high dielectric constant and insulation resistance in the $BaTiO_3$/epoxy composites. So it is important to select proper agglomerated or dispersed $BaTiO_3$ particles in accordance with needs.

BaTiO3 타겟의 R.F. 방전 중 변수에 따른 광반사분광 특성 (Optical Emission Spectroscopy with Parameters During R.F. Discharge of BaTiO3 Target)

  • 박상식
    • 한국재료학회지
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    • 제21권9호
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    • pp.509-514
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    • 2011
  • In this study, optical emission spectroscopy was used to monitor the plasma produced during the RF magnetron sputtering of a $BaTiO_3$ target. The intensities of chemical species were measured by real time monitoring with various discharge parameters such as RF power, pressure, and discharge gas. The emission lines of elemental and ionized species from $BaTiO_3$ and Ti targets were analyzed to evaluate the film composition and the optimized growth conditions for $BaTiO_3$ films. The emissions from Ar(I, II), Ba(I, II) and Ti(I) were found during sputtering of the $BaTiO_3$ target in Ar atmosphere. With increasing RF power, all the line intensities increased because the electron density increased with increasing RF power. When the Ar pressure increased, the Ba(II) and Ti(I) line intensity increased, but the $Ar^+$ line intensity decreased with increasing pressure. This result shows that high pressure is of greater benefit for the ionization of Ba than for that of Ar. Oxygen depressed the intensity of the plasma more than Ar did. When the Ar/$O_2$ ratio decreased, the intensity of Ba decreased more sharply than that of Ti. This result indicates that the plasma composition strongly depends on the discharge gas atmosphere. When the oxygen increased, the Ba/Ti ratio and the thickness of the films decreased. The emission spectra showed consistent variation with applied power to the Ti target during co-sputtering of the $BaTiO_3$ and Ti targets. The co-sputtered films showed a Ba/Ti ratio of 1.05 to 0.73 with applied power to the Ti target. The films with different Ba/Ti ratios showed changes in grain size. Ti excess films annealed at $600^{\circ}C$ did not show the second phase such as $BaTi_2O_5$ and $TiO_2$.

공침법에 의한 $BaTi_4O_9, Ba_2Ti_9O_{20}$$BaTi_5O_{11}$화합물의 합성 및 그의 전기적, 열적 특성 (Synthesis of $BaTi_4O_9, Ba_2Ti_9O_{20}$ and $BaTi_5O_{11}$ Compounds by Coprecipitation Method and Their Electrical and Thermal Properties)

  • 김종옥;손우창;전성용;이경희;이병하
    • 한국세라믹학회지
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    • 제31권9호
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    • pp.1005-1011
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    • 1994
  • The three different composition of BaTi4O9, Ba2Ti9O20 and BaTi5O11 were prepared by coprecipitation process, and then the dielectric properties of these compounds were measured at low microwave frequencies. The powder showing high level of purity was synthesised by the coprecipition reaction of BaCl2 and TiCl4 where (NH4)2CO3 and NH4OH were used as a deflocculent. Followings are the result of this study: 1. The sintering temperature increased with increasing TiO2 content. 2. BaTi4O9 powder were synthesized as a single phase by this processing technique, but the resultant Ba2Ti9O20 and BaTi5O11 phase existed with Ba2Ti9O20 and BaTi5O11 phases. 3. Single phase BaTi4O9 showed high dielectric constant value of 35, high Q value of 8100.

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적층구조 $BaTiO_3$ 박막의 전기적 특성 (Electrical properties of layered $BaTiO_3$ thin film)

  • 송만호;윤기현
    • 한국세라믹학회지
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    • 제34권2호
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    • pp.181-187
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    • 1997
  • 다결정 BaTiO3 박막의 높은 유전상수와 비정질 BaTiO3 박막의 우수한 절연특성을 함께 지닌 적층구조 BaTiO3 박막을 제조하여 적층방법에 따른 전기적 특성을 비교, 평가하였다. BaTiO3 박막은 ITO 투명전전막이 입혀진 유리기판위에 rf=magnetron sputtering방법으로 형성하였으며 적층구조 BaTiO3박막의 제조에는 다결정 BaTiO3 박막의 상부에 기판의 자연 냉각과정중에 비정질층이 형성되는 새로운 적층방법을 사용하였다. 이와같이 제조된 적층박막은 다결정 BaTiO3 박막의 상부에 상온에서 비정질층을 형성시키는 일반적인 적층방법으로 제조한 적층박막에 비하여 높은 단위면적당 정전용량과 유전상수, 우수한 절연특성을 나타내었다. 일반적인 적층방법에 의하여 이중층 구조가 형성되는 반면, 새로운 적층방법으로 제조된 적층박막은 AES depth profile과 전기적 특성 분석을 통하여 비정질/microcrystalline/다결정 구조의 다층구조를 지닌 것으로 확인되었다.

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에폭시/BaTiO$_3$ 복합 내장형 커패시터 필름의 유전상수에 관한 실험값과 이론적 예측값과의 비교 (Comparison of Experimental Values and Theoretical Predictions of the Dielectric Constant of Epoxy/BaTiO$_3$ Composite Embedded Capacitor Films)

  • 조성동;이상용;현진걸;백경욱
    • 마이크로전자및패키징학회지
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    • 제11권1호
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    • pp.87-96
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    • 2004
  • 폴리머/세라믹 복합체는 유기기판용 내장형 커패시터의 가장 유망한 재료다. 폴리머/세라믹 복합체의 유효유전상수를 예측하는 것은 복합재료의 설계에 있어 매우 중요하다. 본 논문에서는 크기가 다른 5가지 $BaTiO_3$ 분말을 이용하여 분말함량에 따른 에폭시/$BaTiO_3$ 복합 내장형 커패시터 필름의 유전상수를 측정하였다. 그 측정 결과를 여러 가지 이론식들에 최소 자승법을 이용해 fitting하여 폴리머/세라믹 복합체의 유효유전상수를 예측하는데 가장 유용한 식을 찾고 BaTiO$_3$ 분말의 유전상수를 추정하고자 하였다. Lichtenecker식과 Jayasundere-Smith식이 에폭시/$BaTiO_3$ 복합 내장형 커패시터 필름의 유전상수 예측에 유용한 것으로 나타났다. 피팅을 통해 계산된 $BaTiO_3$ 분말의 유전상수는 분말의 크기에 따라 100 에서 600 사이였는데 이는 다결정 세라믹 $BaTiO_3$의 유전상수보다 작은 값이다.

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