• 제목/요약/키워드: Automatic level measurement

검색결과 98건 처리시간 0.025초

Automated measurement and analysis of sidewall roughness using three-dimensional atomic force microscopy

  • Su‑Been Yoo;Seong‑Hun Yun;Ah‑Jin Jo;Sang‑Joon Cho;Haneol Cho;Jun‑Ho Lee;Byoung‑Woon Ahn
    • Applied Microscopy
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    • 제52권
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    • pp.1.1-1.8
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    • 2022
  • As semiconductor device architecture develops, from planar field-effect transistors (FET) to FinFET and gate-all-around (GAA), there is an increased need to measure 3D structure sidewalls precisely. Here, we present a 3-Dimensional Atomic Force Microscope (3D-AFM), a powerful 3D metrology tool to measure the sidewall roughness (SWR) of vertical and undercut structures. First, we measured three different dies repeatedly to calculate reproducibility in die level. Reproducible results were derived with a relative standard deviation under 2%. Second, we measured 13 different dies, including the center and edge of the wafer, to analyze SWR distribution in wafer level and reliable results were measured. All analysis was performed using a novel algorithm, including auto fattening, sidewall detection, and SWR calculation. In addition, SWR automatic analysis software was implemented to reduce analysis time and to provide standard analysis. The results suggest that our 3D-AFM, based on the tilted Z scanner, will enable an advanced methodology for automated 3D measurement and analysis.

An obstacle avoidance system of an unmanned aerial vehicle using a laser range finder

  • Kim, Hyun;Miwa, Masafumi;Shim, Joonhwan
    • Journal of Advanced Marine Engineering and Technology
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    • 제37권7호
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    • pp.737-742
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    • 2013
  • Recently, unmanned aircrafts for safe measurement in hazardous locations have been developed. In a method of operation of unmanned aircraft vehicles (UAV), there are two methods of manual control and automatic control. Small UAVs are used for low altitude surveillance flights where unknown obstacles can be encountered. Obstacle avoidance is one of the most challenging tasks which the UAV has to perform with high level of accuracy. In this study, we used a laser range finder as an obstacle detector in automatic navigation of unmanned aircraft to patrol the destination automatically. We proposed a system to avoid obstacles automatically by measuring the angle and distance of the obstacle using the laser range finder.

The NURBS Human Body Modeling Using Local Knot Removal

  • Jo, Joon-Woo;Han, Sung-Soo
    • Fibers and Polymers
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    • 제6권4호
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    • pp.348-354
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    • 2005
  • These days consumers' various demands are accelerating research on apparel manufacturing system including automatic measurement, pattern generation, and clothing simulation. Accordingly, methods of reconstructing human body from point-clouds measured using a three dimensional scanning device are required for apparel CAD system to support these functions. In particular, we present in this study a human body reconstruction method focused on two issues, which are the decision of the number of control point for each sectional curve with error bound and the local knot removal for reducing the unusual concentration of control points. The approximation of sectional curves with error bounds as an approximation criterion leads all sectional curves to their own particular shapes apart from the number of control points. In addition, the application of the local knot removal to construction of human body sectional curves reduces the unusual concentration of control points effectively. The results may be used to produce an apparel CAD system as an automatic pattern generation system and a clothing simulation system through the low level control of NUBS or NURBS.

대용량무선전송장비 전처리장치의 시험 소요시간 단축을 위한 자동 측정 프로그램 연구 (Research on Automatic Measurement Program to shorten Test Time for FEU of HCTRS)

  • 신석호;조태종
    • 한국인터넷방송통신학회논문지
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    • 제20권5호
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    • pp.45-49
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    • 2020
  • 전술정보통신체계(TICN)의 핵심체계인 대용량무선전송장비(HCTRS)용 전처리장치는 송신신호를 증폭시키는 역할을 한다. 전처리장치 성능 시험 중 상호 혼변조와 고조파 시험은 계측기 설정 및 측정을 수동으로 확인하여 시험시간이 오래 걸린다. 따라서 본 논문에서는 각 시험에 필요한 계측기 설정 및 측정을 자동화하는 프로그램을 개발하여 시험 방법을 개선하였다. 본 제안 방법은 상호 혼변조와 고조파 시험을 동시에 진행할 수 있었다. 개선한 시험 방법은 기존 시험 방법과 비교하여 소요시간이 단축됨을 확인하였다. 또한 작업자 숙련도에 따라 시험시간이 결정됐던 기존 시험 방법과는 달리 독립적으로 소요시간을 관리할 수 있어 효율적인 품질보증이 가능할 것으로 기대된다.

Ka 밴드에서 Power Meter 계측 명령어에 따른 측정 정확도와 소요시간에 대한 연구 (A Study on Measurement Accuracy and Required Time based on SCPI of Power Meter in Ka Band)

  • 조태종;신석호
    • 한국인터넷방송통신학회논문지
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    • 제20권5호
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    • pp.51-56
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    • 2020
  • 측정 명령어에 따른 정확도와 소요시간은 효율적인 Ka 밴드용 자동 시험 장비(ATE)를 구축하는데 중요한 요소이다. 이에 따라 본 논문에서는 RF 대표 계측기 Power Meter의 측정 명령어에 대해 연구하였다. 30 G ~ 31 GHz에서 Power Meter의 측정 명령어 FETCH와 MEASURE의 각 측정 레벨에 따른 정확도와 소요시간을 비교하였으며, -70 ~ +20 dBm 영역을 2가지 Power Sensor로 측정하였다. 측정 결과 신속하게 데이터를 불러오는 FETCH 명령어는 잡음 레벨보다 높은 선형 구간에서 비교적 정확한 데이터를 얻을 수 있었다. 가장 정확한 데이터를 얻을 수 있는 MEASURE 명령어는 FETCH 대비 시간이 많이 소요 되었으며, 최대 13.2초가 소요 되었다. 이를 통해 30 G ~ 31 GHz에서 Power Meter 측정 명령어의 정확도와 측정 소요시간을 확인할 수 있었고, 해당 연구 결과는 효율적인 Ka 밴드용 ATE를 구축하는데 기준을 제시할 수 있을 것으로 기대된다.

Shapes of Vowel F0 Contours Influenced by Preceding Obstruents of Different Types - Automatic Analyses Using Tilt Parameters-

  • Jang, Tae-Yeoub
    • 음성과학
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    • 제11권1호
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    • pp.105-116
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    • 2004
  • The fundamental frequency of a vowel is known to be affected by the identity of the preceding consonant. The general agreement is that strong consonants trigger higher F0 than weak consonants. However, there has been a disagreement on the shape of this segmentally affected F0 contours. Some studies report that shapes of contours are differentiated based on the consonant type, but others regard this observation as misleading. This research attempts to resolve this controversy by investigating shapes and slopes of F0 contours of Korean word level speech data produced by four male speakers. Instead of entirely relying on traditional human intuition and judgment, I employed an automatic F0 contour analysis technique known as tilt parameterisation (Taylor 2000). After necessary manipulation of an F0 contour of each data token, various parameters are collapsed into a single tilt value which directly indicates the shape of the contour. The result, in terms of statistical inference, shows that it is not viable to conclude that the type of consonant is significantly related to the shape of F0 contour. A supplementary measurement is also made to see if the slope of each contour bears meaningful information. Unlike shapes themselves, slopes are suspected to be practically more practical for consonantal differentiation, although confirmation is required through further refined experiments.

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결막 충혈도 측정을 위한 공막 영상 분할 (Sclera Segmentation for the Measurement of Conjunctival Injection)

  • 배장표;김광기;정창부;양희경;황정민
    • 한국멀티미디어학회논문지
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    • 제13권8호
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    • pp.1142-1153
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    • 2010
  • 결막 충혈은 결막염, 각막염, 포도막염 등의 안과질환의 초기 증세로서 정량적으로 평가할 수 있다면 진단과 경과 관찰에 도움이 된다. 충혈의 정량화에서 공막의 크기는 중요한 지표이지만 기존의 공막 분할 방법이 정확하지 않기 때문에 수동으로 분할하고 있다. 본 논문에서는 충혈의 정량화를 위하여 level set 방법을 이용한 공막 분할 알고리즘을 제안한다. Level set의 초기 모델은 Lab 색상 모드와 k-means 알고리즘, 기하학적인 정보를 이용하여 지정된다. 헤이시안(hessian) 분석으로 공막과 피부 사이의 골을 향상시킨 영상에 level set을 적용하였다. 제안 방법의 성능 측정을 위하여 52개의 전안부 영상에 대하여 실험하였다. 실험 결과, 제안 방법이 화소값만 이용하는 region growing이나 level set의 초기 모델로 임의의 원을 이용하는 방법보다 성능이 우수하였다. 이 논문에서 제안한 공막 분할 방법은 객관적인 충혈도 측정에서 중요한 요소 기술의 역할을 할 것이다.

무구속적 방법으로 측정된 심전도의 신뢰도 판별 (Quality Level Classification of ECG Measured using Non-Constraint Approach)

  • 김윤재;허정;박광석;김성완
    • 대한의용생체공학회:의공학회지
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    • 제37권5호
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    • pp.161-167
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    • 2016
  • Recent technological advances in sensor fabrication and bio-signal processing enabled non-constraint and non-intrusive measurement of human bio-signals. Especially, non-constraint measurement of ECG makes it available to estimate various human health parameters such as heart rate. Additionally, non-constraint ECG measurement of wheelchair user provides real-time health parameter information for emergency response. For accurate emergency response with low false alarm rate, it is necessary to discriminate quality levels of ECG measured using non-constraint approach. Health parameters acquired from low quality ECG results in inaccurate information. Thus, in this study, a machine learning based approach for three-class classification of ECG quality level is suggested. Three sensors are embedded in the back seat, chest belt, and handle of automatic wheelchair. For the two sensors embedded in back seat and chest belt, capacitively coupled electrodes were used. The accuracy of quality level classification was estimated using Monte Carlo cross validation. The proposed approach demonstrated accuracy of 94.01%, 95.57%, and 96.94% for each channel of three sensors. Furthermore, the implemented algorithm enables classification of user posture by detection of contacted electrodes. The accuracy for posture estimation was 94.57%. The proposed algorithm will contribute to non-constraint and robust estimation of health parameter of wheelchair users.

대기오염도 실측에 의한 대기오염 자동측정망의 대표성 평가 (Evaluation of the Representativeness of Air Quality Monitoring Network in Seoul through Actual Measurement)

  • 전의찬
    • 환경영향평가
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    • 제5권1호
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    • pp.79-85
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    • 1996
  • Simultaneous monitoring in many locations is necessary to evaluate the air quality and analyze future trend of a city, For this purpose, it is essential to install air pollution monitoring network. The first automatic air pollution monitoring network was introduced Seoul in 1973. As of 1995, 20 monitoring stations are now in operation. Concerning the management of the air pollution monitoring network, there was some argument among the relavant scholars, non-governmental organization(NGO) and the government organization. So far, there was no extensive evaluation and analysis about the network. The purpose of this study was to evaluate the representativeness of air quality monitoring network through actual measurement of the concentration of the air pollutant. The concentration of NOx was extensively measured widely in Seoul area three times using the TEA simple measuring technique. Even the judgement level for the area representativeness was lowered to 80%, Ssangmun-dong monitoring station tend to overestimate the pollutant concentration of the covered area. While, Sinlimdong monitoring station tend to underestimate the pollutant concentration of the covered area.

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머신비전 자동검사를 위한 대상객체의 인식방향성 개선 (Recognition Direction Improvement of Target Object for Machine Vision based Automatic Inspection)

  • 홍승범;홍승우;이규호
    • 한국정보통신학회논문지
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    • 제23권11호
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    • pp.1384-1390
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    • 2019
  • 본 논문은 머신비전기반 자동검사를 위한 대상객체의 인식방향성 개선 연구로서, 영상카메라에 의한 자동 비전검사의 과정에서 제한성이 따르는 대상 객체의 인식방향성을 개선하는 방법을 제안한다. 이를 통하여 머신비전 자동검사에서 시험대상물의 위치와 방향에 상관없이 검사대상의 영상을 검출할 수 있게 함으로써 별도 검사지그의 필요성을 배제하고 검사과정의 자동화 레벨을 향상시킨다. 본 연구에서는 검사대상으로서 와이어 하네스 제조과정에서 실제 적용할 수 있는 기술과 방법을 개발하여 실제 시스템으로 구현한 결과를 제시한다. 시스템구현 결과는 공인기관의 평가를 통하여, 정밀도, 검출인식도, 재현률 및 위치조정 성공률에서 모두 성공적인 측정결과를 얻었고, 당초 설정하였던 10종류의 컬러구별 능력, 1초 이내 검사시간, 4개 자동모드 설정 등에서도 목표달성을 확인하였다.