• Journal of the Korean Society for Precision Engineering
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• v.21 no.7
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• pp.145-152
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• 2004

This paper proposed efficient manufacturing system using the OMM (on-machine measurement) system. The OMM system is software based 3D modeler for inspection on machine and it is interfaced tool machine with RS232C. The software is composed of two inspection modules that one is touch probe operating module and the other is laser displacement sensor operating module. The module for touch probe has need of inspection feature that extracted it from CAD data. Touch probe moves to workpiece by three operating modes as follows: manual, general and automatic mode. The operating module of laser displacement sensor is used inspection for profile and very small hole. An Advantage of this inspection method is to be able to execute on-line inspection during machining or after it. The efficiency of proposed system which can predict and definite the machining errors of each process is verified, so the developed system is applied to inspect the mold-base(cavity, core).

• 제어로봇시스템학회:학술대회논문집
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• 1999.10a
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• pp.270-273
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• 1999

Circular dynamic stereo has special advantages as it enables a 3-D measurement using a single TV camera and also enables a high accurate measurement without a cumbersome calibration. Annular particle streaks are recorded using this system and the size of annular streaks directly concerns to the depth from TV camera. That is, the size of annular streaks is inversely proportional to the depth from the TV camera and the depth can be measured automatically by image processing technique. Overlapped streaks can be processed also by our method. The flow measurement in a water tank is one of the applications of our system. Tracer particles are introduced into the water in a flow measurement. Since the tracer particles flow with water, three-dimensional velocity distributions in the water tank can be obtained by measuring the all movement of tracer particles. Experimental results demonstrate the feasibility of our method.

• Applied Microscopy
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• v.52
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• pp.1.1-1.8
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• 2022

As semiconductor device architecture develops, from planar field-effect transistors (FET) to FinFET and gate-all-around (GAA), there is an increased need to measure 3D structure sidewalls precisely. Here, we present a 3-Dimensional Atomic Force Microscope (3D-AFM), a powerful 3D metrology tool to measure the sidewall roughness (SWR) of vertical and undercut structures. First, we measured three different dies repeatedly to calculate reproducibility in die level. Reproducible results were derived with a relative standard deviation under 2%. Second, we measured 13 different dies, including the center and edge of the wafer, to analyze SWR distribution in wafer level and reliable results were measured. All analysis was performed using a novel algorithm, including auto fattening, sidewall detection, and SWR calculation. In addition, SWR automatic analysis software was implemented to reduce analysis time and to provide standard analysis. The results suggest that our 3D-AFM, based on the tilted Z scanner, will enable an advanced methodology for automated 3D measurement and analysis.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2003.06a
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• pp.256-259
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• 2003

This paper proposes OPTICAL MARKER fer registering process - one of the 3D measurement process : scan registering - merging - measurement. If the registering work is carried out manually, it can be accompanied with much time and many errors. Because the patterned marker make registering process automatic, many firms use it now. But the physical shape of existing markers is the source of the data loss caused by hiding surface, and the marker arrangement is the source of the time loss. The optical marker proposed in this paper has marker generator, organized a large number of binary coded control laser diode, separate from 3D scan object. So, it does not take much time for the marker disposition, and it is not the origin of the data loss, and the binary coded laser information make the auto-registering possible.

• Journal of Institute of Control, Robotics and Systems
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• v.14 no.6
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• pp.519-522
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• 2008

As industry of a semiconductor and LCD industry have been rapidly growing, precision technologies of machining such as etching and 3D measurement are required. Stylus has been important measuring method in traditional manufacturing process. However, its disadvantages are low measuring speed and damage possibility at contacting point. To overcome mentioned disadvantage, non-contacting measurement method is needed such as PMP(Phase Measuring Profilometry), WSI(white scanning interferometer) and Confocal Profilometry. Among above 3 well-known methods, WSI started to be applied to FPD(flat panel display) manufacturing process. Even though it overcomes 21t ambiguity of PMP method and can measure objects which has specular surface, the measuring speed and vibration coming from manufacturing machine are one of main issue to apply full automatic total inspection. In this study, We develop high speed WSI system and algorithm to reduce unknown noise. The developing WSI and algorithm are implemented to measure 3D surface of wafer. Experimental results revealed that the proposed system and algorithm are able to measure 3D surface profile of wafer with a good precision and high speed.

• Journal of the Korean Geotechnical Society
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• v.23 no.5
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• pp.53-62
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• 2007

Recently, for the stabilization estimation of structures, many automatic measuring instruments with expensiveness and high accuracy have been developed and utilized. However, the existing manual measuring systems are almost impossible to measure the real-time for the whole surface of large-scale structures and an automatic measuring system has disadvantages with demanding enormous expense. In this study, 3D digital visual monitoring system was developed by using digital photogrammetry technique. To confirm application of developed system, it was applied to the measurement of the wall displacement of concrete surface and displacement measurement of reinforced-soil wall block. Then, the result of the test was compared with measuring value of total station. Based on the results of the comparison, the application of visual monitoring system was evaluated. The results show that the developed visual monitoring system could be available in displacement measure of structures.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 2003.04a
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• pp.255-259
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• 2003

Moire topography method isa well-known non-contacting 3-D measurement method as afast non-contact test for three-dimension shape measuring method. Recently, it's important to study the automatic three-dimension measurement by moire topography because it is frequently applied to the reverse engineering , the medical , the entertainment fields. Three-dimension measurement using projection of moire topography is very attractive because of its high measuring speed and high sensitivity. In this paper, the classical moire method is computerized-so called digital moire when a virtual grating pattern is projected on a surface, the captured image by the CCD camera has three-dimension information of the objects. The moire image can be obtained through a simple image processing and a reference grating pattern. and it provides similar results without physical grating pattern. digital projection moire topography turn out to be very effective for the three-dimension measurement of objects. Using different N-bucket algorithm method of digital projection moire topography is tested to measuring object with the 2-ambiguity problem. Experimental results prove that the proposed scheme is capable of finding measurement errors that decreased more by using the four-three step algorithm method instead of the same step in the phase shifting of different pitch.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 2000.04a
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• pp.653-658
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• 2000

For testing machine tools, we used test the work by measure of 3-D object that it was made by the machine tool. By reason of these, we have spent to the cost of measure and have delayed supply to user. In this study, we made a macro-program and a application program in order to test automatic the machine tool. So, if you constitute a ring core and a touch prove in machine tool, you should test the property of machine tool.

• Spatial Information Research
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• v.12 no.4 s.31
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• pp.321-328
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• 2004

The purpose of this study is to describe 3-Dimensional technique to obtain spatial information automatically using PhotoModeler Pro. PhotoModeler Pro is excellent software with the three-dimensional measurement function used by a personal computer using Windows operating system However, it is not sufficient to carry out the automatic matching work with two stereo images. This is very large neck as a 3-D measurement software. In this study, the automatic stereo matching work using the self-making program and DDE interface within PhotoModeler Pro was tried. The experiment field is the hillside and stair zone of Tateyama region, Nagasaki City. The results of automatic stereo matching work were very good with $100\%$ hitting ratio of target.

• The Journal of the Convergence on Culture Technology
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• v.9 no.1
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• pp.347-353
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• 2023

Currently, soldiers enlisted in the military (Army) are receiving measurements (automatic, manual) of body parts and trying on sample clothing at boot training centers, and then receiving clothing in the desired size. Due to the low accuracy of the measured size during the measurement process, in the military, which uses a relatively more detailed sizing system than civilian casual clothes, the supplied clothes do not fit properly, so the frequency of changing the clothes is very frequent. In addition, there is a problem in that inventory is managed inefficiently by applying the measurement system based on the old generation body shape data collected more than a decade ago without reflecting the western-changed body type change of the MZ generation. That is, military uniforms of the necessary size are insufficient, and many unnecessary-sized military uniforms are in stock. Therefore, in order to reduce the frequency of clothing replacement and improve the efficiency of stock management, deep learning-based automatic measurement of body size, big data analysis, and machine learning-based "Personalized Combat Uniform Automatic Recommendation System for Enlisted Soldiers" is proposed.