• Proceedings of the Korean Vacuum Society Conference
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• 2012.02a
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• pp.241-241
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• 2012

Semiconductor industry has been taking the advantage of improvements in process technology in order to maintain reduced device geometries and stringent performance specifications. This results in semiconductor manufacturing processes became hundreds in sequence, it is continuously expected to be increased. This may in turn reduce the yield. With a large amount of investment at stake, this motivates tighter process control and fault diagnosis. The continuous improvement in semiconductor industry demands advancements in process control and monitoring to the same degree. Any fault in the process must be detected and classified with a high degree of precision, and it is desired to be diagnosed if possible. The detected abnormality in the system is then classified to locate the source of the variation. The performance of a fault detection system is directly reflected in the yield. Therefore a highly capable fault detection system is always desirable. In this research, time series modeling of the data from an etch equipment has been investigated for the ultimate purpose of fault diagnosis. The tool data consisted of number of different parameters each being recorded at fixed time points. As the data had been collected for a number of runs, it was not synchronized due to variable delays and offsets in data acquisition system and networks. The data was then synchronized using a variant of Dynamic Time Warping (DTW) algorithm. The AutoRegressive Integrated Moving Average (ARIMA) model was then applied on the synchronized data. The ARIMA model combines both the Autoregressive model and the Moving Average model to relate the present value of the time series to its past values. As the new values of parameters are received from the equipment, the model uses them and the previous ones to provide predictions of one step ahead for each parameter. The statistical comparison of these predictions with the actual values, gives us the each parameter's probability of fault, at each time point and (once a run gets finished) for each run. This work will be extended by applying a suitable probability generating function and combining the probabilities of different parameters using Dempster-Shafer Theory (DST). DST provides a way to combine evidence that is available from different sources and gives a joint degree of belief in a hypothesis. This will give us a combined belief of fault in the process with a high precision.

• Journal of the Korea Society of Computer and Information
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• v.13 no.6
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• pp.117-125
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• 2008

The Object tracking by real-time image analysis is one of the major concerns in computer vision and its application fields. The Object detection process of real-time images must be preceded before the object tracking process. To achieve the stable object detection performance in the exterior environment, adaptive background model generation methods are needed. The adaptive background model can accept the nature's phenomena changes and adapt the system to the changes such as light or shadow movements that are caused by changes of meridian altitudes of the sun. In this paper, we propose a robust background model generation method effective in an illegal parking auto-detection application area. We also provide a evaluation method that judges whether a moving vehicle stops or not. As the first step, an initial background model is generated. Then the differences between the initial model and the input image frame is used to trace the movement of object. The moving vehicle can be easily recognized from the object tracking process. After that, the model is updated by the background information except the moving object. These steps are repeated. The experiment results show that our background model is effective and adaptable in the variable exterior environment. The results also show our model can detect objects moving slowly. This paper includes the performance evaluation results of the proposed method on the real roads.

• Journal of the Institute of Electronics Engineers of Korea SP
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• v.45 no.1
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• pp.47-54
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• 2008

In this paper, we propose an auto-detection algorithm of basal cell carcinoma(BCC) from the protophorphyrin IX(PpIX) fluorescence image induced by appling the methyl 5-aminolaevulinate(MAL) ointment-induced protophorphyrin IX(PpIX) to the skin tumour area and then shining the wood lamp on the area. The proposed algorithm first generates 3 mask areas-tumor area, suspected tumor area and tumor free area and then applies local watershed algorithm to the turner and the suspected tumor areas to make small watershed regions that include similar luminance value pixels. Next, small watershed regions are merged by hierarchical queue based fast region merging that uses the difference between the average luminance values of adjacent watershed regions as a region merging criterion and finally BCC regions are detected. 50 tissue samples are acquired from the tumour regions of 10 patients with BCC that are extracted by using the proposed algorithm and are performed pathological examination by expert dermatologist. Experiment result shows the rate of tumor detection from BCC lesion using presurgical in vivo of MAL-indeuced PpIX fluorescence has high sensitivity 94.1% and relatively high specificity 82.6%.

• Fire Science and Engineering
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• v.32 no.6
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• pp.40-45
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• 2018

The omnidirectional surveillance camera uses the object detection algorithm to level the object by unit so that broadband surveillance can be performed using a fisheye lens and then, it was a field experiment with a system composed of an omnidirectional surveillance camera and a tracking (PTZ) camera. The omnidirectional surveillance camera accurately detects the moving object, displays the squarely, and tracks it in close cooperation with the tracking camera. In the field test of flame detection and temperature of the sensing camera, when the flame is detected during the auto scan, the detection camera stops and the temperature is displayed by moving the corresponding spot part to the central part of the screen. It is also possible to measure the distance of the flame from the distance of 1.5 km, which exceeds the standard of calorific value of 1 km 2,340 kcal. In the performance test of detecting the flame along the distance, it is possible to be 1.5 km in width exceeding $56cm{\times}90cm$ at a distance of 1km, and so it is also adaptable to forest fire. The system is expected to be very useful for safety such as prevention of intrinsic or surrounding fire and intrusion monitoring if it is installed in a petroleum gas storage facility or a storing place for oil in the future.

• Journal of the Korean Society of Radiology
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• v.9 no.2
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• pp.67-72
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• 2015

In diagnostic radiology, the use of automatic exposure control device is internationally recommended for diagnosis and optimization. However, if exposed to prolonged radiation is a complicated manufacturing process, there is a problem that occurs decrease of various performance overall brightness sensor, which is commercially available conventional. Therefore, in this study, absorption of X-ray is high, and I want to evaluate the AEC applicability of the sensor of the photoconductor-based production has an easy advantage. Experimental results confirms the possibility of fabrication of the sensor through an increase in the SNR, with the detection efficiency superior, accurate turn-off. In addition, it is confirmed that the experimental results of the transmittance and the latent image, Ghost effect by the light conductor does not appear, in the case of a photoconductor with the exception of the PbO, 80% - and it was confirmed good transmittance of 90%. Therefore, excellent mechanical stability and poor performance due to a change of the doping concentration than the existing products that have been put to practical use, the sensor easy photoconductor based, fabrication and can be applied as AEC sensor is expected.

• Journal of Biomedical Engineering Research
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• v.19 no.3
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• pp.251-260
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• 1998

The Holter monitoring system is a widely used noninvasive diagnostic tool for ambulatory patient who may be at risk from latent life-threatening cardiac abnormalities. In this paper, we design a high performance intelligent holter monitoring system which is characterized by the small-sized and the low-power consumption. The system hardware consists of one-chip microcontroller(68HC11E9), ECG preprocessing circuit, and flash memory card. ECG preprocessing circuit is made of ECG preamplifier with gain of 250, 500 and 1000, the bandpass filter with bandwidth of 0.05-100Hz, the auto-balancing circuit and the saturation-calibrating circuit to eliminate baseline wandering, ECG signal sampled at 240 samples/sec is converted to the digital signal. We use a linear recursive filter and preprocessing algorithm to detect the ECG parameters which are QRS complex, and Q-R-T points, ST-level, HR, QT interval. The long-term acquired ECG signals and diagnostic parameters are compressed by the MFan(Modified Fan) and the delta modulation method. To easily interface with the PC based analyzer program which is operated in DOS and Windows, the compressed data, that are compatible to FFS(flash file system) format, are stored at the flash memory card with SBF(symmetric block format).

• The Journal of The Korea Institute of Intelligent Transport Systems
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• v.19 no.2
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• pp.89-103
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• 2020

As we face an aging society, the demand for personal mobility for disabled and aged people is increasing. In fact, as of 2017, the number of electric wheelchair in the country continues to increase to 90,000. However, people with disabilities and seniors are more likely to have accidents while driving, because their judgment and coordination are inferior to normal people. One of the causes of the accident is the interference of personal vehicle steering control due to unbalanced road surface conditions. In this paper, we introduce a encoder type semantic segmentation algorithm that can recognize road conditions at high speed to prevent such accidents. To this end, more than 1,500 training data and 150 test data including road surface damage were newly secured. With the data, we proposed a deep neural network composed of encoder stages, unlike the Auto-encoding type consisting of encoder and decoder stages. Compared to the conventional method, this deep neural network has a 4.45% increase in mean accuracy, a 59.2% decrease in parameters, and an 11.9% increase in computation speed. It is expected that safe personal transportation will be come soon by utilizing such high speed algorithm.

• Journal of the Korea Institute of Information and Communication Engineering
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• v.7 no.1
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• pp.129-135
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• 2003

Optical fiber has many advantages, such as high reliability, long lifetime, immunity to the electromagnetic interference, high speed response and low cost. In this study, we proposed and developed an optical fiber impact and pressure sensor for prevention of accident which occurs in the automatic system or auto door. The principle of the sensor is to detect different optical intensity caused by variation of a speckle pattern due to the external perturbation. Speckle pattern appears at the end of a multimode fiber in which coherent beam propagates. The fabricated sensor in this study was tested. As a result of experiments, amplitude of the output signal isn't linear, but it has sufficient sensitivity for a sensor. Moreover, we can control sensitivity of the sensor by an amplifier at receiver. It has several advantages which are ability of detection at all point on the multimode fiber, large sensitive area, and many application areas for a sensing impact and pressure.

• Journal of Sensor Science and Technology
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• v.26 no.1
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• pp.39-43
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• 2017

Development of vision system as a nondestructive evaluation system can be very useful in screening the defective mechanical parts before they are assembled into the final product. Since the tens of thousands of the mechanical parts are used in an automobile carefully inspecting the quality of the mechanical parts is very important to maximize the performance of the automobile. To sort out the defective mechanical parts before they are assembled, auto parts fabrication companies employ various inspection systems. Nondestructive evaluation systems are getting rapidly popular among various inspection systems. In this study, we have developed a vision system to inspect the inside of the brake caliper, a part that is used to compose a brake which is the most important to the safety of the drivers and the passengers. In a brake caliper, a piston is pushed against the brake disk by oil pressure, causing a friction to damp the rotation of the wheel. Inside the caliper, a groove is positioned to adopt an oil seal to prevent the oil leaks. Inspecting the groove with our vision system, we could examine the existence of the contaminants which are normally the residual tiny pieces from the machining process. We used a high resolution GigE camera, 360 degree lens to look in the inside view of the caliper at once, and a special illumination system in this vision system. We used the edge detection technique to successfully detect the contaminants which were in the form of small metal chips. Labview graphical program was used to process the digital data from the camera and to display the vision and the statistics of the contaminants. We were very successful in detecting the contaminants from the various size calipers. We think we are ready to employ this vision system to the caliper production factories.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.34 no.1
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• pp.73-76
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• 2010

The issue of inspection and characterization of microstructures has emerged as a major consideration in design, fabrication, and detection of MEMS devices. However, the conventional measurement techniques, including scanning electron microscopy (SEM) imaging, atomic force microscopy (AFM) scanning, and mechanical surface profiler, require often destructive process or may be difficult to measure with a wafer scale. In this paper, we characterize the surface profiles of microstructures using an optical scanner based on a DVD pick-up module. Scanning images of the microstructures are successfully generated using the intensity of reflected light from different depths of the surface profiles, based on the focus error signal (FES) from photodiodes. It is shown that the proposed optical scanner can be used as an alternative measurement system with high performance and low cost, compared to conventional measurement techniques.