• 한국신재생에너지학회:학술대회논문집
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• 한국신재생에너지학회 2006년도 추계학술대회
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• pp.411-412
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• 2006

PEM(proton exchange membrane) fuel cell have been receiving considerable interest as power source because of high-energy efficiency. However by using reforming hydrogen gas, CO poisoning occur in anode. To improve CO tolerance PtRu catalysts were prepared by galvanostatic pulse electrodeposition. The composition(atomic ratio) of catalysts are controllable by using different concentrations of PtRu solutions. Also, the particle sizes of PtRu on carbon are similar to about $3.5{\sim}4nm$ regardless of concentration.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2011년도 제40회 동계학술대회 초록집
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• pp.458-458
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• 2011

Graphene, a single atomic layer of sp2-bonded carbon, shows substantial potential for various applications. Chemical manipulation of its electronic properties will be of great importance. In this study, we have investigated interaction between graphene and organic molecular layer of tetrafluorotetracyanoquinodimethane (F4-TCNQ), a strong electron acceptor. F4-TCNQ films of varying thickness were evaporated onto graphene mechanically exfoliated on SiO2/Si substrates. F4-TCNQ molecules increase the frequencies of Raman G and 2D bands of graphene while decreasing the linewidth of G band and 2D/G intensity ratio, which is consistent with increase of hole density in graphene. These results exemplify the possibility of chemical tuning of electronic properties of graphene.

• 정보저장시스템학회:학술대회논문집
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• 정보저장시스템학회 2005년도 추계학술대회 논문집
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• pp.185-189
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• 2005

We reported here nano-scale electrical phase-change recording in amorphous $Ge_2Sb_2Te_5$ media using an atomic force microscope (AFM) having conducting probes. In recording process, a pulse voltage is applied to the conductive probe that touches the media surface to change locally the electrical resistivity of a film. However, in contact operation, tip/media wear and contamination could major obstacles, which degraded SNR, reproducibility, and lifetime. In order to overcome tip/media wear and contamination in contact mode operation, we adopted the W incorporated diamond-like carbon (W-DLC) films as a protective layer. Optimized mutilayer media were prepared by a hybrid deposition system of PECVD and RF magnetron sputtering. When suitable electrical pulses were applied to media through the conducting probe, it was observed that data bits as small as 25 nm in diameter have been written and read with good reproducibility, which corresponds to a data density of $1 Tbit/inch^2$. We concluded that stable electrical phase-change recording was possible mainly due to W-DLC layer, which played a role not only capping layer but also resistive layer.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2012년도 제42회 동계 정기 학술대회 초록집
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• pp.377-377
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• 2012

Microprocessor technology now relies on copper for most of its electrical interconnections. Because of the high diffusivity of copper, Atomic layer deposition (ALD) $TaN_x$ is used as a diffusion barrier to prevent copper diffusion into the Si or $SiO_2$. Another problem with copper is that it has weak adhesion to most materials. Strong adhesion to copper is an essential characteristic for the new barrier layer because copper films prepared by electroplating peel off easily in the damascene process. Thus adhesion-enhancing layer of cobalt is placed between the $TaN_x$ and the copper. Because, cobalt has strong adhesion to the copper layer and possible seedless electro-plating of copper. Until now, metal film has generally been deposited by physical vapor deposition. However, one draw-back of this method is poor step coverage in applications of ultralarge-scale integration metallization technology. Metal organic chemical vapor deposition (MOCVD) is a good approach to address this problem. In addition, the MOCVD method has several advantages, such as conformal coverage, uniform deposition over large substrate areas and less substrate damage. For this reasons, cobalt films have been studied using MOCVD and various metal-organic precursors. In this study, we used $C_{12}H_{10}O_6(Co)_2$ (dicobalt hexacarbonyl tert-butylacetylene, CCTBA) as a cobalt precursor because of its high vapor pressure and volatility, a liquid state and its excellent thermal stability under normal conditions. Furthermore, the cobalt film was also deposited at various $H_2/NH_3$ gas ratio(1, 1:1,2,6,8) producing pure cobalt thin films with excellent conformality. Compared to MOCVD cobalt using $H_2$ gas as a reactant, the cobalt thin film deposited by MOCVD using $H_2$ with $NH_3$ showed a low roughness, a low resistivity, and a low carbon impurity. It was found that Co/$TaN_x$ film can achieve a low resistivity of $90{\mu}{\Omega}-cm$, a low root-mean-square roughness of 0.97 nm at a growth temperature of $150^{\circ}C$ and a low carbon impurity of 4~6% carbon concentration.

• Corrosion Science and Technology
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• 제14권1호
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• pp.19-24
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• 2015

지금까지 마그네타이트 전극의 제조 방법과 전기화학적 특성에 대해 살펴보았다. 마그네타이트 전극을 제조하는 방법은 프레스법, 페이스트법, 전기도금법 등이 있으며, 이들의 전기화학 특성은 다음과 같이 정리할 수 있다. 1. Cycle voltammetry 실험을 통하여 애노딕, 캐소딕 분극 방향으로 각각 2개의 peak가 관찰되고, 이것은 $Fe_3O_4$가 $Fe(OH)_2$, FeO 등의 중간 산화물 형태를 거쳐 $Fe^{2+}$로 용해되는 반응들이다. 2. 산성 및 중성 용액에서는 마그네타이트의 환원적 용해가, 염기성 용액에서는 헤마타이트로의 산화 반응이 나타난다. 3. 전기화학 실험 결과와 마그네타이트 용해도를 관련시키기 위해서는 마그네타이트 용해가 일어나는 전위에서 실험 후, 용액에서 $Fe^{2+}$, $Fe^{3+}$ 이온들에 대한 분석이 필요하다.

• 한국진공학회지
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• 제21권2호
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• pp.106-112
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• 2012

본 연구에서는 톨루엔 등의 휘발성 유기물의 흡착량을 정성, 정량적으로 연구할 수 있는 새로운 장비를 구축하였으며, 이를 이용하여 기존의 탄소를 기반으로 하는 다양한 흡착제와 원자층 증착으로 만든 $TiO_2$ 박막구조의 톨루엔 흡착에 대한 연구를 진행하였다. $TiO_2$ 박막구조의 흡착제가 기존의 탄소기반 흡착제보다 톨루엔 흡착량이 뛰어난 것을 입증하였으며, 이는 원자층증착으로 제조한 $TiO_2$ 박막 표면의 높은 농도의 OH 그룹의 높은 톨루엔 친화력과 연관성이 있는 것으로 나타났다. 또한 본장비를 이용하여 가역적인 흡착과 비가역적인 흡착을 구분할 수 있음을 보여주었다.

• 한국재료학회:학술대회논문집
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• 한국재료학회 2011년도 추계학술발표대회
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• pp.17.2-17.2
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• 2011

Double-walled carbon nanotubes (DWCNTs) were grown with vertical alignment on a Si wafer by using catalytic thermal chemical vapor deposition. This study investigated the effect of pre-annealing time of catalyst on the types of CNTs grown on the substrate. The catalyst layer is usually evolved into discretely distributed nanoparticles during the annealing and initial growth of CNTs. The 0.5-nm-thick Fe served as a catalyst, underneath which Al was coated as a catalyst support as well as a diffusion barrier on the Si substrate. Both the catalyst and support layers were coated by using thermal evaporation. CNTs were synthesized for 10 min by flowing 60 sccm of Ar and 60 sccm of H2 as a carrier gas and 20 sccm of C2H2 as a feedstock at 95 torr and $750^{\circ}C$. In this study, the catalyst and support layers were subject to annealing for 0~420 sec. As-grown CNTs were characterized by using field emission scanning electron microscopy, high resolution transmission electron microscopy, Raman spectroscopy, and atomic force microscopy. The annealing for 90~300 sec caused the growth of DWCNTs as high as ~670 ${\mu}m$ for 10 min while below 90 sec and over 420 sec 300~830 ${\mu}m$-thick triple and multiwalled CNTs occurred, respectively. Several radial breathing mode (RBM) peaks in the Raman spectra were observed at the Raman shifts of 112~191 cm-1, implying the presence of DWCNTs, TWCNTs, MWCNTs with the tube diameters 3.4, 4.0, 6.5 nm, respectively. The maximum ratio of DWCNTs was observed to be ~85% at the annealing time of 180 sec. The Raman spectra of the as-grown DWCNTs showed low G/D peak intensity ratios, indicating their low defect concentrations. As increasing the annealing time, the catalyst layer seemed to be granulated, and then grown to particles with larger sizes but fewer numbers by Ostwald ripening.

• KSTLE International Journal
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• 제1권1호
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• pp.12-20
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• 2000

Nano-wear and friction of carbon overcoated laser-textured and mechanically-textured computer hard disk were characterised after contact start/stop (CSS) wear test. Various analytical and mechanical testing techniques were employed to study the changes in topography, roughness, chemical elements, mechanical properties and friction characteristics of the coating arising from the contact start/stop wear test These techniques include: the atomic force microscopy (AFM), the continuous nano-indentation test, the nano-scratch test, the time-of-flight secondary ion mass spectroscopy (TOF-SIMS) and the auger electron spectroscopy (AES). It was shown that the surface roughness of the laser-textured (LT) bump and mechanically textured (MT) Bone was reduced approximately am and 7nm, respectively, after the CSS wear test. The elastic modulus and hardness values increased after the CSS test, indicating straining hardening of the top coating layer, A critical load was also identified fer adhesion failure between the magnetic layer and the Ni-P layer, The TOF-SIMS analysis also revealed some reduction in the intensity of C and $C_2$$F_59$, confirming the wear of lubricant elements on the coating surface.

• 비파괴검사학회지
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• 제29권4호
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• pp.293-298
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• 2009

본 연구에서는 나노 표면층의 특성 평가를 위해 원자현미경에 초음파 특성을 결합하여 초음파 원자 현미경을 개발하였다. 초음파 원자 현미경은 기존의 나노 표면층에 대한 토포그래프 이미지뿐만 아니라 국부적인 이종부분으로 이루어진 표면에서의 물리적 특성차이에 의한 표면의 탄성 특성 이미지를 얻을 수 있다. 본 연구에서는 프로토타입의 UAFM 장치를 구성하고 이를 몇몇 응용분야에 적용하였다. 구축한 프로토타입의 UAFM 시스템을 이용하여 증착 실리콘 박막층과 냉간 압조용 강의 구상화 그리고 탄소 섬유 강화 복합재료의 표면에 대한 탄성 이미지를 성공적으로 얻을 수 있었다.

• Corrosion Science and Technology
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• 제6권2호
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• pp.37-43
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• 2007

Iodine sulfur (IS) process is one of the promising processes for a hydrogen production by using a high temperature heat generated by a very high temperature gas cooled reactor(VHTR) in the nuclear power industries. Even though the IS process is very efficient for a hydrogen production and it is not accompanied by a carbon dioxide evolution, the highly corrosive environment of the process limits its application in the industry. Corrosion tests of selected materials were performed in sulfuric acid to select appropriate materials compatible with the IS process. The materials used in this work were Fe-Cr alloys, Fe-Ni-Cr alloys, Fe-Si alloys, Ni base alloys, Ta, Ti, Zr, SiC, Fe-Si, etc. The test environments were 50 wt% sulfuric acid at $120^{\circ}C$ and 98 wt% at $320^{\circ}C$. Corrosion rates were measured by using a weight change after an immersion. The surface morphologies and cross sectional areas of the corroded materials were examined by using SEM equipped with EDS. Corrosion behaviors of the materials were discussed in terms of the chemical composition of the materials, a weight loss, the corrosion morphology, the precipitates in the microstructure and the surface layer composition.