• Journal of the Korean Society of Manufacturing Technology Engineers
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• v.19 no.2
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• pp.267-274
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• 2010

Recently, the magnetorheological (MR) polishing process has been examined as a new ultra-precision polishing technology for mirror surface generation in many applications, such as aspheric lenses, biochips, micro parts, etc. This method uses MR fluids which contains micro abrasives as a polishing media, and can. It is possible to obtain nano level surface roughness under suitable process conditions, however, required polishing time is highly dependent on the applied pre-polishing methods due to its very small material removal rate. Thus, in this study, a combined polishing method is presented to reduce total polishing time for SUS304. First, the electropolishing (EP) method was applied to obtain fine surface roughness, and the MR polishing was followed. Surface roughness variations were investigated according to the process conditions. As the results of this study, it was possible to reduce total polishing time for SUS304 using the proposed combined polishing method.

• Korean Journal of Optics and Photonics
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• v.28 no.6
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• pp.281-289
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• 2017

In the present research, the optical measurement error induced by vibration of the optical measurement tower for large mirrors at KRISS (Korea Research Institute of Standards and Science) is investigated. The vibrations of the tower structure, the interferometer, and the null lens are measured while the surface errors of the 600-mm-diameter on-axis aspheric mirror are measuring, under various environmental conditions. The increase of surface error induced by alignment error with respect to vibration is analyzed. As a result, the interferometer and the null lens, which are located on the top of the tower, are highly sensitive to vibration. Additionally, the surface error of the mirror is strongly increased when the vibration directions of the interferometer and the null lens are different. To reduce the alignment error and the surface error induced by vibration, the tower structure should be improved, to be insensitive to low-frequency vibration. Alternatively, optical measuring under stable conditions by vibration monitoring can improve the reliability of the surface error measurement.