• 한국진공학회:학술대회논문집
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• 한국진공학회 2012년도 제42회 동계 정기 학술대회 초록집
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• pp.370-370
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• 2012

Feature size of Cu interconnects keep shrinking into several tens of nanometer level. For this reason, the Cu interconnects face challenging issues such as increase of electro-migration, line-width dependent electrical resistivity increase, and gap-filling difficulty in high aspect ratio structures. As the thickness of the Cu film decreases below 30 nm, the electrical resistivity is not any more constant, but rather exponential. Research on alloying with other elements have been started to inhibit such escalation in the electrical resistivity. A faint trace of Al added in Cu film by sputtering was reported to contribute to suppression of the increase of the electrical resistivity. From an industrial point of view, we introduced cyclic metal organic chemical vapor deposition (MOCVD) in order to control Al concentration in the Cu film more easily by controlling the delivery time ratio of Cu and Al precursors. The amount of alloying element could be lowered at level of below 1 at%. Process of the alloy formation was applied into gap-filling to evaluate the performance of the gap-filling. Voidless gap-filling even into high aspect ratio trenches was achieved. In-depth analysis will be discussed in detail.

• 동력기계공학회지
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• 제10권4호
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• pp.99-104
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• 2006

Young's modulus of composite has been predicted by Eshelby's equivalent inclusion method modified with Mori-Tanaka's mean field theory, where short fibers of aspect ratio distribution are assumed to be aligned. Young's modulus of the composite is predicted with the smallest class interval for simulating the actual distribution of fiber aspect ratio, which is compared with that computed using different class intervals. Young's modulus of the composite predicted with mean aspect ratio or the largest class interval is overestimated by the maximum 10%. As the class interval of short fibers for predicting Young's modulus decreases, the predicted results show good agreements with those obtained using the actual distribution of fiber aspect ratio. It can be finally concluded from the study that if and only if the class interval of short fiber normalized by the maximum aspect ratio is smaller than 0.1, the predicted results are consistent with those obtained using the actual distribution of aspect ratio.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2001년도 추계학술대회논문집B
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• pp.199-204
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• 2001

This paper showed the study on the heat transfer into space by the aspect ratio of solar concentration absorber, and the purpose of this study is to obtain the optimum aspect ratio and tilt angle. The boundary conditions of a numerical model were assumed as follows : (1) The heat source is located at the center of absorber. (2) The bottom was is opened and adiabatic. (3) The top, right and left walls are cooled wall. The parameters for the study are the tilt angles and the aspect ratio. The velocity vectors and isotherms were dense at wall side and the heat source. The mean Nusselt number had a maximum value at Ar=1:1 and $\theta=0^{\circ}$ and showed a low value as the tilt angles were increased.

• Bulletin of the Korean Chemical Society
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• 제29권4호
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• pp.758-760
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• 2008

Nanoporous AAO (Anodic Aluminum Oxide) membranes have many advantages as a template for variety of magnetic materials. Materials can be embedded into the pores by electrodeposition, sputtering or magnetic-field-assisted infiltration of magnetic nanoparticles. This work focuses on the fabrication of the magnetic structures in the AAO templates by electrodeposition. Our method allows the controlled growth of Co nanostructures within the porous alumina membrane in the form of dots, rods and long wires. The shape of Co nanostructures has been investigated by field emission scanning electron microscope (FESEM). The magnetic hysteresis loops of Co nanostructures were measured using SQUID at 5 K and 300 K. The magnetic properties of the Co nanostructures are proportional to their aspect ratios and can be controlled by changing the aspect ratios.

• 대한기계학회논문집B
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• 제34권3호
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• pp.291-299
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• 2010

본 연구에서는 열의 수가 세 개인 원형관 및 종횡비가 고려된 납작관-평판휜 형상의 밀집형 열교환기 내 공기의 유동 및 열전달 특성을 RNG $k-{\varepsilon}$ 난류모델을 적용하여 수치적으로 해석하였다. 수치조건의 범위는 원형관인 경우 1,000<$Re_D_h$<10,000이며, 납작관인 경우 1,000<$Re_{D_h}$<10,000 및 3.06$f\;=\;CRe^m_{D_h}$의 형태로, Colburn j 계수는 $j\;=\;CRe^m_{D_h}$ 형태로 상관관계식을 제시하였다. 이러한 상관관계식은 향후 원형관 및 납작관-평판휜 형상의 열교환기 설계시에 기본적인 자료로 충분히 활용될 수 있을 것으로 판단된다.

• 대한간호
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• 제14권1호통권75호
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• pp.19-21
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• 1975

• 대한간호
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• 제14권5호통권79호
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• pp.59-62
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• 1975

• 대한간호
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• 제26권3호통권141호
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• pp.30-36
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• 1987

• 대한간호
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• 제26권3호통권141호
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• pp.41-47
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• 1987

• 대한간호
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• 제18권2호통권100호
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• pp.39-40
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• 1979