• 대한전기학회:학술대회논문집
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• 대한전기학회 1997년도 하계학술대회 논문집 E
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• pp.1657-1659
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• 1997

Electron temperature and electron density were measured in a radio-frequency inductively coupled plasma (RFICP) using a probe measurements. Measurement was conducted in an argon discharge for pressures from 10 [mTorr] to 40 [mTorr] and input rf power from 100 [W] to 800 [W], Ar flow rate from 5 [sccm] to 30 [sccm], Spatial distribution electron temperature and electron density were measured for discharge with same aspect ratio (R/L=2). Electron temperature and electron density were discovered depending on both pressure and power, Ar flow rate. Electron density was increased with increasing input power and in creasing pressure, increasing Ar flow rate. Radial distribution of the electron density was peaked in the plasma center. Normal distribution of the electron density was peaked in the center between quartz plate and substrate. From these results, We found out the generation mechanism of Radio-Frequency Inductively Coupled Plasma.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2004년도 추계학술대회 논문집
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• pp.709-713
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• 2004

Characteristics of laser-assisted wet etching of titanium in phosphoric acid were investigated to examine the feasibility of this method for fabrication of high aspect ratio microchannels. Laser power, number of scans, etchant concentration, position of beam waist and scanning speed were taken into consideration as the major process parameters exerting the temperature distribution and the cross sectional profile of etched channels. Experimental results indicated that laser power influences on both etch width and depth while number of scans and scanning speed mainly affect on the etch depth. At a low etchant concentration, the cross sectional profile of an etched channel becomes a U-shape but it gradually turns into a V-shape as the concentration increases. On the other hand, surface of the laser beam focus with respect to the sample surface is found to be a key factor determining the bubble dynamics and thus the process stability. It is demonstrated that metallic microchannels with different cross sectional profiles can be fabricated by properly controlling the process parameters. Microchannels of aspect ratio up to 8 with the width and depth ranges of 8∼32 m and 50∼300 m, respectively, were fabricated.

• 한국자동차공학회논문집
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• 제16권6호
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• pp.19-25
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• 2008

Selective Catalytic Reduction is effective in the reduction of NOx emission. This research focused to evaluate the performance of a urea-SCR system and was conducted in two procedures. One is SCR reactor test using model gas in order to provide an optimal injection condition itself. In this step, some parametric study on emission temperature, space velocity, aspect ratio and the formation of urea spray were made by using flow visualization and Computation Fluid Dynamics techniques. The basic simulation results contributed in determining the layout for an actual engine test. The other is an engine performance and emission test. The urea injector was placed at the opposite direction of exhaust gases emitted into an exhaust duct and an optimal amount of a reducing agent is estimated accurately under different engine loads and speeds. Furthermore, the variation of NOx emission and applied amount of urea was investigated in terms of modes under the condition of with and without SCR, and other emissions such as PM, CO and NMHC were evaluated quantitatively as well. This research may provide fundamental data for the practical use of urea-SCR in future.

• 한국재료학회지
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• 제2권3호
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• pp.228-238
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• 1992

서브마이크론 설계규칙을 갖는 소자의 이층 배선 공정에서 다챔버 장비를 이용한 금속 층간절연막의 공극없는 평탄화를 위하여 PECVD와 $O_3$ ThCVD산화막의 증착시 층덮힘성을 연구하였다. 산화막의 두께가 증가됨에 따라 변화되는 순간단차비의 개념을 도입하여 공극형성의 개시점을 예측할 수 있는 관계식을 모델링하였고, 금속배선간격의 초기 단차비가 다양한 패턴에서 산화막의 두께에 따른 순간 단차비의 변화를 조사하였다. 모델링 검정결과 $5^{\circ}$이하의 re-entrant각을 갖는 TEOS에 의한 PECVO 산화막의 순간단차비가 모델링에 잘 일치하였다. 공극없는 평탄화는 제1층의 PECVD 산화막의 순간 단차비를 0.8이하로 유지하거나 Ar sputter식각을 통하여 산화막의 모서리에 경사를 준후 층덮힘성이 우수한 $O_3$ ThCVD산화막을 증착함으로써 가능하였다. $O_3$ ThCVD산화막의 etchback이 non etchback공정에 비하여 via접쪽저항체인에서 높은 수율을 보였으며, via접촉저항은 $0.1~0.3{\Omega}/{\mu}m^2$로 나타났다.

• 한국항해항만학회지
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• 제34권5호
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• pp.367-373
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• 2010

수치해석을 수행할 경우 좀 더 정확한 수치모의를 위하여 해석영역의 특성에 따라 적절하게 요소를 배치하는 것이 필요하다. 본 연구에서 사용한 개별요소법(DEM)은 입자의 마찰력 및 항력을 제외한 반발력과 인장력만을 적용하였다. 초기 쿼드트리(Quad-tree)형식으로 충진된 입자들을 DEM을 이용하여 재배치할 경우 입자의 형상이 원형이기 때문에 입자사이에 존재하는 빈 공간을 최소화 할 수 있다. 결국 입자 중심점의 배치가 정삼각형에 가깝게 되는 특징을 보여준다. 이 재배치된 입자를 대상으로 Delaunay 삼각기법을 이용하여 삼각망을 구성하고, Laplace 보간을 수행하여 격자 품질을 향상시켰다. Laplace 보간 전 후의 형상비(Aspect Ratio: AR)를 비교한 결과 DEM을 이용하여 작성한 격자의 품질도 우수하지만, Laplace보간을 수행한 이후 보다 높은 품질의 격자가 생성되는 것을 확인하였다. 본 연구에서 개발한 기법은 기존의 삼각격자망 생성기법에 비해 다소 계산시간이 오래 걸리는 단점이 있지만, 복잡한 형상과 정확한 지형의 재현을 필요로 하는 파랑 해석용 유한요소 격자망 작성 및 다양한 수치모의 분야에서 그 적용 가능성이 매우 높다고 사료된다.

• 한국재료학회지
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• 제22권10호
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• pp.562-568
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• 2012

Metal nanowires can be coated on various substrates to create transparent conducting films that can potentially replace the dominant transparent conductor, indium tin oxide, in displays, solar cells, organic light-emitting diodes, and electrochromic windows. One issue with these metal nanowire based transparent conductive films is that the resistance between the nanowires is still high because of their low aspect ratio. Here, we demonstrate high-performance transparent conductive films with silver nanofiber networks synthesized by a low-cost and scalable electrospinning process followed by two-step sequential thermal treatments. First, the PVP/$AgNO_3$ precursor nanofibers, which have an average diameter of 208 nm and are several thousands of micrometers in length, were synthesized by the electrospinning process. The thermal behavior and the phase and morphology evolution in the thermal treatment processes were systematically investigated to determine the thermal treatment atmosphere and temperature. PVP/$AgNO_3$ nanofibers were transformed stepwise into PVP/Ag and Ag nanofibers by two-step sequential thermal treatments (i.e., $150^{\circ}C$ in $H_2$ for 0.5 h and $300^{\circ}C$ in Ar for 3 h); however, the fibrous shape was perfectly maintained. The silver nanofibers have ultrahigh aspect ratios of up to 10000 and a small average diameter of 142 nm; they also have fused crossing points with ultra-low junction resistances, which result in high transmittance at low sheet resistance.

• 한국결정성장학회지
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• 제9권1호
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• pp.94-100
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• 1999

음향광 소재와 광전자 재료용으로 적합한 염화제일수은은 밀폐된 용기에서 승화법에 의한 결정성장으로 제 조된다. 온도경계조검으로 밀폐된 용기의 측면에 각각 다른 온도로 부하하였을 때에는 수직적과 수평적 대류현상이 동 시에 일어난다. 수직적 레이 무차원수에 대한 수평적 레이 무차원수의 비율이 1.5 보다 클 때, 대류유동구조는 $2.79{\times}10^4$, Pr = 0.91, Le = 1.01, Pe = 4.60, Ar = 0.2 and $C_v$ = 1.01에서 한 개의 셀에서 여러개의 셀로 변한다. ${Delta}T_H{\ge}0.3$에 대하여, ${Delta}T$의 증가함과 엑스펙트 비율의 감소함에 따라 $$\mid$U$\mid$_{max}$이 증가한다. 0.1에서 1까지의 엑스펙트 비율의 범위에서는 $$\mid$U$\mid$_{max}$가 $\sqrt{{\Delta}T^_H\;^{\ast}}$와 직접적이며 선형적인 관계에 있다. 엑스페트 비율이 감소함에 따라 대류의 흐름은 불안정 하게 되며, 그 결과 대류의 크기는 증가한다. 수직적 온도구배는 대류의 흐름을 불안정하게 하여 진동하게 하며, 그 반면 에 수명적 구배는 흐름을 안정화시킨다.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2003년도 추계학술대회
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• pp.622-627
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• 2003

A numerical study is made of a flow in a cylinder with a rotating grooved endwall disk. The aim is to describe differences in the flow fields when there is concentrically-grooved obstacle characterized by amplitude(a) and wave number(N). The Reynolds number(Re) is varied from $10^{3}$ to $10^{4}$ and the aspect ratio(Ar) fixed to 1.0 for the most part of the simulation. For the various cases of amplitude(a) and wave number(N), numerical results are acquired. As the endwall groove roughness increases until certain limit, the interior azimuthal velocity component(v) increases drastically. But over the limit, the swirl motion chararcterized by velocity v decreases and finally it approaches much alike Ar=1.0-a case. The reason of activating swirl motion is based on increasing of torque transported by endwall disk. Torque coefficients($C_{T}$) are aquired for the various (a,N,Re) combinations and the limiting phenomena of swirl motion activation is explained.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 1997년도 추계학술대회 논문집
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• pp.473-476
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• 1997

Focused Ar ion laser beam can be utilized to fabricate microstructures on silicon substrate as well as other materials(e.g. such as ceramic). The laser using in this study is an argon ion laser with maximum power of 6 W, wavelength of 514 nm. This laser beam is focused by objectives with a high numerical aperture, a long working distance. We have achieved line width about 1 ${\mu}{\textrm}{m}$ with high scan speed. The resolution for Si machining is determined by the selectivity of the chemical reaction rather than the laser spot size. In this study, we have obtained the maximum etch rate of 434.7 ${\mu}{\textrm}{m}$/sec with high aspect ratio. The characteristics of etched groove was investigated by scanning electron microscope(SEM) and auger electron spectroscopy(AES). It is assumed that the technique using arson ion laser is applicab1e to fabricate microstructures.

• 동력기계공학회지
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• 제15권2호
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• pp.31-36
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• 2011

The flow characteristics on the periodically arranged semi-circular ribs in a rectangular channel for turbulent flow have been investigated numerically. The aspect ratio of the rectangular channel was AR=5, the rib height to hydraulic diameter ratio was 0.07 and rib height to channel height ratio was e/H=0.117. The v2-f turbulence model and SST k-${\omega}$ turbulence model were used to find the flow characteristics of near the wall which are suited for realistic phenomena. The numerical analysis results show turbulent flow characteristics and pressure drop at the near the wall as observed experimentally. The results predict that turbulent kinetic energy(k) is closely relative to the diffusion of recirculation flow, and v2-f turbulence model simulation results have a good agreement with experimental.