• Proceedings of the Korean Institute of IIIuminating and Electrical Installation Engineers Conference
• /
• 1999.11a
• /
• pp.58-63
• /
• 1999

In order to analyze the discharge-pumped KrF excimer laser, computer simulation code is developed. On the other hand, the electron velocity distribution in a discharge plasma, measured by the Thomson scattering method, showed the Maxwellian, while the code predicted non-Maxwellian. This disagreement was solved by introducing the electron-electron collision into the simulation code. We also developed a simulation code on the CO2 laser-heated plasma in high-pressure Ar gas, and estimated the formation process of Ar2 excimer. The code predicted the possibility of the Ar2 laser action at 126 nm.

• 발명특허
• /
• v.26 no.10 s.306
• /
• pp.76-83
• /
• 2001

본 발명은 승화성 고체 미립자 제트를 이용한 분사로 표면의 오염물을 제거하는 공정이다. 이는 극저온에서 고화된 입자가 표면에 고속 충돌 후 오염물을 제거하고 자신은 승화되어 잔사를 남기지 않는 청정 세척 공정을 말하는데 반도체 장비, 정밀 제품, 인쇄회로 기판 등의 다양한 표면의 각종 오염막 제거에 널리 사용될 수 있다. 본 장치의 특징은 세정 매체인 $CO_2$와 Carrier gas인 $N_2$를 사용하였고 현재 특허에 출원되어 있는 단순한 액체$CO_2$를 이용한 세정범위를 넘어 다양한 세정매체 즉, 복합인자($CO_2$ + ice, Ar + ice)를 이용하여 세정효율의 다변화를 이루었고 자체 개발한 냉동기를 이용하여 고화율이 액체 $CO_2$보다 상대적으로 낮은 기체 $CO_2$의 고화율을 증대 시킴으로써, 세정매체의 소모시간이 현격히 감소되어 원가절감 효과를 증대 시켰다. 세정대상물을 효과적으로 제거하기 위해 주 세정 매체인 $CO_2$의 수농도를 조절할 수 있는 Multi-Nozzle의 개발과 이로 인하여 세정력의 강도를 조절하도록 하였다. 세정 후 발생되는 오염입자를 효과적으로 제거하도록 국부 Exhaust를 Nozzle전단에 달아 재 오염의 방지효과를 극대화 시켰다.

• Journal of the Optical Society of Korea
• /
• v.20 no.5
• /
• pp.575-578
• /
• 2016

The thermal endurance of fiber Bragg gratings (FBGs), written with the aid of 193-nm ArF excimer laser irradiation on H₂-loaded Ge/B codoped silica fiber, and pretreated with a CO₂ laser and a subsequent slow cooling process, is investigated. These treated gratings show relatively less degradation of grating strength during the thermal annealing procedure. The thermal decay characteristics of treated and untreated fiber, recorded over a time period of 9 hours, have been compared. The effect on the Bragg transmission depth (BTD) and the center-wavelength shift, as well as the growth of refractive-index change during the grating inscription process for both treated and untreated fiber, are analyzed.

• Bulletin of the Korean Chemical Society
• /
• v.11 no.5
• /
• pp.420-422
• /
• 1990

Various substituted benzal chlorides are converted into alkyl phenylacetates ($ArCH_2COOR$) under CO atmosphere on reaction with a catalytic amount of Fe(CO)$_5$, a base, and an alcohol. The optimum conditions are found as atmospheric pressure of CO, 40$^{\circ}C$, potassium hydroxide as base, and medium of alcohol.

• Journal of Korean Tunnelling and Underground Space Association
• /
• v.19 no.3
• /
• pp.375-388
• /
• 2017

In order to solve the traffic congest and environmental issues, small-cross section tunnel for small car only is increasing, but there is not standard for installation of disaster prevention facility. In this study, in order to investigate the behavioral characteristics of thermal environment and smoke in a small cross section tunnels with a large port exhaust ventilation system, the A86, the U-Smartway and the Seobu moterawy tunnel, Temperature and CO concentration in case of fire according to cross sectional area, heat release rate and exhaust air flow rate were analyzed by numerical analysis and the results were as follows. As the cross-sectional area of the tunnel decreases, the temperature of the fire zone increases and the rate of temperature rise is not significantly affected by heat release rate. However, there is a difference depending on the change of the exhaust air flow rate. In the case of applying the exhaust air flow rate $Q_3+2.5Ar$ of the large port exhaust ventilation system, the temperature of the fire zone was 7.1 times for A86 ($Ar=25.3m^2$) and 5.4 time for U-smartway ($Ar=37.32m^2$) by Seobu moterway tunnel ($Ar=46.67m^2$). The CO concentration of fire zone also showed the same tendency. The A86 tunnels were 10.7 times and the U-Smartways were 9.5 times more than the Seobu moterway. Therefore, in the case of a small section tunnel, the thermal environment and noxious gas concentration due to the reduction of the cross-sectional area are expected to increase significantly more than the cross-sectional reduction rate.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
• /
• 2009.11a
• /
• pp.74-74
• /
• 2009

The ArF PR mask was. developed to overcome the limit. of sub 40nm patterning technology with KrF PR. But ArF PR difficult to meet the required PR selectivity by thin PR thickness. So need to the multi-stack mask such as amorphous carbon layer (ACL). Generally capacitively coupled plasma (CCP) etcher difficult to make the high density plasma and inductively coupled plasma (ICP) type etcher is more suitable for multi stack mask etching. Hybrid Coupled Plasma source (HCPs) etcher using the 13.56MHz RF power for ICP source and 2MHz and 27.12MHz for bias power was adopted to improve the process capability and controllability of ion density and energy independently. In the study, the oxide trench which has the multi stack layer process was investigated with the HCPs etcher (iGeminus-600 model DMS Corporation). The results were analyzed by scanning electron microscope (SEM) and it was found that etching characteristic of oxide trench profile depend on the multi-stack mask.

• Journal of Photoscience
• /
• v.12 no.2
• /
• pp.101-107
• /
• 2005

Infrared multiphoton dissociation of $CHCl_2F$ was studied using $CO_2$ laser excitation. Three products, $C_2Cl_2F_2$, $C_2ClF_3$, and $C_2HClF_2$, were identified by the analysis of the gas mixture from the photoreaction of $CHCl_2F$. The dependence of the reaction probability on added Ar gas pressure and excitation laser pulse energy was investigated. At low pressure (< 10 torr), the reaction probability increased as Ar pressure increased due to the rotational hole-filling effect, while it diminished with the increase of Ar pressure at high pressure (> > 20 torr) due to the collisional deactivation. The ratio of two products $(C_2ClF_3/C_2Cl_2F_2)$ decreased at low pressure (< 10 torr) and increased at high pressure (> 20 torr) with the increase of Ar pressure. The log-log plot of the reaction probability vs. laser pulse energy (${\\phi}$) was found to have a linear relationship, and its slope decreased as the added Ar pressure was increased. The reaction mechanisms for product formation have been suggested and validated by experimental evidences and considering the energetics. Fluorine-chlorine exchange reaction in the intermediate complex has been suggested to explain the formation of $C_2ClF_3$.

• Proceedings of the Korea Committee for Ocean Resources and Engineering Conference
• /
• 2004.05a
• /
• pp.365-369
• /
• 2004

Recently, Inconel 625 is used widely in offshore processing piping in order to extend the maintenance tenn and improve the quality of anti-corrosion. According to the resistance to attack in various corrosive media at temperatures from $200^{\circ}C$ to aver $1090^{\circ}C$, in combination with good low- and high-temperature mechanical strength. In general, High quality weldments for this material are readily produced by commonly used processes. in recent years, the flux cored arc welding(FCAW) process is becoming more popular due to higher deposition rate and a better weld quality as compared to the shielded metal arc welding (SMAW) process, at the same time, exhibiting equally good weld metal toughness similar to the SAW process. In this study, the weldability and weldment characteristics(mechanical properties and corrosive environment) of Inconel 625 are considered in FCAW weld associated with the several weld shielding gases($80\%Ar\;+\;20\%\;CO_2,\;50\%Ar\;+\;50\%\;CO_2,\;100\%\;CO_2$) in viewpoint of welding productivity.

• Proceedings of the Korea Committee for Ocean Resources and Engineering Conference
• /
• 2004.05a
• /
• pp.352-355
• /
• 2004

Inconel 625 is useful in variety of industrial applications because of the resistance to attack in various corrosive media at temperatures from $200^{\circ}C$ to over $1090^{\circ}C$, in combination with good law- and high temperature mechanical strength. Rencently, this material is also used widely in offshore processing piping in order to extend the maintenance tenn and improve the quality of anti-corrosion. In general, high quality weldments for this material are readily produced by commonly used processes. Not all processes are applicable to this material group, Ni-alloys. Metallurgiad characterictics or the unavailability of matching, position or suitable welding processes. Nowadays, the flux cored wire is developed and applied for the better productivity in several welding position including the vertical position. in this study, the weldability and weldment characteristics of inconel 625 are considered in FCAW weld associated with the several shielding gases($80\%Ar\;+\;20\%\;CO_2,\;50\%Ar\;+\;50\%\;CO_2,\;100\%\;CO_2$) in viewpoint of welding productivity.

• Proceedings of the Korea Committee for Ocean Resources and Engineering Conference
• /
• 2004.11a
• /
• pp.234-238
• /
• 2004

Inconel 625 is useful in variety of industrial applications because of the resistance to attack in various corrosive media at temperatures from $200^{\circ}C$ to aver $1090^{\circ}C$, in combination with good law- and high temperature mechanical strength. Rencently, this material is also used widely in offshore processing piping in order to extend the maintenance term and improve the quality of anti-corrosion. In general, high quality weldments for this material are readily produced by commonly used processes. Not all processes are applicable to this material group, Ni-alloys. Metallurgical characterictics or the unavailability of matching, position or suitable welding processes. Nowadays, the flux cored wire is developed and applied for the better productivity in several welding position including the vertical position. in this study, the weldability and weldment characteristics (mechanical properties) of inconel 625 are considered in FCAW(Flux Core Arc Welding) associated with the several shielding gases($80\%Ar\;+\;20\%CO_2,\;50\%Ar+50CO_2,\;100CO_2$) in viewpoint of welding productivity.