• Title/Summary/Keyword: Ar rate

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마그네트론 스퍼터링을 이용하여 TiN 박막을 증착한 도전성 섬유

  • Jang, Jin-Hyeok;Mun, Seon-U;Kim, Gyeong-Hun;Kim, Seong-Min;Lee, Seung-Min;Kim, Jeong-Su;Han, Seung-Hui
    • Proceedings of the Korean Vacuum Society Conference
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    • 2013.02a
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    • pp.168-168
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    • 2013
  • 도전성 섬유(Conductive textile)는 섬유자체의 고유 특성을 유지하면서 전기적인 도전 특성을 갖는 섬유로서, Cu, Ag, Ni 등의 전기전도성이 높은 금속 박막을 증착하여 제작하고 있다. 그러나, 이러한 금속은 공기 중의 산소와 결합하여 쉽게 산화되는 특성을 지니고 있기 때문에 사용 중에 산화되어 도전 특성이 감소하는 단점이 있다. TiN은 금속 못지않은 높은 전기전도성을 지니고 있을 뿐만 아니라, 금속에 비하여 높은 경도에 따른 우수한 내마모 특성, 내부식성 및 낮은 마찰계수를 지니고 있다. 그러나, TiN은 경도가 높기 때문에 섬유의 고유 특성인 유연성이 저하되는 문제가 있다. 본 연구에서는 면(Cotton), PE (Polyester), PP (Polypropylene) 등의 섬유 위에 TiN 박막을 증착하여, 섬유의 유연성을 유지하며 전기전도성과 내마모 특성이 우수한 도전성 섬유를 제작하고자 하였다. TiN 박막 증착을 위하여 ICP-assisted pulsed-DC reactive magnetron sputtering 장비를 사용하였으며, Ar:N2 유량비(Flow rate), Ti 타겟 power, ICP RF power 등을 변화시켜 Ti와 N의 조성비를 조절하였고, 이를 통하여 섬유의 휨이나 접힘에도 도전 특성이 변하지 않고 내마모 특성이 우수한 TiN 박막을 증착하였다. TiN 박막이 증착된 섬유의 전기전도도는 일정한 압력 하에 전기전도도를 측정할 수 있는 장치를 제작하여 측정하였으며, 표면 조성 분포 및 접합력 측정을 위하여 XPS (X-ray Photoelectron Spectroscopy)와 Peel-tester를 이용하였다.

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Impact of $CO_2$ Increase on East Asian Monsoon

  • Kripalani, R.H.;Oh, J.H.;Chaudhari, H.S.
    • The Korean Journal of Quaternary Research
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    • v.19 no.2
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    • pp.50-54
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    • 2005
  • Some basic summer precipitation features over East Asia during the $20^{th}-21^{st}$ century as simulated / projected by the 22 coupled climate models under the IPCC AR4 program are investigated. Keeping in view that these are climate runs without prescribed SSTs, models perform well in simulating the regional annual cycle, spatial patterns (not shown) and the inter-annual variability. The projections under the 1% increase in $CO_2$ compounded until reaching double and held constant thereafter reveal that (a) Precipitation is likely to increase in all the months in particular during the summer monsoon (JJA) months. (b) The mean summer monsoon rainfall can increase from 4.2 to 13.5% and its variability is also likely to increase in the warming world due to increase in $CO_2$ (c) Extreme excess and deficient seasonal monsoons are likely to become more intense (not shown here) (d) Once the increase in $CO_2$ is cut-off, the system will reach a state of equilibrium, and then the rate of increase in precipitation is also expected to remain constant.

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A Study on the Gravity Segregation in Monotectic Al Alloys.(I);The Effect of Melting Treatment on the Distribution of Pb, Bi Particles. (Al계 편정합금의 중력 편석에 관한 연구 (I);Pb, Bi 입자의 분산에 미치는 용탕처리의 영향)

  • Hwang, Ho-Eul;Lee, Jai-Ha;Jung, Sung-In;Choe, Jeong-Cheol;Yoon, Eui-Park
    • Journal of Korea Foundry Society
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    • v.10 no.4
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    • pp.316-323
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    • 1990
  • To improve free-cutting property, fine Pb, Bi particles is necessary to be distributed evenly in Al-Cu alloy. The control of added element size and distribution are very difficult because of the insolubility and gravity segregation of Pb, Bi in the matrix. Therefore, in this study, mechanical stirring of the melt, inert gasbubbling, the addition of degasser are used for the fine distribution of Pb, Bi particles. The best distribution are obtained by stirring with 500 rpm for 10min., Ar gas bubbling with 600cc/min for 5min. and degassing with 0.8wt% degasser. As increasing cooling rate, fine grain size and finely dispersed particles were observed. The optimum pouring temperature was $650^{\circ}C$.

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Electrical Characteristic of Al/AIN/GaAs MIS Capacitor fabricated by Reactive Sputtering Method for the DC power (반응성 스퍼터링법으로 Al/AIN/GaAs MIS 커패시터 제조시 DC 전력에 따른 전기적 특성)

  • 권정열;이헌용;김지균;김병호;김유경
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2001.07a
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    • pp.566-569
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    • 2001
  • In this paper, we investigated the electrical characteristics through DC power at manufacturing the MIS capacitor insulator AIN thin film based on reactive sputtering method. In case of deposition temperature 250$^{\circ}C$, pressure 5mTorr, total flow rate 8sccm(Ar:4sccm N2:4sccm), AIN thin film was deposited with changing DC power. As DC power increses, resistivity is observed a little increase. When AIN thin film is deposited at 100W, the result shows leakage current 10$\^$-8/A/$\textrm{cm}^2$ at 0.1MV/cm. Otherwise, In case of depositing at 150W and 200W, the result shows that the characteristic of leakage current is under 10$\^$-9//$\textrm{cm}^2$ at 0.1MV/cm. In C-V characteristic with DC power, deep depletion phenomenon is observed at inversion region in 100W and 150W. In 200W, that phenomenon, however, was showed to decrease. It shows that the hysterisis increases with being increasing DC power.

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Optical Properties of Multi-layer TiNO/AlCrNO/Al Cermet Films Using DC Magnetron Sputtering

  • Han, Sang-Uk;Park, Soo-Young;Kim, Hyun-Hoo;Jang, Gun-Eik;Lee, Yong-Jun
    • Transactions on Electrical and Electronic Materials
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    • v.16 no.5
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    • pp.280-284
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    • 2015
  • Among many the oxynitrides, TiNO and AlCrNO, have diverse applications in different technological fields. We prepared TiNO/AlCrNO/Al thin films on aluminum substrates using the method of dc reactive magnetron sputtering. The reactive gas flow, gas mixture, and target potential were applied as the sputtering conditions during the deposition in order to control the chemical composition. The multi-layer films have been prepared in an Ar and O2+N2 gas mixture rate. The surface properties were estimated by performing scanning electron microscopy (SEM). At a wavelength range of 0.3~2.5 μm, the exact composition and optical properties of thin films were measured by Auger electron spectroscopy (AES) and Ultraviolet-visible-near infrared (UV-Vis-NIR) spectrophotometry. The optimal absorptance of multi-layer films was exhibited above 95.5% in the visible region of the electromagnetic spectrum, and the reflectance was achieved below 1.89%.

Synthesis and Electrochemical Properties of Nanocrystalline LiFePO4 Obtained by Different Methods

  • Son, C.G.;Chang, D.R.;Kim, H.S.;Lee, Y.S.
    • Journal of Electrochemical Science and Technology
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    • v.2 no.2
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    • pp.103-109
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    • 2011
  • Nanocrystalline $LiFePO_4$ powders were prepared at 660-$670^{\circ}C$ in an Ar atmosphere using two different synthetic routes, solid-state and sol-gel. Both materials showed well-developed XRD patterns without any impurity peaks. Particles composed in the range of 200-300 nm from the solid-state method, and 50-100 nm from the sol-gel method, were confirmed through scanning electron microscopy and dynamic light scattering. The $LiFePO_4$ obtained by the sol-gel method offered a high discharge capacity (153 mAh/g) and stable discharge behavior, even at elevated temperatures (50 and $60^{\circ}C$), whereas poor electrochemical performance was observed from the solid-state method. Rate capability studies for sol gel-derived $LiFePO_4$ ranged from 0.2 to 30 C, which revealed excellent retention over 70 cycles with a 99.9% capacity.

GROWTH AND CHARACTERIZATION OF $La_3Ga_5SiO_{14}$ SINGLE CRYSTALS BY THE FLOATING ZONE METHOD

  • Yoon, Won-Ki;Auh, Keun-Ho
    • Proceedings of the Korea Association of Crystal Growth Conference
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    • 1999.06a
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    • pp.253-269
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    • 1999
  • The development of telecommunication and information technology requires to develop new piezoelectric materials with small size, low impedance, wide pass band width and high thermal stability of frequency. Langasite (La3Ga5SiO14) single crystal has been researched substitute of quartz and LiNbO3 for the applications of SAW filter, BAW filter and resonator. Its single crystal growth has been carried out by Czochralski Method. So, in order to get single crystal with higher quality, in this study, lnagasite (La3Ga5SiO14) single crystal was grown by using Floating Zone (FZ) method and characterized. For the growth of langasite single crystals, the langasite powder was synthesized at 135$0^{\circ}C$ for 5hrs and the feed rod was sintered at 135$0^{\circ}C$ for 5hrs. The growing rate was 1.5mm/h and the rotation speed was 15 rpm for an upper rotation and 13 rpm for a lower rotation. In order to prevent the evaporation of gallium oxide, Ar and O2 gas mixture was flowed. The growth direction was analyzed by Laue back-scattered analysis. The composition of grown crystal was analyzed suing XRD and WDS. The electrical properties of grown crystal at various frequencies and temperature were discussed.

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Effect of accelerational perturbations on physical vapor transport crystal growth under microgravity environments

  • Choi, Jeong-Gil;Lee, Kyong-Hwan;Kwon, Moo-Hyun;Kim, Geug-Tae
    • Journal of the Korean Crystal Growth and Crystal Technology
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    • v.16 no.5
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    • pp.203-209
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    • 2006
  • For $P_B=50,\;{\Delta}T=10K$, Ar=5, Pr=2.36, Le=0.015, Pe=1.26, Cv=1.11, the intensity of solutal convection (solutal Grashof number $Grs=3.44x10^4$) is greater than that of thermal convection (thermal Grashof number $Grt=1.81x10^3$) by one order of magnitude, which is based on the solutally buoyancy-driven convection due to the disparity in the molecular weights of the component A($Hg_2Cl_2$) and B(He). With increasing the partial pressure of component B from 10 up to 200 Torr, the rate is decreased exponentially. The convective transport decreases with lower g level and is changed to the diffusive mode at 0.1 $g_0$. In other words, for regions in which the g level is 0.1 $g_0$ or less, the diffusion-driven convection results in a parabolic velocity profile and a recirculating cell is not likely to occur. Therefore a gravitational acceleration level of less than 0.1 $g_0$ can be adequate to ensure purely diffusive transport.

Magnetic Properties of Co-Cr Thin Films Deposited by FTS Method (FTS 방식으로 증착된 Co-Cr 박막의 자기적 특성)

  • Son, In-Hwan;Kim, Myung-Ho;Kong, Sok-Hyun;Kim, Kyung-Hwan;Nakagawa, S.;Naoe, M.
    • Proceedings of the KIEE Conference
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    • 1998.07d
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    • pp.1279-1281
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    • 1998
  • The Co-Cr thin films are one of the most suitable candidates for perpendicular magnetic recording media. The facing targets sputtering(FTS) method has a advantage of preparing films over a wide range of working gas pressure on plasma-free substrates. In this study, we investigated the possibility of employing FTS system for depositing Co-Cr films, Co-Cr thin films were deposited with continuously sputter gas pressure ($P_{Ar}$ = 0.1 mTorr) by FTS method at temperature of $40^{\circ}C$. We find that the change of thickness and deposition rate of sputtered Co-Cr thin films affect crystal orientation and magnetic properties. Crystallographic and magnetic properties were evaluated by x-ray diffractometry(XRD) and vibrating sample magnetometer(VSM) respectively. It has been confirmed that the FTS method is very useful for preparing Co-Cr thin film recording media.

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The Effect of Oxygen and Carbon Dioxide Concentration on Soot Formation in Nonpremixed Flames Using Time Resolved LII Technique

  • Oh, Kwang-Chul;Shin, Hyun-Dong
    • Journal of Mechanical Science and Technology
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    • v.19 no.11
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    • pp.2068-2076
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    • 2005
  • The influence of oxygen concentration and CO$_{2}$ as diluent in oxidizer side on soot characteristics was studied by Laser Induced Incandescence, Time Resolved LII and Transmission Electron Microscopy photography in non-premixed co flowing flames. Through the comparison of TEM photographs and the decay rate of LII signal, suitable two delay times of TIRE-LII method and signal sensitivity ($\Delta$S$_{TIRE-LII/) were determined. The effects of O$_{2}$ and CO$_{2}$ as diluent in oxidizer side on soot formation are investigated with these calibrated techniques. The O$_{2}$+CO$_{2}$, N$_{2}$, and [Ar+CO$_{2}$] mixture in co-flow were used to isolate CO2 effects systematically. The number concentration of primary particle and soot volume fraction abruptly decrease by the addition of CO$_{2}$ to the co-flow. This suppression is resulted from the short residence time in inception region because of the late nucleation and the decrease of surface growth distance by the low flame temperature due to the higher thermal capacity and the chemical change of CO$_{2}$ including thermal dissociation. As the oxygen concentration increases, the number concentration of soot particles at the inception region increases and thus this increase of nucleation enhances the growth of soot particle.