• 제목/요약/키워드: Ar Reshape

검색결과 2건 처리시간 0.017초

4H-SiC Trench MOSFET 응용을 위한 Ar Reshape 공정 최적화 (Optimization of Ar Reshape Process for 4H-SiC Trench MOSFET)

  • 성민제;강민재;김홍기;김성준;이정윤;이원범;이남석;신훈규
    • 전기전자학회논문지
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    • 제22권4호
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    • pp.1234-1237
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    • 2018
  • 본 논문에서는 planar MOSFET 대비 on 저항 감소 및 스위칭 속도 개선의 장점이 있는 4H-SiC trench MOSFET응용을 위하여 trench MOSFET 중요 이슈 중 하나인 sub-trench의 개선연구를 수행하였다. sub-trench의 제거를 위하여 Ar reshape 공정을 수행하였고, 온도와 공정시간을 변화해가며 trench 형태의 변화를 관찰하였다. 그 결과 $1500^{\circ}C$, 20분 조건에서 가장 적절한 sub-trench 완화를 확인하였다. 또한 Ar reshape 공정 이후 건식/습식 산화공정을 진행하여 결정방향에 따른 산화막 두께변화에 대해 확인하였다.

A Study on Fashion Items to Prevent COVID-19 Using Wearable Technology

  • Park, Hye-Sook;Moon, Phil-Joo
    • International Journal of Advanced Culture Technology
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    • 제9권3호
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    • pp.277-282
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    • 2021
  • The generalization of social distancing due to the COVID-19 pandemic has rapidly spread non-face-to-face services, accelerating the speed of non-face-to-face digital conversion technology. The importance of telemedicine, a remote service, has been rekindled in the wearable technology including the medical industry. In a situation where it is not easy for any company to overcome the COVID-19 pandemic, it is a time when collaboration within the industry or between competitors is necessary. In addition to the digital-based online exhibition hall using AR-VR-MR technology, which is a major core technology of the future industry, virtual stores that can receive services such as actual shopping should be actively used. Paradoxically COVID-19 will provide new opportunities to reshape and reconnect the future of the textile and fashion industry. Therefore, the purpose of this study is to investigate the current status of wearable technology products being developed as fashion items for the prevention of COVID-19 and analyze their characteristics. This study results can be used as basic data for future research on the fashion industry and education.