• Title/Summary/Keyword: Ar

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Fabrication of Large Area Transmission Electro-Absorption Modulator with High Uniformity Backside Etching

  • Lee, Soo Kyung;Na, Byung Hoon;Choi, Hee Ju;Ju, Gun Wu;Jeon, Jin Myeong;Cho, Yong Chul;Park, Yong Hwa;Park, Chang Young;Lee, Yong Tak
    • Proceedings of the Korean Vacuum Society Conference
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    • 2013.08a
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    • pp.220-220
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    • 2013
  • Surface-normal transmission electro-absorption modulator (EAM) are attractive for high-definition (HD) three-dimensional (3D) imaging application due to its features such as small system volume and simple epitaxial structure [1,2]. However, EAM in order to be used for HD 3D imaging system requires uniform modulation performance over large area. To achieve highly uniform modulation performance of EAM at the operating wavelength of 850 nm, it is extremely important to remove the GaAs substrate over large area since GaAs material has high absorption coefficient below 870 nm which corresponds to band-edge energy of GaAs (1.424 eV). In this study, we propose and experimentally demonstrate a transmission EAM in which highly selective backside etching methods which include lapping, dry etching and wet etching is carried out to remove the GaAs substrate for achieving highly uniform modulation performance. First, lapping process on GaAs substrate was carried out for different lapping speeds (5 rpm, 7 rpm, 10 rpm) and the thickness was measured over different areas of surface. For a lapping speed of 5 rpm, a highly uniform surface over a large area ($2{\times}1\;mm^2$) was obtained. Second, optimization of inductive coupled plasma-reactive ion etching (ICP-RIE) was carried out to achieve anisotropy and high etch rate. The dry etching carried out using a gas mixture of SiCl4 and Ar, each having a flow rate of 10 sccm and 40 sccm, respectively with an RF power of 50 W, ICP power of 400 W and chamber pressure of 2 mTorr was the optimum etching condition. Last, the rest of GaAs substrate was successfully removed by highly selective backside wet etching with pH adjusted solution of citric acid and hydrogen peroxide. Citric acid/hydrogen peroxide etching solution having a volume ratio of 5:1 was the best etching condition which provides not only high selectivity of 235:1 between GaAs and AlAs but also good etching profile [3]. The fabricated transmission EAM array have an amplitude modulation of more than 50% at the bias voltage of -9 V and maintains high uniformity of >90% over large area ($2{\times}1\;mm^2$). These results show that the fabricated transmission EAM with substrate removed is an excellent candidate to be used as an optical shutter for HD 3D imaging application.

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Structure-Function Analysis of DNA Binding Domain of the Yeast ABF1 Protein (효모 ABF1 단백질의 DNA Binding 부위에 대한 구조 기능 연구)

  • Cho, Gi-Nam;Lee, Sang-Kyung;Kim, Hong-Tae;Kim, Ji-Young;Rho, Hyune-Mo;Jung, Gu-Hung
    • Korean Journal of Microbiology
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    • v.32 no.2
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    • pp.102-108
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    • 1994
  • Autonomously replicating sequence Binding Factor 1(ABF1) is a DNA-binding protein that specifically recognizes the $RTCRYN_5ACG$ at many sites in the yeast genome including the promoter element, mating-type silencer and ARS. To express the intact full-length ABF1 gene in E. coli, the ABF1 gene has been cloned into pMAL-c2 and His-61, Leu-353 and Leu-360 were substituted with other amino acid. ABF1 fusion proteins of wild type ABF1 and H61A, L353R and L360R nutants were purified by amylose resin affinity chromatography. Fusion protein of MBP and ABF1 was digested by Factor Xa and Characterized by gel retardation assay and complementation test. As aresult, we suggested that other DNA binding motif except atypical inc-finger motif is in the middle region of ABF1.

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A Study on the Stretch-flangeability of Hot-Rolled High Strength Steel with Ferrite-Bainite Duplex Microstructure (페라이트-베이나이트 복합조직 고강도 열연강판의 신장플랜지 특성에 관한 연구)

  • Cho, Yeol-Rae;Chung, Jin-Hwan;Koo, Hwang-Hoe;Kim, In-Bae
    • Korean Journal of Materials Research
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    • v.9 no.12
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    • pp.1252-1262
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    • 1999
  • The effect of microstructures on the strength-flangeability of Nb bearing hot-rolled high strength steel was investigated in order to improve the strength-flangeability of conventional TS 580MPa grades HSLA steel for the automotive wheel disc. The low temperature coiling method using 3-step controlled cooling pattern after hot rolling was effective to produce the Nb-bearing high strength steel with the polygonal ferrite and bainite duplex microstructures. It was suggested that the suppressed precipitation of grain boundary cementites and the decreased hardness difference between ferrite matrix and bainite cause the excellent stretch-flangeability of ferrite-bainite duplex microstructure steel. Therefore, the formation and propagation of microcracks were suppressed relative to the conventional HSLA steel with ferrite and pearlite microstructure. In addition, the elongation was improved as compared with that of hot-rolled steel sheets using conventional early cooling pattern because the volume fraction of polygonal ferrite was increased.

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Effects of Load Center of Gravity and Feet Positions on Peak EMG Amplitude at Low Back Muscles While Lifting Heavy Materials (중량물 들기 작업시 물체 무게중심 및 발의 위치가 허리 근육의 최대 EMG 진폭에 미치는 영향)

  • Kim, Sun-Uk;Han, Seung Jo
    • Journal of Korean Society of Occupational and Environmental Hygiene
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    • v.22 no.3
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    • pp.257-264
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    • 2012
  • Objectives: This study's aims were to evaluate the effects of load center of gravity within an object lifted and feet placements on peak EMG amplitude acting on bilateral low back muscle groups, and to suggest adequate foot strategies with an aim to reducing low back pain incidence while lifting asymmetric load. Methods: The hypotheses that asymmetric load imposes more peak EMG amplitude on low back muscles contralateral to load center of gravity than symmetric load and maximum peak EMG amplitude out of bilateral ones can be relieved by locating one foot close to load center of gravity in front of the other were established based on biomechanics including safety margin model and previous researches. 11 male subjects were required to lift symmetrically a 15.8kg object during 2sec according to each conditions; symmetric load-parallel feet (SP), asymmetric load-parallel feet (AP), asymmetric load-one foot contralateral to load center of gravity in front of the other (AL), and asymmetric load-one foot ipsilateral to load center of gravity in front of the other (AR). Bilateral longissimus, iliocostalis, and multifidus on right and left low back area were selected as target muscles, and asymmetric load had load center of gravity 10cm deviated to the right from the center in the frontal plane. Results: Greater peak EMG amplitude in left muscle group than in right one was observed due to the effect of load center of gravity, and mean peak EMG amplitudes on both sides was not affected by load center of gravity because of EMG balancing effect. However, the difference of peak EMG amplitudes between both sides was significantly affected by it. Maximum peak EMG amplitude out of both sides and the difference of peak EMG amplitude between both sides could be reduced with keeping one foot ipsilateral to load center of gravity in front of the other while lifting asymmetric load. Conclusions: It was likely that asymmetric load lead to the elevated incidence of low back pain in comparison with symmetric load based on maximum peak EMG amplitude occurrence and greater imbalanced peak EMG amplitude between both sides. Changing feet positions according to the location of load center of gravity was suggested as one intervention able to reduce the low back pain incidence.

Spatial and Temporal Characteristics of Distributions of Bacteria in the Mideast Part of the Yellow Sea (황해 중동부해역에서 박테리아의 시.공간적 분포의 특징)

  • 조병철;강연식
    • 한국해양학회지
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    • v.29 no.2
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    • pp.145-151
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    • 1994
  • Investigations on distributions of bacterial abundance and production in the mideast part of the Yellow Sea were made in August and October, 1991 as a part of study of "The Exploitation Research of Marine Resources on the Yellow Sea". Here, we report spatial and temporal characteristics of distributions of bacteria in the mideast part of the Yellow Sea including data reported by Son (1989) for the same area. During the whole study period, bacterial abundance ranged from 0.5${\times}$10/SUP 8/ 1/SUP -1/ to 19${\times}$10/SUP 8/ 1/SUP -1/. Seasonal changes and the difference between two studies in bacterial abundance were less than 3.5 fold ar each station in the study area, except October, 1991. An interesting result was that bacterial abundances except October, 1991 were generally lower than those expected from the established relationship between chlorophyll and bacterial abundance in the oceans. For the bacterial abundance observed in October 1991, controlling factor(s) of bacteria might be different from the rest of study period. Bacterial production (0.1∼2.9ug C 1/SUP -1/ d/SUP -1/) comprised a small fraction (18${\pm}$11%) of primary production. Though data are limited, low bacterial abundances compared to chlorophyll concentration and low values of bacterial production to primary production seemed to occur in the mideast part of the Yellow Sea. Unravelling the causes of these phenomena would be necessary to understand the ecology of bacteria in the region.

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Growth of Two-Dimensional Nanostrcutured VO2 on Graphene Nanosheets (그래핀 나노 시트 위에 2차원 나노구조를 갖는 VO2의 성장)

  • Oh, Su-Ar;Kim, Ki-Chul
    • Journal of the Korea Academia-Industrial cooperation Society
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    • v.17 no.9
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    • pp.502-507
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    • 2016
  • Vanadium dioxide, $VO_2$, is a thermochromic material that exhibits a reversible metal-insulator phase transition at $68^{\circ}C$, which accompanies rapid changes in the optical and electronic properties. To decrease the transition temperature around room temperature, a number of studies have been performed. The phase transition temperature of 1D nanowire $VO_2$ with a 100 nm diameter was reported to be approximately $29^{\circ}C$. In this study, 1D or 2D nanostructured $VO_2$ was grown using the vapor transport method. Vanadium dioxide has a different morphology with the same growth conditions for different substrates. The 1D nanowires $VO_2$ were grown on a Si substrate ($Si{\setminus}SiO_2$(300 nm), whereas the 2D & 3D nanostructured $VO_2$ were grown on an exfoliated graphene nanosheet. The crystallographic properties of the 1D or 2D & 3D nanostructured $VO_2$, which were grown by thermal CVD, and exfoliated-transferred graphene nanosheets on a Si wafer which was used as substrate for the vanadium oxide nanostructures, were analyzed by Raman spectroscopy. The as-grown vanadium oxide nanostructures have a $VO_2$ phase, which are confirmed by Raman spectroscopy.

대면적 플라즈마 공정에서 자장이 내장형 선형 유도결합형 플라즈마 특성에 미치는 영향에 관한 연구

  • 경세진;이영준;김경남;염근영
    • Proceedings of the Korean Institute of Surface Engineering Conference
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    • 2003.05a
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    • pp.55-55
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    • 2003
  • 최근 높은 해상도의 평판 디스플레이 장치 특히 차세대 TFT-LCD를 개발하기 위해서는 건식식각공정의 개발이 필수 불가결하며 이는 플라즈마 공정장치의 대면적화가 가능해야 한다. 따라서 산업계는 이러한 제조 조건에 알맞는 대면적 플라즈마 반응기 개발을 추구하고 있다. 이를 위해서는 건식식각공정의 개발이 필수 불가결하며 이를 위해선 플라즈마 공정장 치의 대면적화가 가능해야 한다. 이러한 대면적 공정을 위해서는 낮은 공정압력, 고밀도, 높은 플라즈마 균일도가 요구된다. 또한 이러한 대면적 고밀도 플라즈마에의 적용을 위하여 새로운 유도결합형 플라즈마 소오스의 개발이 진행되고 있으며, 안정적인 300mm웨이퍼 공정을 위하여 여러 형태의 안테나가 연구되어지고 있다. 그러나 차세대 TFT-LCD에 적용 가 능하게끔 기존의 ICP 소오스를 직접적으로 대면적화 하는데 있어서는 안테나의 인덕턴스의 값이 키지며, 유전물질의 두께 증가 및 그에 따른 재료비의 상슴에 의해 그 한계점을 나타 내었다. 본 연구에서는 차세대 TFT-LCD 및 POP 대면적 공정에 적용 가능한 고밀도 플라즈마를 발생시키기 위해서 내장형 유도결합형 선형 안테나를 사용하였다. 내장형 유도결합형 선형 안테나가 가지고 있는 고유의 정전기적 결합효과를 최소화시키기 위해 직사각형모양의 플라즈마 챔버(830mm*1,020mm)에서 영구자석을 사용하였다. 영구자석을 사용하여 외부자 장을 인가하였을 때가, 그럴지 않은 때보다 RF 안테나에 걸리는 코일의 전압을 낮춰주었으며, 영구자석의 배열에 따라 코일의 인덕턴스의 값이 크게 변함을 알 수 있었다. 그리고, 최적화된 자장의 배열은 플라즈마의 이온밀도를 증가시켰으며, 플라즈마 균일도 또한 10% 이 내로 유지됨을 알 수 있었다. 따른 식각 메커니즘에 대하여 알아보고자 하였다. $CF_4/Cl_2$ gas chemistry 에 첨 가 가스로 $N_2$와 Ar을 첨 가할 경 우 텅 스텐 박막과 하부 layer 간의 etch selectivity 증가는 관찰되지 않았으며, 반면에 첨가 가스로 $O_2$를 사용할 경우, $O_2$의 첨가량이 증가함에 따라 etch s selectivity 는 계속적으로 증가렴을 관찰할 수 있었다. 이는 $O_2$ 첨가에 따라 형성되는 WOF4 에 의한 텅스텐의 etch rates 의 감소에 비하여, $Si0_2$ 등의 형성에 의한 poly-Si etch rates 이 더욱 크게 감소하였기 때문으로 사료된다. W 과 poly-Si 의 식각 특성을 이해하기 위하여 X -ray photoelectron spectroscopy (XPS)를 사용하였으며, 식각 전후의 etch depth 를 측정하기 위하여 stylus p pmfilometeT 를 이용하였다.X> 피막이 열처리 전후에 보아는 기계적 특성의 변화 양상은 열역학적으로 안정한 Wurzite-AlN의 석출에 따른 것으로 AlN 석출상의 크기에 의존하며, 또한 이러한 영향은 $(Ti_{1-x}AI_{x})N$ 피막에 존재하는 AI의 함량이 높고, 초기에 증착된 막의 업자 크기가 작을 수록 클 것으로 여겨진다. 그리고 환경의 의미의 차이에 따라 경관의 미학적 평가가 달라진 것으로 나타났다.corner$적 의도에 의한 경관구성의 일면을 확인할수 있지만 엄밀히 생각하여 보면 이러한 예의 경우도 최락의 총체적인 외형은 마찬가지로

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Synthesis of Super Iron Carbide from Hematite Fines with $CO-H_2$ Gas Mixture (Hematite系 微粉鑛石을 사용한 $CO-H_2$ 混合 Gas에 의한 高炭化鐵의 合成)

  • Chung, Uoo-Chang
    • Resources Recycling
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    • v.13 no.5
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    • pp.45-50
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    • 2004
  • To investigate the characteristics of phases formed in iron carbides, super iron carbide was synthesized from hematite fines with $CO-H_2$ gas mixture after reduction under $H_2$ gas at $600^{\circ}C$. Before carburization, the surface of iron powder reduced was pre-treated in the atmosphere of 0.05 vol% $NH_3$-Ar. The synthesized iron carbides were comprehensively explored by C/S analyzer(Low C/S determinator), M$\"{o}$ssbauer spectroscopy, X-ray diffraction patterns(XRD), scanning electron microscopy(SEM), transmission electron microscopy(TEM), and Raman spectroscopy at various reaction time of 5, 10, 15, 20, 25, 30, and 35 min, respectively. By adding a small amount of $NH_3$ gas, the super iron carbides containing 10 wt% carbon were synthesized, and its addition stabilized iron carbides. It was found that the $NH_3$ treatment played a major role in the formation of iron carbide without decomposition($Fe_3C{\to}$3Fe+C) of iron carbides and precipitation of free carbon. It also succeed to synthesize super iron carbide, $Fe_5C_2$, as a stable single phase without involving Fe and $Fe_3C$ phases.

Preparation and oxygen control of Ti-6Al-4V alloys by recycling dental pure Ti scraps (치과용(齒科用) 순(純) 타이타늄 스크랩을 재활용(再活用)한 Ti-6Al-4V 합금(合金)의 제조(製造) 및 산소(酸素) 제어(制御))

  • Oh, Jung-Min;Lee, Back-Kyu;Choi, Good-Sun;Lim, Jae-Won
    • Resources Recycling
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    • v.21 no.1
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    • pp.60-65
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    • 2012
  • The Ti-6Al-4V alloys were prepared by recycling of dental Ti pure scraps using vacuum arc melting process, and their physical properties were evaluated the Ti-6Al-4V alloys with different oxygen concentrations. For the preparation of Ti-6Al-4V alloys, Ti pure scraps used for dental implant were utilized as a raw material, and their different oxygen concentrations were ranged from G1 to G4 grade in ASTM standards. It was confirmed that the weight loss of Al in the composition of Ti-6Al-4V alloy could be controlled under the Ar pressure of 875 torr during the melting of alloy. The oxygen concentrations of the Ti-6Al-4V alloys were ranged from 1170 to 3340 ppm. The vickers hardness change of the Ti-6Al-4V alloys showed a similar behavior with that of pure Ti. As a result, we confirmed a possibility of preparation of Ti-6Al-4V alloy by recycling of dental Ti scraps using vacuum arc melting process in this study.

Assessment of Climate Change Impact on Imha-Dam Watershed Hydrologic Cycle under RCP Scenarios (RCP 기후변화 시나리오에 따른 임하댐 유역의 미래 수문순환 전망)

  • Jang, Sun-Sook;Ahn, So-Ra;Joh, Hyung-Kyung;Kim, Seong-Joon
    • Journal of the Korean Association of Geographic Information Studies
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    • v.18 no.1
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    • pp.156-169
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    • 2015
  • This study was to evaluate the RCP climate change impact on hydrological components in the Imha-Dam watershed using SWAT(Soil and Water Assessment Tool) Model. The model was calibrated for six year(2002~2007) and validated for six year(2008~2013) using daily observed streamflow data at three watershed stations. The overall simulation results for the total released volume at this point appear reasonable by showing that coefficient of determination($R^2$) were 0.70~0.85 and Nash-Sutcliffe model efficiency(NSE) were 0.67-0.82 for streamflow, respectively. For future hydrologic evaluation, the HadGEM3-RA climate data by scenarios of Representative Concentration Pathway(RCP) 4.5 and 8.5 of the Korea Meteorological Administration were adopted. The biased future data were corrected using 34 years(1980~2013, baseline period) of weather data. Precipitation and temperature showed increase of 10.8% and 4.9%, respectively based on the baseline data. The impacts of future climate change on the evapotranspiration, soil moisture, surface runoff, lateral flow, return flow and streamflow showed changes of +11.2%, +1.9%, +10.0%, +12.1%, +18.2%, and +11.2%, respectively.