• 대한기계학회논문집B
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• 제33권3호
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• pp.186-193
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• 2009

In this article, the effect of silica addition on the phase transformation characteristics of $TiO_2$ nanoparticles synthesized by using an $O_2$-enriched coflow, hydrogen, diffusion flame was investigated. TTIP(titanium tetra-isopropoxide) and TEOS(tetraethyl-orthosilicate) were used as precursors for $TiO_2$ and $SiO_2$ nanoparticles, respectively. Based on the results from TEM and XRD analysis, it is believed that the silica addition on the flame synthesis of $TiO_2$ nanoparticles reduces the particle size distribution and raises the temperature of the phase transition from anatase to rutile. But the reduced sizes of the synthesized particles due to the silica addition made the sintering and phase transformation of particles more easily.

• 공업화학
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• 제16권2호
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• pp.187-193
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• 2005

광촉매 $TiO_2$박막은 titanium (IV) isopropoxide, 에탄올, HCl을 일정한 비율로 졸-겔방법에 의해 제작하였다. SEM에 의한 표면관찰에서는 $500^{\circ}C$에서 5회 반복해서 코팅하여 제작한 것이 우수했다. EDX에 의한 성분비는 spin코팅이 O : Ti의 atom%가 61 : 39로 dip코팅보다 우수했다. 그리고 박막제작의 온도에 따라서 anatase상에서 rutile상으로 결정구조가 변화되어 가는 것을 XRD측정으로 알았다. 제작한 $TiO_2$박막에 UV빔을 조사해서 얻은 TOC의 광분해효율이 1 h 이내에 20~65%를 나타내었고, 그 이후에는 서서히 감소하는 것을 확인했다.

• Carbon letters
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• 제7권4호
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• pp.259-265
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• 2006

Carbon-coated $TiO_2$ was prepared by $CCl_4$ solvent mixing method with the different heat treated temperatures (HTTs). Since the carbon layers derived from pitch on the $TiO_2$ particles were porous, the carbon-coated $TiO_2$ sample series showed a good adsorptivity. The values of BET surface areas measured were shown independently on the HTTs. The surface states by SEM present to the characterization of porous texture on the carbon-coated $TiO_2$ sample and carbon distributions on the surfaces. From XRD data, PT700 and PT750 were shown the X-ray diffraction patterns of the anatase $TiO_2$, but PT800 and PT850 were kept anatase-type structure even after heating at $800^{\circ}C$, though small amount of the rutile-type structure appears. The results of EDX microanalyses were observed for each sample show the spectra corresponding to almost all samples similar to C, O and Ti elements with an increase of HTTs. Finally, the excellent photoactivity of carbon-coated $TiO_2$ (especially, PT700 and PT750) could be attributed to the homogeneous coated carbon on the external surface and the structural anatase phase.

• 한국세라믹학회지
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• 제56권4호
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• pp.374-386
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• 2019

A process for nitrogen doping of TiO₂ ceramics was developed, whereby polycrystalline titania particles were prepared at 450-1000℃ with variation of the firing schedule under N₂ atmosphere. The effect of nitrogen doping on the polycrystallites was investigated by X-ray diffraction (XRD) and Raman analysis. The microstructure of the TiO₂ ceramics changed with variation of the firing temperature and the firing atmosphere (N₂ or O₂). The microstructural changes in the nitrogen-doped TiO₂ ceramics were closely related to changes in the Raman spectra. Within the evaluated temperature range, the nitrogen-doped titania ceramics comprised anatase and/or rutile phases, similar to those of titania ceramics fired in air. Infiltration of nitrogen gas into the titania ceramics was analyzed by Raman spectroscopy and XRD analysis, showing a considerable change in the profiles of the N₂-doped TiO₂ ceramics compared with those of the TiO₂ ceramics fired under O₂ atmosphere. The nitrogen doping in the anatase phase may produce active sites for photocatalysis in the visible and ultraviolet regions.

• 한국세라믹학회지
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• 제46권1호
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• pp.1-9
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• 2009

Activated carbon modified with nickel (Ni-AC) was employed the for preparation of Ni-activated carbon/$TiO_2$ (Ni-AC/$TiO_2$) composites. The $N_2$ adsorption data showed that the composites had a decreased surface area compared with pristine AC. This indicated blocking of the micropores on the surface of the AC, which was further supported by observation via SEM. XRD results showed that the Ni-AC/$TiO_2$ composite contained a mixed anatase and rutile phase while the untreated AC/$TiO_2$ contained only a typical single and clear anatase phase. EDX results showed the presence of C, O, and Ti with Ni peaks on the composites of Ni-AC/$TiO_2$. Subsequently, the photocatalytic effects on methylene blue (MB) were investigated. The improved decomposition of MB showed the combined effects of adsorptions and photo degradation. In particular, composites treated with Ni enhanced the photo degradation behaviors of MB.

• 전기학회논문지
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• 제56권7호
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• pp.1255-1260
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• 2007

[ $TiO_2-V_2O_5$ ] sol was prepared using sol-gel method. Sol changed to gel with hydrolysis and polymerization. DTA properties of gel powder had endothermic reaction due to evaporation of propanol about $80^{\circ}C$, had exothermic reaction due to combustion of propanol about $230^{\circ}C$ and had exothermic reaction due to combustion of alkyl group about $350^{\circ}C$. Crystalline properties of gel powder retained amorphous phase at $50^{\circ}C$, retained anatase phase from $400^{\circ}C\;to\;600^{\circ}C$ and had all rutile phase over $700^{\circ}C$ at 0.01mole $V_2O_5$ additive. The capacitance of thin films increased with increasing heat treatment temperature and thin films had best properties at $700^{\circ}C$. The capacitance of thin films increased a lot with decreasing measurement frequency.

• 한국광학회지
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• 제16권2호
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• pp.168-173
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• 2005

고주파 마그네트론 동시 스퍼터링법을 이용하여 $TiO_2$ 박막에 Ag를 도핑한 $Ag/TiO_2$ 박막을 제작하고, 열처리 온도에 따른 박막의 물리적, 화학적 특성을 조사하였다. XRD 측정 결과로부터 금속을 도핑한 박막이 순수 $TiO_2$ 박막보다 결정크기가 더 작은 것을 확인하였으며, SEM 측정 결과로부터 $Ag/TiO_2$ 박막은 순수 $TiO_2$ 박막보다 골자의 크기가 작고 균일하다는 것을 알 수 있었다. 제작된 박막은 가시광선 영역에서 높은 투과율을 나타내었다. $600^{\circ}C$에서 열처리한 박막은 아나타제 결정상이 나타났으며, $900^{\circ}C$에서 열처리한 박막은 아나타제와 루타일상이 혼합되어 나타났다 특히, $900^{\circ}C$에서 열처리한 경우 아나타제에서 루타일로의 상전이에 따른 밴드갭 에너지의 변화에 의해 박막의 흡수단이 장파장 영역으로 이동하였다. 또한 박막 내의 흡수와 산란효과에 의해 투과율이 감소하였다. $Ag/TiO_2$ 박막의 광활성은 순수 $TiO_2$ 박막보다 우수함을 알 수 있었다.

• 한국재료학회지
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• 제34권6호
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• pp.283-290
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• 2024

The aggressive scaling of dynamic random-access memory capacitors has increased the need to maintain high capacitance despite the limited physical thickness of electrodes and dielectrics. This makes it essential to use high-k dielectric materials. TiO₂ has a large dielectric constant, ranging from 30~75 in the anatase phase to 90~170 in rutile phase. However, it has significant leakage current due to low energy barriers for electron conduction, which is a critical drawback. Suppressing the leakage current while scaling to achieve an equivalent oxide thickness (EOT) below 0.5 nm is necessary to control the influence of interlayers on capacitor performance. For this, Pt and Ru, with their high work function, can be used instead of a conventional TiN substrate to increase the Schottky barrier height. Additionally, forming rutile-TiO₂ on RuO₂ with excellent lattice compatibility by epitaxial growth can minimize leakage current. Furthermore, plasma-enhanced atomic layer deposition (PEALD) can be used to deposit a uniform thin film with high density and low defects at low temperatures, to reduce the impact of interfacial reactions on electrical properties at high temperatures. In this study, TiO₂ was deposited using PEALD, using substrates of Pt and Ru treated with rapid thermal annealing at 500 and 600 ℃, to compare structural, chemical, and electrical characteristics with reference to a TiN substrate. As a result, leakage current was suppressed to around 10^-6 A/cm² at 1 V, and an EOT at the 0.5 nm level was achieved.

• 한국분말재료학회지
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• 제19권3호
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• pp.196-203
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• 2012

$TiO_2$ was successfully formed on a Ti specimen by MAO (Micro-Arc-Oxidation) method treated in $Na_3PO_4$ electrolyte. This study deals with the influence of voltage and working time on the change of surface microstructure and phase composition. Voltage affected the forming rate of the oxidized layer and surface microstructure where, a low voltage led to a high surface roughness, more holes and a thin oxidized layer. On the other hand, a high voltage led to more dense surface structure, wider surface holes, a thick layer and fewer holes. Higher voltage increases photocatalytic activity because of better crystallization of the oxidized layer and good phase composition with anatase and rutile $TiO_2$, which is able to effectively separate excited electrons and holes at the surface.

• 센서학회지
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• 제20권2호
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• pp.82-89
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• 2011

Ruthenium(Ru)-doped $TiO_2$ nanofibers were prepared using electrospun Ru-$TiO_2$/poly(vinyl acetate) (PVAc) fibers and subsequent annealing for 1 h at temperatures in the range of $500^{\circ}C$ to $1000^{\circ}C$ in air. The properties of the Ru-$TiO_2$ fibers were characterized as a function of the Ru content and calcination temperature using X-ray diffraction, thermal gravimetry with differential scanning calorimetry, Fourier transform infrared spectroscopy, scanning electron microscopy, transmission electron microscopy, and viscometer, pycnometer and dynamic tensiometer measurements. Although the diameter of the fiber decreased slightly with increasing calcination temperature, no dramatic changes were observed with respect to the ruthenium content. The XRD and FT-IR results revealed that anatase phase and ruthenium metal began to be formed after calcination at temperatures above $500^{\circ}C$. Anatase and rutile phases and ruthenium metal coexisted in the fibers calcined above $600^{\circ}C$. No anatase phase was detected in the fibers containing ruthenium when they were calcined at $1000^{\circ}C$. The morphology of the fibers changed from smooth and uniform to porous with increasing temperature. The experimental results suggest that the calcination temperature and Ru content were influential in determining the morphology and structure of the fibers.