• Title/Summary/Keyword: AlN film

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Modified Atmosphere Packaging of Dry Jujube (건조 대추의 변형기체포장)

  • 하정욱;이동선
    • Food Science and Preservation
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    • v.4 no.3
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    • pp.265-270
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    • 1997
  • Effect of modified atmosphere packaging conditions on quality changes of dry jujube was investigated. Dry jujubes with moisture content of 26.7% were packaged in PET/Al/PE film pouches with modified atmospheres. The tested packages include those with normal air, vacuum, CO2 flushing, N2 flushing and O2 scavenger. Packages were stored at 25$^{\circ}C$ for 6 months, during which ascorbic acid concentration, browning level, titratable acidity and surface color were measured. Generally modified atmosphere packages could improve quality retention of dry jujubes except that vacuum package resulted in large surface color change. CO2-flushed package showed the best quality retention of high ascorbic acid content and low browning during 112 days, but caused high amounts of ascorbic acid destruction and browning in longer storage. In all the modified atmosphere packages titratable acidity reached a maximum followed by decline and subsequent rise, while it increased linearly with time in normal air package. Considering ascorbic acid retention browning level and surface color changes during 112 days, the packages of CO2 flushing and N2 flushing were better than others.

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Design on ultra low power consumption microhotplates based on 3C-SiC for high temperatures (고온용 저전력소비형 3C-SiC 마이크로 히터의 설계)

  • Jeong, Jae-Min;Chung, Gwiy-Sang
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2008.06a
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    • pp.385-386
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    • 2008
  • This paper reports the design of the ultra low power consumption microhotplates for high temperatures. The microhotplates consisting of a platinum-based heating element on AlN/poly 3C-SiC layers were designed. The microhotplate is a $600\times600{\mu}m^2$ square shaped membrane made of $1{\mu}m$ thick ploy 3C-SiC suspended by four legs. The microhotplate was compared with $Si_3N_4/SiO_2/Si_3N_4$(NON) structure microhotplate by COMSOL simulation system. Thermal uniformity, power consumption and thermal characterizations of microhotplates based on 3C-SiC thin film are better than microhotplates with NON structure.

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Fabrication of Nanocrystalline FeCoTaN Magnetic Films Having High Saturation Magnetization and Excellent High Frequency Characteristics (고 포화 자화 및 우수한 고주파 특성을 가진 나노결정 FeCoTaN 박막의 제조)

  • J. M. Shin;Kim, J.;Kim, Y. M.;S. H. Han;Kim, H. J.
    • Proceedings of the Korean Magnestics Society Conference
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    • 2002.12a
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    • pp.214-215
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    • 2002
  • High saturation magnetization (B$\_$s/) and excellent high frequency characteristics of magnetic thin films has been recognized as the most important requirement for further miniaturization and higher frequency operation in magnetic devices, such as magnetic heads and magnetic sensors. Up to now, Fe-X-N (X =Ti, Hf, and Al etc.) films with B$\_$s/ of 15 ∼ 19 kG and coercivity (H$\_$c/) of 0.5 ∼ 5.0 Oe have been successfully fabricated and proven to satisfy various requirements as a potential candidate for thin film head materials. (omitted)

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Deposition Transfer and Electrical Properties of Arachidic Acid Multilayer Manufacture by LB Method (LB법으로 제작한 Arachidic Acid 다층막의 누적전이와 전기특성)

  • Song, Jin-Won;Lee, Kyung-Sup
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2001.05a
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    • pp.11-14
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    • 2001
  • We give pressure stimulation into organic thin films and then manufacture a device under the accumulation condition that the state surface pressure is 30[mN/m]. LB layers of Arac. acid deposited by LB method were deposited onto slide glass as Y-type film. The physicochemical properties of the LB films were examined by UV absorption spectrum, SEM and AFM. The structure of manufactured device is Au/arachidic acid/Al. the number of accumulated layers are 3~9. Also. we then examined of the MIM device by means of I-V. The I-V characteristic of the device is measured from -3 to +3[V]. The insulation property of a thin film is better as the distance between electrodes is larger.

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Optical and textural properties of AZO:H thin films by RF magneton sputtering system with various working pressures

  • Hwang, Seung-Taek;So, Soon-Jin;Park, Choon-Bae
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2010.06a
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    • pp.165-165
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    • 2010
  • AZO:H films were prepared by RF magnetron sputtering system with a AZO (2wt% $Al_2O_3$) ceramic target at a temperature of $150^{\circ}C$. The annealing treatments were carried out in hydrogen ambient for 1hr at a temperature of $400^{\circ}C$. The AZO:H films were etched with 1 % HCl. The influence of the properties of AZO:H films deposited in various working pressures is investigated. As a result, the AZO:H film deposited in 4mTorr showed excellent electrical property of $\rho=5.036{\times}10^{-4}{\Omega}cm$ and strongly oriented (002) peak. The transmittance in the wavelength of 450nm was above 80%. It can be used as front electrode for increasing efficiency of GaN LED.

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Selectrive chemical vapor deposition of aluminum for the metallization of high level IC (고집적회로 금속선 형성을 위한 화학증작 알루미늄의 선택적 증착)

  • 이경일;김영성;주승기
    • Journal of the Korean Institute of Telematics and Electronics A
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    • v.31A no.12
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    • pp.31-37
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    • 1994
  • Aluminum films were deposited by the pyrolysis of triisobutylaluminum(TIBA) in a cold wall LPCVD system for the metallization of high level IC. the selectivity on Si/SiO2 substrate and the contact resistance on submicron contacts were investigated. The carbon free aluminum film could be obtained when the aluminum film was deposited at low substrate temperature. Contact resistances of CVD Al/n+ Si contacts whose contact size was 0.5 .mu.m werre as low as 20~40.OMEGA./ea, which is 30~50% of contact resistance obtained by sputtering technique.

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A Study on Development of Advanced Environmental-Resistant Materials Using Metal Ion Processing

  • Fujita Kazuhisa;Kim Hae-Ji
    • Journal of Mechanical Science and Technology
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    • v.20 no.10
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    • pp.1670-1679
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    • 2006
  • The development of the oxidation, wear and corrosion resistant materials that could be used in severe environmental conditions is needed. The elementary technologies for surface modification include ion implantation and/or thin film coating. Furthermore, in order to develop ion implantation technique to the specimens with three-dimensional shapes, plasma-based ion implantation (PBII) techniques were investigated. As a result, it was found that the ion implantation and/or thin film coating used in this study were/was effective for improving the properties of materials, which include implantations of various kinds of ions into TiAl alloy, TiN films formed on surface of base material and coatings in high-temperature steam. The techniques proposed in this study provide useful information for all of the material systems required to use at elevated temperature. For the practical applications, several results will be presented along with laboratory test results.

Study of Self Texturing on ZnO:Al TCO surface for Thin-Film Solar Cell (박막태양전지용 ZnO:Al 투명전도막 표면 Self-Texturing 연구)

  • Oh, Kyoung Suk;Yoon, Soon Gil;Lee, Jeong Chul
    • 한국신재생에너지학회:학술대회논문집
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    • 2011.05a
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    • pp.127.2-127.2
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    • 2011
  • 본 연구에서는 RF Magnetron Sputtering System을 이용하여 ZnO계 투명전도막 증착시 Vaporization된 MeOH를 유입함으로써 박막증착과 동시에 표면의 Roughness를 제어하여 이에따른 전기적 특성 및 광학적 특성의 개선에 대하여 연구하였다. 실험방법으로 기존의 RF Magnetron Sputtering System에 Vaporization이 가능한 Ultrasonic을 이용하여 MeOH를 Vaporized시켜 MFC Controll을 통해 챔버에 유입하여 ZnO계 투명전도막의 박막증착과 동시에 표면 Texturing을 하였다. ZnO계 투명전도막의 박막증착시 Vaporized MeOH의 유입에 따른 광학적 특성변화를 UV-visible-nIR spectrometry로 조사하였으며, 전기적 특성 변화를 4-Point-Probe로 조사하였으며, 표면적 특성 변화를 Atomic Force Microscope(AFM), Scanning Electron Microscopy(SEM)를 조사하였으며, 박막의 결정성장특성 변화를 X-ray Diffraction(XRD)으로 조사하였으며, Vaporized MeOH 유입에 따른 박막의 성분분석을 Secondary Ion Mass Spectrometry (SIMS)로 조사함으로써 최적의 조건 및 공정을 확립하였다.

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Dielectric Properties of Amorphous and Composite Alkoxi-derived Alumina Thin Films

  • N., Korobova;Soh, Dea-Wha
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2003.07b
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    • pp.772-775
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    • 2003
  • The development of new improved type of dielectric materials on the conception of multiphase structure has been carried out in this paper. Metal alkoxides solutions were used for application of thin film by electrophoretic deposition technique. We succeeded in preparation of amorphous and composite dielectric films from Al alkoxides. Specific features of the preparation technique were considered. Microstructure of the films was examined as well as their dielectric properties. TEM analyses reveals that films deposited from aging sols and heat-treated at temperatures as low as $400^{\circ}C$ contain small whiskers of ${\delta}-Al_2O_3$.

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Capacitance properties of DLPC LB films with MLS structure fabricated by moving wall type method (Moving wall형 LB법으로 제작된 MLS DLPC LB 박막의 제작과 캐패시턴스 특성)

  • Lee, Woo-Sun;Chung, Yong-Ho;Son, Kyeong-Choon
    • Proceedings of the KIEE Conference
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    • 1998.07d
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    • pp.1297-1299
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    • 1998
  • LB layers of L-$\alpha$-DLPC deposited by LB method were deposited onto n-type silicon wafer as Z-type film. Films made up of 8, 16 layers of lipid with long alkyl chain and the thickness of monolayer and multilayers was determined by ellipsometry. It was deposited Ag and Al onto LB layers and silicon wafer for electrode and small electrode exhibit high capacitance and low leakage current. The C-V curves of the MLS capacitor shows very high saturation value of capacitance. And cross-sectional SEM image of MLS capacitor indicated the presence of pore with Al electrode and we found that the Ag is good for electrode metal.

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