• 제목/요약/키워드: Al surface

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$CF_4$ 플라즈마에서 반응성 이온식각한 알루미늄 박막의 표면분석 (Surface analysis of reactively ion-etched aluminum films in $CF_4$ plasma)

  • 김동원;이원종
    • 한국결정성장학회지
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    • 제5권4호
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    • pp.351-357
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    • 1995
  • $CF_4$ 플라즈마 분위기에서 반응성 이온식각된 알루미늄의 표면을 XPS 분석하였다. 알루미늄의 표면에$AlF_3$가 형성되었으며 표면에서의 깊이가 깊어질수록 Al - F 결합에 의한 $Al_{2p}$ peak 강도가 감소하고 금속 알루미늄 결합에 의한 $Al_{2p}$ peak 강도가 증가하였다. 입자의 충돌에 의해서 표면원자들이 mixing 됨으로써 알루미늄의 표면에 50~100 $\AA$ 정도의 두께를 가진 $AlF_x$ 층이 형성되는 것으로 분석되었다. 같은 조건에서 반응성 이온식각된 알루미늄 산화막의 경우에는 mixing 효과가 알루미늄보다 작으므로 상대적으로 얕은 범위(10~20 $\AA$)에서 F가 O를 치환하여 $AlF_x$층이 형성되었다.

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Al 원추경 초정밀가공 특성에 관한 연구 (A Study on the Characteristics of Ultra Precision Machining of a Al Cone Mirror)

  • 현동훈;조언정;이승준;권용재;김영찬
    • 한국소성가공학회:학술대회논문집
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    • 한국소성가공학회 2003년도 춘계학술대회논문집
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    • pp.397-401
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    • 2003
  • In this work, diamond turning process is used to produce mirror surface on a Al cone. The Al cone as used as a mirror which can reflect a laser beam without scattering and, hence, it is critical to minimize the surface roughness of a Al cone. During diamond turning, feedrate and tool nose radius are changed to investigate characteristics of the ultra precision machined surface of a Al cone. A laser beam of 633 nm is applied to examine the effect of surface roughness on the characteristics of reflectivity. It is found that surface roughness is not significantly affected by feedrate. The main factor influencing surface roughness is tool nose radius. The line patterns of reflected laser beams show that the minimum surface roughness of 0.08 $\mu\textrm{m}$ (Ra) is required to avoid scattering phenomena of reflectivity.

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금속기지 세라믹 복합소재의 경면연삭 가공 특성 (Properties of Mirror-surface Grinding for Metal Matrix Ceramic Composites)

  • 곽태수
    • 한국세라믹학회지
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    • 제49권1호
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    • pp.90-94
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    • 2012
  • This study has been focused on properties of mirror surface grinding technology by ELID(Electrolytic In-process Dressing) for metal matrix ceramic composites using in high precision mirror for optics. The experimental studies have been carried out to get mirror surface by grinding for composites, Al-SiC, Al-graphite and Mg-SiC. Grinding process is carried out with varying abrasive mesh type, depth of cut and feed rate using diamond wheel. The machining result of the surface roughness and condition of ground surface, have been analyzed by use of surface roughness tester and SEM measurement system. ELID grinding technology could be applied successfully for the mirror-surface manufacturing processes in spite of ductility of metal matrix material. As the results of experiments, surface roughness of Al-SiC(45 wt%) has been the most superior in these experimental work-pieces as 0.021 ${\mu}m$ Ra.

저농도 HF 수용액을 이용한 Al(OH)3의 표면처리 (Surface Treatment of Al(OH)3 using Dilute Hydrofluoric Acid Aqueous Solution)

  • 김도수;이철경;양동효
    • 한국세라믹학회지
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    • 제39권3호
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    • pp.315-320
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    • 2002
  • 저농도로 희석된 HF 수용액(6 wt%)을 사용하여 $Al(OH)_3$의 표면을 F/Al의 몰비 0.15에서 처리하고, 처리 전후 표면특성을 관찰하였다. 반응계의 온도 및 pH 변화로부터 $Al(OH)_3$에 대한 HF의 표면반응은 HF와 접촉한 $Al(OH)_3$ 표면부에서 metastable한 ${\alpha}$형의 불화알루미늄$({\alpha}-AlF_3{\cdot}3H_2O)$이 안정한 ${\beta}$형의 불화알루미늄$({\beta}-AlF_3{\cdot}3H_2O)$으로 전이되는 과정으로 진행되며, 다량의 발열을 수반하면서 반응계의 온도상승을 유발하였다. 이러한 ${\beta}-AlF_3{\cdot}3H_2O$의 생성은 표면처리된 분말의 FT-IR 및 X-선 회절분석결과를 통해 확인되었다. ${\beta}-AlF_3{\cdot}3H_2O$의 morphology와 분포상태를 SEM을 통해 관찰한 결과 $Al(OH)_3$ 표면에 $1{\mu}m$ 이하의 미세분말 형태로 피복층을 형성하며 균일하게 분포된 것으로 확인되었다. HF로 처리된 시료의 표면 백색도는 미처리에 비해 약 6.6% 증가되었으며, 이는 $Al(OH)_3$보다 높은 백색도를 지닌 ${\beta}-AlF_3{\cdot}3H_2O$ 피복 효과 때문인 것으로 나타났다.

6061 알루미늄 합금의 플라즈마 전해산화 피막의 표면기공율 및 부식특성에 미치는 Na3PO4 농도 및 NaAlO2 봉공처리의 영향 (Effects of Na3PO4 Concentration on the Porosity of Plasma Electrolytic Oxidation Coatings Surface on the 6061 Al Alloy, and Subsequent-NaAlO2 Sealing)

  • 송의석;김용태;최진섭
    • 한국표면공학회지
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    • 제52권3호
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    • pp.117-122
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    • 2019
  • In this study, surface porosity and corrosion resistance of PEO coatings prepared on the 6061 Al alloy were investigated in terms of sodium phosphate ($Na_3PO_4$) concentrations in an alkaline solution and $NaAlO_2$ sealing. The surface morphologies of the PEO coatings clearly show that the coatings film formed in $9g\;L^{-1}$ had the lowest porosity. The $NaAlO_2$ sealing was found to remove micropores and cracks existing on the surface of PEO coatings. As a result, the $NaAlO_2$ sealing resulted in the movement of corrosion potential toward more positive value and lower corrosion current density.

나노 다층 TiAlSiN 박막의 고온 산화 (High-temperature Oxidation of Nano-multilayered TiAlSiN Filems)

  • 이동복;김민정
    • 한국표면공학회:학술대회논문집
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    • 한국표면공학회 2016년도 추계학술대회 논문집
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    • pp.189-189
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    • 2016
  • In this study, the Al-rich AlTiSiN thin films that consisted of TiN/AlSiN nano-multilayers were deposited on the steel substrate by magnetron sputtering, and their high-temperature oxidation behavior was investigated, which has not yet been adequately studied to date. Since the oxidation behavior of the films depends sensitively on the deposition method and deposition parameters which affect their crystallinity, composition, stoichiometry, thickness, surface roughness, grain size and orientation, the oxidation studies under various conditions are imperative. AlTiSiN nano-multilayer thin films were deposited on a tool steel substrate, and their oxidation behavior of was investigated between 600 and $1000^{\circ}C$ in air. Since the amount of Al which had a high affinity for oxygen was the largest in the film, an ${\alpha}-Al_2O_3-rich$ scale formed, which provided good oxidation resistance. The outer surface scale consisted of ${\alpha}-Al_2O_3$ incoporated with a small amount of Ti, Si, and Fe. Below this outer surface scale, a thin ($Al_2O_3$, $TiO_2$, $SiO_2$)-intermixed scale formed by the inwardly diffusing oxygen. The film oxidized slower than the $TiO_2-forming$ kinetics and TiN films, but faster than ${\alpha}-Al_2O_3-forming$ kinetics. During oxidation, oxygen from the atmosphere diffused inwardly toward the reaction front, whereas nitrogen and the substrate element of iron diffused outwardly to a certain extent.

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Improving of Corrosion Resistance of Aluminum Alloys by Removing Intermetallic Compound

  • Seri, Osami
    • Corrosion Science and Technology
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    • 제7권3호
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    • pp.158-161
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    • 2008
  • It is well known that iron is one of the most common impurity elements found in aluminum and its alloys. Iron in the aluminum forms an intermetallic compounds such as $FeAl_3$. The $FeAl_3$ particles on the aluminum surface are one of the most detrimental phases to the corrosion process and anodizing procedure for aluminum and its alloys. Trial and error surface treatment will be carried out to find the preferential and effective removal of $FeAl_3$ particles on the surfaces without dissolution of aluminum matrix around the particles. One of the preferable surface treatments for the aim of getting $FeAl_3$ free surface was an electrochemical treatment such as cathodic current density of $-2kAm^{-2}$ in a 20-30 mass% $HNO_3$ solution for the period of 300s. The corrosion characteristics of aluminum surface with $FeAl_3$ free particles are examined in a $0.1kmol/m^3$ NaCl solution. It is found that aluminum with free $FeAl_3$ particles shows higher corrosion resistance than aluminum with $FeAl_3$ particles.

Investigation on HT-AlN Nucleation Layers and AlGaN Epifilms Inserting LT-AlN Nucleation Layer on C-Plane Sapphire Substrate

  • Wang, Dang-Hui;Xu, Tian-Han
    • Journal of the Optical Society of Korea
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    • 제20권1호
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    • pp.125-129
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    • 2016
  • In this study, we have investigated a high-temperature AlN nucleation layer and AlGaN epilayers on c-plane sapphire substrate by low-pressure metal-organic chemical vapor deposition (LP-MOCVD). High resolution X-ray diffraction (HRXRD), atomic force microscopy (AFM), scanning electron microscope (SEM) and Raman scattering measurements have been exploited to study the crystal quality, surface morphology, and residual strain of the HT-AlN nucleation layer. These analyses reveal that the insertion of an LT-AlN nucleation layer can improve the crystal quality, smooth the surface morphology of the HT-AlN nucleation layer and further reduce the threading dislocation density of AlGaN epifilms. The mechanism of inserting an LT-AlN nucleation layer to enhance the optical properties of HT-AlN nucleation layer and AlGaN epifilm are discussed from the viewpoint of driving force of reaction in this paper.

TiAl 금속간화헙물의 공식거동에 미치는 합금원소의 영향 (Effects of Alloying Elements on the Pitting Behavior of Ti-Al Intermetallic Compounds)

  • 이호종;최한철
    • 한국표면공학회지
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    • 제31권3호
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    • pp.157-164
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    • 1998
  • Effects of alloying elements on the pitting behavior of Ti-Al intermetalic compounds in the electrolytic soution containing Cl- were investigated through electrochemical tets and corrosion morphologies. Corrosion potential increased in the case of Cr addition to Ti-48%Al, whereas it decreased in the case of Si and B addition. The simultaneous addition of Cr and Si increased passive current density and decrosion corrosion potential. The passive current density of N addtion was higher than that of B addition in H2SO4 solution. With the addition of alloying elements, The pitting resistance decreased in order of TiAl>TiAlSi>TiAlN>TiAlB>TiAlCr and whin siumultaneous addition, it decreased in order of TiAlCrSi>TiAlCrBN>TiAlCrrN. The surface merohology after pitting test showed that the TiAl coataining Si had for fewer pits than that containing Cr and N simultaneously.

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Changes in the Surface Characteristics of Gas-atomized Pure Aluminum Powder during Vacuum Degassing

  • Yamasaki, Michiaki;Kawamura, Yoshihito
    • 한국분말야금학회:학술대회논문집
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    • 한국분말야금학회 2006년도 Extended Abstracts of 2006 POWDER METALLURGY World Congress Part2
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    • pp.1039-1040
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    • 2006
  • Vacuum degassing is essential in the preparation of RS P/M aluminum alloys to remove adsorbates and for the decomposition of hydrated-$Al_{2}O_3$ on the powder surface. Changes in the surface characteristics during vacuum degassing were investigated by X-ray photoelectron spectroscopy and temperature-programmed desorption measurement. Hydrated-$Al_{2}O_3$ decomposition to crystalline-$Al_{2}O_3$ and hydrogen desorption on the surface of argon gas-atomized aluminum powder occurred at 623 K and 725 K, respectively. This temperature difference suggests that the reaction converting hydrated-$Al_{2}O_3$ to crystalline-$Al_{2}O_3$ during vacuum degassing should be divided into the two reactions $"2Al+Al_{2}O_3{\cdot}3H_2O\;2Al_{2}O_3+6H_{surf}"and"6H_{surf}3H_2"$.

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