Electrical properties of AZO transparent conductive oxide with substrate bias and $H_2$ annealing
(DC 마그네트론 스퍼트링법으로 제조한 ZnO:N,Al 박막의 전기적 특성에 관한연구)
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- Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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- 2008.11a
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- pp.303-304
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- 2008