• Title/Summary/Keyword: Air Pressure

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Analysis of Contact Pressure for a 300mm Wafer Polishing Table with Air-Bag Head (Air-Bag Head 가압식 300mm 웨이퍼 폴리싱 테이블의 가압 분포 해석)

  • Ro, Seung-Kook
    • Journal of the Korean Society of Manufacturing Technology Engineers
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    • v.22 no.2
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    • pp.310-317
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    • 2013
  • In this paper, the contact pressure of the wafer and polishing pad for final polishing process for 300 mm-wafer were investigated through numerical analysis using FEM tool, ANSYS. The distribution of the contact pressure is one of main parameters which affects on the flatness and surface roughness of polished wafers. Two types of polishing head, a hard type head with ceramic disk and a soft type head with air bag were considered. The effects of the deformation and initial shape of table on the contact pressure were also examined. Both heads and tables were modeled as 3D finite element model from solid model, and the material properties of polishing pads and rubber plate for the air-bag head were obtained from tensile tests. The contact pressure deviation on wafer surface was smaller with air bag head than hard type head even when the table had form errors such as convex or concave. From this 3D analysis, it could be concluded that the air-bag head has better uniformity of the contact pressure on wafer. Also, the effects of inner diameter of air bag and radial clearance between wafer and retainer were investigated as view point of contact pressure concentration on the edge of wafer.

A Study on the Component Performance for Automotive Air Conditioner (자동차용 에어컨의 단품 성능에 관한 연구)

  • 이대웅;유성연
    • Korean Journal of Air-Conditioning and Refrigeration Engineering
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    • v.14 no.4
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    • pp.293-303
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    • 2002
  • For successful design of component, performances of one-tank plate type evaporator, gas-liquid separation type condenser, swash plate type compressor and thermostatic expansion valve for automotive air conditioner are investigated experimentally. Heat transfer characteristics in the evaporator are examined by means of air temperature, relative humidity, air volume flow, outlet refrigerant pressure and superheat, and heat transfer characteristics in the condenser are examined by means of air temperature, air velocity and inlet refrigerant pressure. Pressure drops for both evaporator and condenser are measured arid empirical correlations are derived. Volumetric efficiencies and isentropic efficiencies for trio types of compressors with different capacity are measured and compared. Thermostatic expansion valve is tested to investigate the pressure variation according to temperature changes.

A Study on the Emission Characteristics in 4 Stroke Large Propulsion Diesel Engine (4행정 대형 디젤엔진의 배기 배출특성에 관한 연구)

  • 김현규;전충환;장영준
    • Transactions of the Korean Society of Automotive Engineers
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    • v.9 no.5
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    • pp.38-45
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    • 2001
  • Environmental protection on the ocean has been interested and nowadays the International maritime organization(IMO) has advanced on the prevention of air pollution from ships. This study presents the emission characteristics of 4 stroke propulsion diesel engine in E2 cycle (constant speed) and E3 cycle (propeller curved speed). Also the effects of important operating parameters in terms of intake air pressure and temperature, and maximum combustion pressure are described on the specific emissions. Emissions measurement and calculation are processed according to IMO technical code. The results show that NOx emission level in E3 cycle is higher than E2 cycle due to lower engine speed and lower maximum combustion pressure by retarding fuel injection timing. Intake air temperature has strong influence on NOx emission production. And CO, HC emissions are not affected by maximum combustion pressure and intake air pressure and temperature.

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Effects of boundary layer and liquid viscosity and compressible air on sloshing characteristics

  • Zou, Chang-Fang;Wang, De-Yu;Cai, Zhong-Hua
    • International Journal of Naval Architecture and Ocean Engineering
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    • v.7 no.4
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    • pp.670-690
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    • 2015
  • In this paper, numerical investigations for tank sloshing, based on commercial CFD package FLUENT, are performed to study effects of boundary layer grid, liquid viscosity and compressible air on sloshing pressure, wave height and rising time of impact pressure. Also, sloshing experiments for liquids of different viscosity are carried out to validate the numerical results. Through comparison of numerical and experimental results, a computational model including boundary layer grid can predict the sloshing pressure more accurately. Energy dissipation due to viscous friction leads to reduction of sloshing pressure and wave elevation. Sloshing pressure is also reduced because of cushion effect of compressible air. Due to high viscosity damping effect and compressible air effect, the rising time of impact pressure becomes longer. It is also found that liquid viscosity and compressible air influence distribution of dynamic pressure along the vertical tank wall.

Simulation of Pressure Oscillation in Water Caused by the Compressibility of Entrapped Air in Dam Break Flow (댐 붕괴 유동에서 갇힌 공기의 압축성에 의한 물의 압력 진동 모사)

  • Shin, Sangmook
    • Journal of the Society of Naval Architects of Korea
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    • v.55 no.1
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    • pp.56-65
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    • 2018
  • Pressure oscillation caused by the compressibility of entrapped air in dam break flow is analyzed using an open source code, which is a two-phase compressible code for non-isothermal immiscible fluids. Since compressible flows are computed based on a pressure-based method, the code can handle the equation of state of barotropic fluid, which is virtually incompressible. The computed time variation of pressure is compared with other experimental and computational results. The present result shows good agreements with other results until the air is entrapped. As the entrapped air bubbles pulsate, pressure oscillations are predicted and the pressure oscillations damp out quickly. Although the compressibility parameter of water has been varied for a wide range, it has no effects on the computed results, because the present equation of state for water is so close to that of incompressible fluid. Grid independency test for computed time variation of pressure shows that all results predict similar period of pressure oscillation and quick damping out of the oscillation, even though the amplitude of pressure oscillation is sensitive to the velocity field at the moment of the entrapping. It is observed that as pressure inside the entrapped air changes quickly, the pressure field in the neighboring water adjusts instantly, because the sound of speed is much higher in water. It is confirmed that the period of pressure oscillation is dominated by the added mass of neighboring water. It is found that the temperature oscillation of the entrapped air is critical to the quick damping out of the oscillations, due to the fact that the time averaged temperature inside the entrapped air is higher than that of surrounding water, which is almost constant.

Resistance to Air Flow through Packed Fruits and Vegetables in Vented Box (상자포장 청과물의 송풍저항 특성)

  • 윤홍선;조영길;박경규
    • Journal of Biosystems Engineering
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    • v.20 no.4
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    • pp.351-359
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    • 1995
  • In pressure cooling system, produce were packed in vented box and cooled rapidly by producing a difference in air pressure on opposite faces of stacks of vented box. So, energy requirements and performance of pressure cooling system depended upon the air flow rate and the static pressure drop through packed produce in vented box. The static pressure drop across packed produce in vented box normally depended upon air flow rate, vent area of box and conditions of produce bed (depth, porosity, stacking patterns, size and shape of products) in box. The objectives of this study were to investigate the effect of vent area and air flow rate on airflow resistance of empty box and packed produce in vented box, and to investigate the relationship between the air flow resistance of packed products in vented box and sum of air flow resistance of empty box only and products in bulk only. Mandarins and tomatoes were used in the experiment. The airflow rate were in the range of 0.02~1.0$m^3$/s.$m^2$, the opening ratio of vent hole were in the range of 2.5~20% of the side area. The results were summerized as follows. 1. The pressure drops across vented box increased in proportion to superficial air velocity and decreased in proportion to opening ratio of vent hole. A regression equation to calculate airflow resistance of vented box was derived as a function of superficial air velocity and opening ratio of vent hole. 2. The pressure drops across packed produce in vented box increased in proportion to superficial air velocity and decreased in proportion to opening ratio of vent hole. 3. Because of the air velocity increase in the vicinity of vent hole in box, the airflow resistances of packed products in vented box were always higher than sum of air flow resistance of empty box only and products in bulk only. 4. Based on the airflow resistance of empty box and products in bulk, a regression equation to calculate airflow resistance of packed products in vented box was derived.

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Air dome inner pressure control system

  • Miki, Norihisa
    • 제어로봇시스템학회:학술대회논문집
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    • 1989.10a
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    • pp.727-730
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    • 1989
  • Tokyo dome is Japan's first air dome. The roof of the dome is supported by air pressure. The centralized control system (YOKOGAWA's DCS : CENTUM and YEWPACK) is applied to automatically regurate the air pressure. The control system acquires signals from sensors positioned throughout the stadium and operate 36 fans to blow air into the dome. Great emphasis is placed on the reliability and safety of the system.

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Performance Evaluation of Heat Exchangers due to Air-side Particulate Fouling in the Air Conditioners (공기측 파울링에 의한 에어컨 열교환기의 성능분석 연구)

  • 안영철;조재민;이재근;이현욱;안승표;윤덕현;하삼철;강태욱
    • Korean Journal of Air-Conditioning and Refrigeration Engineering
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    • v.15 no.6
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    • pp.447-453
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    • 2003
  • The air-side particulate fouling in the heat exchangers of HVAC applications degrades the performance of cooling capacity, pressure drop across a heat exchanger, and indoor air quality. Indoor and outdoor air contaminants foul heat exchangers. The purpose of this study is to investigate the cooling performance and pressure drop on the air-side particulate fouling of heat exchangers for air conditioners. Air conditioners being used in the field such as inn, restaurant, and office are collected in chronological used order. Test results show 15% decrease of the cooling capacity and 44% increase of the pressure drop for the 7 years air conditioners used in the seaside inn.

The Effect of Air Chamber Placed in Water Supply Piping System (급수배관계에서 에어 챔버의 설치효과에 관한 연구)

  • 이용화;최국광
    • Korean Journal of Air-Conditioning and Refrigeration Engineering
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    • v.14 no.12
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    • pp.1047-1055
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    • 2002
  • The present study is to investigate the pressure wave characteristics and the absorption of the maximum and minimum pressure generated by instantaneous valve closure and opening at the end of the straightening copper Piping system with and without an air chamber. Also, life of air chamber is investigated. Experiments were conducted under the following conditions: initial pressure of 1~5 bar, flow velocity of 0.5~3.0 m/s, water temperature of$20^{\circ}C$ and air chamber volume of 45.1~449.5$cm^3$ The results of the study can be used in sizing air chamber and selecting the water hammer absorbtion apparatus.

Flow Analysis of the Air Pocket in Draw Die (드로우 금형의 에어포켓 유출 유동해석)

  • Hwang, Se-Joon;Park, Warn-Gyu;Kim, Chul;Oh, Se-Wook;Cho, Nam-Young
    • 유체기계공업학회:학술대회논문집
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    • 2006.08a
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    • pp.345-348
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    • 2006
  • In sheet metal forming process using press and draw die some defect can be made because of the high pressure of air pocket between draw die and the product. The purpose of this study is to develop a program to decide an optimal combination of air vent hole size and number to prevent those defect on product. The air inside air pocket is considered as ideal gas and the compression and expansion is assumed as isentropic process. The mass flow is computed in two flow condition: unchocked and chocked condition. The present computation obtains required cross-sectional area of air vent hole for not exceeding the user specified pressure such as the pressure for yielding strength of the product or the pressure for unchocked flow. To validate the program the present results are compared with the results of other researchers and commercial CFD code.

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