• Proceedings of the Korean Society of Precision Engineering Conference
• /
• 2006.05a
• /
• pp.81-82
• /
• 2006

Conveyor-type transporters have been widely used as a typical delivery system of semi-conductor, FPD and other IT-related products. However, as the IT-product is getting larger in size and higher in resolution, several problems are caused by mechanical contacts between the transporter and target object. In this context, recently, lots of efforts are being devoted for development of various contact-free handling systems to get rid of deffets and oil contaminations. The objectives of this paper are to characterize suspension mechanisms and to investigate air flow effects on air levitation transport system. For this purpose, a series of CFD analyses were carried out and the simulation data showed a good agreement with the corresponding experimental ones. It is anticipated that the promising result can be used as a basis for concept design of the transport system.

• Transactions of the Korean Society of Mechanical Engineers A
• /
• v.21 no.12
• /
• pp.2196-2208
• /
• 1997

In this work, a magnetic levitation (maglev) system is developed to transport a wafer between semiconductor fabrication process modules in clean rooms to take advantages of eliminating particle and oil contamination that normally exist in conventional transport systems due to contact motion of mechanical components. A main feature of the maglev system developed in this work is that a controller and power supplying part are not mounted on the moving carrier but on the stationary track, which is defined a controller-free carrier, to reduce carrier's weight. Iron-core electromagnets and irons are used for levitation, and air-core electromagnets and permanent magnets are used for stabilization. Analysis, design, and modeling of the magnetically levitated transport system are presented. The performance of the maglev system is experimentally demonstrated.

• Journal of the Korean Society of Manufacturing Technology Engineers
• /
• v.25 no.5
• /
• pp.338-344
• /
• 2016

Recent trends in transport system for carrying heavy freight are that demands of a high efficiency, economic efficiency, convenience and safety are increased. Conventional transport systems were poor in transport efficiency and economic efficiency. And Safety problems can be caused to products and workers. In order to overcome these problems, an air cushion transport device with a high-pressure air is required. The air cushion transporter is a device for reducing the frictional force of floor surface and lifting the heavy freight by spraying the high-pressure air to the floor. Technology to float and transfer freight using high-pressure air is very convenient and initial cost can be reduced. In this paper, the study on the levitation performance and transport efficiency of air cushion transport system is conducted and verified that air cushion transporter has a significantly higher transport efficiency than conventional heavy handling systems.

• Proceedings of the Korean Society Of Semiconductor Equipment Technology
• /
• 2007.06a
• /
• pp.149-156
• /
• 2007

Non-contact transportation of the large-sized glass plate using air-cushion is considered for sputtering system of LCD panel. The Argon gas from second gas injection holes is injected to levitate and transport the glass plate. Low maximum pressure and uniform pressure distribution on the bottom surface of the glass plate must be maintained for stable levitation and transportation of the glass plate. Therefore, the analysis of fluid flow between the glass plate and the air-pad is numerically performed for varying space between the injection holes in this study. The pressure uniformity on the bottom surface of the glass plate is evaluated for overall glass plate. The distance between the injection holes must be designed below 90 mm for obtaining the low maximum pressure and uniform pressure distribution.